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    • 11. 发明授权
    • Reduction gear device
    • 减速装置
    • US08435149B2
    • 2013-05-07
    • US12223471
    • 2007-02-06
    • Ryuhei KoyamaToshiharu HibinoMasakazu KuritaJun Hirose
    • Ryuhei KoyamaToshiharu HibinoMasakazu KuritaJun Hirose
    • F16H1/32
    • F16H1/32B25J9/102F16H57/0463
    • A reduction gear device includes a first reduction mechanism and a second reduction mechanism. The second reduction mechanism includes a crankshaft, an external gear and an internal gear. One of the internal gear and the external gear is fixed to a base part side member of a robot arm of an industrial robot, and the other of the internal gear and the external gear is fixed to an anterior end side member of the robot arm of the industrial robot. An inner diameter D of the internal gear is 140 mm≦D≦200 mm, torque T transmitted to the anterior end side member is 650 Nm≦T≦1960 Nm, and the number of teeth N of the internal gear is less than 40 times the difference in the number of teeth between the internal gear and the external gear.
    • 减速装置包括第一减速机构和第二减速机构。 第二减速机构包括曲轴,外齿轮和内齿轮。 内齿轮和外齿轮中的一个被固定到工业机器人的机器人臂的基部侧构件,并且内齿轮和外齿轮中的另一个固定到机器人臂的前端侧构件 工业机器人。 内齿轮的内径D在D = 200mm处为140mm,传递到前端侧构件的扭矩T为650Nm @ T @ 1960Nm,内齿轮的齿数N小于40倍 内齿轮与外齿轮之间的齿数差。
    • 17. 发明授权
    • Vacuum process system
    • 真空过程系统
    • US07198448B2
    • 2007-04-03
    • US11332653
    • 2006-01-13
    • Jun OzawaJun HiroseMasaki Narushima
    • Jun OzawaJun HiroseMasaki Narushima
    • B65G49/07
    • H01L21/67161H01L21/67167H01L21/67184H01L21/6719H01L21/67196H01L21/67201H01L21/67745Y10S414/139
    • A vacuum process system comprises: a load port on which an object to be processed is set; a common transfer chamber disposed adjacent to the load port, having an internal space set at an atmospheric pressure level, and including a first transfer device that is movable and transfers the object into/from the load port, the first transfer device being disposed within the internal space; and a process unit having one process chamber for subjecting the object to a predetermined process, and a vacuum transfer chamber connected to the process chamber, having an internal space set at a vacuum pressure level, and including a second transfer device for transferring the object into/from the process chamber, the second transfer device being disposed within the internal space. The process units are individually connected to the common transfer chamber such that the process units are substantially parallel to each other. The vacuum chamber of each process unit is connected to the common transfer chamber. Each process unit extends linearly in a direction substantially perpendicular to the common transfer chamber. The object is transferred into/from the vacuum transfer chamber by means of the first transfer device.
    • 真空处理系统包括:设置待处理对象的装载端口; 与负载端口相邻设置的公共传送室,具有设定在大气压力水平的内部空间,并且包括第一传送装置,该第一传送装置可移动并将物体传送到/从所述装载端口传送,所述第一传送装置设置在所述传送室内 内部空间; 以及处理单元,其具有用于使物体经受预定处理的一个处理室和连接到处理室的真空传送室,其具有设置在真空压力水平的内部空间,并且包括用于将物体传送到 /从处理室,第二传送装置设置在内部空间内。 处理单元分别连接到公共传送室,使得处理单元基本上彼此平行。 每个处理单元的真空室连接到公共传送室。 每个处理单元在基本上垂直于公共传送室的方向上线性地延伸。 物体通过第一传送装置传送到/从真空传送室传送。
    • 19. 发明授权
    • Structure or construction for mounting a pressure detector
    • 用于安装压力检测器的结构或结构
    • US06606912B2
    • 2003-08-19
    • US09825340
    • 2001-04-04
    • Tadahiro OhmiTakashi HiroseEiji IdetaNobukazu IkedaRyousuke DohiKouji NishinoKazuhiro YoshikawaSatoshi KagatsumeJun HiroseKazuo FukasawaHiroshi KoizumiHideki Nagaoka
    • Tadahiro OhmiTakashi HiroseEiji IdetaNobukazu IkedaRyousuke DohiKouji NishinoKazuhiro YoshikawaSatoshi KagatsumeJun HiroseKazuo FukasawaHiroshi KoizumiHideki Nagaoka
    • G01L700
    • G01L19/0023G01L19/0645G01L19/145G01L19/147
    • A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.
    • 用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变,因为检测器安装在设置在管线等中的夹具主体中,从而保持了输出特性和温度特性 检测器在安装前后差异很大。 压力检测器通过将具有隔膜的膜片基座和具有传感器元件的传感器基座组合并紧固在一起而构成,该传感器基座通过隔膜基座的位移而被激活。 压力检测器,其上放置有垫圈,设置在安装在管道中的固定装置本体的安装孔中。 压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。 压板构件与隔膜基座的块上表面接触,并且垫圈也与隔膜基座的块下表面接触。 浅槽在块体的下表面上在与金属垫片接触的部分的内侧的位置处以环的形式限定,使得浅槽吸收由压紧构件引起的应变。