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21. 发明授权

US06979821B2 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06979821B2
公开(公告)日：2005-12-27
申请号：US10730106
申请日：2003-12-09
申请人： Naomasa Suzuki , Toshiro Kubo , Noriaki Arai , Mitsugu Sato , Hideo Todokoro , Yoichi Ose
发明人： Naomasa Suzuki , Toshiro Kubo , Noriaki Arai , Mitsugu Sato , Hideo Todokoro , Yoichi Ose
IPC分类号： H01J37/244 , G01Q30/02 , H01J37/28
CPC分类号： H01J37/28 , H01J2237/04753 , H01J2237/04756
摘要： Image observation at high resolution is realized and irregularity information of a sample is obtained.The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.
摘要翻译：实现高分辨率的图像观察，获得样品的不规则信息。通过布置在磁场泄漏型物镜7的电子源1侧的检测器10a和10b来检测与样品8的表面成小角度方向发射的反射电子12a和形成样品图像。从样本图像中出现的光和阴影的效果获得样本的不规则信息。

22. 发明授权

US08263943B2 Ion beam device 有权
标题翻译：离子束装置
公开(公告)号：US08263943B2
公开(公告)日：2012-09-11
申请号：US13144620
申请日：2010-01-08
申请人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Noriaki Arai , Tohru Ishitani
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Noriaki Arai , Tohru Ishitani
IPC分类号： H01J49/10 , H01J37/28
CPC分类号： H01J37/08 , H01J27/26 , H01J37/15 , H01J2237/0216 , H01J2237/0807 , H01J2237/28
摘要： Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.
摘要翻译：提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。发射极基座和真空容器彼此磁性相互作用。

23. 发明申请

US20110147609A1 ION BEAM DEVICE 有权
标题翻译：离子束装置
公开(公告)号：US20110147609A1
公开(公告)日：2011-06-23
申请号：US12995700
申请日：2009-03-30
申请人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
IPC分类号： H01J3/04
CPC分类号： H01J27/26 , H01J27/022 , H01J37/023 , H01J37/067 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/2803
摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.
摘要翻译：根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15）构造成围绕发射器尖端（21），以及气体供应管（25）。引出电极（24）的中心轴线与离子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座（64）相对于所述电离室（15）的中心轴线是可倾斜的。因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

24. 发明授权

US06555819B1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US06555819B1
公开(公告)日：2003-04-29
申请号：US09679006
申请日：2000-10-04
申请人： Naomasa Suzuki , Toshiro Kubo , Noriaki Arai , Mitsugu Sato , Hideo Todokoro , Yoichi Ose
发明人： Naomasa Suzuki , Toshiro Kubo , Noriaki Arai , Mitsugu Sato , Hideo Todokoro , Yoichi Ose
IPC分类号： H01J37244
CPC分类号： H01J37/28 , H01J2237/04753 , H01J2237/04756
摘要： Image observation at high resolution is realized and irregularity information of a sample is obtained. The reflected electrons 12a emitted in a direction at a small angle with the surface of the sample 8 are detected by the detectors 10a and 10b arranged on the side of the electron source 1 of the magnetic field leakage type object lens 7 and a sample image is formed. Irregularity information of the sample is obtained from the effects of light and shade appearing in the sample image.
摘要翻译：实现高分辨率的图像观察并获得样品的不规则信息。在与样品8的表面成小角度的方向上发射的反射电子12a被布置在电子侧的检测器10a和10b检测形成磁场泄漏型物镜7的源极1和样本图像。从样本图像中出现的光和阴影的效果获得样本的不规则信息。

25. 发明授权

US5738145A Valve assembly for gas cylinder 失效
标题翻译：气瓶阀组件
公开(公告)号：US5738145A
公开(公告)日：1998-04-14
申请号：US853414
申请日：1997-05-09
申请人： Norio Daicho , Keitaro Yonezawa , Masakatsu Kawahara , Noriaki Arai , Teruo Hatori
发明人： Norio Daicho , Keitaro Yonezawa , Masakatsu Kawahara , Noriaki Arai , Teruo Hatori
IPC分类号： F16K1/30 , F17C13/04 , B65B31/06
CPC分类号： F16K1/305 , F16K1/306 , F16K1/307 , F17C13/04 , F17C2205/0308 , F17C2205/0311 , F17C2205/0329 , F17C2205/0332 , F17C2205/0335 , F17C2205/037 , F17C2205/0385 , F17C2227/048 , F17C2260/02 , Y10T137/87837
摘要： A gas inlet (4) an inlet passage (8), a stop valve (7), an outlet passage (9) and a gas outlet (5) are communicated orderly with one another within a valve casing (3). The outlet passage (9) is communicated with the inlet passage (8) through a gas charging passage (10). A check valve (11) for blocking a flow from the inlet passage (8) to the outlet passage (9) is arranged in the gas charging passage (10). When a vacant gas cylinder (1) is charged with a high-pressure gas, the charge gas is supplied to a gas charging mouthpiece (17) connected to the gas outlet (5) while the stop valve (7) is kept closed. Thereupon, an interior space (A) of the gas cylinder (1) is charged with the charge gas from the outlet (5) through the check valve (11) and the gas inlet (4) in order.
摘要翻译：气体入口（4），入口通道（8），截止阀（7），出口通道（9）和气体出口（5）在阀外壳（3）内相互连通。出口通道（9）通过气体充注通道（10）与入口通道（8）连通。用于阻挡从入口通道（8）到出口通道（9）的流动的止回阀（11）布置在气体填充通道（10）中。当空气气瓶（1）装有高压气体时，将充气气体供给连接到气体出口（5）的气体充气口（17），同时截止阀（7）保持关闭。于是，气瓶（1）的内部空间（A）从出口（5）通过止回阀（11）和气体入口（4）依次充满充气。

