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    • 11. 发明授权
    • Method for fabricating a multi-level mask ROM
    • 多级掩模ROM的制造方法
    • US06180463B2
    • 2001-01-30
    • US09182013
    • 1998-10-29
    • Kazutaka Otsuki
    • Kazutaka Otsuki
    • H01L218236
    • H01L27/11233H01L27/1126
    • A method for fabricating a multi-level mask ROM includes the steps of forming a plurality of memory cell transistors, depositing and planarizing a dielectric film covering the memory cell transistors, forming an opening in the dielectric film in the area for a selected memory cell transistor, and injecting impurity ions through the opening and the gate electrode of the selected memory cell transistor into the channel area thereof to obtain a desired threshold voltage. Planarization of the dielectric film reduces scattering of the injected ions, thereby preventing transverse extension of the injected ions and achieving a higher integration of the multi-level mask ROM.
    • 一种制造多电平掩膜ROM的方法包括以下步骤:形成多个存储单元晶体管,沉积和平坦化覆盖存储单元晶体管的电介质膜,在所选择的存储单元晶体管的区域中形成电介质膜的开口 并且通过所选存储单元晶体管的开口和栅电极将杂质离子注入其沟道区域以获得期望的阈值电压。 电介质膜的平面化减少注入的离子的散射,从而防止注入的离子的横向延伸并实现多电平掩模ROM的更高的集成。
    • 15. 发明授权
    • Semiconductor device
    • 半导体器件使用虚拟图案来保留图案密度
    • US06177693B1
    • 2001-01-23
    • US09162886
    • 1998-09-30
    • Kazutaka Otsuki
    • Kazutaka Otsuki
    • H01L27108
    • H01L27/11253H01L27/0207H01L27/105H01L27/112H01L27/11293Y10S257/908Y10S257/909
    • In a memory cell section of a memory cell array in a semiconductor memory, N+ diffused layers and gate electrode conductors are located with the same line width and with an equal spacing. In a selector section, the N+ diffused layers and the gate electrode conductors are not located with an equal spacing. However, a dummy N+ diffused layer is added to an end of the N+ diffused layer in the selector section. In addition, a dummy N+ diffused layer is additionally located in a region which had existed as an empty region corresponding to the N+ diffused layer in the memory cell section. Thus, a resist pattern for the N+ diffused layers is formed as a designed pattern, and the characteristics of memory cell transistors or selector transistors is homogenized.
    • 在半导体存储器中的存储单元阵列的存储单元部分中,N +扩散层和栅极电极导体以相同的线宽和等间距定位。 在选择器部分中,N +扩散层和栅电极导体不是以相等的间距定位。 然而,在选择器部分中的N +扩散层的一端添加虚拟N +扩散层。 此外,虚拟N +扩散层另外位于存储单元部分中与N +扩散层对应的空区域的区域中。 因此,形成用于N +扩散层的抗蚀剂图案作为设计图案,并且存储单元晶体管或选择晶体管的特性被均匀化。
    • 16. 发明授权
    • SRAM
    • US08441076B2
    • 2013-05-14
    • US13100745
    • 2011-05-04
    • Kazutaka OtsukiJun-ichi Takizawa
    • Kazutaka OtsukiJun-ichi Takizawa
    • H01L31/119
    • H01L27/1104H01L27/11
    • An exemplary aspect of the present invention is an SRAM including: a first gate electrode that constitutes a first load transistor; a second gate electrode that extends in a longitudinal direction of the first gate electrode so as to be spaced apart from the first gate electrode, and constitutes a first drive transistor; a third gate electrode that extends in parallel to the first gate electrode, and constitutes a second load transistor; a first p-type diffusion region that is formed so as to intersect with the third gate electrode, and constitutes the second load transistor; and a first shared contact formed over the first and second gate electrodes and the first p-type diffusion region. The first p-type diffusion region extends to the vicinity of a first gap region between the first and second gate electrodes, and is not formed in the first gap region.
