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    • 18. 发明授权
    • Electron multiplier
    • 电子倍增器
    • US09543129B2
    • 2017-01-10
    • US14123250
    • 2012-05-31
    • Akio SuzukiYuto YanagiharaHiroshi Kobayashi
    • Akio SuzukiYuto YanagiharaHiroshi Kobayashi
    • H01J25/76H01J43/04H01J43/24H01J43/28
    • H01J43/04H01J43/246H01J43/28
    • An electron multiplier includes an insulating substrate which includes an electrical wiring pattern and in which a through-hole is formed, an MCP arranged on one side of the through-hole of the insulating substrate and electrically connected to the electrical wiring pattern, a shield plate arranged in one side of the MCP and electrically connected to the MCP, an anode arranged on the other side of the through-hole and electrically connected to the electrical wiring pattern, and a signal readout terminal fixed to the insulating substrate for reading a signal from the anode. The shield plate is formed to include the MCP when viewed in a thickness direction. A through-hole exposing at least a portion of the MCP is formed in the shield plate. The insulating substrate, the MCP, the shield plate and the anode are fixed to each other to be integral.
    • 电子倍增器包括绝缘基板,其包括电布线图案,并且其中形成有通孔; MCP,布置在绝缘基板的通孔的一侧上并电连接到电布线图案;屏蔽板 布置在MCP的一侧并且电连接到MCP,阳极,其设置在通孔的另一侧并电连接到电布线图案;以及信号读出端子,固定到绝缘基板上,用于读取来自 阳极。 当从厚度方向观察时,屏蔽板形成为包括MCP。 在屏蔽板中形成露出MCP的至少一部分的通孔。 绝缘基板,MCP,屏蔽板和阳极彼此固定为一体。