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11. 发明授权

US08562846B2 Process for producing a chip using a mold 有权
标题翻译：使用模具制造芯片的工艺
公开(公告)号：US08562846B2
公开(公告)日：2013-10-22
申请号：US13175071
申请日：2011-07-01
申请人： Atsunori Terasaki , Junichi Seki , Nobuhito Suehira , Hideki Ina , Shingo Okushima
发明人： Atsunori Terasaki , Junichi Seki , Nobuhito Suehira , Hideki Ina , Shingo Okushima
IPC分类号： C03C15/00
CPC分类号： B29C59/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F9/7042
摘要： A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate 2010 formed of a first material and an alignment mark 2102 formed of a second material different from the first material. The first material and the second material have transmissivities to light in a part of an ultraviolet wavelength range. The second material has a refractive index of not less than 1.7.
摘要翻译：该模具能够在将待固化的树脂材料设置在模具和待加工构件之间的状态下与要处理的构件高度准确地对准，并且由第一材料和对准构成的基板2010构成标记2102由与第一材料不同的第二材料形成。第一材料和第二材料在紫外线波长范围的一部分中具有透光性。第二种材料的折射率不小于1.7。

12. 发明申请

US20110278259A1 PROCESS FOR PRODUCING A CHIP USING A MOLD 有权
标题翻译：使用模具生产切片的方法
公开(公告)号：US20110278259A1
公开(公告)日：2011-11-17
申请号：US13175071
申请日：2011-07-01
申请人： Atsunori TERASAKI , Junichi SEKI , Nobuhito SUEHIRA , Hideki INA , Shingo OKUSHIMA
发明人： Atsunori TERASAKI , Junichi SEKI , Nobuhito SUEHIRA , Hideki INA , Shingo OKUSHIMA
IPC分类号： C03C15/00
CPC分类号： B29C59/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F9/7042
摘要： A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate 2010 formed of a first material and an alignment mark 2102 formed of a second material different from the first material. The first material and the second material have transmissivities to light in a part of an ultraviolet wavelength range. The second material has a refractive index of not less than 1.7.
摘要翻译：该模具能够在将待固化的树脂材料设置在模具和待加工构件之间的状态下与要处理的构件高度准确地对准，并且由第一材料和对准构成的基板2010构成标记2102由与第一材料不同的第二材料形成。第一材料和第二材料在紫外线波长范围的一部分中具有透光性。第二种材料的折射率不小于1.7。

13. 发明授权

US07862761B2 Pattern forming method and pattern forming apparatus 有权
标题翻译：图案形成方法和图案形成装置
公开(公告)号：US07862761B2
公开(公告)日：2011-01-04
申请号：US11753106
申请日：2007-05-24
申请人： Shingo Okushima , Junichi Seki
发明人： Shingo Okushima , Junichi Seki
IPC分类号： B29C43/02 , B29C71/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A pattern forming method for forming a pattern on a pattern forming material on a substrate by using an imprint pattern provided to a mold is constituted by preparing a substrate having thereon a pattern forming area, disposing the pattern forming material placed in an uncured state in the pattern forming area in a dispersion state at a plurality of positions at different intervals, and curing the pattern forming material in a state in which the pattern forming material is deformed in a shape corresponding to a shape of the imprint pattern provided to the mold.
摘要翻译：通过使用设置在模具上的压印图案在基板上的图案形成材料上形成图案的图案形成方法通过制备其上具有图案形成区域的基板来构成，将设置在未固化状态的图案形成材料设置在在多个位置处以不同间隔的分散状态的图案形成区域，并且在图案形成材料以与设置在模具上的压印图案的形状相对应的形状变形的状态下固化图案形成材料。

14. 发明申请

US20100072664A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE 有权
标题翻译：印刷装置及其制造方法
公开(公告)号：US20100072664A1
公开(公告)日：2010-03-25
申请号：US12566572
申请日：2009-09-24
申请人： Eigo Kawakami , Hideki Ina , Junichi Seki , Atsunori Terasaki , Shingo Okushima , Motoki Okinaka
发明人： Eigo Kawakami , Hideki Ina , Junichi Seki , Atsunori Terasaki , Shingo Okushima , Motoki Okinaka
IPC分类号： B29C59/02
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/00
摘要： An imprint apparatus for pressing resin and a mold to each other in a Z-axis direction to form a resin pattern on a shot region includes: a mold chuck; an X-Y stage; a reference mark formed on the stage; a first scope configured to measure a positional deviation in an x-y plane between a mold mark and the reference mark; a second scope configured to measure a position of a substrate mark in the plane not via the mold mark; and a dispenser configured to dispense resin. In the plane, the dispenser center is deviated in position from the mold chuck center by a first distance in a first direction, and the second scope center is deviated in position from the dispenser center by a distance smaller than twice the first distance in the first direction or a second direction opposite thereto.
摘要翻译：在Z轴方向上按压树脂和模具以在射出区域形成树脂图案的压印装置包括：模具卡盘; X-Y舞台; 在舞台上形成参考标记; 第一范围，被配置为测量模具标记和参考标记之间的x-y平面中的位置偏差; 第二范围，被配置为不经由模具标记来测量所述平面中的基板标记的位置; 以及配置成分配树脂的分配器。在平面中，分配器中心从第一方向偏离模具卡盘中心第一距离，并且第二范围中心从分配器中心偏离距离小于第一距离的距离的距离方向或与其相反的第二方向。

