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11. 发明授权

US06757621B2 Process management system 失效
标题翻译：流程管理系统
公开(公告)号：US06757621B2
公开(公告)日：2004-06-29
申请号：US10342871
申请日：2003-01-16
申请人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
发明人： Fumio Mizuno , Seiji Isogai , Kenji Watanabe , Yasuhiro Yoshitake , Terushige Asakawa , Yuichi Ohyama , Hidekuni Sugimoto , Seiji Ishikawa , Masataka Shiba , Jun Nakazato , Makoto Ariga , Tetsuji Yokouchi , Toshimitsu Hamada , Ikuo Suzuki , Masami Ikota , Mari Nozoe , Isao Miyazaki , Yoshiharu Shigyo
IPC分类号： H01L2166
CPC分类号： H01L22/20 , G01N21/9501 , G01R31/2894 , G01R33/06 , H01L2223/54466 , H01L2924/0002 , H01L2924/00
摘要： A process management system in accordance with the present invention includes inspection apparatuses for inspecting defects on a wafer, the inspection apparatuses being connected through a communication network, inspection information and image information obtained from these inspection apparatuses being collected to construct a data base and an image file, therein definition of defects is given by combinations of elements which characterize the defect based on the inspection information and the image information obtained from the inspection apparatuses. By giving definition of the defect, characteristics of the defect can be subdivided and known. Therefore, the cause of a defect can be studied.
摘要翻译：根据本发明的处理管理系统包括用于检查晶片上的缺陷的检查装置，通过通信网络连接的检查装置，从这些检查装置获得的检查信息和图像信息被收集以构建数据库和图像文件，其中缺陷的定义通过基于检查信息和从检查装置获得的图像信息来表征缺陷的元件的组合来给出。通过给出缺陷的定义，可以细分和知道缺陷的特征。因此，可以研究缺陷的原因。

12. 发明授权

US06628817B2 Inspection data analyzing system 失效
公开(公告)号：US06628817B2
公开(公告)日：2003-09-30
申请号：US09752674
申请日：2001-01-03
申请人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
发明人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
IPC分类号： G06K900
CPC分类号： G01N21/88 , G01N21/956 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

13. 发明授权

US06468639B2 Single-application polyimidosiloxane-based coating material and cured film 有权
标题翻译：单应用聚酰亚胺硅氧烷基涂料和固化膜
公开(公告)号：US06468639B2
公开(公告)日：2002-10-22
申请号：US09295883
申请日：1999-04-21
申请人： Seiji Ishikawa , Shigeru Yamamoto , Yoshiaki Watanabe
发明人： Seiji Ishikawa , Shigeru Yamamoto , Yoshiaki Watanabe
IPC分类号： B32B300
CPC分类号： H01L23/3185 , C09D179/08 , C09D183/10 , H01L23/293 , H01L2224/50 , Y10T428/24917 , Y10T428/251 , Y10T428/256 , Y10T428/258 , Y10T428/259 , Y10T428/31663 , Y10T428/31681 , Y10T428/31721 , C08L63/00 , C08L2666/14 , C08L2666/54
摘要： A single-application polyimidosiloxane coating material comprising a uniformly mixed solution composition of a polyimidosiloxane with an epoxy resin-reactive group in the molecule, an epoxy resin and a fine inorganic filler in a solvent. The coating material has satisfactory storage stability and printing properties, and its cured films also have satisfactory properties and allow single-application printing.
摘要翻译：在分子中包含聚酰亚胺硅氧烷与环氧树脂反应性基团的均匀混合溶液组合物，溶剂中的环氧树脂和细无机填料的单应用聚亚硅氧烷涂料。涂料具有令人满意的储存稳定性和印刷性能，其固化膜也具有令人满意的性能，并允许单次印刷。

14. 发明授权

US06330352B1 Inspection data analyzing system 失效
公开(公告)号：US06330352B1
公开(公告)日：2001-12-11
申请号：US09525527
申请日：2000-03-15
申请人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
发明人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
IPC分类号： G06K900
CPC分类号： G01N21/88 , G01N21/956 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.

15. 发明授权

US06185322B2 Inspection system and method using separate processors for processing different information regarding a workpiece such as an electronic device 失效
标题翻译：检查系统和方法使用单独的处理器来处理关于诸如电子设备的工件的不同信息
公开(公告)号：US06185322B2
公开(公告)日：2001-02-06
申请号：US08958095
申请日：1997-10-27
申请人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
发明人： Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
IPC分类号： G06K900
CPC分类号： G01N21/88 , G01N21/956 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
摘要翻译：本发明分别提供用于探测器和自动粒子检测机的数据分析台。并且，在数据分析站中，以产品为基础描述芯片的配置的坐标与描述缺陷的位置的坐标相同。此外，该站提供确定每个缺陷属于哪个芯片的功能。这些数据分析站通过通信线连接。本发明能够基于芯片分析数据，从而能够掌握每个芯片上的缺陷引起的芯片与芯片的产品特性之间的关系。

