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    • 13. 发明授权
    • Fluidic device, system, and mixing method
    • US11982602B2
    • 2024-05-14
    • US17256151
    • 2018-06-29
    • NIKON CORPORATION
    • Ryo KobayashiHirofumi Shiono
    • G01N1/38B01F33/301G01N35/08
    • G01N1/38B01F33/3017G01N35/085G01N2001/383
    • The present invention provides a fluidic device in which solutions of different concentrations can be easily obtained. The fluidic device includes: a first substrate and a second substrate which are stacked in a thickness direction; an undiluted solution introduction flow path which has an undiluted solution introduction port and which is constituted of a groove part provided on at least one of the first substrate and the second substrate; a first circulation flow path which is constituted of a groove part having an annular shape and having a shared part that shares part of a flow path with the undiluted solution introduction flow path and a non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; a second circulation flow path which is provided independently of the first circulation flow path and which is constituted of a groove part having an annular shape and having a shared part that shares some flow path with the undiluted solution introduction flow path and a non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; and/or a third circulation flow path which is constituted of a groove part having an annular shape and having a shared flow path that shares part of a flow path with the first circulation flow path and a non-shared flow path which is not shared with the first circulation flow path and which is connected to a diluting solution introduction port, wherein the undiluted solution introduction flow path includes a valve at both ends of the shared part.