专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

US20060091120A1 Recycling optical systems and methods for thermal processing 审中-公开
标题翻译：回收光学系统和热处理方法
公开(公告)号：US20060091120A1
公开(公告)日：2006-05-04
申请号：US11257291
申请日：2005-10-24
申请人： David Markle
发明人： David Markle
IPC分类号： B23K26/00
CPC分类号： B23K26/04 , B23K26/032 , B23K26/043 , B23K26/0604 , B23K26/0643 , B23K26/0738 , B23K26/08 , B23K26/082 , B23K2101/40
摘要： Recycling optical systems and methods for thermal processing of substrates using same are disclosed. The recycling optical system collects radiation provided to the substrate via an annealing radiation beam and reflected from the substrate. The recycling optical system collects the reflected radiation and returns the collected reflected radiation back through the system as recycled radiation. The recycled radiation is returned to the same region of the substrate from which it reflected—preferably to within the thermal diffusion distance associated with scanning the radiation beam over the substrate. The recycling system preserves the polarization and the incidence angle of the directly incident radiation, while avoiding returning radiation back to the source where it might cause radiation source instability. The delivery of recycled radiation to the substrate improves the uniformity of the annealing process, particularly in the case where the substrate includes features that cause varying amounts of absorption over the substrate surface.
摘要翻译：公开了用于使用其的基板的热处理的回收光学系统和方法。回收光学系统通过退火辐射束收集提供给基板的辐射并从基板反射。回收光学系统收集反射的辐射并将收集的反射辐射作为再循环辐射返回通过系统。再循环的辐射返回到其反射的基底的相同区域，优选地反射到与在衬底上扫描辐射束相关联的热扩散距离内。回收系统保留了直接入射辐射的极化和入射角，同时避免了将辐射返回到可能导致辐射源不稳定的源。将再循环辐射递送到衬底提高退火过程的均匀性，特别是在衬底包括在衬底表面上引起变化量的吸收的特征的情况下。

12. 外观设计

USD762091S1 Grinder bottom 有权
标题翻译：研磨机底部
公开(公告)号：USD762091S1
公开(公告)日：2016-07-26
申请号：US29492231
申请日：2014-05-29
申请人： Matthew Grumbacher , David Markle
设计人： Matthew Grumbacher , David Markle

13. 发明申请

US20200064616A1 SUPER-RESOLUTION, THREE-DIMENSIONAL MICROSCOPE 审中-公开
公开(公告)号：US20200064616A1
公开(公告)日：2020-02-27
申请号：US16543550
申请日：2019-08-17
申请人： David Markle
发明人： David Markle
IPC分类号： G02B21/36 , G01N21/64 , G02B21/16 , G02B21/33 , G02B21/06
摘要： A system for obtaining a 3-D, super-resolution model of an object in an image space is provided as well as novel and nonobvious components thereof. The system includes a light source that constrains uninhibited activation light to a thin slice through the object, the object having a volume that is perpendicular to an axis of a 2-D super-resolution microscope, a means for providing relative incremental movement between the object and the thin slice of constrained uninhibited activation light, and a means for taking a super resolution picture of each incremental slice resulting from the relative incremental movement between the object and the thin slice, thereby creating a set of voxels from which an accurate 3-D super-resolution model of any fluorescent object contained within the image space can be constructed.

14. 外观设计

USD739076S1 Combined grinder and reservoir 有权
标题翻译：组合研磨机和水库
公开(公告)号：USD739076S1
公开(公告)日：2015-09-15
申请号：US29492214
申请日：2014-05-29
申请人： Matthew Grumbacher , David Markle
设计人： Matthew Grumbacher , David Markle

15. 外观设计

USD739075S1 Combined grinder and reservoir 有权
公开(公告)号：USD739075S1
公开(公告)日：2015-09-15
申请号：US29492211
申请日：2014-05-29
申请人： Matthew Grumbacher , David Markle
设计人： Matthew Grumbacher , David Markle

16. 发明申请

US20070068908A1 Methods and apparatus for irradiating a substrate to avoid substrate edge damage 有权
公开(公告)号：US20070068908A1
公开(公告)日：2007-03-29
申请号：US11236271
申请日：2005-09-26
申请人： Boris Grek , David Markle
发明人： Boris Grek , David Markle
IPC分类号： B23K26/08
CPC分类号： B23K26/0853 , B23K26/0006 , B23K26/352 , B23K26/40 , B23K26/703 , B23K2101/40 , B23K2103/50 , B23K2103/56
摘要： Methods and apparatus (100) for scanning a surface (12) of a substrate (10) with an obliquely incident radiation beam (20) over a select scan path (210) to avoid damage (30) to the curved edge (14) of the substrate. The methods and apparatus allow for the substrate edge to be irradiated with the full intensity of the radiation beam, provided that the edge crossing positions avoid a region where the polar angle is less than a scan path critical (SPC) polar angle (φC). At the SPC polar angle the temperatures produced by scanning the beam on the substrate surface and on the edge are the same. The scan path is arranged so the edge crossing positions are located where the polar angle corresponding to each meets or exceeds the SPC polar angle. Ensuring that the substrate edge temperature (TE) remains at or below the substrate surface temperature (TS). The invention has particular utility in laser thermal processing (LTP) of circular silicon substrates when forming transistor-based integrated circuits.

