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11. 发明授权

US08419168B2 Liquid ejection head and manufacturing method therefor 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US08419168B2
公开(公告)日：2013-04-16
申请号：US13218851
申请日：2011-08-26
申请人： Akihiko Okano , Masahiko Kubota , Ryoji Kanri , Yoshiyuki Fukumoto , Masafumi Morisue
发明人： Akihiko Okano , Masahiko Kubota , Ryoji Kanri , Yoshiyuki Fukumoto , Masafumi Morisue
IPC分类号： B41J2/04
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1645 , Y10T29/49401
摘要： Provided is a liquid ejection head including a substrate including a liquid supply port and an energy generating element, in which the liquid supply port has at least one groove shape formed in a wall surface thereof, the at least one groove shape extending from a rear surface, which is a surface opposite to a front surface on which the energy generating element is formed, toward the front surface.
摘要翻译：本发明提供一种液体喷射头，其特征在于，包括：液体供给口和能量产生元件的基板，所述液体供给口和能量产生元件的壁面形成有至少一个槽形状，所述至少一个槽形状从后表面，其是形成有能量产生元件的正面的表面朝向前表面。

12. 发明授权

US08227043B2 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 有权
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US08227043B2
公开(公告)日：2012-07-24
申请号：US10565658
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： B05D1/36 , B05D7/00
CPC分类号： G03F7/038 , B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2002/14475 , Y10T29/49401
摘要： A method for manufacturing a liquid discharge head includes the steps of: forming a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid; forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer; forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer deposited on the solid layer; and removing the solid layer to form a flow path that communicates with the energy element and the discharge port. A material used for the coating layer contains a cationically polymerizable chemical compound, a cationic photopolymerization initiator and an inhibitor of cationic photopolymerization, and a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic acid and methacrylate ester.
摘要翻译：一种液体排出头的制造方法，其特征在于，包括以下步骤：在基板上形成固体层，所述基板上配置能量产生元件，以产生用于排出液体的能量; 在固体固体层的基板上形成用于涂覆固体层的涂层; 形成用于通过光刻工艺在沉积在固体层上的涂层中排出液体的排出口; 并且去除固体层以形成与能量元件和排出口连通的流路。用于涂层的材料包含阳离子可聚合化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，并且与形成涂层的排出口的部分形成边界的固体层的材料包含甲基丙烯酸和甲基丙烯酸酯的共聚物。

13. 发明授权

US07625069B2 Liquid discharge head having hollow portions for relaxing stress in the head and manufacturing method of the same 有权
标题翻译：具有用于在头部中缓和应力的中空部分的排液头及其制造方法
公开(公告)号：US07625069B2
公开(公告)日：2009-12-01
申请号：US11549871
申请日：2006-10-16
申请人： Naozumi Nabeshima , Toru Yamane , Takumi Suzuki , Masahiko Kubota , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai
发明人： Naozumi Nabeshima , Toru Yamane , Takumi Suzuki , Masahiko Kubota , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai
IPC分类号： B41J2/05
CPC分类号： B41J2/1404 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.
摘要翻译：液体排出头包括具有能量产生元件的基板，该能量产生元件被配置为产生排出液体所需的能量，排出端口，其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件，其限定适于存储的室由能量产生元件产生的能量排出液体所需的能量，限定连接腔室和排放口的流体路径的排出部分，便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分所述壁构件，其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口，并且所述中空部分与所述室独立。

14. 发明申请

US20070099121A1 Liquid discharge head manufacturing method, and liquid discharge head obtained using this method 失效
标题翻译：液体排出头的制造方法以及使用该方法得到的排液头
公开(公告)号：US20070099121A1
公开(公告)日：2007-05-03
申请号：US10576249
申请日：2005-06-27
申请人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
发明人： Masahiko Kubota , Takumi Suzuki , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai , Shoji Shiba , Etsuko Hino , Hiroe Ishikura , Akihiko Okano
IPC分类号： G03C5/00
CPC分类号： B41J2/1639 , B41J2/1603 , B41J2/1631 , B41J2002/14475 , G03F7/038
摘要： According to the present invention, a method for manufacturing a liquid discharge head includes the steps of depositing a solid layer for forming a flow path on a substrate on which an energy generating element is arranged to generate energy that is used to discharge liquid, forming, on the substrate where the solid layer is mounted, a coating layer for coating the solid layer, forming a discharge port used to discharge a liquid, through a photolithographic process, in the coating layer formed on the solid layer, and removing the solid layer to form a flow path that communicates with the energy element and the discharge port, whereby a material used for the coating layer contains a cationically polymerizable chemical compound, cationic photopolymerization initiator and a inhibitor of cationic photopolymerization, and whereby a material of the solid layer that forms a boundary with a portion where the discharge port of the coating layer is formed contains a copolymer of methacrylic anhydride and methacrylate ester.
摘要翻译：根据本发明，一种液体排出头的制造方法包括以下步骤：在其上布置能量产生元件的基板上沉积形成流路的固体层，以产生用于排出液体的能量，在固体层安装的基板上，涂布固体层的涂层，通过光刻工艺形成用于排出液体的排出口，在固体层上形成的涂层中去除固体层形成与能量元件和排出口连通的流路，由此用于涂层的材料含有阳离子聚合化学化合物，阳离子光聚合引发剂和阳离子光聚合抑制剂，由此形成固体层的材料与形成涂层的排出口的部分的边界包含甲基丙烯酸酐的共聚物甲基丙烯酸酯和甲基丙烯酸酯。

