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11. 发明授权

US06919539B2 Substantially-uniform-temperature annealing 失效
标题翻译：基本均匀的温度退火
公开(公告)号：US06919539B2
公开(公告)日：2005-07-19
申请号：US10623877
申请日：2003-07-21
申请人： Shariar Motakef , Serhat Yesilyurt
发明人： Shariar Motakef , Serhat Yesilyurt
IPC分类号： C30B33/00 , G02B1/02 , G02B5/30 , F27B5/08 , F27B5/14 , F27B3/28 , F27D1/10
CPC分类号： G02B5/3083 , C30B29/12 , C30B33/00 , G02B1/02 , Y10T117/1016
摘要： A system for heating optical members includes a thermally-conductive inner housing defining an interior volume for receiving an optical member to be heated, a thermally-insulative outer housing at least partially containing the thermally-conductive inner housing, and a heating structure disposed outside the inner housing and configured to provide heat through the thermally-conductive inner housing and into the interior volume defined by the inner housing.
摘要翻译：一种用于加热光学构件的系统包括限定用于接收待加热的光学构件的内部空间的导热内部壳体，至少部分地包含导热内部壳体的热绝缘外部壳体，以及设置在内壳体并且被配置为通过导热内壳体提供热量并进入由内壳体限定的内部空间。

12. 发明授权

US3647924A High-temperature furnace for melting materials in space 失效
标题翻译：用于空气中熔融材料的高温炉
公开(公告)号：US3647924A
公开(公告)日：1972-03-07
申请号：US3647924D
申请日：1971-02-12
申请人： NASA
发明人： RASQUIN JOHN R
IPC分类号： B64G4/00 , F27D11/02 , F27B5/08 , H05B3/00
CPC分类号： F27D11/02 , B64G4/00
摘要： An electrically powered furnace for melting high-melting point materials in the vacuum and zero gravity environment of space comprising an alumina crucible, cylindrical in shape, and enclosing a cylindrical tantalum sample holder that contains the sample to be melted. The crucible is surrounded by concentric cylindrical enclosures made of polished sheet molybdenum. The sample holder is clamped between a pair of round plates and a pair of alignment bolts are joined to the circular plates and extend along the longitudinal axis of the furnace through the end covers of the crucible and surrounding concentric enclosures.
摘要翻译：一种用于在空间真空和零重力环境中熔化高熔点材料的电动炉，其包括圆柱形的氧化铝坩埚，并且包围含有要熔化的样品的圆柱形钽样品架。坩埚被由抛光片钼制成的同心圆柱形外壳包围。样品架夹在一对圆形板之间，一对校准螺栓与圆形板连接，并通过坩埚的端盖和周围的同心围板沿炉纵向轴线延伸。

13. 发明申请

US20220008991A1 SEALED FURNACE 有权
公开(公告)号：US20220008991A1
公开(公告)日：2022-01-13
申请号：US17429763
申请日：2020-02-11
申请人： Desktop Metal, Inc.
发明人： Nathan Woodard , Jonah Samuel Myerberg , Emanuel M Sachs , Richard Remo Fontana , Robert Edward Weiss , Yet-Ming Chiang , Stephen Dipietro , Nicholas Graham Bandiera
IPC分类号： B22F3/00 , B22F3/10 , B33Y40/20 , F27B5/04 , F27B5/08 , F27D1/00 , F27D99/00 , F27B5/18
摘要： A furnace may include an outer wall defining a chamber, the chamber including an internal cavity configured to receive one or more parts, at least one heater positioned within the chamber, the at least one heater being configured to generate temperatures of at least about 800 degrees Celsius within the internal cavity, and a vacuum pump configured to apply a vacuum to at least a portion of the chamber. The furnace may also include at least one layer of inner insulation and at least one layer of outer insulation disposed outward of the inner insulation with respect to the chamber, the at least one layer of outer insulation being sealed with respect to the at least one layer of inner insulation.

