专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US5891806A Proximity-type microlithography apparatus and method 失效
标题翻译：近程型微光刻设备及方法
公开(公告)号：US5891806A
公开(公告)日：1999-04-06
申请号：US842897
申请日：1997-04-17
申请人： Masato Shibuya , Keiichiro Sakato , Akira Miyaji , Toshiyuki Namikawa , Takashi Mori
发明人： Masato Shibuya , Keiichiro Sakato , Akira Miyaji , Toshiyuki Namikawa , Takashi Mori
IPC分类号： G03F7/20 , H01L21/00
CPC分类号： G03F7/70091 , G03F7/702 , G03F7/7035 , G03F7/70358 , Y10S438/942
摘要： Apparatus and methods are disclosed for increasing the illuminance at a mask used for proximity-type microlithography and for achieving increases in throughput. A mask defining a pattern is illuminated by an illumination optical system. The pattern is transferred to a workpiece separated from the mask by a prescribed standoff. The mask and workpiece can be relatively moved in a scan direction. With respect to the illumination optical system, the workpiece-side numerical aperture in a first direction on the plane of the mask is different from the workpiece-side numerical aperture in a second direction, perpendicular to the first direction, on the plane of the mask. A reflective-type relay optical system can be included that comprises first and second spherical mirrors that do not produce chromatic aberrations.
摘要翻译：公开了用于增加用于接近型微光刻的掩模的照度和用于实现生产量增加的装置和方法。定义图案的掩模由照明光学系统照亮。将图案转移到与掩模分开的工件中，以规定的间距。掩模和工件可以沿扫描方向相对移动。相对于照明光学系统，在掩模的平面上的第一方向上的工件侧数值孔径在垂直于第一方向的第二方向上与工件侧数值孔径不同于掩模的平面。可以包括反射型中继光学系统，其包括不产生色差的第一和第二球面镜。

12. 发明授权

US5739898A Exposure method and apparatus 失效
标题翻译：曝光方法和装置
公开(公告)号：US5739898A
公开(公告)日：1998-04-14
申请号：US312241
申请日：1994-09-26
申请人： Toshihiko Ozawa , Masaya Komatsu , Masato Shibuya , Hiroshi Ooki , Masaomi Kameyama , Yoshifumi Tokoyoda
发明人： Toshihiko Ozawa , Masaya Komatsu , Masato Shibuya , Hiroshi Ooki , Masaomi Kameyama , Yoshifumi Tokoyoda
IPC分类号： G03F7/20 , G03B27/32 , G03B27/42
CPC分类号： G03F7/70566 , G03F7/70125 , G03F7/70475 , G03F7/70583
摘要： The present invention relates to a projection exposure method and an exposure apparatus for projecting a pattern on a photo-mask through a projection optical system onto a predetermined photosensitive material. The photosensitive material is a nonlinear photosensitive material in which the effective light intensity distribution is nonlinear to the intensity of incident exposure light. Further, multiple exposure is made with plural patterns having a certain lateral shift therebetween, or multiple exposure is made with shifting the position of an identical pattern, whereby multiple exposure is effected with patterns different in intensity distribution on the photosensitive material. A high-resolution pattern can be formed over the resolution limit of projection optical system by the above arrangement.
摘要翻译：本发明涉及一种用于通过投影光学系统将光掩模上的图案投影到预定感光材料上的投影曝光方法和曝光装置。感光材料是非线性感光材料，其中有效光强度分布对入射曝光光的强度是非线性的。此外，通过在其间具有一定的横向偏移的多个图案进行多次曝光，或者通过移位相同图案的位置进行多次曝光，由此通过感光材料上的强度分布不同的图案来实现多次曝光。通过上述布置，可以在投影光学系统的分辨率极限上形成高分辨率图案。

