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11. 发明申请

US20100091407A1 PERPENDICULAR WRITE HEAD HAVING A STEPPED FLARE STRUCTURE AND METHOD OF MANUFACTURE THEREOF 有权
标题翻译：具有阶梯式结构的平头书写头及其制造方法
公开(公告)号：US20100091407A1
公开(公告)日：2010-04-15
申请号：US12646879
申请日：2009-12-23
申请人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/60 , G11B5/127
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure that is recessed from the ABS by a distance that is greater than that of the magnetic shell portion. A magnetic shield is formed over the magnetic shell and non-magnetic spacer.
摘要翻译：一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。写头还包括形成在磁性壳结构上的非磁性间隔层，其从ABS凹陷的距离大于磁性壳部分的距离。在磁性壳体和非磁性间隔物上形成磁屏蔽。

12. 发明申请

US20070230046A1 Write head design and method for reducing adjacent track interference in at very narrow track widths 有权
标题翻译：用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法
公开(公告)号：US20070230046A1
公开(公告)日：2007-10-04
申请号：US11391942
申请日：2006-03-28
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3163
摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. The trailing shield is notched, having an un-notched portion directly behind (trailing) the write pole and first and second notched portions that extend laterally to either side. The un-notched portion of the trailing shield is located adjacent to the trailing edge of the write pole and is separated from the trailing edge of the write pole by a trailing shield notch. The notched portions are separated from the trailing edge of the write gap by a notch depth, measured along the trailing direction, the notch depth as measured in the trailing direction being larger than the trailing shield distance. The notch depth as measured in the trailing direction is preferably 25-50 nm larger than the trailing shield gap distance.
摘要翻译：垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。后屏蔽被切口，具有直写在后面（后面）写入极的未切口部分，以及横向延伸到任一侧的第一和第二切口部分。后屏蔽的未切口部分位于与写极的后缘相邻并且通过后屏蔽切口与写极的后缘分离。切口部分从写入间隙的后缘与沿着拖尾方向测量的切口深度分开，在后沿方向上测量的切口深度大于尾部屏蔽距离。在拖尾方向上测量的凹口深度优选比后屏蔽间隙距离大25-50nm。

13. 发明授权

US07120988B2 Method for forming a write head having air bearing surface (ABS) 失效
标题翻译：用于形成具有空气轴承表面（ABS）的写头的方法
公开(公告)号：US07120988B2
公开(公告)日：2006-10-17
申请号：US10672896
申请日：2003-09-26
申请人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
发明人： Quang Le , Edward Hin Pong Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
IPC分类号： G11B5/127 , C23C14/00
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49067
摘要： A method and materials to fabricate a trailing shield write pole that resolve the problems of controlling the write gap and preventing damages to the write gap or pole during fabrication of the subsequent structure. This process also introduces a CMP assisted lift-off process to remove re-deposition and fencing (increase yields) and a method to create dishing in the top of the write pole. Moreover, also included in this disclosure are suitable materials that can function as an ion mill transfer layer, CMP layer, and RIEable layer.
摘要翻译：一种用于制造后屏蔽写入极的方法和材料，其解决了在后续结构的制造期间控制写入间隙并防止对写入间隙或极的损坏的问题。该过程还引入CMP辅助剥离过程以去除再沉积和栅栏（增加产量）以及在写柱顶部产生凹陷的方法。此外，本公开中还包括可用作离子磨转移层，CMP层和可分离层的合适材料。

14. 发明申请

US20060165959A1 Contact magnetic transfer template 失效
公开(公告)号：US20060165959A1
公开(公告)日：2006-07-27
申请号：US11044777
申请日：2005-01-26
申请人： Zvonimir Bandic , A. Erpelding , Jordan Katine , Quang Le , Kim Lee , Jui-Lung Li , Michael Rooks
发明人： Zvonimir Bandic , A. Erpelding , Jordan Katine , Quang Le , Kim Lee , Jui-Lung Li , Michael Rooks
IPC分类号： B32B3/00
CPC分类号： G11B5/865 , G11B5/855 , Y10T428/24612
摘要： A contact magnetic transfer (CMT) master template has a flexible plastic film with a planarized top or upper surface containing magnetic islands separated from one another by nonmagnetic regions. The flexible plastic film is secured at its perimeter to a silicon annulus that provides rigid support at the perimeter of the film. The plastic film is preferably polyimide that has recesses filled with the magnetic material that form the pattern of magnetic islands. The upper surfaces of the islands and the upper surfaces of the nonmagnetic regions form a continuous planar surface. The nonmagnetic regions are formed of chemical-mechanical-polishing (CMP) stop layer material that remains after a CMP process has planarized the upper surface of the plastic film.