14. 发明授权

US10605530B2 Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace 有权
公开(公告)号：US10605530B2
公开(公告)日：2020-03-31
申请号：US15660805
申请日：2017-07-26
申请人： ASM IP Holding B.V.
发明人： Lucian C. Jdira , Chris G. M. de Ridder , Theodorus G. M. Oosterlaken , Klaas P. Boonstra , Herbert Terhorst , Juul Keijser
IPC分类号： F27D7/06 , F27B5/04 , F27B1/14 , F27B1/28 , F27B5/08 , F27B5/12 , F27B5/16 , F27D3/00 , F27D11/00 , H01L21/67
摘要： An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

15. 发明授权

US10529597B2 Heater elements with enhanced cooling 有权
公开(公告)号：US10529597B2
公开(公告)日：2020-01-07
申请号：US15619568
申请日：2017-06-12
申请人： Arsalan Emami
发明人： Arsalan Emami
IPC分类号： F27D11/00 , H01L21/67 , H01L23/467 , F27D1/00 , F27B5/08 , F27B3/24 , F27D9/00
摘要： A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

16. 发明授权

US09679791B2 Heater elements with enhanced cooling 有权
公开(公告)号：US09679791B2
公开(公告)日：2017-06-13
申请号：US14920900
申请日：2015-10-23
申请人： Arsalan Emami
发明人： Arsalan Emami
IPC分类号： F27D11/00 , H01L21/67 , H01L23/467 , F27D1/00 , F27B5/08 , F27D9/00
CPC分类号： H01L21/67098 , F27B5/08 , F27D1/0006 , F27D11/00 , F27D2009/0005 , H01L21/67109 , H01L23/467 , H01L2924/0002 , H01L2924/00
摘要： A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

17. 发明授权

US08987641B2 High performance heater 有权
标题翻译：高性能加热器
公开(公告)号：US08987641B2
公开(公告)日：2015-03-24
申请号：US13517850
申请日：2012-06-14
申请人： Arsalan Emami
发明人： Arsalan Emami
IPC分类号： H05B3/06 , H05B3/08 , H05B3/66 , F27B5/08 , F27B5/14 , F27D1/04 , F27D11/02 , B23P19/00 , F27D1/00 , F27B17/00
CPC分类号： F27D11/02 , B23P19/00 , F27B5/14 , F27B17/0025 , F27D1/0006 , F27D1/0036 , H05B3/08 , H05B3/66 , Y10T29/49826
摘要： Systems and methods are provided for a high performance heater. In an embodiment, the high performance heater comprises a first stackable tray comprising a first alignment pin that insulates a first heating element disposed in the first stackable tray; a second stackable tray comprising a second alignment pin that insulates a second heating element disposed in the second stackable tray, wherein a top of the first alignment pin fits into a cutout of a bottom of the second alignment pin when the first and second stackable trays are stacked, and wherein the first and second stackable trays comprise one or more materials, an outer diameter and an inner diameter, and wherein an area between the outer diameter and the inner diameter of the stackable trays comprises at least one cutout portion that allows expansion of the material(s) when the high performance heater is at high temperatures.
摘要翻译：为高性能加热器提供系统和方法。在一个实施例中，高性能加热器包括第一可堆叠托盘，其包括使布置在第一可堆叠托盘中的第一加热元件绝缘的第一对准销; 第二可堆叠托盘，其包括第二对准销，所述第二对准销绝缘设置在所述第二可堆叠托盘中的第二加热元件，其中当所述第一和第二可堆叠托盘是第一可堆叠托盘时，所述第一对准销的顶部装配到所述第二对准销的底部的切口中并且其中第一和第二可堆叠托盘包括一个或多个材料，外径和内径，并且其中可堆叠托盘的外径和内径之间的区域包括至少一个切口部分，其允许当高性能加热器处于高温时的材料。

