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21. 发明授权

US08044352B2 Electron microscopy 有权
标题翻译：电子显微镜
公开(公告)号：US08044352B2
公开(公告)日：2011-10-25
申请号：US12392732
申请日：2009-02-25
申请人： Kotaro Hosoya , Yoshihiko Nakayama , Isao Nagaoki
发明人： Kotaro Hosoya , Yoshihiko Nakayama , Isao Nagaoki
IPC分类号： H01J37/28 , H01J37/244
CPC分类号： H01J37/28 , H01J37/222 , H01J37/244 , H01J2237/221 , H01J2237/2443 , H01J2237/24455 , H01J2237/24475 , H01J2237/24485
摘要： Using, as a detector, a CCD detector having a CCD element to which a scintillator is closely fixed, a backscattered or scanning transmission image is obtained by the following method. The detector is disposed directly under an objective lens to obtain the backscattered electron image. When one point of a specimen is irradiated with an electron beam, backscattered or transmission electrons generated from the specimen collide with the scintillator to form a luminescent pattern. This pattern is detected by the CCD detector, and stored in a memory. This processing is sequentially repeated for each irradiation position to obtain all the patterns in an electron beam scanning range. Arithmetic processing is performed on each pattern to convert it into an image. Usually, image data for one pixel is calculated from one pattern. By sequentially repeating this, a backscattered or transmission electron image in the electronic beam scanning range can be obtained.
摘要翻译：使用具有闪烁体紧密固定的CCD元件的CCD检测器作为检测器，通过以下方法获得反向散射或扫描透射图像。检测器直接设置在物镜的下面，以获得背散射的电子图像。当用电子束照射样品的一个点时，从样品产生的反向散射或透射电子与闪烁体碰撞以形成发光图案。该图案由CCD检测器检测，并存储在存储器中。对于每个照射位置依次重复该处理，以获得电子束扫描范围内的所有图案。对每个图案进行算术处理，将其转换为图像。通常，从一个图案计算一个像素的图像数据。通过顺序地重复该操作，可以获得电子束扫描范围内的反向散射或透射电子图像。

22. 发明授权

US07838834B2 Image forming method and electron microscope 有权
标题翻译：图像形成方法和电子显微镜
公开(公告)号：US07838834B2
公开(公告)日：2010-11-23
申请号：US12048775
申请日：2008-03-14
申请人： Isao Nagaoki , Yoshihiko Nakayama , Ryoichi Ishii
发明人： Isao Nagaoki , Yoshihiko Nakayama , Ryoichi Ishii
IPC分类号： G01N23/04
CPC分类号： H01J37/26 , H01J37/222 , H01J37/265 , H01J2237/226 , H01J2237/2487 , H01J2237/2611 , H01J2237/2617 , H01J2237/262 , H01J2237/2802
摘要： As an image forming method including comparison between images for three-dimensional image construction or the like and an apparatus for forming such images, there are provided an image forming method and an electron microscope capable of obtaining with high accuracy or efficiency information required for comparison. In the image forming method, an image is formed on the basis of comparison between a plurality of images obtained by applying an electron beam to a specimen at different tilt angles. The method includes obtaining a first transmission image with the electron beam applied in a first direction and a second transmission image with the electron beam applied in a second direction, the second transmission image being formed within a region different from a peripheral blurred region resulting from tilting, and making a search in the first transmission image by using the second transmission image.
摘要翻译：作为包括用于三维图像构造等的图像之间的比较的图像形成方法以及用于形成这种图像的装置，提供了能够以高精度或高效率获得比较所需的信息的图像形成方法和电子显微镜。在图像形成方法中，基于通过以不同的倾斜角将电子束施加到样本而获得的多个图像之间的比较来形成图像。该方法包括获得具有沿第一方向施加的电子束的第一透射图像和在第二方向上施加电子束的第二透射图像，第二透射图像形成在与由倾斜产生的周边模糊区域不同的区域内，并且通过使用第二传输图像在第一传输图像中进行搜索。

23. 发明授权

US07041977B2 Electron microscope 失效
公开(公告)号：US07041977B2
公开(公告)日：2006-05-09
申请号：US11052200
申请日：2005-02-08
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/26
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.

