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    • 14. 发明申请
    • COLLABORATIVE SHARING WORKGROUP
    • 合作共享工作组
    • US20120310532A1
    • 2012-12-06
    • US13247788
    • 2011-09-28
    • Jeroen SnoeckJeffrey A. HamiltonJohn F. CameronBenedict J. G. AtkinsJeffrey H. Drake
    • Jeroen SnoeckJeffrey A. HamiltonJohn F. CameronBenedict J. G. AtkinsJeffrey H. Drake
    • G01C21/00
    • G06Q10/06
    • A collaborative sharing workgroup comprising a plurality of assets is disclosed. An integrated manager module is fixedly coupled with each asset, the integrated manager module comprising an asset systems monitor; a global navigation satellite system (GNSS) position information monitor; and an environment information monitor. In addition, a communications module is fixedly coupled with each asset. The communications module automatically shares information from each integrated manager module to each of the plurality of assets in the workgroup and similarly receives the shared information from each of the plurality of assets in the workgroup. A user guidance module is also coupled with each asset. The user guidance module utilizes the shared information to automatically update guidance information for an asset. Moreover, the user guidance module operates independently on each asset in a workgroup without utilizing a central managing device.
    • 公开了包括多个资产的协作共享工作组。 集成管理器模块与每个资产固定耦合,所述集成管理器模块包括资产系统监视器; 全球导航卫星系统(GNSS)位置信息监测器; 和环境信息监视器。 此外,通信模块与每个资产固定耦合。 通信模块自动地将来自每个集成管理器模块的信息共享到工作组中的多个资产中的每一个,并且类似地从工作组中的多个资产中的每一个接收共享信息。 用户指导模块还与每个资产相结合。 用户指导模块利用共享信息自动更新资产的指导信息。 此外,用户指导模块在工作组中的每个资产上独立地操作,而不使用中央管理设备。
    • 19. 发明授权
    • Electrostatic chuck with conformal insulator film
    • 带保形绝缘膜的静电吸盘
    • US5745331A
    • 1998-04-28
    • US381786
    • 1995-01-31
    • Shamouil ShamouilianSasson SomekhHyman J. LevinsteinManoocher BirangSemyon SherstinskyJohn F. Cameron
    • Shamouil ShamouilianSasson SomekhHyman J. LevinsteinManoocher BirangSemyon SherstinskyJohn F. Cameron
    • B23Q3/15H01L21/683H02N13/00
    • H01L21/6831H01L21/6833H02N13/00
    • An electrostatic chuck (20) for holding a substrate (75) comprises (i) a base (80) having an upper surface (95) with grooves (85) therein, the grooves (85) sized and distributed for holding coolant for cooling a substrate (75), and (ii) a substantially continuous insulator film (45) conformal to the grooves (85) on upper surface (95) of the base (80). The base (80) can be electrically conductive and capable of serving as the electrode (50) of the chuck (20), or the electrode (50) can be embedded in the insulator film (45). The insulator film (45) has a dielectric breakdown strength sufficiently high that when a substrate (75) placed on the chuck (20) and electrically biased with respect to the electrode (50), electrostatic charge accumulates in the substrate (75) and in the electrode (50) forming an electrostatic force that attracts and holds the substrate (75) to the chuck (20). Preferably the chuck (20) is fabricated using a pressure forming process, and more preferably using a pressure differential process.
    • 用于保持基板(75)的静电卡盘(20)包括(i)具有在其中具有凹槽(85)的上表面(95)的基部(80),所述凹槽(85)的尺寸和分布以保持用于冷却的冷却剂 衬底(75),和(ii)与基座(80)的上表面(95)上的凹槽(85)共形的基本上连续的绝缘膜(45)。 基座(80)可以是导电的并且能够用作卡盘(20)的电极(50),或者电极(50)可以嵌入绝缘膜(45)中。 绝缘体膜(45)具有足够高的绝缘击穿强度,当放置在卡盘(20)上并相对于电极(50)电偏置的基板(75)时,静电电荷积聚在基板(75)中 所述电极(50)形成吸引并保持所述基板(75)到所述卡盘(20)的静电力。 优选地,使用压力成形方法制造卡盘(20),更优选使用压差法。
    • 20. 发明授权
    • Collaborative sharing workgroup
    • 协作共享工作组
    • US08639434B2
    • 2014-01-28
    • US13247788
    • 2011-09-28
    • Jeroen SnoeckJeffrey A. HamiltonJohn F. CameronBenedict J. G. AtkinsJeffrey H. Drake
    • Jeroen SnoeckJeffrey A. HamiltonJohn F. CameronBenedict J. G. AtkinsJeffrey H. Drake
    • G06F19/00G06G7/70G01S1/00G06Q10/00
    • G06Q10/06
    • A collaborative sharing workgroup comprising a plurality of assets is disclosed. An integrated manager module is fixedly coupled with each asset, the integrated manager module comprising an asset systems monitor; a global navigation satellite system (GNSS) position information monitor; and an environment information monitor. In addition, a communications module is fixedly coupled with each asset. The communications module automatically shares information from each integrated manager module to each of the plurality of assets in the workgroup and similarly receives the shared information from each of the plurality of assets in the workgroup. A user guidance module is also coupled with each asset. The user guidance module utilizes the shared information to automatically update guidance information for an asset. Moreover, the user guidance module operates independently on each asset in a workgroup without utilizing a central managing device.
    • 公开了包括多个资产的协作共享工作组。 集成管理器模块与每个资产固定耦合,所述集成管理器模块包括资产系统监视器; 全球导航卫星系统(GNSS)位置信息监测器; 和环境信息监视器。 此外,通信模块与每个资产固定耦合。 通信模块自动地将来自每个集成管理器模块的信息共享到工作组中的多个资产中的每一个,并且类似地从工作组中的多个资产中的每一个接收共享信息。 用户指导模块还与每个资产相结合。 用户指导模块利用共享信息自动更新资产的指导信息。 此外,用户指导模块在工作组中的每个资产上独立地操作,而不使用中央管理设备。