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11. 发明申请

US20090122429A1 Self-correcting optical elements for high-thermal-load optical systems 有权
标题翻译：用于高热负荷光学系统的自校正光学元件
公开(公告)号：US20090122429A1
公开(公告)日：2009-05-14
申请号：US11983615
申请日：2007-11-09
申请人： Douglas C. Watson , Alton H. Phillips
发明人： Douglas C. Watson , Alton H. Phillips
IPC分类号： G02B7/185
CPC分类号： G02B7/028 , G02B7/008 , G02B7/181
摘要： Mirrors and other optical elements are disclosed that include a body defining an optical surface (typically a reflective surface) and an opposing second surface. The body has a coefficient of thermal expansion (CTE). The optical element includes a correcting portion (e.g., a layer) attached to the second surface and having a CTE that, during heating of the optical element, imparts a bending moment to the body that at least partially offsets a change in curvature of the optical surface caused by heating. The body can be internally cooled. The body and correcting portion desirably are made of respective thermally conductive materials that can vary only slightly in CTE. The body desirably has a lower CTE than the correcting portion, and the correcting portion can be tuned according a variable property of the body and/or reflective surface. The body and correcting portion desirably function cooperatively in a thermally bimetallic-like manner.
摘要翻译：公开了镜子和其它光学元件，其包括限定光学表面（通常为反射表面）和相对的第二表面的主体。身体有一个热膨胀系数（CTE）。光学元件包括附接到第二表面并具有CTE的校正部分（例如，层），该CTE在光学元件的加热期间向本体施加弯曲力矩，该弯曲力矩至少部分地抵消光学元件的曲率变化加热引起的表面。身体可以内部冷却。主体和校正部分期望地由可在CTE中稍微变化的相应导热材料制成。身体期望地具有比校正部分更低的CTE，并且校正部分可以根据身体和/或反射表面的可变特性进行调节。身体和校正部分期望地以热双金属样的方式协同地起作用。

12. 发明授权

US06880942B2 Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system 失效
标题翻译：具有离散致动器的自适应光学器件用于可变形反射镜系统的连续变形
公开(公告)号：US06880942B2
公开(公告)日：2005-04-19
申请号：US10460644
申请日：2003-06-13
申请人： Andrew J. Hazelton , W. Thomas Novak , Alton H. Phillips , Douglas C. Watson
发明人： Andrew J. Hazelton , W. Thomas Novak , Alton H. Phillips , Douglas C. Watson
IPC分类号： G02B26/08 , G03F7/20 , G02B5/08
CPC分类号： G03F7/70266 , G02B26/0825
摘要： Adaptive optical elements for use in high precision lithography exposure are provided with an array of discrete actuators to provide highly stable and repeatable correction of the shape of an optical element to an accuracy of a small fraction of a very short wavelength of light in the EUV range of 1 to 50 nanometers, responsive to a metrology source and sensor arrangement. The actuators are matched to the deformation characteristics of the adaptive optical elements. Preferably, the actuators provide both positive and negative force for outward and/or inward deflection continuously over the surface of the mirror. The surface of the optical element may thus be accurately, controllably and repeatably deformed to within an allowable deformation limit to optimize optical performance of an optical system for high precision lithography exposure.
摘要翻译：用于高精度光刻曝光的自适应光学元件设置有离散致动器的阵列，以提供高度稳定且可重复的光学元件形状的校正，使其在EUV范围内的非常短波长的光的一小部分的精度 1至50纳米，响应于测量源和传感器布置。致动器与自适应光学元件的变形特性相匹配。优选地，致动器在反射镜的表面上连续地向外和/或向内偏转提供正的和负的力。因此，光学元件的表面因此可以精确地，可控地和可重复地变形到允许的变形极限内，以优化用于高精度光刻曝光的光学系统的光学性能。

13. 发明授权

US08425060B2 Self-correcting optical elements for high-thermal-load optical systems 有权
公开(公告)号：US08425060B2
公开(公告)日：2013-04-23
申请号：US11983615
申请日：2007-11-09
申请人： Douglas C. Watson , Alton H. Phillips
发明人： Douglas C. Watson , Alton H. Phillips
IPC分类号： G02B5/08
CPC分类号： G02B7/028 , G02B7/008 , G02B7/181
摘要： Mirrors and other optical elements are disclosed that include a body defining an optical surface (typically a reflective surface) and an opposing second surface. The body has a coefficient of thermal expansion (CTE). The optical element includes a correcting portion (e.g., a layer) attached to the second surface and having a CTE that, during heating of the optical element, imparts a bending moment to the body that at least partially offsets a change in curvature of the optical surface caused by heating. The body can be internally cooled. The body and correcting portion desirably are made of respective thermally conductive materials that can vary only slightly in CTE. The body desirably has a lower CTE than the correcting portion, and the correcting portion can be tuned according a variable property of the body and/or reflective surface. The body and correcting portion desirably function cooperatively in a thermally bimetallic-like manner.

