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1. 发明授权

US09837239B2 Techniques for optimizing nanotips derived from frozen taylor cones 有权
公开(公告)号：US09837239B2
公开(公告)日：2017-12-05
申请号：US15361911
申请日：2016-11-28
申请人： Gregory Hirsch
发明人： Gregory Hirsch
IPC分类号： G21K5/02 , H01J9/02 , C23C14/58 , C23C14/24 , C23C14/16 , C25D3/50 , C25D5/50 , C25D17/00 , H01J37/073 , H01J37/08 , H05G2/00 , H01J1/304 , B21C1/16
CPC分类号： H01J9/025 , B21C1/16 , C23C14/16 , C23C14/24 , C23C14/5806 , C25D3/50 , C25D5/50 , C25D17/00 , H01J1/3044 , H01J37/073 , H01J37/08 , H01J37/3178 , H01J2201/30411 , H01J2209/0226 , H01J2237/0802 , H01J2237/0805 , H05G2/005
摘要： Optimization techniques are disclosed for producing sharp and stable tips/nanotips relying on liquid Taylor cones created from electrically conductive materials with high melting points. A wire substrate of such a material with a preform end in the shape of a regular or concave cone, is first melted with a focused laser beam. Under the influence of a high positive potential, a Taylor cone in a liquid/molten state is formed at that end. The cone is then quenched upon cessation of the laser power, thus freezing the Taylor cone. The tip of the frozen Taylor cone is reheated by the laser to allow its precise localized melting and shaping. Tips thus obtained yield desirable end-forms suitable as electron field emission sources for a variety of applications. In-situ regeneration of the tip is readily accomplished. These tips can also be employed as regenerable bright ion sources using field ionization/desorption of introduced chemical species.

2. 发明授权

US06337540B1 High brightness point ion sources using liquid ionic compounds 失效
标题翻译：使用液体离子化合物的高亮点离子源
公开(公告)号：US06337540B1
公开(公告)日：2002-01-08
申请号：US08541663
申请日：1995-10-10
申请人： Antoine Corbin , Pierre Sudraud , Rainer Sailer
发明人： Antoine Corbin , Pierre Sudraud , Rainer Sailer
IPC分类号： H01J724
CPC分类号： H01J37/3056 , H01J27/26 , H01J37/08 , H01J2237/0802
摘要： A novel high brightness point ion source (10) that is adapted to operate with liquid ionic compounds such as mixtures of molten salts, bases or acids. The ion source is basically comprised of two parts: the needle assembly (11) and the extraction assembly (12). The former consists of a point shaped needle (13) made of a refractory ceramic material, whose sharpened extremity is referred to as the tip (13a). The needle is partially lodged in a recess of an insulating support (15). A heating coil (14) made of stainless steel is tightly wound around a portion of the needle adjacent to the tip. The needle is coated with the mixture, for instance, by dipping in a crucible containing the mixture. The extraction assembly is comprised of a metal extracting electrode (20) provided with a central aperture that is screwed on a cylindrical metallic body (19), so that the spacing between the tip and the aperture center is adjustable. The needle assembly is mounted inside the cylindrical body and accurately affixed thereto by centering screws (22). The high brightness point ion source is then ready for use in a FIB column. A heating current supply (18) is connected to the coil extremities to melt the mixture if necessary. An extraction voltage supply (23) applies a potential difference between the extraction assembly and the mixture at the tip apex for ion emission.
摘要翻译：一种新颖的高亮点离子源（10），其适于与液体离子化合物如熔融盐，碱或酸的混合物一起操作。离子源基本上由两部分组成：针组件（11）和提取组件（12）。前者包括由难熔陶瓷材料制成的点状针（13），其尖锐的末端被称为尖端（13a）。针被部分地放置在绝缘支撑件（15）的凹部中。由不锈钢制成的加热线圈（14）紧紧地缠绕在与尖端相邻的针的一部分上。例如，通过浸入含有混合物的坩埚中将针涂覆混合物。提取组件由金属提取电极（20）组成，金属提取电极（20）设置有螺纹连接在圆柱形金属体（19）上的中心孔，使得尖端和孔径中心之间的间距是可调节的。针组件安装在圆柱体内部，并通过定心螺钉（22）精确地固定在其上。然后高亮度点离子源准备用于FIB色谱柱。如果需要，加热电流源（18）连接到线圈末端以熔化混合物。提取电压源（23）在提取组件和尖端顶点处的混合物之间施加电位差用于离子发射。

