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    • 11. 发明授权
    • Nitride-based semiconductor light emitting device and manufacturing method therefor
    • 氮化物系半导体发光元件及其制造方法
    • US06442184B1
    • 2002-08-27
    • US09459471
    • 1999-12-13
    • Hiroyuki OtaAtsushi WatanabeToshiyuki Tanaka
    • Hiroyuki OtaAtsushi WatanabeToshiyuki Tanaka
    • H01S500
    • H01L33/007H01L33/22H01S5/0213H01S5/3202H01S5/32341
    • A semiconductor light emitting device having multi-layer structure of group-3 nitride-based semiconductors is disclosed. The light emitting device has lower density of threading dislocation extending from a boundary of a crystal substrate through the multi-layer structure, thereby obtaining good luminescence characteristics. The nitride semiconductor light emitting device has the multi-layer structure. The multi-layer structure comprises a first crystal layer containing substantially pyramidal crystal grains, each of grains has a crystal face non-parallel to a surface of the substrate, and the pyramidal crystal grains are distributed at random like islands. The structure further comprises a second crystal layer formed on the first crystal layer with a compound having a different lattice constant from that of the first crystal layer. The second crystal layer smoothes a surface of the first crystal layer parallel to the surface of the substrate.
    • 公开了一种具有III族氮化物基半导体的多层结构的半导体发光器件。 发光器件具有从晶体衬底的边界通过多层结构延伸的穿透位错的较低密度,从而获得良好的发光特性。 氮化物半导体发光器件具有多层结构。 多层结构包括含有大致锥形晶粒的第一晶体层,每个晶粒具有不平行于衬底表面的晶面,并且金字塔形晶粒以岛状随机分布。 该结构还包括在第一晶体层上形成具有与第一晶体层不同的晶格常数的化合物的第二晶体层。 第二晶体层使平行于衬底表面的第一晶体层的表面平滑。
    • 14. 发明授权
    • Group III nitride semiconductor light-emitting device having anticracking feature
    • III族氮化物半导体发光器件具有抗撬性能
    • US06259122B1
    • 2001-07-10
    • US09368535
    • 1999-08-04
    • Hiroyuki OtaToshiyuki TanakaAtsushi Watanabe
    • Hiroyuki OtaToshiyuki TanakaAtsushi Watanabe
    • H01L3300
    • H01L33/32H01S5/32341
    • In a semiconductor light-emitting device having a multilayered structure which consists essentially of layers of Group III nitride semiconductors (AlxGa1−x) 1−yInyN (0≦x≦1, 0≦y≦1) which are different from each other in chemical composition ratio, generation of cracks at an interface propagating from an interface between adjacent layers is prevented. Two adjacent layers within the multilayered structure, which include a lower layer having a lattice constant larger than a lattice constant of an upper layer of the two adjacent layers, have a portion close to the interface of the two adjacent layers doped such that an element different from the Group III nitride semiconductors is added in a higher concentration, i.e. in a higher distribution density than in other portions thereof.
    • 在具有多层结构的半导体发光器件中,其基本上由III族氮化物半导体(Al x Ga 1-x)1-y In y N(0 <= x <= 1,0 <= y <= 1) 彼此之间的化学组成比,防止了从相邻层之间的界面传播的界面产生裂纹。 多层结构中的两个相邻层,其包括具有大于两个相邻层的上层的晶格常数的晶格常数的下层,具有靠近所述两个相邻层的界面的部分,所述界面被掺杂,使得元件不同 从III族氮化物半导体中加入更高的浓度,即比其它部分更高的分布密度。
    • 20. 发明授权
    • Conveyance device for base material having both surfaces coated with coating solution
    • 基材的输送装置,两面均涂有涂层溶液
    • US08875651B2
    • 2014-11-04
    • US13381322
    • 2010-06-25
    • Atsushi Watanabe
    • Atsushi Watanabe
    • B05C3/12B05C13/02H01M4/04B05C9/04B65H23/022B65H23/032B65H23/038H01M4/88B05C5/02
    • H01M4/0404B05C5/0254B05C9/04B05D2252/02B05D2252/10B65H23/022B65H23/0324B65H23/038H01M4/8828Y02E60/50
    • A double-sided coated substrate transport device (1) is described. A die head for front face coating (3) and a die head for back face coating (4) coat a coating liquid onto a substrate 1. A drying oven (5) dries the coating liquid applied to the substrate (1), to form coating films on the front and back faces of the substrate (1). A first and second rotating body unit (20A, 20B) are respectively furnished independently at widthwise edge sections of the substrate (1). Each of the first and second rotating body units has a free roller (21) and a drive roller (22) constituting a pair of rotating bodies, and a rotating body swivel section (23). The free roller (21) and the drive roller (22) grip the widthwise edge sections of the substrate (1) from the front and back sides. The rotating body swivel section (23) allows the orientation of the free roller (21) and the drive roller (22), respectively, to be modified separately for the first rotating body unit (20A) and the second rotating body unit (20B), so that the rotation axis of the free roller (21) and the drive roller (22) is inclined towards the downstream side in the substrate transport direction as seen from the outside in the substrate widthwise direction, with respect to a line perpendicular to the substrate transport direction.
    • 对双面涂布基板输送装置(1)进行说明。 用于前面涂层的模头(3)和用于背面涂层的模头(4)将涂布液涂覆到基材1上。干燥箱(5)将施加到基材(1)上的涂布液干燥,形成 在基板(1)的前表面和背面上涂覆膜。 第一和第二旋转体单元(20A,20B)分别独立地设置在基板(1)的宽度方向的边缘部分。 第一和第二旋转体单元中的每一个具有构成一对旋转体的自由辊(21)和驱动辊(22),以及旋转体旋转部(23)。 自由辊(21)和驱动辊(22)从前侧和后侧夹紧基板(1)的宽度方向的边缘部分。 旋转体旋转部(23)能够分别对第一旋转体单元(20A)和第二旋转体单元(20B)分别改变自由辊(21)和驱动辊(22)的取向, 使得自由辊(21)和驱动辊(22)的旋转轴线在从基板宽度方向的外侧观察到的基板输送方向上的下游侧相对于垂直于基板横向的线倾斜 基材输送方向。