26. 发明授权

US08779380B2 Ion beam device 有权
标题翻译：离子束装置
公开(公告)号：US08779380B2
公开(公告)日：2014-07-15
申请号：US12995700
申请日：2009-03-30
申请人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
发明人： Hiroyasu Shichi , Shinichi Matsubara , Norihide Saho , Masahiro Yamaoka , Noriaki Arai
IPC分类号： H01J27/00
CPC分类号： H01J27/26 , H01J27/022 , H01J37/023 , H01J37/067 , H01J37/08 , H01J37/26 , H01J37/28 , H01J2237/002 , H01J2237/006 , H01J2237/061 , H01J2237/0807 , H01J2237/2803
摘要： An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.
摘要翻译：根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15）构造成围绕发射器尖端（21），以及气体供应管（25）。引出电极（24）的中心轴线与离子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座（64）相对于所述电离室（15）的中心轴线是可倾斜的。因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。

27. 发明授权

US08455841B2 Ion microscope 有权
标题翻译：离子显微镜
公开(公告)号：US08455841B2
公开(公告)日：2013-06-04
申请号：US13381623
申请日：2010-06-04
申请人： Norihide Saho , Hiroyuki Tanaka , Noriaki Arai , Hiroyasu Shichi , Yoichi Ose
发明人： Norihide Saho , Hiroyuki Tanaka , Noriaki Arai , Hiroyasu Shichi , Yoichi Ose
IPC分类号： H01J37/26
CPC分类号： H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0216 , H01J2237/061 , H01J2237/0807
摘要： Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.
摘要翻译：提供大电流和高度稳定的气田电离离子源，以及具有大焦深的高分辨率离子显微镜。本发明涉及一种具有气田电离离子源的离子显微镜，其中设置有用于冷却与离子显微镜主体无关的气田电离离子源的制冷机，以及用于循环的制冷剂循环回路冷却机构气体离子源和冰箱之间的制冷剂。因此，可以减小传播到气田电离离子源的冰箱的机械振动，并且实现离子源的亮度的提高和离子束聚焦性能的提高。

28. 发明授权

US08153966B2 Electrode unit and charged particle beam device 有权
标题翻译：电极单元和带电粒子束装置
公开(公告)号：US08153966B2
公开(公告)日：2012-04-10
申请号：US12992788
申请日：2009-05-15
申请人： Noriaki Arai , Hideyuki Kazumi
发明人： Noriaki Arai , Hideyuki Kazumi
IPC分类号： H01J37/244
CPC分类号： H01J37/026 , H01J3/027 , H01J37/04 , H01J37/28 , H01J2237/0041 , H01J2237/0048 , H01J2237/30 , H01J2237/31749
摘要： A high-resolution sample image is acquired by eliminating both of charge over an entire sample (global charge) and charge in a local region irradiated with a primary charged particle beam (local charge). An electrode unit (50) according to the present invention is used in a charged particle beam device. The electrode unit (50) includes a plate electrode disposed facing an insulator sample between an objective lens and the sample, and further includes: a first charge-neutralization charged particle beam source which emits a first charged particle beam to eliminate local charge on the sample; and a second charge-neutralization charged particle beam source (25) which emits a second charged particle beam to eliminate global charge on the sample. A first hole (53) through which a primary charged particle beam passes, and a second hole through which the second charged particle beam is emitted are provided in the plate electrode, and the first and second charge-neutralization charged particle beam sources are disposed at such positions as not to interfere with each other. The charged particle beam emitted from the first charge-neutralization charged particle beam source is introduced in the vicinity of the first hole (53).
摘要翻译：通过在整个样品（全局电荷）上消除电荷并在用初级带电粒子束（局部电荷）照射的局部区域中的电荷获得高分辨率采样图像。根据本发明的电极单元（50）用于带电粒子束装置。电极单元（50）包括面对物镜和样品之间的绝缘体样品的平板电极，还包括：第一电荷中和带电粒子束源，其发射第一带电粒子束以消除样品上的局部电荷 ; 以及发射第二带电粒子束以消除样品上的全局电荷的第二电荷中和带电粒子束源（25）。初级带电粒子束通过的第一孔53和第二带电粒子束发射的第二孔设置在板电极中，第一和第二电荷中和带电粒子束源设置在这样的位置不会相互干扰。从第一电荷中和带电粒子束源发射的带电粒子束被引入第一孔（53）附近。