15. 发明申请

US20060002023A1 Magnetic head having a deposited second magnetic shield and fabrication method therefor 审中-公开
标题翻译：具有沉积的第二磁屏蔽的磁头及其制造方法
公开(公告)号：US20060002023A1
公开(公告)日：2006-01-05
申请号：US10883327
申请日：2004-06-30
申请人： Quang Le , Edwin Hin Lee , Jui-Lung Li , Nian-Xiang Sun , Yi Zheng
发明人： Quang Le , Edwin Hin Lee , Jui-Lung Li , Nian-Xiang Sun , Yi Zheng
IPC分类号： G11B5/147 , G11B5/127 , G11B5/33
CPC分类号： B82Y10/00 , G11B5/3163 , G11B5/3912
摘要： The magnetic head includes a second magnetic shield that is fabricated in a deposition process. The present invention therefore does not require the deposition of the electrically conductive seed layer. In a preferred embodiment, the deposited second magnetic shield is comprised of cobalt zirconium tantalum (CZT). Because the CZT material is relatively soft, it is preferably deposited within an opening formed in a relatively hard RIEable material such as Ta2O5, SiO2, Si3N3, and SiOxNy, such that a subsequent chemical mechanical polishing (CMP) step can be conducted down to the surface of the relatively hard layer.
摘要翻译：磁头包括在沉积工艺中制造的第二磁屏蔽。因此，本发明不要求导电种子层的沉积。在优选实施例中，所沉积的第二磁屏蔽由钴锆钽（CZT）组成。由于CZT材料相对较软，因此优选沉积在形成于相对较硬的RIEable材料（例如Ta 2 O 5，SiO 2）中的开口内， SUB>，Si 3 N 3 N 3和SiO x N N y，使得随后的化学机械抛光（ CMP）步骤可以向下传导到相对硬的层的表面。

16. 发明授权

US08011084B2 Method for fabricating narrow magnetic read width TMR/CPP sensors 有权
标题翻译：制造窄磁读宽TMR / CPP传感器的方法
公开(公告)号：US08011084B2
公开(公告)日：2011-09-06
申请号：US12184054
申请日：2008-07-31
申请人： Quang Le , Jui-Lung Li
发明人： Quang Le , Jui-Lung Li
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3909 , B82Y10/00 , B82Y25/00 , G01R33/093 , G01R33/098 , G11B5/3163 , G11B5/3932 , G11B2005/3996 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a manufacturing a magnetoresistive sensor that allows the sensor to be constructed with a very narrow and well controlled track width. The method includes depositing a layer of diamond like carbon over a series of sensor layers. A first mask is then formed to define a sensor, and an ion milling is performed to remove sensor material not protected by the first mask. Then, a second mask is formed, and a hard bias layer is deposited to the thickness of the sensor layers. The second mask is then lifted off and a CMP is performed to remove the first mask structure. Because all areas other than the area directly over the sensor are substantially planar a quick, gentle CMP can be used to remove the first mask layer even if the first mask is small, such as for definition of a very narrow track-width sensor.
摘要翻译：一种用于制造磁阻传感器的方法，该传感器允许传感器被构造成具有非常窄且良好控制的轨道宽度。该方法包括在一系列传感器层上沉积一层类似金刚石的碳。然后形成第一掩模以限定传感器，并且执行离子铣削以去除未被第一掩模保护的传感器材料。然后，形成第二掩模，并且在传感器层的厚度上沉积硬偏置层。然后将第二掩模剥离并执行CMP以除去第一掩模结构。由于除传感器正上方的区域以外的所有区域基本上是平面的（由于第二掩模的移除和硬偏置材料的低水平），可以使用快速，温和的CMP来去除第一掩模层，即使第一个掩模很小，如定义非常窄的轨道宽度传感器。

17. 发明申请

US20100128392A1 PERPENDICULAR WRITE HEAD HAVING A STEPPED FLARE STRUCTURE AND METHOD OF MANUFACTURE THEREOF 审中-公开
标题翻译：具有阶梯式结构的平头书写头及其制造方法
公开(公告)号：US20100128392A1
公开(公告)日：2010-05-27
申请号：US12646858
申请日：2009-12-23
申请人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Dudley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/127
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A magnetic write head for data recording having a magnetic write pole with a stepped magnetic shell structure that defines a secondary flare point. The secondary flare point defined by the magnetic shell portion can be more tightly controlled with respect to its distance from the air bearing surface (ABS) of the write head than can a traditional flare point that is photolithographically on the main pole structure. This allows the effective flare point of the write head to be moved much closer to the ABS than would otherwise be possible using currently available tooling and photolithography techniques. The write head also includes a non-magnetic spacer layer formed over the magnetic shell structure and a trailing magnetic shield, a portion of which is formed over the non-magnetic spacer.
摘要翻译：一种用于数据记录的磁写头，具有限定二次闪光点的阶梯状磁性壳结构的磁性写入极。由磁性壳体部分限定的次级火炬点可以相对于与写入磁头的空气轴承表面（ABS）的距离比在主极结构上光刻的传统闪光点更加严格地控制。这使得使用当前可用的工具和光刻技术可以使写入头的有效喇叭点移动得更接近ABS。写头还包括形成在磁性壳结构上的非磁性间隔层和尾部磁屏蔽，其一部分形成在非磁性间隔物上。