3. 发明授权

US5504340A Process method and apparatus using focused ion beam generating means 失效
标题翻译：使用聚焦离子束产生装置的方法和装置
公开(公告)号：US5504340A
公开(公告)日：1996-04-02
申请号：US207860
申请日：1994-03-09
申请人： Michinobu Mizumura , Yuuichi Hamamura , Junzou Azuma , Akira Shimase , Takashi Kamimura , Fumikazu Itoh , Kaoru Umemura , Yoshimi Kawanami , Yuuichi Madokoro
发明人： Michinobu Mizumura , Yuuichi Hamamura , Junzou Azuma , Akira Shimase , Takashi Kamimura , Fumikazu Itoh , Kaoru Umemura , Yoshimi Kawanami , Yuuichi Madokoro
IPC分类号： G01Q30/20 , G01Q60/52 , H01J37/305 , H01J37/317
CPC分类号： H01J37/3056 , H01J2237/0802 , H01J2237/0805 , H01J2237/0807 , H01J2237/0817 , H01J2237/31732 , H01J2237/31742 , H01J2237/31749
摘要： A processing method and a processing apparatus realizing the method use a focused ion beam generator. The apparatus includes a plasma or liquid metal ion source producing ions not influencing electric characteristics of a sample, an ion beam generator for extracting ions from the ion source into an ion beam, an ion beam focusing device for focusing the ion beam, an irradiator for irradiating the focused ion beam onto the sample, and a sample chamber in which the sample to be irradiated for processing is installed. The focused ion beam is irradiated onto a sample such as a silicon wafer or device to conduct on a particular position of the sample a fine machining work, a fine layer accumulation, and an analysis.
摘要翻译：实现该方法的处理方法和处理装置使用聚焦离子束发生器。该装置包括：等离子体或液体金属离子源，其产生不影响样品电特性的离子;离子束发生器，用于将离子源离子离子束提取到离子束;离子束聚焦装置，用于聚焦离子束;辐照器，将聚焦的离子束照射到样品上，并且在其中安装待照射用于处理的样品的样品室。将聚焦离子束照射到诸如硅晶片或器件的样品上以在样品的特定位置上进行精细加工，细层积累和分析。

4. 发明申请

US20180174792A1 Device for Generating a Source Current of Charge Carriers 审中-公开
公开(公告)号：US20180174792A1
公开(公告)日：2018-06-21
申请号：US15843919
申请日：2017-12-15
申请人： KETEK GmbH
发明人： Felix Düsberg , Michael Bachmann
IPC分类号： H01J29/96 , H01J35/14 , H01J35/06 , H01J29/62
CPC分类号： H01J29/96 , H01J27/26 , H01J29/62 , H01J35/065 , H01J35/14 , H01J37/073 , H01J37/08 , H01J37/243 , H01J2237/0635 , H01J2237/0802 , H05G1/34
摘要： A device for generating a source current of charge carriers by a field emission and a method stabilizing a source current of charge carriers emitted by a field emission element are disclosed. In an embodiment the device includes at least one field emission element from which the charge carriers emerge during operation, which lead to an emission current in the field emission element, at least one extraction electrode in order to extract the charge carriers from the field emission element, wherein a first part of the extracted charge carriers contributes to the source current, and a second part of the extracted charge carriers impinges on the extraction electrode and leads to an extraction current in the extraction electrode, an additional electrode on which the source current of charge carriers impinges at least in part and which contributes to an electrode current in the additional electrode.