16. 发明授权

US5885138A Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device 失效
公开(公告)号：US5885138A
公开(公告)日：1999-03-23
申请号：US767060
申请日：1996-12-16
申请人： Katsuya Okumura , Riichirou Aoki , Hiromi Yajima , Seiji Ishikawa , Manabu Tsujimura
发明人： Katsuya Okumura , Riichirou Aoki , Hiromi Yajima , Seiji Ishikawa , Manabu Tsujimura
IPC分类号： B08B1/04 , B24B27/00 , B24B37/04 , B24B51/00 , B24B55/12 , F24F3/16 , H01L21/00 , H01L21/677 , H03M13/39 , H04L1/00 , H04N5/44 , H04N5/455 , B24B5/00 , B24B7/00 , B24B9/00 , B24B29/00
CPC分类号： H01L21/67161 , B08B1/04 , B24B27/0023 , B24B37/04 , B24B37/345 , B24B51/00 , B24B55/12 , F24F3/161 , H01L21/67028 , H01L21/67046 , H01L21/67057 , H01L21/67167 , H01L21/67219 , H01L21/67745 , H01L21/67778 , H03M13/39 , H04N5/455 , H04N5/4401
摘要： A polishing apparatus includes an arrangement of a plurality of units to deal with various operations and a robot having at least one arm. The plurality of units are disposed around the robot and include a loading unit for receiving thereon a, e.g. dry, workpiece to be polished, a polishing system including at least one polishing unit for polishing the workpiece, a washing system and a drying system at least one washing unit for washing and drying the polished workpiece, and an unloading unit for receiving thereon a resultant clean and dry polished workpiece.

17. 发明授权

US5643986A Polyimidosiloxane compositions 失效
标题翻译：聚亚硅氧烷组合物
公开(公告)号：US5643986A
公开(公告)日：1997-07-01
申请号：US615828
申请日：1996-03-14
申请人： Seiji Ishikawa , Hiroshi Yasuno , Masayuki Nakatani , Hiroyuki Fukuda , Shigeru Yamamoto
发明人： Seiji Ishikawa , Hiroshi Yasuno , Masayuki Nakatani , Hiroyuki Fukuda , Shigeru Yamamoto
IPC分类号： C08K3/30 , C08K3/34 , C08L83/10 , C09D183/10 , C08K5/06
CPC分类号： C08K3/34 , C08K3/30 , C08L83/10 , C09D183/10
摘要： A composition containing 100 parts by weight of a soluble polyimidosiloxane obtained by polymerization and imidation of an aromatic tetracarboxylic acid component and a component comprising a diaminopolysiloxane, an aromatic diamine with a hydroxyl group and optionally another aromatic diamine, 1 to 50 parts by weight of an epoxy resin, and optionally, also 2 to 150 parts by weight of an inorganic filler such as mica, silica or barium sulfate, and an organic solvent. The composition is homogeneously soluble in organic solvents, and when formed into a protective film on a flexible wiring board it has high heat resistance, flexing resistance, adhesion and chemical resistance (against soldering flux and tin plating solutions).
摘要翻译：含有100重量份通过芳族四羧酸组分的聚合和酰亚胺获得的可溶性聚亚酰基硅氧烷和包含二氨基聚硅氧烷，具有羟基的芳族二胺和任选的另外的芳族二胺的组分的组合物，1至50重量份的环氧树脂，任选地，还可以使用2〜150重量份的无机填料如云母，二氧化硅或硫酸钡和有机溶剂。该组合物均匀溶于有机溶剂中，并且当在柔性布线板上形成保护膜时，其耐热性，抗弯曲性，粘附性和耐化学性（耐焊剂和镀锡溶液）具有高的耐热性。

18. 发明授权

US5497267A Video microscope 失效
标题翻译：视频显微镜
公开(公告)号：US5497267A
公开(公告)日：1996-03-05
申请号：US64444
申请日：1993-05-21
申请人： Seiji Ishikawa , Hajime Murakami
发明人： Seiji Ishikawa , Hajime Murakami
IPC分类号： G02B21/02 , G02B21/36 , G02B21/06
CPC分类号： G02B21/362 , G02B21/025
摘要： A video microscope capable of optionally and continuously varying image pickup magnifying power of an observed object over a wide range without requiring replacement of a lens. A lens barrel in which a lens system is arranged is slidably positionally adjusted relative to an observation stand in which an illuminating light source is arranged by means of an objective distance adjusting mechanism, to thereby adjust a relative distance between the observed object and an objective side of the lens system. Also, a cylinder of a video signal converting section in which a two-dimensional CCD element is provided is slidably positionally adjusted relative to the lens barrel by means of an enlargement (reduction) magnification and focus adjusting mechanism, resulting in desired magnifying power of the observed object being readily obtained.
摘要翻译：能够在不需要更换镜头的情况下，可以在宽范围内任意地且连续地改变被观察物体的摄像放大倍率的视频显微镜。相对于通过物镜距离调整机构配置有照明光源的观察台，可以将配置有透镜系统的透镜镜筒相对于被观察物体和物镜侧之间的相对距离的镜头系统。此外，通过放大（缩小）倍率和焦点调节机构，相对于镜筒相对于其设置有二维CCD元件的视频信号转换部的圆柱体相对于镜筒滑动地位置调节，从而产生期望的放大倍率观察到的物体容易获得。

