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1. 发明授权

US11898254B2 Processing method for fluorination of fluorination-target component for semiconductor fabrication equipment, which minimizes generation of contaminant particles, and fluorinated component obtained thereby 有权
公开(公告)号：US11898254B2
公开(公告)日：2024-02-13
申请号：US17965802
申请日：2022-10-14
申请人： WONIK QNC Corporation
发明人： Yoonjae Yu , Seungyoung Oh , Eunyoung Choi , Joohee Jang , Soyoung Choi , Sanghyun Cho
IPC分类号： C23C8/36 , C23C8/06
CPC分类号： C23C8/36 , C23C8/06
摘要： Disclosed are a processing method for fluorination of a fluorination-target component for semiconductor fabrication equipment, which may realize high density and high strength by fluorinating the fluorination-target component using a fluorinating gas excited into plasma, and at the same time, may significantly reduce plasma contaminant particles which are generated during formation of a fluoride coating, and a fluorinated component obtained by the method.

2. 发明授权

US09518318B2 Method and device for hardening work pieces and workpieces hardened according to said method 有权
标题翻译：根据所述方法硬化工件和工件的方法和装置
公开(公告)号：US09518318B2
公开(公告)日：2016-12-13
申请号：US13394795
申请日：2010-09-06
申请人： Volker Heuer , Klaus Loeser , Gunther Schmitt , Gerhard Welzig
发明人： Volker Heuer , Klaus Loeser , Gunther Schmitt , Gerhard Welzig
IPC分类号： C23C8/02 , C23C8/06 , C23C8/20 , C23C8/22 , C23C8/24 , C23C8/26 , C23C8/80
CPC分类号： C23C8/02 , C23C8/06 , C23C8/20 , C23C8/22 , C23C8/24 , C23C8/26 , C23C8/80
摘要： The invention relates to a method and device for thermally treating workpieces, the device including a cooling chamber and two or more carburizing chambers in which the work pieces are heated to a temperature of 950 to 1200° C. by means of direct heat radiation from a heating device.
摘要翻译：本发明涉及一种用于热处理工件的方法和装置，该装置包括一个冷却室和两个或多个渗碳室，其中工件通过直接加热辐射从而加热到950至1200℃的温度加热装置。

3. 发明授权

US09238864B2 Controlled coating apparatus, systems, and methods 有权
标题翻译：受控涂层设备，系统和方法
公开(公告)号：US09238864B2
公开(公告)日：2016-01-19
申请号：US13416497
申请日：2012-03-09
申请人： Michael T. Pelletier
发明人： Michael T. Pelletier
IPC分类号： C23C8/04 , C23C8/06 , C23C22/48 , C23C16/04 , C23C16/52 , C23C16/455 , C23C22/00
CPC分类号： C23C16/45544 , C23C16/042 , C23C16/045 , C23C16/45555 , C23C16/52
摘要： Apparatus and systems may operate to provide a first reactant as a gas that flows under reduced atmospheric pressure to interact with a surface, such as a tool body surface, the interaction confined to a passage within the tool body, wherein the passage includes the surface and extends without interruption from an entrance end of the passage to an exit end of the passage. Additional activity may include providing a second reactant as a gas under the reduced atmospheric pressure, subsequent to the first reactant, to interact with the surface of the tool body; and repeated provision of the first and second reactants until a selected coating thickness on the surface is formed. Additional apparatus, systems, and methods are disclosed.
摘要翻译：装置和系统可以操作以提供作为气体的第一反应物，所述气体在降低的大气压力下流动以与表面（例如工具主体表面）相互作用，所述相互作用限于工具主体内的通道，其中通道包括表面和从通道的入口端不间断地延伸到通道的出口端。另外的活性可以包括在第一反应物之后在降低的大气压下提供作为气体的第二反应物与工具体的表面相互作用; 并重复提供第一和第二反应物，直到形成表面上所选择的涂层厚度。公开了附加装置，系统和方法。

