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    • 13. 发明授权
    • Flash memory array structure suitable for multiple simultaneous operations
    • 闪存阵列结构适用于多个同时操作
    • US06584034B1
    • 2003-06-24
    • US10131271
    • 2002-04-23
    • Fu-Chang HsuPeter W. LeeHsing-Ya Tsao
    • Fu-Chang HsuPeter W. LeeHsing-Ya Tsao
    • G11C800
    • G11C16/10G11C7/18G11C8/12G11C2216/22
    • In the present invention is disclosed a flash memory for simultaneous read and write operations. The memory is partitioned into a plurality of sectors each of which have a sector decoder. The sector decoder connects a plurality of main bit lines to a plurality of sub bit lines contained within each memory sector A 21 decoder is used to demonstrate the invention although other decoders including a 2M decoder and a hierarchical type decoder can be used. The memory array can be configured from a variety of architectures, including NOR, OR, NAND, AND, Dual-String and DINOR. The memory cells can be formed from a variety of array structures including ETOX, FLOTOX, EPROM, EEPROM, Split-Gate, and PMOS.
    • 在本发明中公开了一种用于同时读和写操作的闪速存储器。 存储器被划分成多个扇区,每个扇区具有扇区解码器。 扇区解码器将多个主位线连接到每个存储器扇区内所包含的多个子位线。虽然可以使用包括2M解码器和分层式解码器的其他解码器,但是使用解码器来解释本发明。 存储器阵列可以由各种架构进行配置,包括NOR,OR,NAND,AND,Dual-String和DINOR。 存储器单元可以由包括ETOX,FLOTOX,EPROM,EEPROM,分离栅极和PMOS的各种阵列结构形成。
    • 14. 发明授权
    • Apparatus for improving film stability of halogen-doped silicon oxide films
    • 用于提高卤素掺杂氧化硅膜的膜稳定性的装置
    • US06374770B1
    • 2002-04-23
    • US09597856
    • 2000-06-20
    • Peter W. LeeStuardo RoblesAnand GuptaVirendra V. S. RanaAmrita Verma
    • Peter W. LeeStuardo RoblesAnand GuptaVirendra V. S. RanaAmrita Verma
    • C23C1600
    • H01L21/02131C23C16/401C23C16/56H01L21/02274H01L21/0234H01L21/02362H01L21/3105H01L21/31629
    • A chemical vapor deposition system that includes a housing configured to form a processing chamber, a substrate holder configured to hold a substrate within the processing chamber, a gas distribution system configured to introduce gases into the processing chamber, a plasma generation system configured to form a plasma within the processing chamber, a processor operatively coupled to control the gas distribution system and the plasma generation system, and a computer-readable memory coupled to the processor that stores a computer-readable program which directs the operation of the chemical vapor deposition system. In one embodiment the computer-readable program comprises instructions that control the gas distribution system to flow a process gas comprising silicon, oxygen and a halogen family member into the chamber to deposit a halogen-doped silicon oxide film on a substrate positioned on the substrate holder and instructions that control the gas distribution system and plasma generation system to densify the halogen-doped silicon oxide film by bombarding the film with ionic species from a plasma of an argon-containing gas source. In another embodiment, the computer-readable program comprises instructions that control the gas distribution system to flow a process gas comprising silicon, oxygen and a halogen family member into the chamber to deposit a halogen-doped silicon oxide film on said substrate and instructions that control the gas distribution system and plasma generation system to form a plasma from a hydrogen containing source gas to bombard the halogen-doped silicon oxide film with hydrogen ions to remove loosely bound halogen atoms from the film.
    • 一种化学气相沉积系统,其包括构造成形成处理室的壳体,被配置为在处理室内保持衬底的衬底保持器,配置成将气体引入到处理室中的气体分配系统;等离子体生成系统, 处理室内的等离子体,可操作地耦合以控制气体分配系统和等离子体生成系统的处理器以及耦合到处理器的计算机可读存储器,其存储引导化学气相沉积系统的操作的计算机可读程序。 在一个实施例中,计算机可读程序包括控制气体分配系统以将包含硅,氧和卤素族成员的工艺气体流入室中的指令,以将沉积卤素掺杂的氧化硅膜沉积在位于衬底保持器 以及控制气体分配系统和等离子体发生系统通过用来自含氩气体源的等离子体的离子物质轰击膜来致密化掺杂氧化硅膜的指令。 在另一个实施例中,计算机可读程序包括控制气体分配系统以使包含硅,氧和卤素族成员的工艺气体流入腔室中以在所述衬底上沉积卤素掺杂的氧化硅膜的指令,以及控制 气体分配系统和等离子体发生系统,以形成来自含氢源气体的等离子体,用氢离子轰击卤素掺杂的氧化硅膜,以从薄膜中去除松散结合的卤素原子。
    • 19. 发明申请
    • Novel NAND-based hybrid NVM design that integrates NAND and NOR in 1-die with serial interface
    • 新型基于NAND的混合NVM设计,将NAND和NOR集成在1-die与串行接口中
    • US20110051519A1
    • 2011-03-03
    • US12807080
    • 2010-08-27
    • Peter W. LeeKesheng WangFu-Chang Hsu
    • Peter W. LeeKesheng WangFu-Chang Hsu
    • G11C16/04
    • G11C16/32G11C7/1075
    • A nonvolatile memory device includes multiple independent nonvolatile memory arrays that concurrently for parallel reading and writing the nonvolatile memory arrays. A serial interface communicates commands, address, device status, and data between a master device and nonvolatile memory arrays for concurrently reading and writing of the nonvolatile memory arrays and sub-arrays. Data is transferred on the serial interface at the rising edge and the falling edge of the synchronizing clock. The serial interface transmits a command code and an address code from a master device and transfers a data code between the master device and the nonvolatile memory device, wherein the data code has a length that is determined by the command code and a location determined by the address code. An enable signal defines a beginning and termination of a reading or writing operation. Reading one nonvolatile memory array may be interrupted for another operation and then resumed.
    • 非易失性存储器件包括多个独立的非易失性存储器阵列,用于并行读写非易失性存储器阵列。 串行接口在主设备和非易失性存储器阵列之间传送命令,地址,设备状态和数据,用于同时读写非易失性存储器阵列和子阵列。 数据在同步时钟的上升沿和下降沿在串行接口上​​传输。 串行接口从主设备发送命令代码和地址代码,并在主设备和非易失性存储设备之间传送数据代码,其中数据代码具有由命令代码确定的长度和由 地址代码 启用信号定义读取或写入操作的开始和结束。 读取一个非易失性存储器阵列可能被中断用于另一个操作,然后恢复。