17. 发明申请

US20060163223A1 Methods and apparatus for truncating an image formed with coherent radiation 有权
标题翻译：用于截断用相干辐射形成的图像的方法和装置
公开(公告)号：US20060163223A1
公开(公告)日：2006-07-27
申请号：US11040739
申请日：2005-01-21
申请人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David Markle , Casey Donaher
发明人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David Markle , Casey Donaher
IPC分类号： B23K26/06
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/082 , B23K2101/40
摘要： Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
摘要翻译：用于截断用相干辐射形成的图像的方法和装置。光学继电器系统适于在图像平面处形成线图像。图像被与图像平面共轭的孔径平面处或附近的可变孔截断，以阻止逐渐增加用于形成线图像的入射相干辐射束的部分。在瞳孔平面中设置有在中心具有最大透射或反射的变迹瞳孔滤光器以及与线图像的长方向相对应的方向变化的透射或反射图。该变迹被设计成防止在截断图像中形成热点并确保相对光滑，平坦的强度分布。因此，在扫描期间扫描的相干线图像的一端或另一端可以在扫描期间被截断，而基本上不改变延伸到产品区域中的图像强度。

18. 发明授权

US09737092B2 Herbal grinder and reservoir 有权
公开(公告)号：US09737092B2
公开(公告)日：2017-08-22
申请号：US14290577
申请日：2014-05-29
申请人： Matthew Grumbacher , David Markle
发明人： Matthew Grumbacher , David Markle
IPC分类号： A47J42/40 , A24C5/40 , B02C18/08 , A47J42/24
CPC分类号： A24C5/40 , A47J42/24 , B02C18/08
摘要： An herbal grinder and reservoir having a conical shape wherein said herbal grinder comprises a top grinding cap and a grinding section comprising a plurality of grinding knives; and wherein said grinding section comprises a plate having a drop through pattern for allowing ground material to exit the grinding section and fall into the reservoir.

19. 外观设计

USD762090S1 Grinder top 有权
标题翻译：研磨机顶部
公开(公告)号：USD762090S1
公开(公告)日：2016-07-26
申请号：US29492222
申请日：2014-05-29
申请人： Matthew Grumbacher , David Markle
设计人： Matthew Grumbacher , David Markle

20. 发明申请

US20060255017A1 Methods and apparatus for remote temperature measurement of a specular surface 有权
标题翻译：用于远程测量镜面的方法和装置
公开(公告)号：US20060255017A1
公开(公告)日：2006-11-16
申请号：US11129971
申请日：2005-05-16
申请人： David Markle
发明人： David Markle
IPC分类号： B23K26/04
CPC分类号： G01K11/125 , G01J5/0003 , G01J5/58 , G01J2005/0077
摘要： Methods and apparatus for remotely measuring the temperature of a specular surface are disclosed. The method includes taking two different measurements of P-polarized radiation emitted from the surface at or near the Brewster angle associated with the surface. The first measurement (SA) collects and detects a first amount of radiation emitted directly from a surface portion using a collection optical system. The second measurement (SB) includes the first amount of radiation and adds a quantity of radiation collected at or near the Brewster angle and reflected from the surface. This is accomplished with a retro optical system with a round-trip transmission t2 that retro-reflects a quantity of radiation received from the surface portion back to the same surface portion where it is reflected and combined with the first amount of radiation collected by the collection optical system. Measurements SA and SB and the transmission, t2, are used to determine the surface emissivity (ξ). A calibration curve is then used that relates the ratio of the first measurement SA to the surface emissivity ξ, (SA/ξ), to surface temperature. The calibration curve is then used to determine the surface temperature from the SA/ξ value.
摘要翻译：公开了用于远程测量镜面温度的方法和装置。该方法包括在与表面相关联的布鲁斯特角处或附近从表面发射的P偏振辐射的两种不同测量。第一测量（SA）使用收集光学系统收集并检测从表面部分直接发射的第一量的辐射。第二测量（SB）包括第一辐射量并且增加在布鲁斯特角度处或附近收集的辐射量并从表面反射。这是通过具有往返传输t 2的复古光学系统实现的，其将从表面部分接收的辐射量反射回到与其反射并与其组合的相同表面部分由收集光学系统收集的第一量的辐射。测量SA和SB以及透射率t 2 2用于确定表面发射率（xi）。然后使用将第一测量SA与表面发射率xi（SA / xi）的比率与表面温度相关联的校准曲线。然后使用校准曲线从SA / xi值确定表面温度。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式