4. 发明授权

US08795770B2 Preparation of mist, process and apparatus for forming new materials by mist gas discharge 有权
标题翻译：雾气排放形成新材料的雾，工艺和装置的制备
公开(公告)号：US08795770B2
公开(公告)日：2014-08-05
申请号：US13127342
申请日：2009-09-15
申请人： Yifei Zhang , Xinhui Zhang
发明人： Yifei Zhang , Xinhui Zhang
IPC分类号： C23C8/06 , C23C8/36 , D06M16/00 , H01J37/32 , C23C10/06 , D06M14/18 , D06M11/09 , C23C14/48
CPC分类号： C23C8/06 , C23C8/36 , C23C10/06 , C23C14/48 , D06M11/09 , D06M14/18 , D06M16/00 , H01J37/32018 , H01J37/32055 , H01J37/3244 , H01J37/32522
摘要： A process for preparing mist, which includes micro/nano solids or liquids, and a process for forming new materials by mist gas discharge, and also an apparatus for forming new materials. The advantages are: as compared to common gases, mists exhibit broader selection range of elements and compounds and broader range of suitable temperature and pressure. Due to the presence of mist AI(m), in a sealed container, the concentration of A in unit volume of mist is far higher than the concentration of A in unit volume of gas. Under specific conditions, the physical/chemical reactions can be carried out more easily, and new materials can be formed with higher efficiency.
摘要翻译：一种制备薄雾的方法，包括微/纳米固体或液体，以及通过雾气排放形成新材料的方法，以及用于形成新材料的装置。其优点是：与普通气体相比，雾状物显示更广泛的元素和化合物选择范围以及更宽范围的合适温度和压力。由于存在雾AI（m），在密封容器中，单位体积雾中的A浓度远远高于气体单位体积中的A浓度。在特定条件下，物理/化学反应可以更容易地进行，可以以更高的效率形成新的材料。

5. 发明授权

US08641834B2 Method for manufacturing electric contact material, electric contact material, and thermal fuse 有权
标题翻译：电接触材料，电接触材料和热熔丝的制造方法
公开(公告)号：US08641834B2
公开(公告)日：2014-02-04
申请号：US12309275
申请日：2008-05-20
申请人： Toshiya Yamamoto , Kazuyasu Takada , Kiyokazu Kojima
发明人： Toshiya Yamamoto , Kazuyasu Takada , Kiyokazu Kojima
IPC分类号： C23C8/06 , C22C5/00 , C22C5/06
CPC分类号： H01H1/0206 , C22C1/1078 , C23C8/02 , C23C8/10 , H01H37/76 , H01H85/0241
摘要： A method for manufacturing an electric contact material in which a surface layer portion of an alloy containing 1 to 15 mass % of Cu, 0.01 to 0.7 mass % of Ni, and the remainder of Ag and unavoidable impurities is supplied with an amount of oxygen exceeding the amount of oxygen required for internal oxidation of Cu to form an oxygen concentrated layer.
摘要翻译：一种电接触材料的制造方法，其中，含有1〜15质量％的Cu，0.01〜0.7质量％的Ni，剩余的Ag和不可避免的杂质的合金的表层部分被供给超过一定量的氧内部氧化Cu形成氧浓缩层所需的氧气量。