14. 发明授权

US07591561B2 Liquid cooled mirror for use in extreme ultraviolet lithography 有权
标题翻译：用于极紫外光刻的液体冷却镜
公开(公告)号：US07591561B2
公开(公告)日：2009-09-22
申请号：US11382342
申请日：2006-05-09
申请人： Alton H. Phillips , Derek Coon , Douglas C. Watson
发明人： Alton H. Phillips , Derek Coon , Douglas C. Watson
IPC分类号： G02B5/08
CPC分类号： G02B5/10 , G02B7/1815 , G03F7/70783 , G03F7/70891 , G03F7/70983 , G21K1/06 , G21K2201/065
摘要： Methods and apparatus for internally or directly cooling a mirror using a fluid with laminar flow properties are disclosed. According to one aspect of the present invention, an internally cooled mirror includes an optical surface that absorbs light, and at least one microchannel formed beneath the optical surface. The mirror also includes a port that supplied a fluid to the microchannel. The fluid is subjected to a laminar flow and absorbs heat associated with the absorbed light.
摘要翻译：公开了使用具有层流性质的流体内部或直接冷却反射镜的方法和装置。根据本发明的一个方面，内部冷却镜包括吸收光的光学表面和形成在光学表面下方的至少一个微通道。镜子还包括向微通道供应流体的端口。流体经受层流并吸收与吸收的光相关的热量。

15. 发明申请

US20090033907A1 DEVICES AND METHODS FOR DECREASING RESIDUAL CHUCKING FORCES 审中-公开
标题翻译：减少残肢的装置和方法
公开(公告)号：US20090033907A1
公开(公告)日：2009-02-05
申请号：US12168726
申请日：2008-07-07
申请人： Douglas C. Watson , Christopher S. Margeson , Alton H. Phillips , Hiromitsu Yoshimoto , Noriya Kato
发明人： Douglas C. Watson , Christopher S. Margeson , Alton H. Phillips , Hiromitsu Yoshimoto , Noriya Kato
IPC分类号： G03B27/62
CPC分类号： G03B27/62 , G03F7/707
摘要： Devices and methods are disclosed for holding a reticle or analogous object, particularly a planar object. An exemplary reticle-holding device includes a reticle chuck having a reticle-holding surface on which a reticle is placed to hold the reticle. The device includes at least one ultrasonic transducer (as an exemplary vibration-inducing device) sonically coupled to the reticle to excite, whenever the ultrasonic transducer is being energized, a vibrational mode in the reticle or reticle chuck, or both. The vibration mode is sufficient to reduce an adhesion force holding the reticle to the reticle-holding surface. Sonic coupling can be by direct contact with the transducer or across a gap.
摘要翻译：公开了用于保持掩模版或类似物体，特别是平面物体的装置和方法。示例性的掩模版保持装置包括具有掩模版保持表面的掩模版卡盘，在其上放置掩模版以保持掩模版。每当超声波换能器通电时，该装置包括至少一个超声波换能器（作为示例性的振动诱导装置），其超声波耦合到光罩以激发，在标线片或光罩卡盘或两者中均振动模式。振动模式足以减少将掩模版保持在掩模版保持表面上的粘附力。声波耦合可以通过与换能器或间隙直接接触。

16. 发明申请

US20070285632A1 EUVL reticle stage and reticle protection system and method 审中-公开
标题翻译： EUVL标线片和掩模版保护系统及方法
公开(公告)号：US20070285632A1
公开(公告)日：2007-12-13
申请号：US11450766
申请日：2006-06-08
申请人： Alton H. Phillips , Douglas C. Watson
发明人： Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/52
CPC分类号： G03B27/42 , G03F7/70916
摘要： Apparatuses for and methods of maximizing particle protection while enabling temporary concurrent illumination of a reticle with exposure radiation through an aperture and auto focus beams or while mounting a reticle to or removing a reticle from a reticle stage are disclosed.
摘要翻译：公开了一种使粒子保护最大化的装置，同时使通过孔径和自动聚焦光束的曝光辐射临时同时照射光罩，或者同时将掩模版安装在标线片平台上或从掩模工艺台移除掩模版。

