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    • 5. 发明授权
    • Exposure apparatus and device manufacturing method
    • 曝光装置和装置制造方法
    • US08253928B2
    • 2012-08-28
    • US12549194
    • 2009-08-27
    • Yoshiyuki UsuiShinichi Hirano
    • Yoshiyuki UsuiShinichi Hirano
    • G03B27/58G03B27/62
    • G03B27/62G03F9/7011
    • An exposure apparatus for exposing a substrate to radiant energy includes: a stage including a chuck, and configured to hold the substrate on the chuck with vacuum and to be moved; a recovery device configured to recover the substrate from the stage; a first detector configured to detect an error of holding of the substrate on the chuck; a measuring device configured to measure an amount of positional deviation of the substrate relative to the chuck; and a controller configured to cause the measuring device to measure the amount of positional deviation in a case where the first detector detects the error, and to control an operation of the stage such that the amount of positional deviation falls within a tolerance based on the measured amount.
    • 一种用于将衬底暴露于辐射能的曝光装置包括:包括卡盘的台,并且被配置为将真空保持在卡盘上并被移动; 构造成从所述载物台回收所述基板的恢复装置; 第一检测器,被配置为检测所述基板在所述卡盘上的保持误差; 测量装置,被配置为测量所述基板相对于所述卡盘的位置偏移量; 以及控制器,其被配置为使得所述测量装置在所述第一检测器检测到所述误差的情况下测量位置偏差量,并且基于所测量的位置偏差落入公差内来控制所述台的操作 量。
    • 6. 发明申请
    • DUAL SIDED MIRROR BOOK IMAGING DEVICES AND METHODS
    • 双面镜成像设备和方法
    • US20120200948A1
    • 2012-08-09
    • US13022813
    • 2011-02-08
    • Jack ReeseShawn Reid
    • Jack ReeseShawn Reid
    • G02B5/08
    • G02B5/08G02B7/182G03B27/62G03G15/605Y10S359/90
    • Devices, systems, and methods for facilitating the imaging of books are presented. A first transparent plate and a second transparent plate may be positioned at approximately a 45 degree angle to the first transparent plate. A dual-sided mirror may be configured to be positioned substantially parallel with the first transparent plate and to be positioned substantially parallel with the second transparent plate. The first side of the dual-sided mirror may be configured to reflect a first image of a first page of a book, the first image being received by the dual-sided mirror through the first transparent plate. The second side of the dual-sided mirror may be configured to reflect a second image of a second page of the book, the second image being received by the dual-sided mirror through the second transparent plate.
    • 介绍了便于图书成像的设备,系统和方法。 第一透明板和第二透明板可以与第一透明板大致成45度的角度定位。 双面镜可以被配置为基本上与第一透明板平行地定位并且与第二透明板基本平行地定位。 双面镜的第一面可以被配置为反映书的第一页的第一图像,第一图像由双面镜通过第一透明板接收。 双面镜的第二面可以被配置为反映书的第二页的第二图像,第二图像由双面镜通过第二透明板接收。
    • 7. 发明申请
    • FILM HOLDER
    • 电影夹
    • US20110063600A1
    • 2011-03-17
    • US12794709
    • 2010-06-04
    • Xian-Jun WangMing-Jie ZhaoJian-Chun Yu
    • Xian-Jun WangMing-Jie ZhaoJian-Chun Yu
    • G03B27/62H04N5/253
    • G03B27/62
    • A film holder is provided. During scanning of a to-be-scanned object, the film holder is inserted into a scanning device. The film holder includes an input portion, a guiding portion and an information window. The input portion has an entrance, a channel and an exit, the channel disposed between the entrance and the exit. During scanning of the to-be-scanned object, the to-be-scanned object passes through the channel. The guiding portion connects to the input portion for guiding the to-be-scanned object. The information window is formed at and through the guiding portion. During scanning of the to-be-scanned object, the side regions of the to-be-scanned object pass through the information window. Functions of the scanning device are effectively augmented; the film is kept from being scratched; the quality of image scanning is kept from being deteriorated; and it is convenient to use the scanning device.
    • 提供电影持有人。 在扫描被扫描物体的扫描期间,将胶片保持器插入到扫描装置中。 胶片保持器包括输入部分,引导部分和信息窗口。 输入部分具有入口,通道和出口,通道设置在入口和出口之间。 待扫描对象的扫描期间,被扫描对象通过通道。 引导部分连接到用于引导被扫描物体的输入部分。 信息窗口形成在导引部分上并通过引导部分。 扫描被扫描物体时,待扫描物体的侧面区域通过信息窗口。 有效增强扫描装置的功能; 电影不被划伤; 防止图像扫描的质量恶化; 并且使用扫描装置是方便的。