13. 发明授权

US5535054A Illumination optical system 失效
标题翻译：照明光学系统
公开(公告)号：US5535054A
公开(公告)日：1996-07-09
申请号：US317994
申请日：1994-10-04
申请人： Masato Shibuya
发明人： Masato Shibuya
IPC分类号： G02B27/28 , G02B5/30 , G02F1/13 , G02F1/1335 , G02F1/13357 , G03B33/12
CPC分类号： G02B5/3025
摘要： An illumination optical system for supplying polarized illumination light to an object to be illuminated. The light from a light source is separated by a polarizing beam splitter into a first polarized light component as the illumination light and a second polarized light component which is different in polarizing direction from the first polarized light component. A first reflecting optical member for returning the second polarized light component to the light source side and a converging optical system are arranged in such a manner that a light source image due to the backward light from the first reflecting optical member is formed at a position apart from the light source in a direction substantially perpendicular to the optical axis of the converging optical system. The backward light is converted by a polarizing element to a polarized light of the same polarizing direction as the first polarized light component and it is again emitted from the polarizing beam splitter at an optical axis position adjacent to the first polarized light component.
摘要翻译：一种照明光学系统，用于向被照射物体提供偏振照明光。来自光源的光由偏振分束器分离为第一偏振光分量作为照明光，并且偏振方向与第一偏振光分量不同的第二偏振光分量。用于将第二偏振光分量返回到光源侧的第一反射光学部件和会聚光学系统被布置成使得由于来自第一反射光学部件的反射光引起的光源图像形成在分开的位置从光源沿着与会聚光学系统的光轴基本垂直的方向。反射光由偏振元件转换为与第一偏振光分量相同的偏振方向的偏振光，并且在与第一偏振光分量相邻的光轴位置处再次从偏振分束器发射。

14. 发明授权

US4864123A Apparatus for detecting the level of an object surface 失效
标题翻译：用于检测物体表面水平的装置
公开(公告)号：US4864123A
公开(公告)日：1989-09-05
申请号：US189831
申请日：1988-05-03
申请人： Hideo Mizutani , Isao Sato , Masato Shibuya
发明人： Hideo Mizutani , Isao Sato , Masato Shibuya
IPC分类号： G01S7/499 , G01S17/46 , G02B7/32 , G03F9/00
CPC分类号： G03F9/7065 , G01S17/46 , G01S7/499 , G02B7/32 , G03F9/7023 , G03F9/7076
摘要： An apparatus for detecting the level of an object surface comprises a light source for supplying a light beam obliquely incident on the object surface, an imaging optical system provided to image the light beam reflected by the object surface, a light-receiving element having a detecting surface coincident with the imaging plane of the imaging optical system and determining the level of the object surface on the basis of the position of the image of the light beam on the detecting surface, and polarization correcting optics provided on an optical path leading from the light source via the object surface to the detecting surface for adjusting the intensity ration between the two mutally orthogonal polarized light components of the light beam.
摘要翻译：一种用于检测物体表面的装置的装置包括：用于供应倾斜入射在物体表面上的光束的光源，用于对由物体表面反射的光束进行成像的成像光学系统;具有检测的光接收元件表面与成像光学系统的成像平面重合，并且基于检测表面上的光束的图像的位置确定物体表面的水平，以及偏振校正光学器件，其设置在从光引导的光路上源极经由物体表面到检测表面，用于调节光束的两个非正交偏振光分量之间的强度比例。

15. 发明申请

US20120323380A1 WATER DEMAND OPTIMIZATION SYSTEM, CONTROL SYSTEM AND PROGRAM 有权
标题翻译：水需求优化系统，控制系统和程序
公开(公告)号：US20120323380A1
公开(公告)日：2012-12-20
申请号：US13550756
申请日：2012-07-17
申请人： Hisashi KOBAYASHI , Yoshitaka Kobayashi , Koichi Hirooka , Yutaka Iino , Masato Shibuya
发明人： Hisashi KOBAYASHI , Yoshitaka Kobayashi , Koichi Hirooka , Yutaka Iino , Masato Shibuya
IPC分类号： G05D7/06
CPC分类号： E03B1/02 , E03B3/00 , G06Q50/06
摘要： According to one embodiment, a water demand optimization system includes a management terminal, a measuring apparatus, a demand information generating unit and a water-supply control apparatus. The management terminal drives customer equipment, which performs an operation using water, in a time zone in which a power unit rate is low. The measuring apparatus measures an amount of water used in a dwelling unit. The demand information generating unit generates water demand based on the amount of water. The water-supply control apparatus controls a pump in a manner to meet water demand and to minimize a treatment cost in a water purification plant and a cost for conveyance of clear water with reference to a variation in the power unit rate.
摘要翻译：根据一个实施例，水需求优化系统包括管理终端，测量装置，需求信息生成单元和供水控制装置。在电力单位利率低的时区，管理终端驱动使用水进行操作的客户设备。测量装置测量在住宅单元中使用的水量。需求信息生成单元基于水量生成用水需求。供水控制装置参照功率单位率的变化，以满足用水需求的方式控制泵并使水净化装置的处理成本最小化，以及输送清水的成本。