    • 本发明的示例性方面是一种SRAM,包括:构成第一负载晶体管的第一栅电极; 第二栅电极,其沿着所述第一栅电极的纵向方向延伸以与所述第一栅电极间隔开,并构成第一驱动晶体管; 第三栅电极,其平行于所述第一栅电极延伸,并构成第二负载晶体管; 形成为与第三栅电极交叉的第一p型扩散区,构成第二负载晶体管; 以及形成在第一和第二栅极电极和第一p型扩散区域上的第一共享接触。 第一p型扩散区域延伸到第一和第二栅电极之间的第一间隙区域附近,并且不形成在第一间隙区域中。
    • 18. 发明授权
    • Method of manufacturing semiconductor device having memory cell transistors
    • 制造具有存储单元晶体管的半导体器件的方法
    • US06436772B2
    • 2002-08-20
    • US09875050
    • 2001-06-07
    • Kazutaka Otsuki
    • Kazutaka Otsuki
    • H01L218236
    • H01L27/1126H01L21/266H01L27/112H01L27/11531Y10S438/923
    • A plurality of diffusion layers extending in a first direction is formed at a surface of a semiconductor substrate in a cell region to be provided with the memory cell transistors. A plurality of gate electrodes extending in a second direction perpendicular to the first direction is formed on the semiconductor substrate in the cell regions. An interlayer insulating film is formed on the semiconductor substrate. A first resist film is formed on the interlayer insulating film. The first resist film is provided with openings in positions in alignment with regions between adjacent diffusion layers among the plurality of diffusion layers. a second resist film provided with openings previously designed in an arbitrary manner is formed on the first resist film. Then ions are implanted in the cell region using the first and second resist films as a mask.
    • 在单元区域中的半导体衬底的表面上形成有沿第一方向延伸的多个扩散层,以提供存储单元晶体管。 在电池区域中的半导体衬底上形成有沿垂直于第一方向的第二方向延伸的多个栅电极。 在半导体基板上形成层间绝缘膜。 在层间绝缘膜上形成第一抗蚀剂膜。 第一抗蚀剂膜在多个扩散层中设置有与相邻扩散层之间的区域对准的位置的开口。 在第一抗蚀剂膜上形成设置有任意设计的开口的第二抗蚀剂膜。 然后使用第一和第二抗蚀剂膜作为掩模将离子注入单元区域。
    • 19. 发明授权
    • Memory cell structure of a mask programmable read only memory with ion-implantation stopper films
    • 具有离子注入阻挡膜的掩模可编程只读存储器的存储单元结构
    • US06204540B1
    • 2001-03-20
    • US09333992
    • 1999-06-16
    • Kazutaka Otsuki
    • Kazutaka Otsuki
    • H01L27112
    • H01L27/112H01L27/1126
    • A semiconductor structure includes a semiconductor active region of a first conductivity type including a channel region and a non-channel region surrounding the channel region; an insulation film extending over at least the channel region; at least a control electrode on the insulation film for applying an electric field to the channel region; at least a first diffusion region of the first conductivity type occupying the channel region for defining a threshold voltage of the channel region; and at least an ion-implantation stopper film covering at least a part of the non-channel region but not covering at least a center region of the control electrode, and the ion-implantation stopper film being made of a material preventing ions from penetrating the ion-implantation stopper film in an ion-implantation for forming the first diffusion region.
    • 半导体结构包括第一导电类型的半导体有源区,包括沟道区和围绕沟道区的非沟道区; 至少在所述通道区域延伸的绝缘膜; 所述绝缘膜上至少设置有用于向所述沟道区域施加电场的控制电极; 至少第一导电类型的第一扩散区域占据沟道区域,用于限定沟道区域的阈值电压; 以及至少覆盖所述非沟道区域的至少一部分但不覆盖所述控制电极的至少中心区域的离子注入阻挡膜,所述离子注入阻挡膜由防止离子渗透的物质构成 用于形成第一扩散区域的离子注入中的离子注入阻挡膜。
    • 20. 发明授权
    • Method for manufacturing NAND type semiconductor memory device
    • 用于制造NAND型半导体存储器件的方法
    • US5593904A
    • 1997-01-14
    • US451548
    • 1995-05-26
    • Teiichiro NishizakaKazutaka Otsuki
    • Teiichiro NishizakaKazutaka Otsuki
    • H01L21/8246H01L27/112
    • H01L27/1126H01L27/112
    • A plurality of gate electrodes are formed over a semiconductor substrate of a first conductivity type, and impurities of a second conductivity type are introduced into the substrate with a mask of the gate electrodes, to form source/drain impurity regions. Then, an insulating pattern is formed on the gate electrode and the source/drain impurity regions, and impurities of the second conductivity type are introduced into the substrate with a mask of the insulating pattern, to form a deep base region which is connected to one of the source/drain impurity regions. Also, impurities of the first conductivity type are introduced into the substrate with a mask of the insulating pattern, to form a shallow emitter region.
    • 在第一导电类型的半导体衬底上形成多个栅电极,并且用栅电极的掩模将第二导电类型的杂质引入到衬底中,以形成源/漏杂质区。 然后,在栅电极和源极/漏极杂质区上形成绝缘图案,并且用绝缘图案的掩模将第二导电类型的杂质引入到衬底中,以形成连接到绝缘图案的深基区 的源极/漏极杂质区域。 此外,第一导电类型的杂质用绝缘图案的掩模引入到衬底中,以形成浅的发射极区域。