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11. 发明授权

US06763048B2 Line narrowing of molecular fluorine laser emission 失效
标题翻译：分子氟激光发射线窄
公开(公告)号：US06763048B2
公开(公告)日：2004-07-13
申请号：US09883128
申请日：2001-06-15
申请人： Sergei Govorkov , Klaus Vogler , Rainer Paetzel
发明人： Sergei Govorkov , Klaus Vogler , Rainer Paetzel
IPC分类号： H01S300
CPC分类号： H01S3/22 , H01S3/036 , H01S3/038 , H01S3/08004 , H01S3/08009 , H01S3/1055 , H01S3/106 , H01S3/134 , H01S3/2258 , H01S2301/02
摘要： A molecular fluorine laser system includes a discharge tube filled with a gas mixture including molecular fluorine and at least one buffer gas and having a total pressure of less than substantially 2500 mbar, multiple electrodes within the discharge tube, a pulsed discharge circuit connected to the electrodes for energizing the gas mixture, a line-selection optic for selecting one of multiple closely-spaced lines around 157 nm emitted from the discharge tube, and a laser resonator including the line-selection optic and the discharge tube for generating a beam of laser pulses having a wavelength around 157 nm at a bandwidth of less than 0.6 pm.
摘要翻译：分子氟激光系统包括：填充有包括分子氟和至少一种缓冲气体并且总压力小于基本上2500mbar的气体混合物的放电管，放电管内的多个电极，连接到电极的脉冲放电电路用于激励气体混合物，用于选择从放电管发射的157nm附近的多个紧密间隔的线之一的线选择光学器件，以及包括用于产生激光脉冲束的线选择光学器件和放电管的激光谐振器在小于0.6μm的带宽下具有约157nm的波长。

12. 发明授权

US07760788B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US07760788B2
公开(公告)日：2010-07-20
申请号：US12170249
申请日：2008-07-09
申请人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

13. 发明授权

US07245420B2 Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
公开(公告)号：US07245420B2
公开(公告)日：2007-07-17
申请号：US11654780
申请日：2007-01-18
申请人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei V. Govorkov , Gongxue Hua , Timur Misuryaev , Alexander O. Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00 , G02B27/14
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.

14. 发明申请

US20070115535A1 Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime 有权
标题翻译：具有长光学寿命的主振荡器功率放大器（MOPA）准分子或分子氟激光系统
公开(公告)号：US20070115535A1
公开(公告)日：2007-05-24
申请号：US11654780
申请日：2007-01-18
申请人： Sergei Govorkov , Gongxue Hua , Timur Misuryaev , Alexander Wiessner , Thomas Schmidt , Rainer Paetzel
发明人： Sergei Govorkov , Gongxue Hua , Timur Misuryaev , Alexander Wiessner , Thomas Schmidt , Rainer Paetzel
IPC分类号： H01S3/00
CPC分类号： G03F7/7055 , H01S3/0057 , H01S3/0835 , H01S3/235
摘要： The lifetime of optical components used in deep-UV (DUV) excimer laser systems, including systems in a MOPA configuration, can be increased by reducing the intensity of pulses incident upon these components. In one approach, an output pulse can be “stretched” in order to reduce the peak power of the pulse. A pulse stretching component can be used, which can be mounted outside the laser enclosure with a horizontal beam path in order to provide a delay line with a minimum impact on the laser system footprint. The horizontal beam path also can minimize the number of optical components in the arm containing the high power beam. A beamsplitting prism can be used with the delay line to avoid the rapid degradation of coatings otherwise exposed to intense UV beams. The prism can expand the beam in the delay line in order to minimize beam intensity and losses due to reflection.
摘要翻译：包括在MOPA配置中的系统的深UV（DUV）准分子激光系统中使用的光学部件的寿命可以通过降低入射在这些部件上的脉冲的强度来增加。在一种方法中，输出脉冲可以被“拉伸”，以便降低脉冲的峰值功率。可以使用脉冲拉伸部件，其可以安装在具有水平光束路径的激光外壳外部，以便提供对激光系统占地面积具有最小影响的延迟线。水平光束路径还可以使包含高功率光束的臂中的光学部件的数量最小化。分束棱镜可以与延迟线一起使用，以避免涂层的快速退化，否则暴露于强烈的UV光束。棱镜可以在延迟线中扩展光束，以便最小化光束强度和由于反射引起的损耗。

