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    • 17. 发明授权
    • Piezo-electric/electrostrictive film type element
    • 压电/电致伸缩膜型元件
    • US5889352A
    • 1999-03-30
    • US727083
    • 1996-10-08
    • Yukihisa TakeuchiKoji KimuraTsutomu Nanataki
    • Yukihisa TakeuchiKoji KimuraTsutomu Nanataki
    • G01L1/16G01L9/00H01L41/08H01L41/09H04R17/00H04R17/08
    • G01L9/008H01L41/0973H04R17/00H04R17/08
    • A piezo-electric/electrostrictive film type element is constituted of a ceramic substrate including a spacer plate having at least one window, and a thin closure plate for closing the window, integrally joined to the spacer plate, and a piezo-electric/electrostrictive working portion having a lower electrode, a piezo-electric/electrostrictive layer and an upper electrode disposed in turn in the form of a layer at a closure position of the window on the outer surface of the closure plate by a film formation method. The piezo-electric/electrostrictive layer is arranged so as to cover a part only of the area of the window in a plan view. Since at the end portions of the void, the piezo-electric/electrostrictive working portion does not pick up fluctuation and vibration which would contain noise at the end portions of the void, the noise at the time of sensing, filtering or acoustic oscillation can be remarkably minimized, and a gap between the characteristics of a simulation at the time of design and those of the actual product can be remarkably reduced.
    • 压电/电致伸缩薄膜型元件由包括具有至少一个窗口的间隔板和用于闭合窗口的薄封闭板,整体连接到间隔板的陶瓷基板和压电/电致伸缩工作 具有下电极的部分,压电/电致伸缩层和上电极,其通过成膜方法依次设置在封闭板的外表面上的窗口的封闭位置处的层的形式。 压电/电致伸缩层被布置成在平面图中仅覆盖窗口区域的一部分。 由于在空隙的端部,压电/电致伸缩工作部分不会吸收在空隙的端部处将包含噪声的波动和振动,所以在感测,滤波或声振荡时的噪声可以是 显着地最小化,并且在设计时的仿真特性与实际产品的特性之间的差距可以显着降低。