16. 发明授权

US07457084B2 Recording medium drive with magnetic body embedded in housing base opposite voice coil motor to suppress leakage flux 失效
标题翻译：记录介质驱动器，磁体嵌入壳体底座对面的音圈电机，以抑制漏磁通
公开(公告)号：US07457084B2
公开(公告)日：2008-11-25
申请号：US11100413
申请日：2005-04-07
申请人： Yoshiharu Matsuda , Shinji Fujimoto , Masato Shibuya , Keiichi Miyajima
发明人： Yoshiharu Matsuda , Shinji Fujimoto , Masato Shibuya , Keiichi Miyajima
IPC分类号： G11B5/55 , G11B19/20 , G11B21/02 , G11B25/04 , G11B33/12 , G11B33/14
CPC分类号： G11B33/121 , G11B5/4813 , G11B5/5569 , G11B19/2009 , G11B25/043
摘要： A hard disk drive includes a base having a bottom plate. A magnetic body is embedded in the bottom plate. The magnetic body is allowed to serve as a magnetic shield in the hard disk drive. The magnetic body is allowed to have a sufficient thickness without requiring an additional space outside the base, since the magnetic body is embedded in the base. The magnetic field directed outside the base can reliably be absorbed at the magnetic body. The magnetic body may be received in a depression defined in the bottom plate. The depression may be formed based on a reduction in the thickness of the bottom plate.
摘要翻译：硬盘驱动器包括具有底板的底座。磁性体嵌入底板。允许磁体用作硬盘驱动器中的磁屏蔽。允许磁体具有足够的厚度，而不需要在基座之外的额外空间，因为磁体嵌入基座中。引导到基座外部的磁场可以可靠地被吸收在磁体上。磁体可以容纳在底板中限定的凹陷中。凹陷可以基于底板的厚度的减小而形成。

17. 发明授权

US07414815B2 Magnetic head actuator with centered deviation 失效
标题翻译：具有中心偏差的磁头执行器
公开(公告)号：US07414815B2
公开(公告)日：2008-08-19
申请号：US11819427
申请日：2007-06-27
申请人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
发明人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
IPC分类号： G11B5/55 , G11B21/22
CPC分类号： G11B5/5569 , G11B5/54
摘要： A magnetic disk device comprises a magnetic disk in which a data zone is formed. An actuator has a voice coil and a head slider carrying a magnetic head, the actuator being swung to move the magnetic head over the disk between an innermost position of the data zone and an outermost position of the data zone. A magnet has a magnetization center and is opposed to the voice coil so that a voice coil motor which swings the actuator is formed, the magnet having a north pole and a south pole confronting each other via the magnetization center. The magnetic disk device is provided so that a deviation of a center of the voice coil from the magnetization center when the magnetic head is in the innermost position of the data zone is substantially equal to a deviation of the center of the voice coil from the magnetization center when the magnetic head is in the outermost position of the data zone.
摘要翻译：磁盘装置包括形成数据区的磁盘。致动器具有音圈和携带磁头的磁头滑块，所述致动器摆动以使磁头在数据区的最内位置和数据区的最外位置之间的磁盘上移动。磁体具有磁化中心并且与音圈相对，从而形成摆动致动器的音圈电动机，磁体具有通过磁化中心彼此相对的北极和南极。提供磁盘装置，使得当磁头处于数据区的最内位置时，音圈的中心与磁化中心的偏差基本上等于音圈的中心与磁化的偏差当磁头位于数据区的最外侧位置时居中。

