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    • 12. 发明授权
    • Optical fiber amplifier, semiconductor laser module for pumping and
optical signal communication system
    • 光纤放大器,用于泵浦和光信号通信系统的半导体激光模块
    • US5936763A
    • 1999-08-10
    • US968578
    • 1997-11-13
    • Masahiro MitsudaTomoaki UnoKiyoshi Fujihara
    • Masahiro MitsudaTomoaki UnoKiyoshi Fujihara
    • G02B6/42H01S3/094G02B6/28H01S3/30
    • H01S3/094003G02B6/4249G02B6/4246H01S3/094096
    • The optical fiber amplifier of this invention includes plural pump light sources for emitting pump light; a first wavelength multiplexer for receiving the pump light emitted by the pump light sources at plural input ports and wavelength multiplexing the received pump light, so as to generate wavelength multiplexed pump light and output the wavelength multiplexed pump light from an output port; a second wavelength multiplexer for receiving the wavelength multiplexed pump light at a first input port and receiving signal light at a second input port, so as to generate coupled light by coupling the wavelength multiplexed pump light and the signal light and emit the coupled light from an output port; and a rare earth-doped optical fiber for receiving the coupled light emitted from the output port of the second wavelength multiplexer and amplifying the coupled light. At least one of the pump light sources is a narrow-linewidth light source for emitting light with a laser linewidth of approximately 5 nm or less as the pump light.
    • 本发明的光纤放大器包括用于发射泵浦光的多个泵浦光源; 第一波长多路复用器,用于接收在多个输入端口处由泵浦光源发射的泵浦光,并对接收的泵浦光进行波长多路复用,以产生波长多路复用的泵浦光,并从输出端口输出波长多路复用的泵浦光; 第二波长多路复用器,用于在第一输入端口处接收波长多路复用的泵浦光并在第二输入端口接收信号光,以便通过耦合所述波长多路复用的泵浦光和所述信号光来产生耦合的光,并从 输出端口 以及稀土掺杂光纤,用于接收从第二波长多路复用器的输出端口发射的耦合光并放大耦合的光。 泵浦光源中的至少一个是用于发射具有约5nm或更小的激光线宽的光作为泵浦光的窄线宽光源。
    • 19. 发明授权
    • Method of fabricating semiconductor laser
    • 制造半导体激光器的方法
    • US5227015A
    • 1993-07-13
    • US735728
    • 1991-07-25
    • Kiyoshi FujiharaMasato IshinoNaoki Takenaka
    • Kiyoshi FujiharaMasato IshinoNaoki Takenaka
    • H01L21/306H01S5/12H01S5/20H01S5/227H01S5/323
    • H01L21/30612H01S5/227H01S5/1231H01S5/2081H01S5/2275H01S5/32391Y10S148/095
    • An n-InP buffer layer 102, an InGaAsP active layer 103, a p-InP cladding layer 104 and a p-InGaAsP surface protective layer 105 are successively epitaxially grown on an n-InP substrate 101 having a (100) plane as a main plane. An etching mask 106, an insulating film, is formed in a stripe in the direction by photolithography and dry etching. Using a solution comprising a mixture of hydrochloric acid, oxygenated water and acetic acid, the n-InP buffer layer 102 is etched to a depth lower than the p-InP cladding layer 103, to form a mesa stripe 107. Next, the insulating film 106 is removed and the p-InGaAsP surface protective layer 105 is removed using a solution comprising a mixture of sulfuric acid and oxygenated water. Thereafter, InP current blocking layers 108 and 109 are selectively formed at the regions other than the mesa stripe 107 by the liquid-phase epitaxial growth. Thus, a buried heterostructure semiconductor laser is fabricated, having good laser characteristics and a high reliability.
    • 在具有(100)面作为主要的n-InP衬底101上依次外延生长n-InP缓冲层102,InGaAsP有源层103,p-InP包层104和p-InGaAsP表面保护层105 飞机 通过光刻和干蚀刻在<011>方向上的条纹中形成蚀刻掩模106,绝缘膜。 使用包含盐酸,含氧水和乙酸的混合物的溶液,将n-InP缓冲层102蚀刻到比p-InP包覆层103低的深度,以形成台面条107.接下来,绝缘膜 106,并且使用包含硫酸和含氧水的混合物的溶液除去p-InGaAsP表面保护层105。 此后,通过液相外延生长,在台面条107以外的区域选择性地形成InP电流阻挡层108和109。 因此,制造了具有良好的激光特性和高可靠性的掩埋异质结构半导体激光器。