15. 发明申请

US20090166317A1 METHOD OF PROCESSING SUBSTRATE BY IMPRINTING 审中-公开
标题翻译：通过印刷加工基板的方法
公开(公告)号：US20090166317A1
公开(公告)日：2009-07-02
申请号：US12337155
申请日：2008-12-17
申请人： Shingo Okushima , Atsunori Terasaki , Junichi Seki
发明人： Shingo Okushima , Atsunori Terasaki , Junichi Seki
IPC分类号： C03C15/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： A method of processing a substrate includes applying a resin on the substrate, imprinting a pattern of a mold onto the resin, the pattern including protrusions and recesses, forming a protective layer over the resin, etching the protective layer so that the protrusions of the pattern imprinted in the resin are exposed and the protective layer in the recesses of the pattern in the resin remains, etching the exposed protrusions of the pattern, to expose the substrate, while using the protective layer as a mask to prevent areas covered by the protective layer from being etched, so that a reverse pattern is formed on the protective layer, which has a structure reversed from the pattern imprinted on the resin, and etching the exposed substrate, to etch a pattern in the substrate, while using the reverse pattern as a mask to prevent areas covered by the protective layer from being etched.
摘要翻译：一种处理基板的方法包括在基板上施加树脂，将模具图案压印在树脂上，图案包括突起和凹陷，在树脂上形成保护层，蚀刻保护层，使得图案的突起在树脂中印刷，并且树脂中的图案的凹部中的保护层保留，蚀刻图案的露出的突起，露出基板，同时使用保护层作为掩模，以防止被保护层覆盖的区域从而被蚀刻，使得在保护层上形成反向图案，该保护层具有与印刷在树脂上的图案相反的结构，并蚀刻暴露的基板，以蚀刻基板中的图案，同时使用反向图案作为掩模以防止被保护层覆盖的区域被蚀刻。

16. 发明申请

US20090152239A1 PROCESS FOR PRODUCING A CHIP USING A MOLD 有权
标题翻译：使用模具生产切片的方法
公开(公告)号：US20090152239A1
公开(公告)日：2009-06-18
申请号：US12388179
申请日：2009-02-18
申请人： Atsunori TERASAKI , Junichi SEKI , Nobuhito SUEHIRA , Hideki INA , Shingo OKUSHIMA
发明人： Atsunori TERASAKI , Junichi SEKI , Nobuhito SUEHIRA , Hideki INA , Shingo OKUSHIMA
IPC分类号： B44C1/22
CPC分类号： B29C59/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F9/7042
摘要： A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate 2010 formed of a first material and an alignment mark 2102 formed of a second material different from the first material. The first material and the second material have transmissivities to light in a part of an ultraviolet wavelength range. The second material has a refractive index of not less than 1.7.
摘要翻译：该模具能够在将待固化的树脂材料设置在模具和待加工构件之间的状态下与要处理的构件高度准确地对准，并且由第一材料和对准构成的基板2010构成标记2102由与第一材料不同的第二材料形成。第一材料和第二材料在紫外线波长范围的一部分中具有透光性。第二种材料的折射率不小于1.7。

17. 发明授权

US08741192B2 Method and device for producing micro-droplets 有权
标题翻译：用于生产微滴的方法和装置
公开(公告)号：US08741192B2
公开(公告)日：2014-06-03
申请号：US10593783
申请日：2005-03-15
申请人： Toru Torii , Toshiro Higuchi , Takashi Nishisako , Shingo Okushima
发明人： Toru Torii , Toshiro Higuchi , Takashi Nishisako , Shingo Okushima
IPC分类号： A61M31/00 , A61K9/00 , B01L3/02
CPC分类号： B01F13/0071 , B01F3/0807 , B01F5/0471 , B01F13/0062 , B01F15/00253 , B01J13/04 , Y10T137/0391 , Y10T428/2982
摘要： A method and an apparatus for producing various types of microdroplets. The apparatus has a cross intersection portion at which a first continuous phase, a first dispersion phase, and a second dispersion phase intersect with each other. A first liquid feed device controls the first dispersion phase and a second liquid feed device controls the second dispersion phase. A control device is connected to the first liquid feed device and the second liquid feed device. The first liquid feed device and the second liquid feed device are controlled by a signal from the control device so that microdroplets formed of the first dispersion phase and microdroplets formed of the second dispersion phase are sequentially produced.
摘要翻译：一种用于生产各种微滴的方法和装置。该装置具有交叉相交部分，第一连续相位，第一分散相位和第二分散相位彼此相交。第一液体进料装置控制第一分散相，第二液体进料装置控制第二分散相。控制装置连接到第一液体供给装置和第二液体供给装置。第一液体供给装置和第二液体供给装置由来自控制装置的信号控制，从而顺序地产生由第一分散相形成的微滴和由第二分散相形成的微滴。

