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11. 发明授权

US06838833B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US06838833B2
公开(公告)日：2005-01-04
申请号：US10670288
申请日：2003-09-26
申请人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
发明人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
IPC分类号： H01J37/32 , H01L21/00 , H01L21/683 , H01J7/24
CPC分类号： H01L21/67109 , H01J37/32724 , H01J2237/2001 , H01L21/6833
摘要： A plasma processing apparatus provided with a holding stage of a system in which a temperature of an electrode block is controlled so as to control the temperature of a semiconductor wafer. The electrode block is provided with at least first and second independent temperature controllers on inner and outer sides thereof, and a slit for suppressing heat transfer is provided in the electrode block between the first and second temperature controllers.
摘要翻译：一种等离子体处理装置，其具有控制电极块的温度以控制半导体晶片的温度的系统的保持台。电极块在其内侧和外侧设置有至少第一和第二独立温度控制器，并且在第一和第二温度控制器之间的电极块中设置用于抑制热传递的狭缝。

12. 发明授权

US06664738B2 Plasma processing apparatus 有权
公开(公告)号：US06664738B2
公开(公告)日：2003-12-16
申请号：US10083381
申请日：2002-02-27
申请人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
发明人： Masatsugu Arai , Ryujiro Udo , Naoyuki Tamura , Masanori Kadotani , Motohiko Yoshigai
IPC分类号： H01J724
CPC分类号： H01L21/67109 , H01J37/32724 , H01J2237/2001 , H01L21/6833
摘要： There is provided a plasmar processing apparatus capable of positively controlling the temperature distribution of a semiconductor wafer during etching processing in a clear state, wherein an electrode block is provided with independent slits as coolant flow paths on the inner and outer peripheries and, at the same time, between these slits is formed a slit for suppressing heat transfer between the inner and outer peripheries, and owing to this slit for suppressing heat transfer, a uniform temperature in the electrode block is suppressed and thus it is possible to obtain an arbitrary independent temperature in the plane of the electrode block and positive and clear control of temperature distribution patterns can be performed.

13. 发明授权

US5254053A Five-speed automatic transmission 失效
标题翻译：五速自动变速箱
公开(公告)号：US5254053A
公开(公告)日：1993-10-19
申请号：US964631
申请日：1992-10-23
申请人： Takao Taniguchi , Kazumasa Tsukamoto , Masahiro Hayabuchi , Masanori Kadotani , Masahiko Ando , Yasuo Hojo , Seitoku Kubo , Yutaka Taga , Hidehiro Oba
发明人： Takao Taniguchi , Kazumasa Tsukamoto , Masahiro Hayabuchi , Masanori Kadotani , Masahiko Ando , Yasuo Hojo , Seitoku Kubo , Yutaka Taga , Hidehiro Oba
IPC分类号： F16H3/62 , F16H3/44 , F16H3/66
CPC分类号： F16H3/66 , F16H2200/0047
摘要： A five-speed automatic transmission includes a main transmission and an over-drive transmission of a front disposition type. The main transmission includes three sets of planetary gears, a clutch for engaging and disengaging speed-change elements of the planetary gear sets, and a brake for fixing and releasing the speed change elements, and provides for four forward speed ranges and one reverse speed range. In the over-drive transmission of a front disposition type, a speed change element of an over-drive planetary gear set connected to an input element of the main transmission is adapted to be engaged, disengaged and fixed for achieving either a directly coupled stage or an over-drive stage. The over-drive transmission releases the direct coupling for reverse driving operation. One of the clutches of the main transmission for achieving the directly coupled stage and one of the brakes for achieving the low speed stage are engageable in the reverse driving operation.
摘要翻译：五速自动变速器包括主变速器和前部配置型的过驱动变速器。主变速器包括三组行星齿轮，用于接合和分离行星齿轮组的变速元件的离合器和用于固定和释放变速元件的制动器，并且提供四个前进速度范围和一个倒档速度范围。在前部配置型的过驱动传动中，连接到主变速器的输入元件的过驱动行星齿轮组的变速元件适于接合，分离和固定，以实现直接耦合的级或过驱动阶段。过驱动传动释放用于反向驱动操作的直接联接。用于实现直接耦合级的主变速器的离合器之一和用于实现低速级的制动器之一可接合于反向驱动操作。