15. 发明授权

US06987790B2 Excimer or molecular fluorine laser with several discharge chambers 有权
标题翻译：具有多个放电室的准分子或分子氟激光
公开(公告)号：US06987790B2
公开(公告)日：2006-01-17
申请号：US10776137
申请日：2004-02-11
申请人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
发明人： Sergei V. Govorkov , Rainer Paetzel , Igor Bragin , Rainer Desor , Andreas Targsdorf , Andriy Knysh
IPC分类号： H01S3/22 , H01S3/223 , H01S3/097
CPC分类号： H01S3/225 , H01S3/09713 , H01S3/2366
摘要： Precise timing control can be obtained for a gas discharge laser, such as an excimer or molecular fluorine laser, using a timed trigger ionization. Instead of using a standard approach to control the timing of the emission or amplification of an optical pulse using the discharge of the main electrodes, the timing of which can only be controlled to within about 10 ns, a trigger ionization pulse applied subsequent to the charging of the main electrodes can be used to control the timing of the discharge, thereby decreasing the timing variations to about 1 ns. Since ionization of the laser gas can consume relatively small amounts of energy, such a circuit can be based on a fast, high-voltage, solid state switch that is virtually free of jitter. Trigger ionization also can be used to synchronize the timing of dual chambers in a MOPA configuration. In one such approach, ionization trigger can include at least a portion of the optical pulse from the oscillator in a MOPA configuration.
摘要翻译：使用定时触发电离可以为气体放电激光器（例如准分子激光或分子氟激光）获得准确的时序控制。代替使用标准方法来控制使用主电极的放电的光脉冲的发射或放大的定时，其定时只能被控制在约10ns内，在充电之后施加的触发电离脉冲的主电极可以用于控制放电的定时，从而将定时变化减小到大约1ns。由于激光气体的离子化可以消耗相对少量的能量，所以这种电路可以基于实际上没有抖动的快速，高电压的固态开关。触发电离也可用于同步MOPA配置中双室的时序。在一种这样的方法中，电离触发可以包括来自MOPA配置中的来自振荡器的光脉冲的至少一部分。

16. 发明授权

US07418022B2 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US07418022B2
公开(公告)日：2008-08-26
申请号：US11142648
申请日：2005-06-01
申请人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei V. Govorkov , Alexander O. W. Wiessner , Timur V. Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

17. 发明申请

US20080019411A1 Compact sealed-off excimer laser 审中-公开
标题翻译：紧凑型密封准分子激光器
公开(公告)号：US20080019411A1
公开(公告)日：2008-01-24
申请号：US11490386
申请日：2006-07-20
申请人： Norbert Niemoeller , Igor Bragin , Rainer Paetzel , Rustem Osmanow , Juergen Witt
发明人： Norbert Niemoeller , Igor Bragin , Rainer Paetzel , Rustem Osmanow , Juergen Witt
IPC分类号： H01S3/22
CPC分类号： H01S3/225 , H01S3/0305 , H01S3/036 , H01S3/0385
摘要： An excimer laser is disclosed in which a gas-discharge is formed for exciting an excimer-forming lasing-gas mixture. The gas discharge is formed between an elongated anode electrode and a elongated cathode electrode. The anode is in contact with a dielectric surface and the cathode is supported above the dielectric surface, laterally spaced from and parallel to the anode. The gas-discharge has a surface-discharge or sliding discharge portion extending from the anode over the dielectric surface, and a volume-discharge portion connecting the sliding-discharge portion to the cathode. The volume-discharge excites the lasing-gas mixture. A laser resonator is arranged to generate laser radiation from the excited gas mixture. The sliding-discharge has homogeneous, stable characteristics that are inherited by the volume-discharge. An ion-wind generator provides circulation of the lasing-gas mixture through the volume-discharge.
摘要翻译：公开了一种准分子激光器，其中形成气体放电以激发准分子成型激光气体混合物。气体放电形成在细长的阳极电极和细长的阴极电极之间。阳极与电介质表面接触，并且阴极被支撑在电介质表面的上方，与阳极横向间隔开并平行。气体放电具有从电介质表面上的阳极延伸的表面放电或滑动放电部，以及将滑动放电部连接到阴极的容积放电部。体积放电激发激光气体混合物。激光谐振器布置成从激发的气体混合物产生激光辐射。滑动放电具有由体积放电所遗传的均匀，稳定的特性。离子风发生器通过体积放电提供激光气体混合物的循环。

