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21. 发明授权

US5430355A RF induction plasma source for plasma processing 失效
标题翻译：用于等离子体处理的RF感应等离子体源
公开(公告)号：US5430355A
公开(公告)日：1995-07-04
申请号：US100501
申请日：1993-07-30
申请人： Ajit P. Paranjpe
发明人： Ajit P. Paranjpe
IPC分类号： C23F4/00 , H01J37/32 , H01L21/3065 , H05H1/46 , H01J7/24
CPC分类号： H01J37/321 , H05H1/46
摘要： Plasma generator (10) includes chamber (14) for containing the plasma source and a plurality of coils (12) located inside of chamber (14). Located external to chamber (14) are a plurality of permanent multipolar magnets (34) operable to establish a magnetic field in the plasma source along the surface of chamber (14) and a set of electromagnets (36) located outside of chamber (14), which define a preferred propagation direction for a whistler wave in chamber (14). Coils (12) resonantly inductive couple RF power to the whistler wave so as to transfer a sufficient amount of energy to the plasma source to induce a plasma state in the plasma source. Coils (12) also generate time varying electromagnetic fields which also sustain the plasma state in the plasma source.
摘要翻译：等离子体发生器（10）包括用于容纳等离子体源的腔室（14）和位于腔室（14）内部的多个线圈（12）。位于室（14）外部的多个永久多极磁体（34）可操作以沿着室（14）的表面和位于室（14）外部的一组电磁体（36）在等离子体源中建立磁场，，其限定了室（14）中的吹风哨波的优选传播方向。线圈（12）谐振感应将RF功率耦合到吹风波，以便将足够量的能量传递到等离子体源以在等离子体源中诱导等离子体状态。线圈（12）还产生也维持等离子体源中的等离子体状态的时变电磁场。

22. 发明授权

US5389153A Plasma processing system using surface wave plasma generating apparatus and method 失效
标题翻译：等离子体处理系统采用表面波等离子体发生装置及方法
公开(公告)号：US5389153A
公开(公告)日：1995-02-14
申请号：US19941
申请日：1993-02-19
申请人： Ajit P. Paranjpe , Steve S. Huang
发明人： Ajit P. Paranjpe , Steve S. Huang
IPC分类号： H05H1/46 , H01J37/32 , C23C16/50
CPC分类号： H01J37/32229 , H01J37/32192
摘要： A surfatron 12 is provided which includes first waveguide 32 coupled to a section of coaxial waveguide 30 to define a cavity 28 at the intersection therebetween. The coaxial waveguide 30 includes an outer cylinder 36 and an inner cylinder 34 disposed within the outer cylinder 36. Inner cylinder 34 has an end disposed proximate to a wall of first section of waveguide 32. A space 40 is defined between the end of inner cylinder 34 and the wall of waveguide 32. A discharge tube 22 is provided having a first portion disposed within inner cylinder 34 and a second portion extending through space 40 between the end of inner cylinder 34 and the wall of waveguide 32. A coil 38 is disposed around the portion of discharge tube 22 extending through space 40 between the end of inner cylinder 34 and the wall of waveguide 32.
摘要翻译：提供了一种冲洗台12，其包括耦合到同轴波导30的一部分的第一波导32，以在它们之间的交叉处限定空腔28。同轴波导30包括外筒36和设置在外筒36内的内筒34.内筒34具有靠近波导32的第一部分的壁设置的端部。空间40限定在内筒体的端部 34和波导管32的壁。排放管22设置有设置在内筒34内的第一部分和延伸穿过内筒34的端部与波导32的壁之间的空间40的第二部分。线圈38设置围绕在内筒34的端部和波导管32的壁之间延伸通过空间40的放电管22的部分。

23. 发明授权

US09230846B2 Multi-wafer rotating disc reactor with inertial planetary drive 有权
标题翻译：具有惯性行星驱动器的多晶圆旋转盘式反应堆
公开(公告)号：US09230846B2
公开(公告)日：2016-01-05
申请号：US13153679
申请日：2011-06-06
申请人： Adrian Celaru , Todd A. Luse , Ajit P. Paranjpe , Joseph Scandariato , Qingfu Tang
发明人： Adrian Celaru , Todd A. Luse , Ajit P. Paranjpe , Joseph Scandariato , Qingfu Tang
IPC分类号： C23C16/00 , H01L21/687 , C23C16/458
CPC分类号： H01L21/68771 , C23C16/4584 , H01L21/68764
摘要： Wafer carriers and methods for moving wafers in a reactor. The wafer carrier may include a platen with a plurality of compartments and a plurality of wafer platforms. The platen is configured to rotate about a first axis. Each of the wafer platforms is associated with one of the compartments and is configured to rotate about a respective second axis relative to the respective compartment. The platen and the wafer platforms rotate with different angular velocities to create planetary motion therebetween. The method may include rotating a platen about a first axis of rotation. The method further includes rotating each of a plurality of wafer platforms carried on the platen and carrying the wafers about a respective second axis of rotation and with a different angular velocity than the platen to create planetary motion therebetween.
摘要翻译：用于在反应器中移动晶片的晶片载体和方法。晶片载体可以包括具有多个隔室和多个晶片平台的压板。压板被构造成围绕第一轴线旋转。每个晶片平台与隔室中的一个相关联并且被构造成相对于相应的隔室围绕相应的第二轴线旋转。压板和晶片平台以不同的角速度旋转以在它们之间产生行星运动。该方法可以包括围绕第一旋转轴旋转压板。该方法还包括旋转承载在压板上的多个晶片平台中的每一个，并且以相对于第二旋转轴线的速度运送晶片，并以与该压板相对的角速度不同以在其间产生行星运动。