14. 发明授权

US5954177A Oil seal for automatic transmission 失效
标题翻译：油封自动变速器
公开(公告)号：US5954177A
公开(公告)日：1999-09-21
申请号：US997397
申请日：1997-12-23
申请人： Fumitomo Yokoyama , Kazuhisa Ozaki , Masanori Kadotani , Mikio Iwase , Harumichi Tsuboi , Makoto Hijikata , Yasuo Hojo , Atsushi Tabata , Yasunori Nakawaki , Yasunari Nakamura , Nobuaki Takahashi , Hideki Miyata , Kagenori Fukumura , Koji Tsukamoto
发明人： Fumitomo Yokoyama , Kazuhisa Ozaki , Masanori Kadotani , Mikio Iwase , Harumichi Tsuboi , Makoto Hijikata , Yasuo Hojo , Atsushi Tabata , Yasunori Nakawaki , Yasunari Nakamura , Nobuaki Takahashi , Hideki Miyata , Kagenori Fukumura , Koji Tsukamoto
IPC分类号： F16H57/028 , F16H57/029 , F16H57/03 , F16H57/04 , F16H61/00 , F16H63/30 , F16D25/0638 , F16J15/16
CPC分类号： F16H57/0469 , F16H61/0009 , F16H63/3026
摘要： An oil seal member is compressed between a connecting pipe for supplying oil to an oil chamber of a hydraulic servo and the cylinder drum of the hydraulic servo. The cylinder drum has an interior oil chamber and turns through a predetermined angle upon operation of a frictional engagement element by the hydraulic servo. The end of the seal member pressed against the cylindrical drum surrounds an oil hole 73 formed in the cylindrical drum, and oil pressure is supplied to the oil chamber through an oil passage in which the seal member is mounted and through the oil hole. A recess is formed in the outer surface of the cylindrical drum around the oil hole and the end of the seal member is received in the recess. When the cylindrical member turns within the predetermined angular range, the end of the seal member is protected by the recess. As a result, the end of the seal member is not damaged and the integrity of the seal is protected.
摘要翻译：油密封构件在用于将油供给到液压伺服机构的油室的连接管与液压伺服的气缸滚筒之间被压缩。气缸滚筒具有内部油室，并且通过液压伺服器在摩擦接合元件操作时转过预定角度。按压在圆筒形滚筒上的密封件的端部包围形成在圆筒形滚筒中的油孔73，并且通过安装密封件的油通道和油孔将油压供给到油室。在圆筒形鼓的外表面上形成有一个凹槽，围绕着油孔，密封件的端部被容纳在凹槽中。当圆柱形构件在预定角度范围内转动时，密封构件的端部被凹部保护。结果，密封构件的端部不被损坏并且密封件的完整性受到保护。