18. 发明申请

US20060171439A1 Master oscillator - power amplifier excimer laser system 有权
标题翻译：主振荡器 - 功率放大器准分子激光系统
公开(公告)号：US20060171439A1
公开(公告)日：2006-08-03
申请号：US11371411
申请日：2006-03-09
申请人： Sergei Govorkov , Rainer Paetzel
发明人： Sergei Govorkov , Rainer Paetzel
IPC分类号： H01S3/22
CPC分类号： H01S3/2366 , H01S3/005 , H01S3/0057 , H01S3/225 , H01S3/2325 , H01S3/2333 , H01S3/235
摘要： A Master Oscillator (MO)—Power Amplifier (PA) configuration (MOPA) can be used advantageously in an excimer laser system for micro-lithography applications, where semiconductor manufacturers demand powers of 40 W or more in order to support the throughput requirements of advanced lithography scanner systems. A MOPA-based laser system can provide both high pulse energies and high spectral purity. A MOPA system can utilize a multi-pass PA, as well as a special beam path capable of reducing the amount of ASE (Amplified Spontaneous Emission) and feedback to the MO. Lithography scanner optics are primarily fused silica, such that the peak pulse power must be kept low to avoid material compaction when a MOPA system is used with lithography applications. This conflict between the demand for high average power and the low peak power requirement of the pulsed excimer laser source can be resolved by using a novel beam path to generate a sufficiently long pulse length.
摘要翻译：主振荡器（MO） - 功率放大器（PA）配置（MOPA）可以有利地用于微光刻应用的准分子激光系统，其中半导体制造商需要40W或更高的功率，以支持先进的吞吐量要求光刻扫描仪系统。基于MOPA的激光系统可以提供高脉冲能量和高光谱纯度。 MOPA系统可以利用多通道PA，以及能够减少ASE（放大自发发射）量和向MO的反馈的特殊光束路径。平版印刷扫描仪光学器件主要是熔融石英，使得峰值脉冲功率必须保持较低，以避免当MOPA系统与光刻应用一起使用时的材料压实。可以通过使用新颖的光束路径来产生足够长的脉冲长度来解决脉冲准分子激光源的高平均功率需求和低峰值功率需求之间的这种冲突。

19. 发明申请

US20060007978A1 Bandwidth-limited and long pulse master oscillator power oscillator laser systems 有权
标题翻译：带宽限制和长脉冲主振荡器功率振荡器激光系统
公开(公告)号：US20060007978A1
公开(公告)日：2006-01-12
申请号：US11142648
申请日：2005-06-01
申请人： Sergei Govorkov , Alexander Wiessner , Timur Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
发明人： Sergei Govorkov , Alexander Wiessner , Timur Misyuryaev , Alexander Jacobson , Gongxue Hua , Rainer Paetzel , Thomas Schroeder , Hans-Stephan Albrecht
IPC分类号： H01S3/22
CPC分类号： H01S3/10092 , H01S3/08031 , H01S3/083 , H01S3/097 , H01S3/225 , H01S2301/02
摘要： Laser systems have a line-narrowed master oscillator and a power oscillator for amplifying the output of the master oscillator. The power oscillator includes optical arrangements for limiting the bandwidth of radiation that can be amplified. The limited amplification bandwidth of the power oscillator is relatively broad compared to that of the output of the master oscillator, but narrower than would be the case without the bandwidth limiting arrangements. The bandwidth narrowing arrangements of the power oscillator function primarily to restrict the bandwidth of amplified spontaneous emission generated by the power oscillator.
摘要翻译：激光系统具有线窄的主振荡器和用于放大主振荡器的输出的功率振荡器。功率振荡器包括用于限制可放大的辐射带宽的光学装置。与主振荡器的输出相比，功率振荡器的有限放大带宽相对较宽，但比没有带宽限制布置的情况更窄。功率振荡器的带宽窄化布置主要用于限制由功率振荡器产生的放大的自发发射的带宽。

20. 发明申请

US20050083984A1 Laser system sealing 审中-公开
标题翻译：激光系统密封
公开(公告)号：US20050083984A1
公开(公告)日：2005-04-21
申请号：US10963284
申请日：2004-10-12
申请人： Igor Bragin , Rainer Paetzel , Juergen Baumler , Heiko Diesing , Helmer Beulshausen , Ulrich Rebhan
发明人： Igor Bragin , Rainer Paetzel , Juergen Baumler , Heiko Diesing , Helmer Beulshausen , Ulrich Rebhan
IPC分类号： H01S3/03 , H01S3/036 , H01S3/22 , H01S3/225
CPC分类号： H01S3/036 , H01S3/03 , H01S3/225
摘要： The lifetime of the laser gas in a laser system such as an excimer laser can be increased by changing the way in which the laser system is sealed. In addition to primary seals used to seal the reservoir chamber and discharge channel, at least one secondary seal can be used between the primary seals and the surrounding environment in order to further prevent permeation of impurities into the discharge chamber, as well as to create an intermediate gas volume. A controlled atmosphere can be generated in the intermediate gas volume, which can be at a slightly higher pressure than the surrounding environment in order to resist the flow of impurities through the secondary seal(s). Further, a flow of purge gas can be introduced into the controlled atmosphere in order to carry away any impurities that leak through the secondary seal(s).
摘要翻译：通过改变激光系统被密封的方式，可以增加诸如准分子激光器之类的激光系统中的激光气体的寿命。除了用于密封储存室和排出通道的主密封件之外，可以在主密封件和周围环境之间使用至少一个二次密封件，以便进一步防止杂质渗透到排放室中，并且产生中间气体体积。可以在中间气体体积中产生受控的气氛，其可以处于比周围环境稍高的压力，以抵抗杂质通过二次密封件的流动。此外，吹扫气体流可以被引入到受控气氛中，以便携带通过二次密封件泄漏的任何杂质。

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