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    • 1. 发明申请
    • SRAM
    • US20110278677A1
    • 2011-11-17
    • US13100745
    • 2011-05-04
    • Kazutaka OTSUKIJun-ichi TAKIZAWA
    • Kazutaka OTSUKIJun-ichi TAKIZAWA
    • H01L27/092
    • H01L27/1104H01L27/11
    • An exemplary aspect of the present invention is an SRAM including: a first gate electrode that constitutes a first load transistor; a second gate electrode that extends in a longitudinal direction of the first gate electrode so as to be spaced apart from the first gate electrode, and constitutes a first drive transistor; a third gate electrode that extends in parallel to the first gate electrode, and constitutes a second load transistor; a first p-type diffusion region that is formed so as to intersect with the third gate electrode, and constitutes the second load transistor; and a first shared contact formed over the first and second gate electrodes and the first p-type diffusion region. The first p-type diffusion region extends to the vicinity of a first gap region between the first and second gate electrodes, and is not formed in the first gap region.
    • 本发明的示例性方面是一种SRAM,包括:构成第一负载晶体管的第一栅电极; 第二栅电极,其沿着所述第一栅电极的纵向方向延伸以与所述第一栅电极间隔开,并构成第一驱动晶体管; 第三栅电极,其平行于所述第一栅电极延伸,并构成第二负载晶体管; 形成为与第三栅电极交叉的第一p型扩散区,构成第二负载晶体管; 以及形成在第一和第二栅极电极和第一p型扩散区域上的第一共享接触。 第一p型扩散区域延伸到第一和第二栅电极之间的第一间隙区域附近,并且不形成在第一间隙区域中。
    • 2. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07279376B2
    • 2007-10-09
    • US10998947
    • 2004-11-30
    • Kazutaka Otsuki
    • Kazutaka Otsuki
    • H01L21/76
    • H01L21/76229
    • The present invention provides a technology for forming the trenches having different depths in one semiconductor substrate, which enables easily conducting the photo resist process employed for the etch process and forming trenches at higher depth dimension accuracy. The openings of the first films are formed in the semiconductor substrate to expose surfaces of the semiconductor substrate, the semiconductor substrate is etched through the openings to a depth of the shallower trench and then the cell region is covered with the second photo resist pattern, and the peripheral region is etched through the first films to form the deeper trench. Since the etch process is conducted under the conditions, in which the surfaces of the semiconductor substrate are exposed (opened) within the openings in the first film, trenches having different depths can be formed with higher depth dimension accuracy by suitably controlling the etch conditions.
    • 本发明提供一种用于在一个半导体衬底中形成具有不同深度的沟槽的技术,其能够容易地传导用于蚀刻工艺的光刻胶工艺并以更高的深度尺寸精度形成沟槽。 第一膜的开口形成在半导体衬底中以暴露半导体衬底的表面,半导体衬底通过开口蚀刻到较浅沟槽的深度,然后电池区域被第二光刻胶图案覆盖,以及 通过第一膜蚀刻外围区域以形成更深的沟槽。 由于蚀刻工艺是在半导体衬底的表面在第一膜的开口内露出(打开)的条件下进行的,因此通过适当地控制蚀刻条件,可以以更高的深度尺寸精度形成具有不同深度的沟槽。
    • 6. 发明授权
    • Semiconductor device having mosfets formed in inherent and well regions
of a semiconductor substrate
    • 在半导体衬底的固有和阱区中形成有半导体器件的半导体器件
    • US5545911A
    • 1996-08-13
    • US350696
    • 1994-12-07
    • Kazutaka OtsukiMasaaki Yamada
    • Kazutaka OtsukiMasaaki Yamada
    • H01L29/78H01L21/336H01L21/74H01L27/08H01L27/088H01L29/10H01L29/76H01L29/80H01L29/94
    • H01L29/66575H01L21/74H01L27/088H01L29/1083
    • A semiconductor device has an inherent region of the same conductivity type and the same impurity concentration as a semiconductor substrate and well regions located close to each other under a main surface of the semiconductor substrate. A field oxide film is selectively formed on the main surface. A MOSFET, termed an "undoped MOSFET," is formed in the inherent region. A carrier stop layer having a conductivity type opposite to, and an impurity concentration higher than, that of the inherent region is formed within the inherent region. The carrier stop layer extends from the bottom of the field oxide film and underlies the source/drain regions of the undoped MOSFET in spaced relationship therewith. The carrier stop layer prevents punch-through between the well region and densely diffused source/drain regions in the undoped MOSFET region, even when they are located close to each other. The present invention permits a higher density integration of elements or circuits in a semiconductor device to be achieved than is possible in the prior art.