5. 发明申请

US20160111242A1 METHOD AND APPARATUS FOR A POROUS ELECTROSPRAY EMITTER 有权
公开(公告)号：US20160111242A1
公开(公告)日：2016-04-21
申请号：US14975374
申请日：2015-12-18
申请人： Massachusetts Institute of Technology
发明人： Paulo C. Lozano , Steven Mark Arestie
IPC分类号： H01J27/26
CPC分类号： H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
摘要： An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.

6. 发明授权

US08803411B2 Charged particle beam radiation apparatus 有权
标题翻译：带电粒子束辐射装置
公开(公告)号：US08803411B2
公开(公告)日：2014-08-12
申请号：US13812700
申请日：2011-06-15
申请人： Shunichi Watanabe , Takashi Onishi , Minoru Kaneda , Hisaya Murakoshi
发明人： Shunichi Watanabe , Takashi Onishi , Minoru Kaneda , Hisaya Murakoshi
IPC分类号： H01J29/84 , H01J29/48 , H01J3/40 , H01J3/02 , H01J37/02
CPC分类号： H01J29/484 , H01J3/02 , H01J3/027 , H01J3/40 , H01J29/488 , H01J37/026 , H01J37/073 , H01J37/248 , H01J2237/038 , H01J2237/06341 , H01J2237/0802
摘要： In an accelerating tube which uses a conductive insulator, there is a possibility that the dopant concentration on a surface of the conductive insulator becomes non-uniform so that the surface resistance of the conductive insulator becomes non-uniform. Accordingly, a circumferential groove is formed on the inner surface of the conductive insulator accelerating tube in plural stages, and metal is metalized along inner portions of the grooves. When the resistance of a specific portion on the surface of the accelerating tube differs from the resistance of an area around the specific portion, the potential of the metalized region on the inner surface of the accelerating tube becomes a fixed value and hence, the potential distribution on the inner surface of the accelerating tube in the vertical direction can be maintained substantially equal without regard to the circumferential direction.
摘要翻译：在使用导电绝缘体的加速管中，导电绝缘体的表面上的掺杂剂浓度有可能变得不均匀，使得导电绝缘体的表面电阻变得不均匀。因此，在导电绝缘体加速管的内表面上形成有多个周向槽，并且金属沿着槽的内部被金属化。当加速管表面上的特定部分的电阻与特定部分周围的区域的电阻不同时，加速管内表面上的金属化区域的电位变为固定值，因此电位分布在加速管的内表面上，在垂直方向上可以保持基本上相等于圆周方向。

7. 发明授权

US08785881B2 Method and apparatus for a porous electrospray emitter 有权
标题翻译：多孔电喷发射体的方法和装置
公开(公告)号：US08785881B2
公开(公告)日：2014-07-22
申请号：US14070351
申请日：2013-11-01
申请人： Massachusetts Institute of Technology
发明人： Paulo C. Lozano , Steven Mark Arestie
IPC分类号： H01J9/02 , H01J37/08
CPC分类号： H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
摘要： An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
摘要翻译：离子液体离子源可以包括包含基底和尖端的微加工体。身体可以由与离子液体或室温熔融盐中的至少一种相容的多孔材料形成。身体可以具有从身体的基部到身体的尖端减小的孔径梯度，使得离子液体或室温熔融盐中的至少一种能够通过毛细管线从基底转移到小费。