6. 发明授权

US08343449B1 Device and method for producing a tubular refractory metal compound structure 有权
$Device and method for producing a tubular refractory metal compound structure$
标题翻译：用于生产管状难熔金属复合结构的装置和方法
公开(公告)号：US08343449B1
公开(公告)日：2013-01-01
申请号：US13171198
申请日：2011-06-28
申请人： Jason Schmitt
发明人： Jason Schmitt
IPC分类号： C01B21/06 , C01B31/34 , C01B31/30 , C01B21/076 , C01B35/04 , C01B25/08 , C04B35/52 , C04B35/00 , C03C3/00 , C23C8/00 , C23C22/00 , C23C8/24 , C23C8/06
CPC分类号： C23C8/00 , C01B21/0761 , C01B32/914 , C01B35/04 , C04B35/5607 , C04B35/5622 , C04B35/58028 , C04B35/58078 , C04B35/65 , C04B2235/404 , C04B2235/46 , C04B2235/48 , C04B2235/486 , C04B2235/6567 , C04B2235/6586 , C23C8/06
摘要： The disclosure provides a device and method used to produce a tubular structure made of a refractory metal compound. In particular, the disclosure provides a device and method used to produce a tubular structure made of a refractory metal compound by reacting a green tubular structure made of a refractory metal with at least one reactive gas.
摘要翻译：本公开提供了用于生产由难熔金属化合物制成的管状结构的装置和方法。特别地，本公开提供了一种用于通过使由难熔金属制成的绿色管状结构与至少一种反应气体反应来制造由难熔金属化合物制成的管状结构的装置和方法。

7. 发明授权

US07678471B2 Surface modification to improve fireside corrosion resistance of Fe-Cr ferritic steels 失效
标题翻译：改善Fe-Cr铁素体钢的炉边耐腐蚀性能进行表面改性
公开(公告)号：US07678471B2
公开(公告)日：2010-03-16
申请号：US11374849
申请日：2006-03-14
申请人： Jong-Hee Park , Krishnamurti Natesan , David L. Rink
发明人： Jong-Hee Park , Krishnamurti Natesan , David L. Rink
IPC分类号： C25D5/10 , C23C8/00 , C23C22/00 , C23C8/06
CPC分类号： C23C10/52 , C23C10/46 , C23C10/50 , Y10T428/12958
摘要： An article of manufacture and a method for providing an Fe—Cr ferritic steel article of manufacture having a surface layer modification for corrosion resistance. Fe—Cr ferritic steels can be modified to enhance their corrosion resistance to liquid coal ash and other chemical environments, which have chlorides or sulfates containing active species. The steel is modified to form an aluminide/silicide passivating layer to reduce such corrosion.
摘要翻译：一种用于提供具有耐腐蚀性的表面层改性的Fe-Cr铁素体钢制品的制造方法和方法。 Fe-Cr铁素体钢可以改性，以增强其对液态煤灰和其他具有含有活性物质的氯化物或硫酸盐的化学环境的耐腐蚀性。钢被改性以形成铝化物/硅化物钝化层以减少这种腐蚀。

8. 发明授权

US07232611B2 Component including a zirconium alloy, a method for producing said component, and a nuclear plant including said component 有权
标题翻译：包括锆合金的组分，所述组分的制备方法和包括所述组分的核电厂
公开(公告)号：US07232611B2
公开(公告)日：2007-06-19
申请号：US10204846
申请日：2001-03-20
申请人： Gunnar Hultquist , Magnus Limbäck , Gunnar Wikmark
发明人： Gunnar Hultquist , Magnus Limbäck , Gunnar Wikmark
IPC分类号： C23C8/06
CPC分类号： G21C3/07 , C22C16/00 , C23C8/02 , C23C8/10 , C23C8/34 , C23C8/80 , Y02E30/40
摘要： The present invention relates to a component (1) comprising an element (2), which contains zirconium or a zirconium alloy and which has a surface (3) on which a corrosion protective layer (4) is formed, the oxide layer (4) comprising zirconium oxide. The component (1) is intended to be in an oxidising environment (6) and said oxide layer (4) has an outer surface (5) towards said oxidising environment (6). The element (2) comprises a layer (10), that borders said surface (3) and comprises hydrogen and at least one metal from the group of lanthanum elements and/or from the group platinum metals and/or yttrium which in its elemental form or as an oxide have the ability to effectively dissociate oxygen and H2O. The invention also relates to a method for manufacturing the component (1) and a nuclear facility comprising the component (1).
摘要翻译：本发明涉及一种包含元素（2）的组分（1），其含有锆或锆合金，并且具有形成有腐蚀保护层（4）的表面（3），氧化物层（4）包括氧化锆。组分（1）旨在处于氧化环境（6）中，并且所述氧化物层（4）具有朝向所述氧化环境（6）的外表面（5）。元件（2）包括与所述表面（3）相接合的层（10），并且包含氢和至少一种来自镧元素的金属和/或其元素形式的铂金属和/或钇或作为氧化物具有有效地解离氧和H 2 O 2的能力。本发明还涉及用于制造组分（1）的方法和包含组分（1）的核设施。