24. 发明申请

US20060011838A1 Sample observation method and transmission electron microscope 有权
标题翻译：样品观察法和透射电子显微镜
公开(公告)号：US20060011838A1
公开(公告)日：2006-01-19
申请号：US11228400
申请日：2005-09-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： G21K7/00
CPC分类号： G06K9/00147 , H01J37/26 , H01J2237/221
摘要： Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
摘要翻译：对作为参考图像倾斜的物体的透射图像和通过该透射图像的极坐标变换获得的图像进行准备，并且通过样本中的物体的透射图像的极坐标变换获得的图像建立相关性。

25. 发明授权

US08426811B2 Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US08426811B2
公开(公告)日：2013-04-23
申请号：US13059550
申请日：2009-07-10
申请人： Isao Nagaoki , Toshiaki Tanigaki
发明人： Isao Nagaoki , Toshiaki Tanigaki
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/26 , H01J2237/1534 , H01J2237/2614 , H01J2237/2802
摘要： An electron microscope according to the present invention includes a phase plate (510) having a thickness which changes in a radial direction, and adjusts a phase difference caused by a difference in electron beam path due to an effect of a spherical aberration when an electron beam is converged by a lens or an image of the electron beam is formed. Accordingly, the phase difference caused by the difference in electron beam path is adjusted, to thereby improve the coherence, so that a phase contrast image of transmitted electrons can be obtained at a higher resolution.
摘要翻译：根据本发明的电子显微镜包括具有沿径向改变的厚度的相位板（510），并且当电子束（510）由于球面像差的影响而调整由电子束路径差引起的相位差由透镜会聚或形成电子束的图像。因此，调整由电子束路径的差异引起的相位差，从而提高相干性，从而能够以更高的分辨率获得透射电子的相位差图像。

26. 发明授权

US08288725B2 Charged particle beam device 失效
标题翻译：带电粒子束装置
公开(公告)号：US08288725B2
公开(公告)日：2012-10-16
申请号：US12906361
申请日：2010-10-18
申请人： Akiko Fujisawa , Eiko Nakazawa , Isao Nagaoki
发明人： Akiko Fujisawa , Eiko Nakazawa , Isao Nagaoki
IPC分类号： G01N23/00
CPC分类号： G01N23/04
摘要： There is provided a charged particle beam device which can prevent a specimen from not being able to be observed due to entering of a part of a grid of a mesh in a field of view, in which each pixel of a scanning transmission electron microscope image is displayed on the basis of a gray value of a predetermined gradation scale. In the case where the number of pixels of the predetermined gray value is not less than a predetermined percentage, it is judged that the mesh image is included in the scanning transmission electron microscope image. When the mesh image is not anymore included in the scanning transmission electron microscope image, the predetermined gradation scale is converted to another gradation scale and a scanning transmission electron microscope image is obtained.
摘要翻译：提供了一种带电粒子束装置，其可以防止由于在扫描透射电子显微镜图像的每个像素是视场中的网格的一部分网格进入而不能观察到样本基于预定灰度级的灰度值显示。在预定灰度值的像素数不小于预定百分比的情况下，判断网格图像包含在扫描透射电子显微镜图像中。当扫描透射电子显微镜图像中不再包括网格图像时，将预定灰度级别转换为另一灰度级，并获得扫描透射电子显微镜图像。