19. 发明授权

US5416511A Observation apparatus for selectively providing color signals 失效
标题翻译：用于选择性地提供彩色信号的观察装置
公开(公告)号：US5416511A
公开(公告)日：1995-05-16
申请号：US66415
申请日：1993-05-25
申请人： Seiji Ishikawa , Masanori Hirai , Hajime Murakami , Masao Yamamoto
发明人： Seiji Ishikawa , Masanori Hirai , Hajime Murakami , Masao Yamamoto
IPC分类号： H04N5/225 , H04N9/04 , H04N7/18
CPC分类号： H04N5/2256 , H04N9/045
摘要： The present invention is intended to enable the change of the operating mode of an observation apparatus of a video system between a fluorescent observation mode and an ordinary observation mode and to enable the observation apparatus to reproduce a clear image for observation. The observation apparatus in accordance with the present invention uses a principle that an image pickup system provides three color signals, namely, R-, G- and B-signals. The image pickup system of the observation apparatus is provided with an illuminating light selecting means for selectively using light in a specified wavelength region as illuminating light, and a color signal selecting means for selectively providing the color signals. When the specified wavelength region is the visible region, at least the color signals in a wavelength region including the specified wavelength region including the illuminating light are cut off. When the specified wavelength region is an ultraviolet region, the color signals in a wavelength region including the main wavelength region including fluorescent light emitted by excitation by the illuminating light in the ultraviolet region are provided selectively.
摘要翻译：本发明旨在使得能够在荧光观察模式和普通观察模式之间改变视频系统的观察装置的操作模式，并且使得观察装置能够再现清晰的观察图像。根据本发明的观察装置使用图像拾取系统提供三种颜色信号即R，G和B信号的原理。观察装置的图像拾取系统设置有用于选择性地使用指定波长区域中的光作为照明光的照明光选择装置，以及用于选择性地提供彩色信号的彩色信号选择装置。当指定波长区域是可视区域时，至少包括包括照明光的指定波长区域的波长区域中的彩色信号被切断。当指定的波长区域是紫外区域时，选择性地提供包括由包括通过紫外线区域中的照明光的激发而发射的荧光的主波长区域的波长区域中的颜色信号。

20. 发明授权

US5402441A Signal receiver for global positioning system 失效
标题翻译：用于全球定位系统的信号接收器
公开(公告)号：US5402441A
公开(公告)日：1995-03-28
申请号：US108079
申请日：1993-08-17
申请人： Koichi Washizu , Toshihiro Kawazoe , Yorihisa Suwa , Yukio Yokoi , Chogo Sekine , Tomio Yasuda , Toshimitsu Oka , Yuichi Murakami , Tomohiro Yamamoto , Seiji Ishikawa
发明人： Koichi Washizu , Toshihiro Kawazoe , Yorihisa Suwa , Yukio Yokoi , Chogo Sekine , Tomio Yasuda , Toshimitsu Oka , Yuichi Murakami , Tomohiro Yamamoto , Seiji Ishikawa
IPC分类号： G01S1/00 , G01S1/04 , G01S19/22 , G01S19/30 , G01S5/02
CPC分类号： G01S19/22
摘要： A GPS signal receiver has a PN code generator for producing a PN code identical to a PN code in a received GPS signal which is transmitted from a GPS satellite, the PN code produced by the PN code generator being controllable in phase, a PN code correlator for correlating the received GPS signal with the PN code produced by the PN code generator so as to code-strip the received GPS signal, a signal search unit for monitoring a correlated output signal from the PN code correlator and controlling the phase of the PN code produced by the PN code generator to search for a correlated output signal in excess of a predetermined value, a signal determining unit for determining the correlated output signal in excess of the predetermined value as being produced by a direct wave of the GPS signal, and a signal tracking unit for controlling the phase of the PN code produced by the PN code generator to track a peak of the correlated output signal that is determined as being produced by the direct wave of the GPS signal.
摘要翻译： GPS信号接收机具有用于产生与从GPS卫星发送的接收的GPS信号中的PN码相同的PN码的PN码发生器，由PN码发生器产生的PN码同相控制，PN码相关器用于将所接收的GPS信号与由PN码发生器产生的PN码相关联，以便对所接收的GPS信号进行编码;信号搜索单元，用于监视来自PN码相关器的相关输出信号并控制PN码的相位由PN码发生器产生的用于搜索超过预定值的相关输出信号的信号确定单元，用于确定由GPS信号的直接波产生的超过预定值的相关输出信号，以及信号跟踪单元，用于控制由PN码发生器产生的PN码的相位，以跟踪被确定为由直接w产生的相关输出信号的峰值 ave的GPS信号。

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