8. 发明授权

US08710453B2 Charged particle source with multiple selectable particle emitters 有权
标题翻译：具有多个可选粒子发射器的带电粒子源
公开(公告)号：US08710453B2
公开(公告)日：2014-04-29
申请号：US13341487
申请日：2011-12-30
申请人： N. William Parker
发明人： N. William Parker
IPC分类号： H01J31/48
CPC分类号： H01J37/26 , H01J37/06 , H01J37/08 , H01J37/1471 , H01J37/28 , H01J2237/0635 , H01J2237/0802 , H01J2237/083 , H01J2237/1501 , H01J2237/1502 , H01J2237/31749
摘要： A charged particle source for a focused particle beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.
摘要翻译：公开了透射电子显微镜（TEM），扫描透射电子显微镜（STEM），扫描电子显微镜（SEM）或聚焦离子束（FIB）系统等聚焦粒子束系统的带电粒子源。该源在可以在带电粒子系统的轴线上居中的小区域内采用多个可独立寻址的发射器。所有的发射器可以被单独控制以使得能够同时从一个或多个尖端发射。只有一个发射器激活的模式对应于高亮度，而同时激活多个发射器的模式提供了较高亮度的较高角度强度。可以通过连续使用单个发射器来扩展源寿命。描述了用于所有发射器的组合的机械和电气校准程序。

9. 发明申请

US20120168638A1 Charged Particle Source with Multiple Selectable Particle Emitters 有权
标题翻译：带多个可选粒子发射器的带电粒子源
公开(公告)号：US20120168638A1
公开(公告)日：2012-07-05
申请号：US13341487
申请日：2011-12-30
申请人： N. William Parker
发明人： N. William Parker
IPC分类号： H01J3/14
CPC分类号： H01J37/26 , H01J37/06 , H01J37/08 , H01J37/1471 , H01J37/28 , H01J2237/0635 , H01J2237/0802 , H01J2237/083 , H01J2237/1501 , H01J2237/1502 , H01J2237/31749
摘要： A charged particle source for a focused particle beam system such as a transmission electron microscope (TEM), scanning transmission electron microscope (STEM), scanning electron microscope (SEM), or focused ion beam (FIB) system is disclosed. The source employs a multiplicity of independently-addressable emitters within a small region which can be centered on the axis of the charged particle system. All of the emitters may be individually controlled to enable emission from one or more tips simultaneously. A mode with only one emitter activated corresponds to high brightness, while modes with multiple emitters simultaneously activated provides high angular intensities with lower brightness. Source lifetimes can be extended through sequential use of single emitters. A combined mechanical and electrical alignment procedure for all emitters is described.
摘要翻译：公开了透射电子显微镜（TEM），扫描透射电子显微镜（STEM），扫描电子显微镜（SEM）或聚焦离子束（FIB）系统等聚焦粒子束系统的带电粒子源。该源在可以在带电粒子系统的轴线上居中的小区域内采用多个可独立寻址的发射器。所有的发射器可以被单独控制以使得能够同时从一个或多个尖端发射。只有一个发射器激活的模式对应于高亮度，而同时激活多个发射器的模式提供了较高亮度的较高角度强度。可以通过连续使用单个发射器来扩展源寿命。描述了用于所有发射器的组合的机械和电气校准程序。

10. 发明授权

US11993402B2 Ion propulsion device 有权
公开(公告)号：US11993402B2
公开(公告)日：2024-05-28
申请号：US17762303
申请日：2020-09-22
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , CENTRE NATIONAL D'ETUDES SPATIALES , UNIVERSITE PARIS-SACLAY
发明人： Jacques Gierak , Claude Boniface , Mathieu Lepesant
IPC分类号： B64G1/40 , H01J27/26
CPC分类号： B64G1/405 , H01J27/26 , H01J2237/0802 , H01J2237/317
摘要： An ion propulsion device including emission modules in an emission plane, each module having an insulating support, an emission electrode on the support, and a conductive liquid with a microfluidic channel depositing conductive liquid on the electrode; an extraction electrode common to the emission modules and facing the modules; and a control unit, in which each module is configured to emit an ion beam when an electric field is applied to the liquid; each control unit controls an ion emission current emitted by applying a potential difference between each emission electrode and the extraction electrode; the emission electrodes are spaced apart by a linear distance that is greater than a distance between two adjacent emission electrodes separated by an empty space; and a length of the insulating support between the electrodes is greater than a propagation distance of an electric leakage current by charge jumping along the support between the electrodes.

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