18. 发明授权

US08668484B2 Mold, imprint method, and process for producing a chip 有权
标题翻译：模具，压印方法和制造芯片的工艺
公开(公告)号：US08668484B2
公开(公告)日：2014-03-11
申请号：US12388194
申请日：2009-02-18
申请人： Atsunori Terasaki , Junichi Seki , Nobuhito Suehira , Hideki Ina , Shingo Okushima
发明人： Atsunori Terasaki , Junichi Seki , Nobuhito Suehira , Hideki Ina , Shingo Okushima
IPC分类号： B29C59/00
CPC分类号： B29C59/00 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F9/7042
摘要： A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate 2010 formed of a first material and an alignment mark 2102 formed of a second material different from the first material. The first material and the second material have transmissivities to light in a part of an ultraviolet wavelength range. The second material has a refractive index of not less than 1.7.
摘要翻译：该模具能够在将待固化的树脂材料设置在模具和待加工构件之间的状态下与要处理的构件高度准确地对准，并且由第一材料和对准构成的基板2010构成标记2102由与第一材料不同的第二材料形成。第一材料和第二材料在紫外线波长范围的一部分中具有透光性。第二种材料的折射率不小于1.7。

19. 发明授权

US08517518B2 Recording apparatus and liquid ejection head 有权
公开(公告)号：US08517518B2
公开(公告)日：2013-08-27
申请号：US13287402
申请日：2011-11-02
申请人： Ryota Kashu , Naoto Sasagawa , Seiichiro Karita , Takatsuna Aoki , Shingo Okushima , Eisuke Nishitani
发明人： Ryota Kashu , Naoto Sasagawa , Seiichiro Karita , Takatsuna Aoki , Shingo Okushima , Eisuke Nishitani
IPC分类号： B41J2/05 , B41J2/18
CPC分类号： B41J2/18 , B41J2/1404 , B41J2/14233 , B41J2/1433 , B41J2/145 , B41J2202/12
摘要： A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.

20. 发明申请

US20120113197A1 RECORDING APPARATUS AND LIQUID EJECTION HEAD 有权
标题翻译：记录装置和液体喷射头
公开(公告)号：US20120113197A1
公开(公告)日：2012-05-10
申请号：US13287402
申请日：2011-11-02
申请人： Ryota Kashu , Naoto Sasagawa , Seiichiro Karita , Takatsuna Aoki , Shingo Okushima , Eisuke Nishitani
发明人： Ryota Kashu , Naoto Sasagawa , Seiichiro Karita , Takatsuna Aoki , Shingo Okushima , Eisuke Nishitani
IPC分类号： B41J2/18
CPC分类号： B41J2/18 , B41J2/1404 , B41J2/14233 , B41J2/1433 , B41J2/145 , B41J2202/12
摘要： A recording apparatus including an ink tank and a recording head having a flow path forming portion that has an ejection orifice plate having plural ink ejection orifices and a liquid chamber provided for each orifice to supply ink to the orifices, and an energy generating element for ejecting ink in the chamber. A surface layer of the flow path forming portion opposes to the outside of the plate. An opening is provided opposing to the orifices in the surface layer. An ink reservoir is provided between the plate and the opening. A circulation flow path communicating with the ink reservoir is provided. The area of the opening is larger than that of the orifice. Both ends of the circulation flow path are respectively connected to inlet and outlet portions connected to the circulation flow path. The inlet and outlet portions and liquid chamber are connected to the ink tank.
摘要翻译：一种记录装置，包括墨盒和具有流路形成部分的记录头，该流路形成部具有具有多个墨喷射口的喷射孔板和为每个喷孔设置的用于向喷嘴供应墨水的液体室，以及用于喷射的能量产生元件墨水在室内。流路形成部的表面层与板的外侧相反。提供与表面层中的孔相对的开口。在所述板和所述开口之间设置有墨水储存器。提供与墨水容器连通的循环流路。开口面积大于孔口面积。循环流路的两端分别与连接于循环流路的入口部和出口部连接。入口和出口部分和液体室连接到墨水罐。

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