15. 发明授权

US5579883A Automatic transmission 失效
标题翻译：自动变速器
公开(公告)号：US5579883A
公开(公告)日：1996-12-03
申请号：US437314
申请日：1995-05-09
申请人： Kazumasa Tsukamoto , Masahiro Hayabuchi , Masanori Kadotani , Satoru Kasuya
发明人： Kazumasa Tsukamoto , Masahiro Hayabuchi , Masanori Kadotani , Satoru Kasuya
IPC分类号： F16H3/44 , F16D25/0638 , F16D25/10 , F16H57/10 , F16H61/30 , F16H63/30
CPC分类号： F16D25/0638 , F16D25/10 , F16H63/3026 , F16H2200/0047 , F16H2200/2012
摘要： First and second hydraulic servo units operate respective frictional engagement elements in a transmission and each includes first and second cylinders, each having a side wall portion interposed between the two frictional engagement elements. The first cylinder has first outer and inner cylinder portions and the first hydraulic servo unit further includes a first piston having inner and outer cylindrical surfaces slidably supported by the first outer and first inner cylinder portions of the first cylinder for reciprocating axial motion into and out of engagement with one frictional engagement element. First return springs are arranged radially inward of the one frictional engagement element for returning the first piston. The second cylinder includes second outer and inner cylinder portions and the second hydraulic servo unit further includes a second piston having a larger diameter portion and a smaller diameter portion, slidably supported by the inner cylindrical surfaces of the second outer cylinder portion and the first inner cylinder portion, for reciprocating axial motion into and out of engagement with the second frictional engagement element. Second return springs are arranged around the inner circumference of the one frictional engagement element for returning the second piston.
摘要翻译：第一和第二液压伺服单元在变速器中操作相应的摩擦接合元件，并且每个包括第一和第二缸，每个具有插入在两个摩擦接合元件之间的侧壁部分。第一气缸具有第一外筒部和内筒部，第一液压伺服单元还包括第一活塞，其具有由第一气缸的第一外筒体部和第一内筒部可滑动地支撑的内筒体和外筒体，与一个摩擦接合元件接合。第一复位弹簧布置在一个摩擦接合元件的径向内侧，用于使第一活塞返回。第二气缸包括第二外筒部分和第二内筒部分，第二液压伺服单元还包括具有较大直径部分和较小直径部分的第二活塞，其可滑动地由第二外筒部分和第一内筒部分的内圆柱表面支撑部分，用于往复运动的轴向运动进入和离开与第二摩擦接合元件的接合。第二复位弹簧布置在一个摩擦接合元件的内圆周周围，用于使第二活塞返回。

16. 发明授权

US5267917A Rotary element engaging device for an automatic transmission 失效
标题翻译：用于自动变速器的旋转元件接合装置
公开(公告)号：US5267917A
公开(公告)日：1993-12-07
申请号：US964634
申请日：1992-10-23
申请人： Masanori Kadotani , Masahiro Haybuchi , Takashi Morimoto , Kazumasa Tsukamoto , Yasuo Hojo , Hidehiro Oba , Yutaka Taga
发明人： Masanori Kadotani , Masahiro Haybuchi , Takashi Morimoto , Kazumasa Tsukamoto , Yasuo Hojo , Hidehiro Oba , Yutaka Taga
IPC分类号： F16D41/00 , F16D55/40 , F16H3/66 , F16H57/08 , F16H63/30 , F16H57/10
CPC分类号： F16H57/08
摘要： A rotary element engaging device of an automatic transmission includes a stationary member, a planetary gear set having rotary elements, a frictionally engaging element interposed between the stationary member and one of the rotary elements, a one-way clutch interposed between the stationary member and the one rotary element, and an operating member for engaging and disengaging the frictionally engaging element. The rotary element is adapted to be selectively engaged with the stationary member through two paths formed of the frictionally engaging element and the one-way clutch. The one-way clutch is disposed between the frictionally engaging element and the operating member. The one-way clutch includes an inner race connected to the one rotary element and an outer race fixed to the stationary member. The operating member is adapted to act on the frictionally engaging element through the outer race.
摘要翻译：自动变速器的旋转元件接合装置包括固定构件，具有旋转元件的行星齿轮组，设置在静止构件和其中一个旋转元件之间的摩擦接合元件，插入在静止构件和静止构件之间的单向离合器一个旋转元件和用于接合和分离摩擦接合元件的操作构件。旋转元件适于通过由摩擦接合元件和单向离合器形成的两个路径选择性地与固定构件接合。单向离合器设置在摩擦接合元件和操作构件之间。单向离合器包括连接到一个旋转元件的内圈和固定到静止构件的外圈。操作构件适于通过外圈作用在摩擦接合元件上。