29. 发明申请

US20090065694A1 Scanning electron microscope 有权
标题翻译：扫描电子显微镜
公开(公告)号：US20090065694A1
公开(公告)日：2009-03-12
申请号：US12289461
申请日：2008-10-28
申请人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
发明人： Noriaki Arai , Makoto Ezumi , Yoichi Ose
IPC分类号： G21K7/00
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0044 , H01J2237/12 , H01J2237/2817
摘要： An object of the invention is to reduce the beam drift in which the orbit of the charged particle beam is deflected by a potential gradient generated by a nonuniform sample surface potential on a charged-particle-beam irradiation area surface, the nonuniform sample surface potential being generated by electrification made when observing an insulating-substance sample using a charged particle beam.Energy of the charged particle beam to be irradiated onto the sample is set so that generation efficiency of secondary electrons generated from the sample becomes equal to 1 or more. A flat-plate electrode (26) is located in such a manner as to be directly opposed to the sample. Here, the flat-plate electrode is an electrode to which a voltage can be applied independently, and which is equipped with a hole through which a primary charged particle beam can pass. Furthermore, a voltage can be applied independently to a sample stage (12) on which the sample is mounted. Here, the sample stage's surface directly opposed to the sample is formed into a planarized structure with no projections and depressions thereon. Also, diameter D of the hole provided in the flat-plate electrode (26) and distance L between the flat-plate electrode (26) and the sample are set such that a relation of D/L≦1. 5 is satisfied.
摘要翻译：本发明的目的是减少带电粒子束的轨道偏转由带电粒子束照射区域表面上的不均匀样品表面电位产生的电位梯度的光束漂移，不均匀的样品表面电位为通过使用带电粒子束观察绝缘物质样品时进行通电而产生。设定要照射到样品上的带电粒子束的能量被设定为使得从样品产生的二次电子的产生效率等于1或更大。平板电极（26）以与样品直接相对的方式定位。这里，平板电极是能够独立施加电压的电极，并且具有一次带电粒子束可以穿过的孔。此外，可以独立地对安装有样品的样品台（12）施加电压。这里，与样品直接相对的样品台的表面形成为在其上没有凸起和凹陷的平坦化结构。此外，设置在平板电极（26）中的孔的直径D和平板电极（26）与样品之间的距离L设定为D / L <1的关系。 5满足。

30. 发明授权

US08835884B2 Charged particle beam apparatus with cleaning photo-irradiation apparatus 有权
标题翻译：带清洁光电照射装置的带电粒子束装置
公开(公告)号：US08835884B2
公开(公告)日：2014-09-16
申请号：US13994812
申请日：2011-12-08
申请人： Noriaki Arai
发明人： Noriaki Arai
IPC分类号： H01J37/06 , H01J49/00 , H01J29/00 , H01J49/26 , H01J27/02
CPC分类号： H01J27/022 , H01J29/00 , H01J37/06 , H01J37/08 , H01J49/26 , H01J2237/002 , H01J2237/022 , H01J2237/06341 , H01J2237/0802
摘要： A charged particle beam apparatus including a charged particle emission gun with which cleaning of a tip is possible without stopping the operation of the charged particle emission gun for a long time and without heating the tip. The charged particle emission gun includes a cleaning photo-irradiation apparatus that generates ultraviolet light or infrared light to irradiate a tip, and an optical fiber for guiding the ultraviolet light or the infrared light toward the tip. The cleaning photo-irradiation apparatus generates ultraviolet light or an infrared light with a predetermined wavelength and intensity to desorb a molecule adsorbed on the tip through photon stimulated desorption, or to desorb a molecule adsorbed on the tip through photon stimulated desorption and ionize the desorbed molecule.
摘要翻译：一种带电粒子束装置，包括带电粒子发射枪，可以在不停止长时间的带电粒子发射枪的操作的情况下清洁尖端而不加热尖端。带电粒子发射枪包括产生紫外光或红外光以照射尖端的清洁光照射装置，以及用于将紫外线或红外光引向尖端的光纤。清洗光照射装置产生具有预定波长和强度的紫外光或红外光，以通过光子激发解吸解吸附在尖端上的分子，或通过光子激发解吸解吸附在尖端上的分子，并将解吸的分子。

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