24. 发明授权

US06391754B1 Method of making an integrated circuit interconnect 失效
标题翻译：制造集成电路互连的方法
公开(公告)号：US06391754B1
公开(公告)日：2002-05-21
申请号：US08722904
申请日：1996-09-27
申请人： Ajit P. Paranjpe
发明人： Ajit P. Paranjpe
IPC分类号： H01L213205
CPC分类号： H01L21/76852 , H01L21/3215 , H01L21/76814 , H01L21/76825 , H01L21/76838 , H01L21/76843 , H01L21/76859 , H01L21/76867 , H01L21/76888 , Y10S438/927
摘要： A method of encapsulating metal lines (130, 132, 134, 136, 138) by implantation of dopants to form surface regions (131, 133, 135, 137, 139) after the metal lines have been fabricated. The surface regions may act as passivation layers and electromigration inhibitors and so forth.
摘要翻译：在金属线制造之后，通过注入掺杂剂来密封金属线（130,132,134,136,138）以形成表面区域（131,133,135,137,139）的方法。表面区域可以用作钝化层和电迁移抑制剂等。

25. 发明授权

US5593924A Use of a capping layer to attain low titanium-silicide sheet resistance and uniform silicide thickness for sub-micron silicon and polysilicon lines 失效
标题翻译：使用覆盖层获得低的硅化钛薄层电阻和亚微米硅和多晶硅线的均匀硅化物厚度
公开(公告)号：US5593924A
公开(公告)日：1997-01-14
申请号：US460345
申请日：1995-06-02
申请人： Pushkar P. Apte , Ajit P. Paranjpe
发明人： Pushkar P. Apte , Ajit P. Paranjpe
IPC分类号： H01L21/203 , H01L21/28 , H01L21/285 , H01L21/3205 , H01L21/336 , H01L21/768 , H01L23/52 , H01L29/78
CPC分类号： H01L21/28052 , H01L21/28518 , H01L21/76889 , Y10S438/902
摘要： A titanium-silicide process using a capping layer to reduce the silicide sheet resistance. A layer of titanium (20) is deposited. A react capping layer (22) may then be deposited to prevent contaminants from entering the titanium layer (20)during the subsequent react step. The layer of titanium (20) is then reacted to form titanium-silicide (32). The react capping layer (22) is then removed and an anneal capping layer (36) is deposited to prevent contaminants from entering the silicide layer (32) during the subsequent anneal step. Then, the silicide anneal is performed to accomplish to transformation to a lower resistivity phase of silicide. An advantage of the invention is providing a silicide process having reduced silicide sheet resistance for narrow polysilicon lines.
摘要翻译：使用覆盖层来降低硅化物薄层电阻的硅化钛工艺。沉积一层钛（20）。然后可以沉积反应覆盖层（22），以防止污染物在随后的反应步骤期间进入钛层（20）。然后使钛（20）层反应形成硅化钛（32）。然后去除反应覆盖层（22），并且沉积退火覆盖层（36）以防止污染物在随后的退火步骤期间进入硅化物层（32）。然后，进行硅化物退火以实现向硅化物的较低电阻率相的转变。本发明的一个优点是提供了一种对于窄多晶硅线路具有降低的硅化物薄层电阻的硅化物工艺。