17. 发明授权

US08926790B2 Plasma processing apparatus 有权
标题翻译：等离子体处理装置
公开(公告)号：US08926790B2
公开(公告)日：2015-01-06
申请号：US11508187
申请日：2006-08-23
申请人： Tsutomu Tetsuka , Toshio Masuda , Naoshi Itabashi , Masanori Kadotani , Takashi Fujii
发明人： Tsutomu Tetsuka , Toshio Masuda , Naoshi Itabashi , Masanori Kadotani , Takashi Fujii
IPC分类号： H01J37/32 , C23C16/455 , C23C16/44 , C23C16/505
CPC分类号： H01J37/32082 , C23C16/4401 , C23C16/45565 , C23C16/505 , H01J37/3244 , H01J37/32477 , H01J37/32495 , H01J37/32504 , H01J37/32559
摘要： The invention provides a plasma processing apparatus aimed at suppressing the corrosion caused by reactive gas and heavy-metal contamination caused by plasma damage of components constituting the high-frequency electrode and gas supply unit. The plasma processing apparatus comprises a processing chamber 1 for subjecting a processing substrate 4 to plasma processing, gas supply means 17, 16 and 11 for feeding gas to the processing chamber 1, and an antenna electrode 10 for supplying high-frequency radiation for discharging the gas to generate plasma, wherein the gas supply means includes a gas shower plate 11 having gas discharge holes on the surface exposed to plasma, and a portion of or a whole surface of the conductor 10 exposed to gas constituting the antenna-electrode side of the gas supply means is subjected to ceramic spraying containing no heavy metal to form a protecting film 12.
摘要翻译：本发明提供一种等离子体处理装置，旨在抑制由构成高频电极和气体供应单元的部件的等离子体损伤引起的反应性气体和重金属污染引起的腐蚀。等离子体处理装置包括用于对处理基板4进行等离子体处理的处理室1，用于将气体供给到处理室1的气体供给装置17,16和11以及用于提供高频辐射的天线电极10 气体产生等离子体，其中气体供给装置包括在暴露于等离子体的表面上具有气体排放孔的气体喷淋板11和暴露于构成天线电极侧的气体的导体10的一部分或整个表面气体供给装置经受不含重金属的陶瓷喷涂以形成保护膜12。

18. 发明授权

US5591099A Shift mechanism for automatic transmission with lubricating means for one-way clutch 失效
标题翻译：用于单向离合器润滑装置的自动变速器换档机构
公开(公告)号：US5591099A
公开(公告)日：1997-01-07
申请号：US442419
申请日：1995-05-16
申请人： Kazumasa Tsukamoto , Masahiro Hayabuchi , Masanori Kadotani , Satoru Kasuya
发明人： Kazumasa Tsukamoto , Masahiro Hayabuchi , Masanori Kadotani , Satoru Kasuya
IPC分类号： F16D55/40 , F16H3/66 , F16H57/04 , F16H57/08 , F16H63/02 , F16H63/30 , F16H3/62
CPC分类号： F16H57/04 , F16H3/66 , F16H57/08 , F16H63/3026
摘要： A shift mechanism for an automatic transmission includes a frictional engagement element arranged between the case of the automatic transmission and one element of a planetary gear unit and a hydraulic servo unit for engaging the frictional engagement element. A one-way clutch is connected to that same one element of the planetary gear unit for selectively locking it to the case. The one-way clutch is axially spaced from the frictional engagement element with the hydraulic servo unit therebetween. Further, the one-way clutch has its outer race connected to the case and its inner race connected to the aforementioned element of the planetary gear unit through a connection member axially extending along the inner circumferential side of the hydraulic servo unit. The inner race is formed with a radial lubricating oil passage in fluid communication with an oil passage in a transmission shaft.
摘要翻译：用于自动变速器的变速机构包括设置在自动变速器的壳体和行星齿轮单元的一个元件之间的摩擦接合元件和用于接合摩擦接合元件的液压伺服单元。单向离合器连接到行星齿轮单元的同一个元件，用于选择性地将其锁定到壳体。单向离合器与摩擦接合元件轴向间隔开，其间具有液压伺服单元。此外，单向离合器的外圈与外壳连接，其内圈通过沿着液压伺服单元的内周侧轴向延伸的连接构件连接到行星齿轮单元的上述元件。内圈形成有与传动轴中的油路流体连通的径向润滑油通道。

