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    • 12. 发明授权
    • Semiconductor wafer, semiconductor chip, and manufacturing method of semiconductor device
    • 半导体晶片,半导体芯片和半导体器件的制造方法
    • US06885599B2
    • 2005-04-26
    • US10764539
    • 2004-01-27
    • Yoshikazu SaitohSadayuki MoritaTakahiro Sonoda
    • Yoshikazu SaitohSadayuki MoritaTakahiro Sonoda
    • G01R31/30G01R31/28G11C29/00G11C29/48H01L21/66G11C7/00
    • G11C29/48
    • By using a small number of needles and contact terminals at burn-in, electric contact check is performed between each needle and each terminal provided in each semiconductor chip, and thereby the yield of assembled products can be improved. A packaging structure in which, for example, a volatile memory chip and a nonvolatile memory chip are formed is assembled in accordance with a production scheme in which burn-in of each memory chip is performed while still under the state of a semiconductor wafer, and by forming the packaged structure using the good volatile memory chip subjected to burn-in and likewise, also, the nonvolatile memory chip. At this burn-in, contact check is performed by bringing a needle, provided in a burn-in board, into contact with, for example, six test-only signal terminals of a test circuit formed on each semiconductor chip.
    • 通过在老化期间使用少量的针和接触端子,在每个针与每个半导体芯片中提供的每个端子之间进行电接触检查,从而可以提高组装产品的产量。 根据其中形成有易失性存储器芯片和非易失性存储器芯片的封装结构,根据在半导体晶片的状态下执行每个存储芯片的老化的生产方案,并且 通过使用经过老化的良好易失性存储器芯片以及类似地,非易失性存储器芯片形成封装结构。 在该老化期间,通过将设置在老化板中的针与例如在每个半导体芯片上形成的测试电路的六个测试信号端子接触来进行接触检查。
    • 19. 发明授权
    • Semiconductor wafer, semiconductor chip, and manufacturing method of semiconductor device
    • 半导体晶片,半导体芯片和半导体器件的制造方法
    • US06711075B2
    • 2004-03-23
    • US09906060
    • 2001-07-17
    • Yoshikazu SaitohSadayuki MoritaTakahiro Sonoda
    • Yoshikazu SaitohSadayuki MoritaTakahiro Sonoda
    • G11C700
    • G11C29/48
    • By using a small number of needles and contact terminals at burn-in, electric contact check is performed between each needle and each terminal provided in each semiconductor chip, and thereby the yield of assembled products can be improved. A packaging structure in which, for example, a volatile memory chip and a nonvolatile memory chip are formed is assembled in accordance with a production scheme in which burn-in of each memory chip is performed while still under the state of a semiconductor wafer, and by forming the packaged structure using the good volatile memory chip subjected to burn-in and likewise, also, the nonvolatile memory chip. At this burn-in, contact check is performed by bringing a needle, provided in a burn-in board, into contact with, for example, six test-only signal terminals of a test circuit formed on each semiconductor chip.
    • 通过在老化期间使用少量的针和接触端子,在每个针与每个半导体芯片中提供的每个端子之间进行电接触检查,从而可以提高组装产品的产量。 根据其中形成有易失性存储器芯片和非易失性存储器芯片的封装结构,根据在半导体晶片的状态下执行每个存储芯片的老化的生产方案,并且 通过使用经过老化的良好易失性存储器芯片以及类似地,非易失性存储器芯片形成封装结构。 在该老化期间,通过将设置在老化板中的针与例如在每个半导体芯片上形成的测试电路的六个测试信号端子接触来进行接触检查。