    • 半导体器件具有与半导体衬底的主表面相邻的半导体衬底和阱区相同的导电类型和相同的杂质浓度的固有区域。 在主表面上选择性地形成场氧化膜。 在固有区域中形成了称为“未掺杂MOSFET”的MOSFET。 在固有区域内形成具有与固有区域相反并且杂质浓度高于其固有区域的导电类型的载流子停止层。 载流子停止层从场氧化物膜的底部延伸并且与未掺杂的MOSFET的源极/漏极区域在其间隔开的关系中。 载体停止层即使在它们彼此靠近的位置时也防止了未掺杂的MOSFET区域中的阱区域和密集扩散的源极/漏极区域之间的穿透。 本发明允许在半导体器件中实现比现有技术中可能的元件或电路更高密度的集成。
    • 8. 发明申请
    • EMULSION FOR VIBRATION DAMPING MATERIALS
    • 用于振动阻尼材料的乳液
    • US20080245989A1
    • 2008-10-09
    • US12057928
    • 2008-03-28
    • Yukihiro MiyawakiKazutaka OtsukiDai NagaishiTakahiro Miwa
    • Yukihiro MiyawakiKazutaka OtsukiDai NagaishiTakahiro Miwa
    • E04B1/82
    • C08F2/26C08F257/02C09D5/02
    • The present invention has an object to provide at least one of the following (1) to (3). (1) To provide the following emulsion for vibration damping materials: it is excellent in vibration damping property, drying property, and mechanical stability; it can improve skinning property of the coating film surface; and it can form an excellent coating film which hardly collapses, for example, hardly sags, even if the emulsion is coated on the vertical surface and dried by heating at a high temperature. (2) To provide the following emulsion for vibration damping materials: it is excellent in vibration damping property and thermal drying property; it is hardly changed with time; it can improve the stability or dispersibility of the composition; and it can form a coating film exhibiting excellent vibration damping property even if the emulsion is coated on an inclined object. (3) To provide the following emulsion for vibration damping materials: it includes acrylic emulsion particles each having a core part and a shell part and exhibits high vibration damping property in a wide temperature region; it is excellent in mechanical stability; and it is also excellent in storage stability at a low temperature. The present invention relates to an emulsion for vibration damping materials, including an emulsion obtainable by emulsion polymerization of a monomer component, wherein the emulsion is obtainable by emulsion polymerization using an anionic emulsifier and/or a reactive emulsifier, and emulsion particles have an average particle diameter of 100 to 450 nm, and an emulsion for vibration damping materials, comprising acrylic emulsion particles each having a core part and a shell part, wherein the acrylic emulsion particles are obtainable by polymerizing a monomer component including a monomer having a Q value of 0.6 to 1.4 and an e value of −0.4 to −1.2.
    • 本发明的目的是提供以下(1)至(3)中的至少一个。 (1)为减震材料提供以下乳液:减振性能好,干燥性能好,机械稳定性好; 可以改善涂膜表面的表皮性能; 并且即使将乳液涂布在垂直面上并通过在高温下加热而干燥,也可以形成难以塌陷的优异的涂膜,例如几乎不下垂。 (2)为减震材料提供以下乳液:减震性能和热干性能优异; 随着时间的推移几乎没有变化 它可以提高组合物的稳定性或分散性; 并且即使将乳液涂覆在倾斜物体上,也可以形成具有优异的振动阻尼性能的涂膜。 (3)为减震材料提供以下乳液:它包括丙烯酸乳液颗粒,每个丙烯酸乳液颗粒均具有核心部分和外壳部分,并且在宽温度区域表现出高振动阻尼性能; 机械稳定性好; 并且在低温下的储存稳定性也优异。 本发明涉及一种用于减振材料的乳液,其包括可通过单体组分的乳液聚合获得的乳液,其中乳液可通过使用阴离子乳化剂和/或反应性乳化剂的乳液聚合获得,乳液颗粒具有平均颗粒 100〜450nm的直径,以及用于减震材料的乳液,其包含各自具有核心部分和壳部分的丙烯酸乳液颗粒,其中所述丙烯酸乳液颗粒可通过使包含Q值为0.6的单体的单体组分聚合而获得 至1.4,e值为-0.4至-1.2。
    • 9. 发明申请
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US20050142808A1
    • 2005-06-30
    • US10998947
    • 2004-11-30
    • Kazutaka Otsuki
    • Kazutaka Otsuki
    • H01L21/3065H01L21/76H01L21/762H01L21/768H01L21/8242H01L27/08H01L27/10H01L27/108H01L21/8238
    • H01L21/76229
    • The present invention provides a technology for forming the trenches having different depths in one semiconductor substrate, which enables easily conducting the photo resist process employed for the etch process and forming trenches at higher depth dimension accuracy. The openings of the first films are formed in the semiconductor substrate to expose surfaces of the semiconductor substrate, the semiconductor substrate is etched through the openings to a depth of the shallower trench and then the cell region is covered with the second photo resist pattern, and the peripheral region is etched through the first films to form the deeper trench. Since the etch process is conducted under the conditions, in which the surfaces of the semiconductor substrate are exposed (opened) within the openings in the first film, trenches having different depths can be formed with higher depth dimension accuracy by suitably controlling the etch conditions.
    • 本发明提供一种用于在一个半导体衬底中形成具有不同深度的沟槽的技术,其能够容易地传导用于蚀刻工艺的光刻胶工艺并以更高的深度尺寸精度形成沟槽。 第一膜的开口形成在半导体衬底中以暴露半导体衬底的表面,半导体衬底通过开口蚀刻到较浅沟槽的深度,然后电池区域被第二光刻胶图案覆盖,以及 通过第一膜蚀刻外围区域以形成更深的沟槽。 由于蚀刻工艺是在半导体衬底的表面在第一膜的开口内露出(打开)的条件下进行的,因此通过适当地控制蚀刻条件,可以以更高的深度尺寸精度形成具有不同深度的沟槽。