17. 发明授权

US06922293B2 Kinematic optical mounting assembly with flexures 有权
标题翻译：运动光学安装组件带弯曲
公开(公告)号：US06922293B2
公开(公告)日：2005-07-26
申请号：US10229051
申请日：2002-08-28
申请人： Douglas C. Watson , Alton H. Phillips , Masato Hatasawa
发明人： Douglas C. Watson , Alton H. Phillips , Masato Hatasawa
IPC分类号： G02B7/02
CPC分类号： G02B7/023
摘要： A kinematic optical mounting assembly secures an optical element to a base. A plurality of first bracket assemblies and second bracket assemblies are secured to the base and engage the optical element. Each first bracket assembly constrains the optical element from movement relative to the base in a direction substantially parallel to an axis of the base. Each second bracket assembly constrains the optical element from movement relative to the base in a direction substantially perpendicular to the axis of the base and substantially tangential to a periphery of the base. Six independent bracket assemblies constrain the optical element in six degrees of freedom to provide kinematic constraint without bending moments.
摘要翻译：运动学光学安装组件将光学元件固定到基座。多个第一支架组件和第二支架组件固定到基座并接合光学元件。每个第一支架组件限制光学元件在基本上平行于基座的轴线的方向上相对于基座移动。每个第二支架组件约束光学元件在基本上垂直于基座的轴线的方向上相对于基座移动，并且基本上与基座的周边相切。六个独立的支架组件以六个自由度约束光学元件以提供运动约束而没有弯矩。

18. 发明授权

US08767174B2 Temperature-controlled holding devices for planar articles 有权
标题翻译：用于平面物品的温度控制保持装置
公开(公告)号：US08767174B2
公开(公告)日：2014-07-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/42
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

19. 发明申请

US20140176931A1 INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS 审中-公开
标题翻译：可移动光学元件的间歇温度控制
公开(公告)号：US20140176931A1
公开(公告)日：2014-06-26
申请号：US14237821
申请日：2012-08-12
申请人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
发明人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
IPC分类号： G02B26/08 , G03F7/20
CPC分类号： G02B26/0816 , G03F7/70075 , G03F7/702 , G03F7/70825 , G03F7/70891 , G03F7/7095
摘要： An optical system including an optical element, a positioning mechanism configured to position the optical element into an operational position, and a temperature control mechanism configured to intermittently control the temperature of the optical element between operations. By alternatively positioning the optical element between an operational position and a position in thermal contact with the temperature control mechanism, the two mechanisms for positioning and controlling the temperature of the optical element are de-coupled from one another. As a result, the mechanism for each may be optimized In non-exclusive embodiments, the temperature control mechanism may be used to control the temperature of an individual optical element or a plurality of optical elements, such as for example, a fly's eye mirror used in an illumination unit of an EUV lithography tool.
摘要翻译：一种光学系统，包括光学元件，配置成将光学元件定位在操作位置的定位机构，以及配置为在操作之间间歇地控制光学元件的温度的温度控制机构。通过可选地将光学元件定位在与温度控制机构热接触的操作位置和位置之间，用于定位和控制光学元件的温度的两个机构彼此脱耦合。结果，可以优化每个的机构在非排他性的实施例中，温度控制机构可用于控制单个光学元件或多个光学元件的温度，例如使用的飞眼镜在EUV光刻工具的照明单元中。

20. 发明申请

US20110211178A1 TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES 有权
标题翻译：用于平面文章的温度控制保持装置
公开(公告)号：US20110211178A1
公开(公告)日：2011-09-01
申请号：US13026129
申请日：2011-02-11
申请人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
发明人： Michael R. Sogard , Alton H. Phillips , Douglas C. Watson
IPC分类号： G03B27/52
CPC分类号： H01L21/67109 , G03F7/70716 , G03F7/70875
摘要： An exemplary apparatus includes a controllably movable body, a holding device, and a coolant circulation device. The body comprises a wall including a planar contact surface that receives the reverse surface of the article. The wall co-extends with at least a heat-receiving area of the utility surface whenever the article is being held by the body. The wall also includes a second surface separated from but proximal to the contact surface, and is thermally conductive from the contact surface to the second surface. The holding device holds the article to the contact surface with the reverse surface contacting the contact surface. The coolant circulation device delivers flow of a coolant fluid to the second surface to urge conduction of heat from the contact surface to the second surface. The holding device and coolant-circulation device operate in concert to actively control shape of the article being held by the apparatus.
摘要翻译：示例性装置包括可控制的移动体，保持装置和冷却剂循环装置。该主体包括一个壁，该壁包括接纳制品的相反表面的平面接触表面。每当物品被身体保持时，墙壁至少与实用表面的受热区域共同延伸。该壁还包括从接触表面分离但接近接触表面的第二表面，并且从接触表面到第二表面是导热的。保持装置将物品保持在与接触表面接触的反面的接触表面上。冷却剂循环装置将冷却剂流体的流动传递到第二表面以促使热量从接触表面传导到第二表面。保持装置和冷却剂循环装置协同工作以主动地控制由装置保持的物品的形状。

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