9. 发明申请

US20060196581A1 Primarily niobium stent 失效
标题翻译：主要是铌支架
公开(公告)号：US20060196581A1
公开(公告)日：2006-09-07
申请号：US11417856
申请日：2006-05-03
申请人： Torsten Scheuermann , Eckhard Alt
发明人： Torsten Scheuermann , Eckhard Alt
IPC分类号： C23C8/06
CPC分类号： A61L31/18 , A61F2/91 , A61F2/915 , A61F2002/91541 , A61F2002/91558 , A61F2310/00598 , A61L31/022 , A61L31/088
摘要： In a process of fabricating a stent composed primarily of niobium alloyed with a trace amount of zirconium, tantalum, or titanium for hardening, the stent is annealed under vacuum in a substantially oxygen-free environment. The vacuum is preferably maintained at pressure less than 10−4 millibars, oxygen-content less than about 80 parts per million, and the annealing temperature exceeds 400° C. for at least one hour, and is preferably kept in a range from about 1100-1200° C. for several hours. This may be followed by applying a surface layer of oxide, such as iridium oxide, with a thickness of 299-300 nm to the stent.
摘要翻译：在制造主要由铌合金化的用于硬化的锆，钽或钛的支架的制造过程中，支架在基本上无氧的环境中在真空下退火。真空优选保持在小于10 -4毫巴的压力下，含氧量小于约百万分之八十，退火温度超过400℃至少一小时，优选保持在约1100-1200℃的范围内几个小时。然后可以向支架施加厚度为299-300nm的氧化物表面层，例如氧化铱。

10. 发明授权

US6077370A Thin-walled monolithic metal oxide structures made from metals, and methods for manufacturing such structures 失效
标题翻译：由金属制成的薄壁整体式金属氧化物结构体及其制造方法
公开(公告)号：US6077370A
公开(公告)日：2000-06-20
申请号：US079693
申请日：1998-05-15
申请人： Konstantin Solntsev , Eugene Shustorovich , Sergei Myasoedov , Vyacheslav Morgunov , Andrei Chernyavsky , Yuri Buslaev , Richard Montano , Alexander Shustorovich
发明人： Konstantin Solntsev , Eugene Shustorovich , Sergei Myasoedov , Vyacheslav Morgunov , Andrei Chernyavsky , Yuri Buslaev , Richard Montano , Alexander Shustorovich
IPC分类号： C23C8/06 , C23C8/10 , C23C8/14 , C23C8/18 , C21D6/04
CPC分类号： C23C8/10 , C23C8/14 , C23C8/18 , Y10T428/24149
摘要： Monolithic metal oxide structures, and processes for making such structures, are disclosed. The structures are obtained by heating a metal-containing structure having a plurality of surfaces in close proximity to one another in an oxidative atmosphere at a temperature below the melting point of the metal while maintaining the close proximity of the metal surfaces. Exemplary structures of the invention include open-celled and closed-cell monolithic metal oxide structures comprising a plurality of adjacent bonded corrugated and/or flat layers, and metal oxide filters obtained from a plurality of metal filaments oxidized in close proximity to one another.
摘要翻译：公开了单片金属氧化物结构及其制造方法。通过在保持金属表面的紧密度的同时，在低于金属熔点的温度的氧化气氛中加热具有多个表面的含金属结构的结构体。本发明的示例性结构包括开孔和闭孔单块金属氧化物结构，其包括多个相邻的波纹和/或平坦层，以及由彼此非常接近地氧化的多个金属丝获得的金属氧化物过滤器。

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