19. 发明授权

US5158508A Resilient support for friction elements of a multi-disc clutch or brake of an automatic transmission 失效
标题翻译：自动变速器的多片离合器或制动器的摩擦元件的弹性支撑
公开(公告)号：US5158508A
公开(公告)日：1992-10-27
申请号：US717199
申请日：1991-06-18
申请人： Yoshikazu Sakaguchi , Takahiro Yasuda , Yasushi Ando , Masanori Kadotani
发明人： Yoshikazu Sakaguchi , Takahiro Yasuda , Yasushi Ando , Masanori Kadotani
IPC分类号： F16H61/28 , F16D13/52 , F16D65/12 , F16H57/027 , F16H57/028 , F16H57/10 , F16H63/30
CPC分类号： F16H57/027 , F16D13/52 , F16D65/12 , F16H57/10 , F16H2200/0043 , Y10T403/32852 , Y10T403/7061
摘要： An automatic transmission for a vehicle having a planetary gear mechanism, which is accommodated in an automatic transmission case, is provided with an accordion-like leaf spring disposed in a gap for allowing interior spaces of an automatic transmission case to communicate with each other, the gap being provided in the automatic transmission case between an outer peripheral surface of axially movable brake elements which are fixed against rotation on the one hand, and an inner peripheral surface of the automatic transmission case on the other. The accordion-like leaf spring is adapted to engage and bias a friction plate and has folded-back portions or pleats that lie generally parallel to the rotating shaft.
摘要翻译：具有容纳在自动变速箱中的行星齿轮机构的车辆用自动变速器设置有设置在间隙中的手风琴式片簧，以允许自动变速箱的内部空间彼此连通，在自动变速器壳体中，一方面固定在一侧的旋转固定的轴向可动制动元件的外周面与另一方的自动变速箱的内周面之间设有间隙。类风琴式弹簧适于接合和偏置摩擦片，并且具有大致平行于旋转轴的折叠部分或褶皱。

20. 发明授权

US4875665A Accumulator 失效
标题翻译：累加器
公开(公告)号：US4875665A
公开(公告)日：1989-10-24
申请号：US196417
申请日：1988-05-20
申请人： Eiji Kato , Masanori Kadotani , Yoshikazu Sakaguchi , Seitoku Kubo , Kunihiro Iwatsuki , Hiroji Taniguchi , Yoshihara Harada
发明人： Eiji Kato , Masanori Kadotani , Yoshikazu Sakaguchi , Seitoku Kubo , Kunihiro Iwatsuki , Hiroji Taniguchi , Yoshihara Harada
IPC分类号： F15B1/02 , F15B1/04 , F15B1/24 , F16H61/06
CPC分类号： F16H61/067 , F15B1/04 , F15B2201/21 , F15B2201/312 , F15B2201/413
摘要： In an accumulator including a piston which slides freely in a cylinder and a spring which presses the piston, a hole of the piston end where, at the bottom, a large diameter section is made, and small diameter section whose diameter is smaller than that of the large diameter section is located at another side of the large diameter section is located at another side of the large diameter section against the bottom of the hole is provided, and the spring assembly having the retaining member and the coil spring whose one end is fixed to the retaining member and another end is free is provided, and the snap ring is provided to hold the retaining member between the bottom of the hole and the snap ring which is installed in the large diameter section with radial expansion force, so that the spring assembly is installed in the hole of the piston.
摘要翻译：在包括在气缸中自由滑动的活塞和按压活塞的弹簧的蓄能器中，在底部形成有大直径部的活塞端的孔和直径小于所述大直径部分位于所述大直径部分的位于所述大直径部分相对于所述孔底部的另一侧的另一侧，并且所述弹簧组件具有所述保持部件和所述螺旋弹簧，所述弹簧组件的一端固定并且另外一端设有自由，并且卡环设置成将保持构件保持在孔的底部和安装在大直径部分中的卡环之间，具有径向膨胀力，使得弹簧组件安装在活塞的孔中。

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