18. 发明授权

US07157666B2 Systems for producing semiconductors and members therefor 有权
标题翻译：半导体制造系统及其成员
公开(公告)号：US07157666B2
公开(公告)日：2007-01-02
申请号：US10753583
申请日：2004-01-08
申请人： Yoshinobu Goto , Hideyoshi Tsuruta
发明人： Yoshinobu Goto , Hideyoshi Tsuruta
IPC分类号： C23C16/00 , F27B5/08 , F27B5/16
CPC分类号： F27B17/0025 , F27D11/02 , H01L21/67109
摘要： A member provided around a susceptor for mounting a semiconductor in a chamber of a semiconductor production system. The member has a face opposing the susceptor and a center line average surface roughness of the face opposing the susceptor is 0.5 μm or less. Alternatively, the face opposing the susceptor has a thermal emissivity ε of 0.5 or lower. The member can also be a liner [4] having a supported face [4] whose area is not more than 20 percent of that of the face [4] opposing the susceptor.
摘要翻译：设置在基座周围的构件，用于将半导体安装在半导体生产系统的腔室中。该构件具有与基座相对的面，并且与基座相对的面的中心线平均表面粗糙度为0.5μm以下。或者，与感受器相对的面的热发射率ε为0.5以下。该构件还可以是具有支撑面[4]的衬垫[4]，其面积不大于与感受器相对的面部[4]面积的20％。

19. 发明授权

US3857553A Heat treatment furnace and method 失效
标题翻译：热处理炉和方法
公开(公告)号：US3857553A
公开(公告)日：1974-12-31
申请号：US30035672
申请日：1972-10-24
申请人： ACTRIC LTD
发明人： GRIFFITHS P
IPC分类号： D21H17/03 , B22F3/10 , C21D1/18 , C21D1/26 , C21D1/28 , C21D1/74 , C21D1/76 , C23C8/06 , C23C8/32 , F27B5/08 , C21D9/00
CPC分类号： C21D1/74
摘要： A heat treatment furnace is sub-divided by an internal wall into an ante-chamber and a treatment chamber arranged so that workpieces pass through an entry of the furnace into the antechamber, and thence through the treatment chamber to an exit of the furnace. Fuel-fired heating tubes are provided in the treatment chamber to radiate heat to workpieces therein and the tubes are arranged to discharge into the ante-chamber so that the hot products of combustion contact the workpieces in the antechamber. The ante-chamber itself is sub-divided into front and rear parts, and the front part is provided with a gas outlet through which the products of combustion from the heating tubes can leave the furnace. Air may be drawn through the entry into the front part of the ante-chamber to burn off oil from the workpieces therein.
摘要翻译：一个热处理炉被一个内壁细分成一个前室和一个处理室，这样一个处理室被布置成使得工件通过炉子的入口进入前室，然后通过处理室进入炉的出口。燃料加热管设置在处理室中以将热量散发到其中的工件，并且管布置成排放到前室中，使得燃烧的热产物与前室中的工件接触。前室本身分为前部和后部，前部设有气体出口，来自加热管的燃烧产物可通过该出口离开炉。空气可以通过入口进入前室的前部，以从其中的工件燃烧掉油。

20. 发明授权

US3842181A Furnace 失效
标题翻译：炉
公开(公告)号：US3842181A
公开(公告)日：1974-10-15
申请号：US38456973
申请日：1973-08-01
申请人： TNO
发明人： DIJKSTRA F , GROOTHUIZEN T , PASMAN H , VAN DE PUTTE T
IPC分类号： F27D11/02 , H05B3/00 , F27B5/08
CPC分类号： H05B3/0028 , F27D11/02
摘要： A furnace provided with three heating mantles mounted around each other and separated by insulating layers, wherein the innermost, i.e., the first mantle is connected to a first supply voltage source, and the second and the third mantles are connected in series to a second supply voltage source, which second source is controlled by heat flow in the insulating layer located between the first and second mantles, the second and third mantles being constructed such that the power excitable per unit of surface in the mantles are substantially equal.
摘要翻译：炉子具有三个彼此相互安装并由绝缘层隔开的加热罩，其中最内层的，即第一地幔连接到第一电源电压源，第二和第三外壳串联连接到第二电源电压源，其中第二源由位于第一和第二外壳之间的绝缘层中的热流控制，第二和第三外壳被构造成使得每个地幔中每单位表面可激发的功能基本相等。

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