15. 发明申请

US20060114295A1 Liquid discharge head and method of manufacturing the same 失效
标题翻译：液体排放头及其制造方法
公开(公告)号：US20060114295A1
公开(公告)日：2006-06-01
申请号：US11288151
申请日：2005-11-29
申请人： Kazuhiro Asai , Masahiko Kubota , Ryoji Kanri
发明人： Kazuhiro Asai , Masahiko Kubota , Ryoji Kanri
IPC分类号： B41J2/05 , B41J2/04
CPC分类号： B41J2/1404 , B41J2002/14387
摘要： According to the present invention, a discharge speed of liquid droplets is increased, a discharge amount of liquid droplets is stabilized, and a discharge efficiency of the liquid droplets is enhanced. A bubbling chamber has: a first bubbling chamber which is connected to a supply path while a main surface of an element substrate is a bottom surface and in which bubbles are generated in ink by a heater; and a second bubbling chamber connected to the first bubbling chamber. Moreover, a nozzle has a discharge port portion including a discharge port connected to the second bubbling chamber. Assuming that an average sectional area of the first bubbling chamber is S1, an average sectional area of the second bubbling chamber is S2, and an average sectional area of the discharge port portion is S3 in a section parallel to the main surface of the element substrate, the nozzle satisfies a relation of S2>S1>S3.
摘要翻译：根据本发明，液滴的排出速度增加，液滴的排出量稳定，液滴的排出效率提高。鼓泡室具有：第一鼓泡室，其连接到供应路径，而元件基板的主表面是底表面，并且其中通过加热器在油墨中产生气泡; 以及连接到第一鼓泡室的第二鼓泡室。此外，喷嘴具有包括连接到第二鼓泡室的排出口的排出口部分。假设第一鼓泡室的平均截面积为S 1，则第二鼓泡室的平均截面积为S 2，排出口部分的平均截面积为与主表面平行的截面的S 3 元件基板，喷嘴满足S 2> S 1> S 3的关系。

16. 发明申请

US20060092246A1 Method for manufacturing a filter substrate, inkjet recording head, and method for manufacturing the inkjet recording head 失效
标题翻译：用于制造过滤器基板的方法，喷墨记录头以及用于制造喷墨记录头的方法
公开(公告)号：US20060092246A1
公开(公告)日：2006-05-04
申请号：US11263425
申请日：2005-10-31
申请人： Masataka Kato , Makoto Terui , Ryoji Kanri
发明人： Masataka Kato , Makoto Terui , Ryoji Kanri
IPC分类号： B41J2/05 , B41J2/175
CPC分类号： B41J2/1639 , B41J2/1603 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1635
摘要： A filter capable of separating or filtering micro foreign particles in a flow passage is provided. A first mask and a second mask are formed on a silicon substrate by dry etching. Before performing the dry etching, a resist of the first mask is subjected to a heat treatment performed at a temperature equal to or higher than a glass transition point. A resist of the second mask is not subjected to such a heat treatment. This processing simultaneously forms in the substrate a groove portion and a wall having a hole that is located in the groove portion. A silicon material located beneath a wide portion of the first mask remains as a wall portion separating the holes.
摘要翻译：提供了能够分离或过滤流路中的微小异物的过滤器。通过干蚀刻在硅衬底上形成第一掩模和第二掩模。在进行干蚀刻之前，对第一掩模的抗蚀剂进行在玻璃化转变点以上的温度下进行的热处理。第二掩模的抗蚀剂不进行这种热处理。这种处理在基板中同时形成有槽部分和具有位于槽部分中的孔的壁。位于第一掩模的宽部分下方的硅材料保留为分离孔的壁部分。

17. 发明授权

US06953530B2 Forming method of ink jet print head substrate and ink jet print head substrate, and manufacturing method of ink jet print head and ink jet print head 失效
标题翻译：喷墨打印头基板和喷墨打印头基板的成型方法以及喷墨打印头和喷墨打印头的制造方法
公开(公告)号：US06953530B2
公开(公告)日：2005-10-11
申请号：US10081184
申请日：2002-02-25
申请人： Ryoji Kanri
发明人： Ryoji Kanri
IPC分类号： B41J2/16
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645
摘要： The invention provides a forming method of an ink jet print head substrate and an ink jet print head substrate, and a manufacturing method of an ink jet print head and an ink jet print head, in which adhesion between a substrate for forming an ink discharging pressure generating element and an ink flow path forming member is increased to increase reliability even if an ink flow path forming member is formed covering a long distance. In a forming method of an ink jet print head substrate or the like, in which an ink flow path forming member is attached onto a substrate on which an ink discharging pressure generating element is formed, minute pit is formed on an attachment region of the substrate for attaching the liquid flow path forming member.
摘要翻译：本发明提供一种喷墨打印头基板和喷墨打印头基板的形成方法，以及喷墨打印头和喷墨打印头的制造方法，其中用于形成喷墨压力的基板即使形成油墨流路形成部件长距离地形成，产生元件和油墨流路形成部件也增加，以提高可靠性。在喷墨打印头基板等的形成方法中，在其上形成有墨水排出压力产生元件的基板上安装有油墨流路形成部件，在基板的附着区域上形成有微小的凹坑用于安装液体流路形成构件。