26. 发明授权

US5422723A Diffraction gratings for submicron linewidth measurement 失效
$Diffraction gratings for submicron linewidth measurement$
标题翻译：用于亚微米线宽测量的衍射光栅
公开(公告)号：US5422723A
公开(公告)日：1995-06-06
申请号：US948194
申请日：1992-09-21
申请人： Ajit P. Paranjpe , Phillip Chapados, Jr. , Jimmy W. Hosch
发明人： Ajit P. Paranjpe , Phillip Chapados, Jr. , Jimmy W. Hosch
IPC分类号： G01B11/02 , G02B5/18 , H01L21/302 , H01L21/306 , H01L21/3065 , G01B9/02
CPC分类号： G01B11/02
摘要： A test structure and a method of using it for measuring submicron linewidths. Diffraction gratings are made with lines having an unknown linewidth. The grating has a pitch comprises of multiple lines and multiple spaces. This permits a wider "effective pitch" resulting in an increased number of observable diffraction orders. Each order provides an intensity measurement, which can be substituted into a diffraction intensity equation in which intensity is a function of linewidth and other unknown variables. At least as many intensity measurements are obtained as are unknown variables so that a system of equations can be solved for the linewidth. In practice, if the grating lines are made in the same manner as other lines of a product, the width of the latter can be inferred.
摘要翻译：测试结构及其用于测量亚微米线宽的方法。衍射光栅由具有未知线宽的线制成。光栅具有包括多条线和多个空间的间距。这允许更宽的“有效间距”导致可观察的衍射级数的增加。每个顺序都提供强度测量，可以用衍射强度方程来代替强度是线宽和其他未知变量的函数。至少获得与未知变量一样多的强度测量，以便可以求解线宽系数。实际上，如果光栅线以与产品的其它线相同的方式制造，则可以推断后者的宽度。

27. 发明申请

US20110300297A1 MULTI-WAFER ROTATING DISC REACTOR WITH INERTIAL PLANETARY DRIVE 有权
标题翻译：多波段旋转盘反应器与惯性行星传动
公开(公告)号：US20110300297A1
公开(公告)日：2011-12-08
申请号：US13153679
申请日：2011-06-06
申请人： Adrian Celaru , Todd A. Luse , Ajit P. Paranjpe , Joseph Scandariato , Quinfu Tang
发明人： Adrian Celaru , Todd A. Luse , Ajit P. Paranjpe , Joseph Scandariato , Quinfu Tang
IPC分类号： C23C16/458 , B05C13/02
CPC分类号： H01L21/68771 , C23C16/4584 , H01L21/68764
摘要： Wafer carriers and methods for moving wafers in a reactor. The wafer carrier may include a platen with a plurality of compartments and a plurality of wafer platforms. The platen is configured to rotate about a first axis. Each of the wafer platforms is associated with one of the compartments and is configured to rotate about a respective second axis relative to the respective compartment. The platen and the wafer platforms rotate with different angular velocities to create planetary motion therebetween. The method may include rotating a platen about a first axis of rotation. The method further includes rotating each of a plurality of wafer platforms carried on the platen and carrying the wafers about a respective second axis of rotation and with a different angular velocity than the platen to create planetary motion therebetween.
摘要翻译：用于在反应器中移动晶片的晶片载体和方法。晶片载体可以包括具有多个隔室和多个晶片平台的压板。压板被构造成围绕第一轴线旋转。每个晶片平台与隔室中的一个相关联并且被构造成相对于相应的隔室围绕相应的第二轴线旋转。压板和晶片平台以不同的角速度旋转以在它们之间产生行星运动。该方法可以包括围绕第一旋转轴旋转压板。该方法还包括旋转承载在压板上的多个晶片平台中的每一个，并且以相对于第二旋转轴线的速度运送晶片，并以与该压板相对的角速度不同以在其间产生行星运动。

28. 发明授权

US07393561B2 Method and apparatus for layer by layer deposition of thin films 失效
标题翻译：用于逐层沉积薄膜的方法和装置
公开(公告)号：US07393561B2
公开(公告)日：2008-07-01
申请号：US10342151
申请日：2003-01-13
申请人： Ajit P. Paranjpe
发明人： Ajit P. Paranjpe
IPC分类号： C23C16/00
CPC分类号： C23C16/45525 , C23C16/345 , C23C16/45527 , C23C16/4557 , H01J37/32082 , H01J37/32733 , H01J2237/2001 , H01L21/02532 , H01L21/0262 , H01L21/28562 , H01L21/3141 , H01L21/3185 , H01L21/67017 , H01L21/67069 , H01L21/67115
摘要： A method of increasing ALP briefly, a preferred embodiment of the present invention includes a method of increasing ALP throughput by continuously modulating gas flow in a reactor to achieve layer by layer growth on a wafer. A first reactant is introduced with a percentage of a carrier gas. After a first time interval, the first reactant flow is reduced while the carrier gas flow is increased so as to maintain an approximately constant total gas flow. When the first reactant flow reaches a minimal, predetermined amount, a second reactant flow is initiated and increased while the carrier gas flow is decreased so as to continue a constant total gas flow. The method alternatively includes introducing a substance that enhances reactant adsorption and chemisorption, either as a first applied gas that reacts with the surface or as an added ligand to the reactant. Still further alternatives include a periodic rapid thermo anneal for improving film properties, parallel wafer processing and a reactant reservoir.
摘要翻译：本发明优选实施方案的一个优选实施方案包括一种通过连续地调节反应器中的气流以在晶片上逐层生长来提高ALP通量的方法。第一反应物被引入一定百分比的载气。在第一时间间隔之后，第一反应物流减少，同时载气流量增加，以保持大致恒定的总气流。当第一反应物流量达到最小预定量时，启动并增加第二反应物流，同时减少载气流，从而继续恒定的总气流。该方法或者包括引入增强反应物吸附和化学吸附的物质，作为与表面反应的第一个施加的气体，或作为反应物的添加配体。更进一步的替代方案包括用于改善膜性能，平行晶片处理和反应物储存器的周期性快速热退火。