18. 发明申请

US20070253114A1 Magnetic disk device 失效
标题翻译：磁盘装置
公开(公告)号：US20070253114A1
公开(公告)日：2007-11-01
申请号：US11819427
申请日：2007-06-27
申请人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
发明人： Shinji Fujimoto , Masato Shibuya , Hisashi Kaneko , Tsuneyori Ino , Yukihiro Komura , Mitsuhiro Izumi , Kei Funabashi
IPC分类号： G11B5/55
CPC分类号： G11B5/5569 , G11B5/54
摘要： A magnetic disk device comprises a magnetic disk in which a data zone is formed. An actuator has a voice coil and a head slider carrying a magnetic head, the actuator being swung to move the magnetic head over the disk between an innermost position of the data zone and an outermost position of the data zone. A magnet has a magnetization center and is opposed to the voice coil so that a voice coil motor which swings the actuator is formed, the magnet having a north pole and a south pole confronting each other via the magnetization center. The magnetic disk device is provided so that a deviation of a center of the voice coil from the magnetization center when the magnetic head is in the innermost position of the data zone is substantially equal to a deviation of the center of the voice coil from the magnetization center when the magnetic head is in the outermost position of the data zone.
摘要翻译：磁盘装置包括形成数据区的磁盘。致动器具有音圈和携带磁头的磁头滑块，所述致动器摆动以使磁头在数据区的最内位置和数据区的最外位置之间的磁盘上移动。磁体具有磁化中心并且与音圈相对，从而形成摆动致动器的音圈电动机，磁体具有通过磁化中心彼此相对的北极和南极。提供磁盘装置，使得当磁头处于数据区的最内位置时，音圈的中心与磁化中心的偏差基本上等于音圈的中心与磁化的偏差当磁头位于数据区的最外侧位置时居中。

19. 发明授权

US06592583B2 Perfusate supply apparatus for electric bipolar tweezers and surgical procedure with electric bipolar tweezers 失效
标题翻译：电动双极镊子的灌注装置和电动双极镊子的外科手术
公开(公告)号：US06592583B2
公开(公告)日：2003-07-15
申请号：US09796574
申请日：2001-02-27
申请人： Shinichi Hirano , Masato Shibuya
发明人： Shinichi Hirano , Masato Shibuya
IPC分类号： A61B1812
CPC分类号： A61B18/1442 , A61B2018/00029 , A61B2018/1462 , A61B2218/003 , A61B2218/005
摘要： Electric bipolar tweezers include a pair of elongated portions that extend from a base of the tweezers in a forked manner. An electrode is located on the distal end of each electrode. When a legion is held between the elongated portions, high-frequency current is supplied to the electrodes. A perfusate tube is attached to the tweezers and has an outlet that opens near one electrode. A gas line is connected to an intermediate portion of the perfusate tube. Gas is thus mixed with perfusate in the perfusate tube such that perfusate mist is blown from the outlet of the perfusate tube. The mist blows away perfusate between the electrodes, thus preventing the electrodes from short-circuiting.
摘要翻译：电双极镊子包括从镊子的基部以叉形方式延伸的一对细长部分。电极位于每个电极的远端。当在细长部分之间保持军团时，向电极提供高频电流。灌注管连接到镊子，并且具有在一个电极附近开口的出口。气体管线连接到灌注液管的中间部分。因此，气体与灌注液中的灌注液混合，使得灌注液雾从灌注液管的出口吹出。电极之间的雾气吹除灌注液，从而防止电极短路。

20. 发明授权

US06563567B1 Method and apparatus for illuminating a surface using a projection imaging apparatus 失效
公开(公告)号：US06563567B1
公开(公告)日：2003-05-13
申请号：US09540874
申请日：2000-03-31
申请人： Hideki Komatsuda , Osamu Tanitsu , Akihiko Goto , Nobumichi Kanayamaya , Masato Shibuya , Tetsuo Takahashi
发明人： Hideki Komatsuda , Osamu Tanitsu , Akihiko Goto , Nobumichi Kanayamaya , Masato Shibuya , Tetsuo Takahashi
IPC分类号： G03B2772
CPC分类号： G03F7/70075 , G03F7/701 , G03F7/70108 , G03F7/70158 , G03F7/70183 , G03F7/7025
摘要： A method and illumination optical system forms a modified illumination configuration on an optical integrator so that a secondary light source having a desired modified illumination configuration is formed and light loss is minimized. A light beam shape changing element that diffuses illumination in a plurality of directions, and an angular light beam forming element that forms a plurality of light source images operate together to create a modified illumination configuration on the optical integrator. Since the secondary light source has a desired modified illumination configuration, an aperture stop used to restrict the size and/or shape of the secondary light source blocks only a small amount of illumination, or can be eliminated altogether. It is possible to alter the annular ratio and outer diameter of an annular or quadrupole modified illumination configuration by changing the magnification of a zoom optical system positioned between the light beam shape changing element and the angular light beam forming element. Furthermore, by changing the focal length of a zoom optical system (which is positioned upstream of the optical integrator), it is possible to change the outer diameter of the annular or quadrupole secondary light source without changing the annular ratio thereof.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式