18. 发明授权

US08557164B2 Liquid discharge head and manufacturing method of the same 失效
标题翻译：排液头及其制造方法相同
公开(公告)号：US08557164B2
公开(公告)日：2013-10-15
申请号：US12581666
申请日：2009-10-19
申请人： Naozumi Nabeshima , Toru Yamane , Takumi Suzuki , Masahiko Kubota , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai
发明人： Naozumi Nabeshima , Toru Yamane , Takumi Suzuki , Masahiko Kubota , Tamaki Sato , Ryoji Kanri , Maki Hatta , Kazuhiro Asai
IPC分类号： B29C33/76
CPC分类号： B41J2/1404 , B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1645 , Y10T29/49401
摘要： A liquid discharge head includes a substrate having an energy generating element configured to generate energy required to discharge liquid, a discharge port configured to discharge the liquid and provided in an opposed relationship to the energy generating element, a wall member defining a chamber adapted to store the energy required to discharge liquid the energy being generated by the energy generating element, a discharge portion defining a fluid path connecting the chamber and the discharge port, a supply path facilitating supplying the liquid into the chamber, and a pair of hollow portions provided in the wall member, wherein the hollow portions oppose each other and sandwich at least the entire discharge port in a direction from the discharge port to the substrate, and the hollow portions are independent of the chamber.
摘要翻译：液体排出头包括具有能量产生元件的基板，该能量产生元件被配置为产生排出液体所需的能量，排出端口，其构造成排出液体并以与该能量产生元件相对的关系提供;壁构件，其限定适于存储的室由能量产生元件产生的能量排出液体所需的能量，限定连接腔室和排放口的流体路径的排出部分，便于将液体供应到腔室中的供应路径以及设置在腔室中的一对中空部分所述壁构件，其中所述中空部分彼此相对并且在从所述排出口到所述基板的方向上至少夹着所述排出口的整个排出口，并且所述中空部分与所述室独立。

19. 发明申请

US20120069094A1 LIQUID EJECTION HEAD AND MANUFACTURING METHOD THEREFOR 有权
标题翻译：液体喷射头及其制造方法
公开(公告)号：US20120069094A1
公开(公告)日：2012-03-22
申请号：US13218851
申请日：2011-08-26
申请人： Akihiko Okano , Masahiko Kubota , Ryoji Kanri , Yoshiyuki Fukumoto , Masafumi Morisue
发明人： Akihiko Okano , Masahiko Kubota , Ryoji Kanri , Yoshiyuki Fukumoto , Masafumi Morisue
IPC分类号： B41J2/045 , B23P17/00
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1645 , Y10T29/49401
摘要： Provided is a liquid ejection head including a substrate including a liquid supply port and an energy generating element, in which the liquid supply port has at least one groove shape formed in a wall surface thereof, the at least one groove shape extending from a rear surface, which is a surface opposite to a front surface on which the energy generating element is formed, toward the front surface.
摘要翻译：本发明提供一种液体喷射头，其特征在于，包括：液体供给口和能量产生元件的基板，所述液体供给口和能量产生元件的壁面形成有至少一个槽形状，所述至少一个槽形状从后表面，其是形成有能量产生元件的正面的表面朝向前表面。

20. 发明申请

US20120028383A1 PROCESSING METHOD OF SILICON SUBSTRATE AND LIQUID EJECTION HEAD MANUFACTURING METHOD 有权
标题翻译：硅基板和液体喷射头制造方法的处理方法
公开(公告)号：US20120028383A1
公开(公告)日：2012-02-02
申请号：US13186740
申请日：2011-07-20
申请人： Atsushi Hiramoto , Masahiko Kubota , Ryoji Kanri , Akihiko Okano , Yoshiyuki Fukumoto , Atsunori Terasaki
发明人： Atsushi Hiramoto , Masahiko Kubota , Ryoji Kanri , Akihiko Okano , Yoshiyuki Fukumoto , Atsunori Terasaki
IPC分类号： H01L21/3065
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2002/14467 , H01L21/30655
摘要： A processing method of a silicon substrate including forming a second opening in a bottom portion of a first opening using a patterning mask having a pattern opening by plasma reactive ion etching. The reactive ion etching is performed with a shield structure formed in or on the silicon substrate, the shield structure preventing inside of the first opening from being exposed to the plasma.
摘要翻译：一种硅衬底的处理方法，包括使用具有通过等离子体反应离子蚀刻的图案开口的图案化掩模在第一开口的底部形成第二开口。反应离子蚀刻通过形成在硅衬底中或之上的屏蔽结构进行，防止第一开口内部的屏蔽结构暴露于等离子体。

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