29. 发明授权

US06696931B2 Retrofittable vehicle collision warning apparatus 有权
标题翻译：可改装车辆碰撞警告装置
公开(公告)号：US06696931B2
公开(公告)日：2004-02-24
申请号：US09938897
申请日：2001-08-24
申请人： Ajit P. Paranjpe
发明人： Ajit P. Paranjpe
IPC分类号： B60Q100
CPC分类号： B60Q9/008 , B60Q9/006
摘要： A retrofittable collision warning apparatus for vehicles comprises a base unit within the vehicle cabin and a plurality of remote units located around the periphery of the vehicle. The remote units generally operate in a low-power sleep mode, and periodically go partially active to listen for wakeup inputs from the base unit, at which time the remote units enter a highest-power active mode to measure the distance between the vehicle and obstacles in the proximity, and use wireless transmission to communicate obstacle position information to the base unit. The base unit accepts operator commands, use wireless communication to transmit control signals to the remote units and receives obstacle position information from the remote units, communicates obstacle position information to the operator through audio and/or visual signals, and controls operation of the collision warning apparatus. The base and remote units employ power conservation and voltage boosters to extend the lifetime of compact, low voltage on-board power sources and communicate through wireless means. Auto detection and configuration of remote units are incorporated for easy system expandability.
摘要翻译：用于车辆的可改装的碰撞警告装置包括车厢内的基座单元和位于车辆周边周围的多个远程单元。远程单元通常以低功率睡眠模式工作，并且周期性地部分地活动以监听来自基本单元的唤醒输入，此时远程单元进入最高功率活动模式以测量车辆与障碍物之间的距离并且使用无线传输将障碍物位置信息传送到基本单元。基地单元接受操作者指令，利用无线通信向远程单元发送控制信号，并从远程单元接收障碍物位置信息，通过音频和/或视觉信号将障碍物位置信息传送给操作员，并控制碰撞警告的操作仪器。基站和远程单元采用节能和升压器来延长紧凑型低压板载电源的使用寿命，并通过无线方式进行通信。结合远程单元的自动检测和配置，便于系统扩展。

30. 发明授权

US06339369B1 Retrofittable vehicle collision warning apparatus 有权
标题翻译：可改装车辆碰撞警告装置
公开(公告)号：US06339369B1
公开(公告)日：2002-01-15
申请号：US09159137
申请日：1998-09-23
申请人： Ajit P. Paranjpe
发明人： Ajit P. Paranjpe
IPC分类号： B60Q100
CPC分类号： B60Q9/006 , B60Q9/008
摘要： A retrofittable collision warning apparatus for vehicles is described. The collision warning apparatus comprises a base unit that is located within the vehicle cabin and a plurality of remote units located around the periphery of the vehicle. The remote units respond to inputs from the base unit, measure the distance between the vehicle and obstacles in the proximity, and utilize wireless transmission to communicate obstacle position information to the base unit. The base unit accepts operator commands, utilizes wireless communication to transmit control signals to the remote units and receive obstacle position information from the remote units, communicates obstacle position information to the operator through audio and visual signals, and controls operation of the collision warning apparatus. Base unit and remote units that comprise the collision warning apparatus employ power management to extend the lifetime of power sources and communicate through wireless means. These attributes make this collision warning apparatus well suited for quick and easy retrofit to existing vehicles.
摘要翻译：描述了用于车辆的可改装的碰撞警告装置。碰撞警告装置包括位于车厢内的基座单元和位于车辆周边周围的多个远程单元。远程单元响应基本单元的输入，测量车辆与邻近的障碍物之间的距离，并利用无线传输将障碍物位置信息传送到基本单元。基座单元接受操作员命令，利用无线通信向远程单元发送控制信号，并从远程单元接收障碍物位置信息，并通过音视频信号向操作人员传送障碍物位置信息，并控制碰撞警告装置的操作。构成碰撞警告装置的基本单元和远程单元采用电力管理来延长电源的使用寿命并通过无线方式进行通信。这些属性使得这种碰撞警告装置非常适合对现有车辆进行快速和轻松的改造。

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