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1. 发明申请

US20140176931A1 INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS 审中-公开
标题翻译：可移动光学元件的间歇温度控制
公开(公告)号：US20140176931A1
公开(公告)日：2014-06-26
申请号：US14237821
申请日：2012-08-12
申请人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
发明人： Alton H. Phillips , Douglas C. Watson , Travis D. Bow , Hiroyuki Kondo , Atsushi Yamada , Hideo Takino , Hideki Komatsuda
IPC分类号： G02B26/08 , G03F7/20
CPC分类号： G02B26/0816 , G03F7/70075 , G03F7/702 , G03F7/70825 , G03F7/70891 , G03F7/7095
摘要： An optical system including an optical element, a positioning mechanism configured to position the optical element into an operational position, and a temperature control mechanism configured to intermittently control the temperature of the optical element between operations. By alternatively positioning the optical element between an operational position and a position in thermal contact with the temperature control mechanism, the two mechanisms for positioning and controlling the temperature of the optical element are de-coupled from one another. As a result, the mechanism for each may be optimized In non-exclusive embodiments, the temperature control mechanism may be used to control the temperature of an individual optical element or a plurality of optical elements, such as for example, a fly's eye mirror used in an illumination unit of an EUV lithography tool.
摘要翻译：一种光学系统，包括光学元件，配置成将光学元件定位在操作位置的定位机构，以及配置为在操作之间间歇地控制光学元件的温度的温度控制机构。通过可选地将光学元件定位在与温度控制机构热接触的操作位置和位置之间，用于定位和控制光学元件的温度的两个机构彼此脱耦合。结果，可以优化每个的机构在非排他性的实施例中，温度控制机构可用于控制单个光学元件或多个光学元件的温度，例如使用的飞眼镜在EUV光刻工具的照明单元中。

2. 发明授权

US06984051B2 Multifaceted reflecting mirror, illumination optical system based on use of the same, and semiconductor exposure apparatus 有权
标题翻译：多面反射镜，基于使用的照明光学系统和半导体曝光装置
公开(公告)号：US06984051B2
公开(公告)日：2006-01-10
申请号：US10288337
申请日：2002-11-06
申请人： Hideo Takino
发明人： Hideo Takino
IPC分类号： G02B5/08 , G02B7/182
CPC分类号： G03F7/70141 , G02B5/08 , G02B5/09 , G02B7/182 , G02B7/1828 , G02B26/085 , G03F7/702 , G03F7/70958 , G03F7/70975 , G21K1/06 , Y10S359/903
摘要： A multifaceted reflecting mirror is provided with a plurality of reflecting mirror elements 10 and a base plate 13 for magnet, each of the plurality of reflecting mirror elements 10 comprising a reflecting surface 19 and a magnetic film 17 formed on a bottom surface. The respective reflecting mirror elements 10 can be positioned highly accurately on the base plate 13 by using a positioning guide 15. The maintenance operation is easily performed as well, because the respective reflecting mirror elements 10 are detachable. When the multifaceted reflecting mirror is used in combination with another multifaceted reflecting mirror for an illumination optical system of a reflection type exposure apparatus which uses, as an exposure light beam, a light beam having a short wavelength such as soft X-ray, it is possible to illuminate an exposure area on a substrate with the light beam having an extremely uniform illumination intensity.
摘要翻译：多面反射镜设置有多个反射镜元件10和用于磁体的基板13，多个反射镜元件10中的每一个包括反射表面19和形成在底表面上的磁性膜17。通过使用定位引导件15，能够将各反射镜元件10高精度地定位在基板13上。因为各个反射镜元件10是可拆卸的，所以也容易进行维护操作。当多面反射镜与另一种使用作为曝光光束的反射型曝光装置的照明光学系统的多面反射镜结合使用具有短X射线等短波长的光束时，它是可以用具有非常均匀的照明强度的光束来照亮基板上的曝光区域。

3. 发明申请

US20130335720A1 REFLECTING OPTICAL MEMBER, OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 有权
标题翻译：反射光学部件，光学系统，曝光装置和装置制造方法
公开(公告)号：US20130335720A1
公开(公告)日：2013-12-19
申请号：US13883362
申请日：2011-11-09
申请人： Hideo Takino , Tetsuya Tomofuji , Hideki komatsuda , Kahtaro Kasashima
发明人： Hideo Takino , Tetsuya Tomofuji , Hideki komatsuda , Kahtaro Kasashima
IPC分类号： G03F7/20 , G02B7/182
CPC分类号： G03F7/7015 , G02B7/182 , G03F7/70075 , G03F7/70825
摘要： An exit-side fly-eye mirror is provided with a first mirror block having a mirror element as one of a plurality of mirror elements, and a second mirror block having a mirror element as one of the plurality of mirror elements. The first mirror block has a connecting part that protrudes from an area other than the mirror surface of the mirror element, the connecting part providing a connection to the second mirror block. With the connecting part of the first mirror block, a plurality of mirror elements that includes the mirror element of the second mirror block is positioned relative to the mirror element of the first mirror block.
摘要翻译：出射侧飞眼镜设置有具有作为多个反射镜元件之一的反射镜元件的第一镜块，以及具有作为多个镜元件之一的镜元件的第二镜块。第一镜块具有从反射镜元件的镜面以外的区域突出的连接部，连接部提供与第二镜块的连接。利用第一镜块的连接部分，包括第二镜块的镜元件的多个镜元件相对于第一镜块的镜元件定位。

4. 发明授权

US09477156B2 Reflecting optical member, optical system, exposure apparatus, and device manufacturing method 有权
标题翻译：反射光学构件，光学系统，曝光装置和装置制造方法
公开(公告)号：US09477156B2
公开(公告)日：2016-10-25
申请号：US13883362
申请日：2011-11-09
申请人： Hideo Takino , Tetsuya Tomofuji , Hideki Komatsuda , Kohtaro Kasashima
发明人： Hideo Takino , Tetsuya Tomofuji , Hideki Komatsuda , Kohtaro Kasashima
IPC分类号： G03B27/52 , G03F7/20 , G02B7/182
CPC分类号： G03F7/7015 , G02B7/182 , G03F7/70075 , G03F7/70825
摘要： An exit-side fly-eye mirror is provided with a first mirror block having a mirror element as one of a plurality of mirror elements, and a second mirror block having a mirror element as one of the plurality of mirror elements. The first mirror block has a connecting part that protrudes from an area other than the mirror surface of the mirror element, the connecting part providing a connection to the second mirror block. With the connecting part of the first mirror block, a plurality of mirror elements that includes the mirror element of the second mirror block is positioned relative to the mirror element of the first mirror block.
摘要翻译：出射侧飞眼镜设置有具有作为多个反射镜元件之一的反射镜元件的第一镜块，以及具有作为多个镜元件之一的镜元件的第二镜块。第一镜块具有从反射镜元件的镜面以外的区域突出的连接部，连接部提供与第二镜块的连接。利用第一镜块的连接部分，包括第二镜块的镜元件的多个镜元件相对于第一镜块的镜元件定位。

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