27. 发明申请

US20110115637A1 CHARGED CORPUSCULAR RAY APPARATUS 有权
标题翻译：收费的公司RAY APPARATUS
公开(公告)号：US20110115637A1
公开(公告)日：2011-05-19
申请号：US13055589
申请日：2009-06-15
申请人： Hideki Kikuchi , Isao Nagaoki , Katsuyuki Minakawa
发明人： Hideki Kikuchi , Isao Nagaoki , Katsuyuki Minakawa
IPC分类号： G08B17/12 , H01J37/26 , G06K9/62
CPC分类号： H01J37/21 , H01J37/20 , H01J37/222 , H01J37/28 , H01J2237/20207 , H01J2237/226 , H01J2237/31749
摘要： The present invention relates to the acquisition of tilted series images of a minute sample in a short time.The present invention relates to: measuring in advance the relation between an amount of focus shift and a degree of coincidence at the time of acquiring tilted series images; calculating backwards a focus shift from the degree of coincidence on the basis of this relation; correcting the focus shift by controlling a stage, an objective lens, and the like; and thus acquiring the tilted series images. In addition, the present invention relates to: acquiring a reference image in advance at the time of photographing the tilted series images; obtaining the correlation between an acquired image and the reference image; and performing, if the degree of coincidence is equal to or smaller than a set value, processing such as the transmission of a warning message and the stop of an image acquisition sequence. According to the present invention, it becomes possible to perform focusing at the time of photographing the tilted series images at high speed, so that the length of time for photographing the tilted series images can be shortened. In addition, an image inappropriate for three-dimensional reconstruction can be removed. This makes it possible to enhance the throughput of failure analysis of a semiconductor and an advanced material.
摘要翻译：本发明涉及在短时间内采集微小样品的倾斜系列图像。本发明涉及：在获取倾斜的串联图像时预先测量焦点偏移量与一致度之间的关系; 根据这种关系从巧合程度向后计算重点转移; 通过控制舞台，物镜等来校正焦点偏移; 从而获得倾斜的系列图像。此外，本发明涉及：在拍摄倾斜的串联图像时预先获取参考图像; 获得所获取的图像和参考图像之间的相关性; 并且如果一致度等于或小于设定值，则执行诸如发送警告消息和停止图像获取序列的处理。根据本发明，可以高速拍摄倾斜的串联图像时进行聚焦，从而可以缩短用于拍摄倾斜的系列图像的时间长度。此外，可以去除不适于三维重建的图像。这使得可以提高半导体和先进材料的故障分析的吞吐量。

28. 外观设计

USD636005S1 Electron microscope 有权
公开(公告)号：USD636005S1
公开(公告)日：2011-04-12
申请号：US29363415
申请日：2010-06-09
申请人： Mitsuru Oonuma , Akira Omachi , Yoshifumi Taniguchi , Isao Nagaoki , Hiroshi Aoyagi
设计人： Mitsuru Oonuma , Akira Omachi , Yoshifumi Taniguchi , Isao Nagaoki , Hiroshi Aoyagi

29. 发明授权

US07214938B2 Sample observation method and transmission electron microscope 有权
标题翻译：样品观察法和透射电子显微镜
公开(公告)号：US07214938B2
公开(公告)日：2007-05-08
申请号：US11228400
申请日：2005-09-19
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/26 , G21K7/00
CPC分类号： G06K9/00147 , H01J37/26 , H01J2237/221
摘要： Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.
摘要翻译：对于作为参考图像倾斜的物体的透射图像和通过该透射图像的极坐标变换而获得的图像进行准备，并且通过样本中的物体的透射图像的极坐标变换获得的图像建立相关性。

30. 发明申请

US20050145792A1 Electron microscope 失效
标题翻译：电子显微镜
公开(公告)号：US20050145792A1
公开(公告)日：2005-07-07
申请号：US11052200
申请日：2005-02-08
申请人： Eiko Nakazawa , Isao Nagaoki
发明人： Eiko Nakazawa , Isao Nagaoki
IPC分类号： H01J37/22 , H01J37/26 , H01J37/28 , G21K7/00 , G01N23/00
CPC分类号： H01J37/265 , H01J37/28
摘要： An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.
摘要翻译：本发明的目的是提供一种能够在重新开始样品观察时提高工作效率的电子显微镜。一种用于控制观察条件设置装置的控制单元，包括电子枪控制单元，照射透镜控制单元，物镜控制单元，放大透镜系统控制单元和样本台控制单元，被提供。当指定某个样品的图像数据时，检索样品的观察条件数据。然后，根据观察条件数据，在电子显微镜上自动恢复与保存样品的图像数据时相同的观察条件。结果，与存储的图像相同的图像被忠实地恢复。

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