18. 发明申请

US20100126001A1 Method for self aligning a lapping guide with a structure of a magnetic write head 有权
标题翻译：用于将研磨引导件与磁性写入头的结构自对准的方法
公开(公告)号：US20100126001A1
公开(公告)日：2010-05-27
申请号：US12646884
申请日：2009-12-23
申请人： Christian Rene Bonhote , Thomas Budley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
发明人： Christian Rene Bonhote , Thomas Budley Boone, JR. , Quang Le , Jui-Lung Li , Jeffrey S. Lille , Scott Arthur MacDonald , Neil Leslie Robertson , Xhavin Sinha , Petrus Antonius Van Der Heijden
IPC分类号： G11B5/127
CPC分类号： G11B5/3146 , G11B5/11 , G11B5/1278 , G11B5/3116 , G11B5/315 , G11B5/3166 , G11B5/3169
摘要： A method for self aligning a lapping guide with a structure of a write pole. A write pole is formed over a substrate and an electrically conductive material lapping guide material is deposited in a location that is removed from the write pole. A mask is then formed over a portion of the write pole and a portion of the electrically conductive material. A material removal process such as reactive ion etching can then be performed to remove a portion of the magnetic material that is not protected by the mask structure. An magnetic material is then electroplated over the write pole with the write pole, with the mask still in place. In this way, the electroplated material has an edge that is self aligned with an edge of the electrically conductive lapping guide material, both being defined by the same mask structure.
摘要翻译：一种用于将研磨导向器与写入杆的结构自对准的方法。写入极在衬底上形成，并且导电材料研磨引导材料沉积在从写柱移除的位置。然后在写入极的一部分和导电材料的一部分上形成掩模。然后可以执行诸如反应离子蚀刻的材料去除处理以去除未被掩模结构保护的磁性材料的一部分。然后将磁性材料用写入极电镀在写入极上，同时掩模仍然在位。以这种方式，电镀材料具有与导电研磨导向材料的边缘自对准的边缘，两者都由相同的掩模结构限定。

19. 发明申请

US20060288565A1 WRITE POLE FABRICATION FOR PERPENDICULAR RECORDING 失效
标题翻译：写字符制造用于完整记录
公开(公告)号：US20060288565A1
公开(公告)日：2006-12-28
申请号：US11469132
申请日：2006-08-31
申请人： Quang Le , Edward Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
发明人： Quang Le , Edward Lee , Jui-Lung Li , Aron Pentek , Nian-Xiang Sun
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/112 , Y10T29/49021 , Y10T29/49032 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052 , Y10T29/49067
摘要： Methods for forming write heads. One method includes forming a mask layer above a pole tip layer; forming a layer of resist above the mask layer; patterning the resist; removing portions of the mask layer not covered by the patterned resist; shaping a pole tip from the pole tip layer; depositing a layer of dielectric material above the pole tip and flux shaping layer, wherein the layer of dielectric material extends about adjacent to the mask layer; depositing a stop layer over the dielectric material, the stop layer abutting the mask layer; and polishing for forming a substantially planar upper surface comprising the mask layer and stop layer. Another method includes depositing a layer of dielectric material at least adjacent the pole tip, wherein the layer of dielectric material extends about adjacent to the mask layer. A further method includes forming dishing in the pole tip.
摘要翻译：形成写头的方法一种方法包括在极尖层上形成掩模层; 在掩模层之上形成抗蚀剂层; 图案化抗蚀剂; 去除未被图案化抗蚀剂覆盖的掩模层的部分; 从极尖层成形极尖; 在极尖和熔剂成形层上沉积介电材料层，其中介电材料层围绕掩模层延伸; 在电介质材料上沉积停止层，停止层邻接掩模层; 以及用于形成包括掩模层和停止层的基本平坦的上表面的抛光。另一种方法包括沉积至少邻近极尖的介电材料层，其中电介质材料层围绕掩模层延伸。另一种方法包括在极尖中形成凹陷。

20. 发明申请

US20060109588A1 Method of making a perpendicular recording magnetic head pole tip with an etchable adhesion CMP stop layer 审中-公开
公开(公告)号：US20060109588A1
公开(公告)日：2006-05-25
申请号：US11325133
申请日：2006-01-03
申请人： Quang Le , Jui-lung Li , Jeffrey Lille , Son Nguyen
发明人： Quang Le , Jui-lung Li , Jeffrey Lille , Son Nguyen
IPC分类号： G11B5/147
CPC分类号： G11B5/1278 , G11B5/3106 , Y10T29/49041 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： The method of making a magnetic head assembly includes forming a second pole piece layer that is recessed from a head surface, forming a reactive ion etchable (RIEable) pole tip forming layer on the second pole piece layer, forming an adhesion/stop layer of tantalum (Ta) on the pole tip forming layer, forming a photoresist mask on the adhesion/stop layer with an opening for patterning the adhesion/stop layer and the pole tip forming layer with another opening, reactive ion etching (RIE) through the opening to form the other opening, forming the second pole piece pole tip in the other opening with a top which is above a top of the adhesion/stop layer and chemical mechanical polishing (CMP) the top of the second pole piece pole tip until the CMP contacts the adhesion/stop layer. The invention also includes the magnetic head made by such a process.

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