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    • 122. 发明申请
    • Multilevel-Cell Memory Structures Employing Multi-Memory Layers with Tungsten Oxides and Manufacturing Method
    • 使用氧化钨的多存储器层的多层单元存储器结构和制造方法
    • US20080173931A1
    • 2008-07-24
    • US11625216
    • 2007-01-19
    • ChiaHua HoErh-Kun Lai
    • ChiaHua HoErh-Kun Lai
    • H01L27/00H01L21/44
    • H01L45/04H01L27/2409H01L27/2481H01L45/1233H01L45/1273H01L45/146H01L45/1633
    • The present invention provides multilevel-cell memory structures with multiple memory layer structures where each memory layer structure includes a tungsten oxide region that defines different read current levels for a plurality of logic states. Each memory layer structure can provide two bits of information, which constitutes four logic states, by the use of the tungsten oxide region that provides multilevel-cell function in which the four logic states equate to four different read current levels. A memory structure with two memory layer structures would provide four bits of storage sites and 16 logic states. In one embodiment, each of the first and second memory layer structures includes a tungsten oxide region extending into a principle surface of a tungsten plug member where the outer surface of the tungsten plug is surrounded by a barrier member.
    • 本发明提供具有多个存储层结构的多电平单元存储器结构,其中每个存储层结构包括为多个逻辑状态定义不同读取电流电平的氧化钨区域。 每个存储器层结构可以通过使用提供多电平单元功能的氧化钨区域来提供构成四个逻辑状态的两位信息,其中四个逻辑状态等于四个不同的读取电流电平。 具有两个存储器层结构的存储器结构将提供四位存储位置和16个逻辑状态。 在一个实施例中,第一和第二存储层结构中的每一个包括延伸到钨插塞构件的主表面中的钨氧化物区域,其中钨插塞的外表面被阻挡构件包围。
    • 125. 发明申请
    • Non-volatile memory and method for fabricating the same
    • 非易失性存储器及其制造方法
    • US20060205157A1
    • 2006-09-14
    • US11429070
    • 2006-05-05
    • Erh-Kun LaiHang-Ting LueYen-Hao ShihChia-Hua Ho
    • Erh-Kun LaiHang-Ting LueYen-Hao ShihChia-Hua Ho
    • H01L21/336
    • H01L27/11568H01L27/115H01L29/42348H01L29/66833H01L29/7923
    • A non-volatile memory is provided. The memory comprises a substrate, a dielectric layer, a conductive layer, an isolation layer, a buried bit line, a tunneling dielectric layer, a charge trapping layer, a barrier dielectric layer and a word line. Wherein, the dielectric layer is disposed on the substrate. The conductive layer is disposed on the dielectric layer. The isolation layer is disposed on the substrate and adjacent to the dielectric layer and the conductive layer. The buried bit line is disposed in the substrate and underneath the isolation layer. The tunneling dielectric layer is disposed on both the substrate and the sidewalls of the conductive layer and the isolation layer. The charge trapping layer is disposed on the tunneling dielectric layer and the barrier dielectric layer is disposed on the charge trapping layer. The word line is disposed on the substrate, crisscrossing with the buried bit line.
    • 提供非易失性存储器。 存储器包括衬底,电介质层,导电层,隔离层,掩埋位线,隧道电介质层,电荷俘获层,势垒介电层和字线。 其中介电层设置在基板上。 导电层设置在电介质层上。 隔离层设置在基板上并且邻近电介质层和导电层。 掩埋位线设置在衬底中并在隔离层下方。 隧道电介质层设置在导电层和隔离层的基板和侧壁上。 电荷捕获层设置在隧道介电层上,势垒介电层设置在电荷俘获层上。 字线设置在基板上,与埋入位线交叉。
    • 126. 发明申请
    • THREE-DIMENSIONAL MEMORY STRUCTURE AND MANUFACTURING METHOD THEREOF
    • 三维存储器结构及其制造方法
    • US20060197180A1
    • 2006-09-07
    • US11307221
    • 2006-01-27
    • Erh-Kun LaiMing-Chung Liang
    • Erh-Kun LaiMing-Chung Liang
    • H01L29/00
    • H01L27/1021H01L21/8221H01L23/5252H01L27/0688H01L2924/0002H01L2924/00
    • A three-dimensional memory structure and manufacturing method thereof is provided. A first stack layer is formed over a substrate. The first stack layer includes, from the substrate upwards, an n-type polysilicon layer, a conductive layer, an anti-fuse and another n-type polysilicon layer. The first stack layer is patterned to form a first stack circuit. Thereafter, a second stack layer is formed over the first stack circuit. The second stack layer includes, from the first stack circuit upwards, a p-type polysilicon layer, a conductive layer, an anti-fuse and another p-type polysilicon. The second stack layer is patterned to form a second stack circuit that crosses over the first stack circuit perpendicularly. The aforementioned steps are repeated to form more stack circuits above the substrate and hence produce a three-dimensional structure.
    • 提供三维记忆结构及其制造方法。 第一堆叠层形成在衬底上。 第一堆叠层从衬底向上包括n型多晶硅层,导电层,反熔丝和另一n型多晶硅层。 图案化第一堆叠层以形成第一堆叠电路。 此后,在第一堆叠电路上形成第二堆叠层。 第二堆叠层从第一堆叠电路向上包括p型多晶硅层,导电层,反熔丝和另一p型多晶硅。 图案化第二堆叠层以形成垂直于第一堆叠电路的第二堆叠电路。 重复上述步骤以在衬底上形成更多的堆叠电路,并因此产生三维结构。
    • 128. 发明授权
    • Formation method of shallow trench isolation
    • 浅沟隔离的形成方法
    • US06566225B2
    • 2003-05-20
    • US09921580
    • 2001-08-06
    • Erh-Kun LaiHsin-Huei ChenYu-Ping Huang
    • Erh-Kun LaiHsin-Huei ChenYu-Ping Huang
    • H01L21336
    • H01L21/76224
    • The present invention provides a formation method of a trench structure comprising forming a pad oxide layer on a substrate. A first polysilicon layer is formed on the pad oxide layer and an oxide layer is formed thereon. A second polysilicon layer is formed on the oxide layer. The partial second polysilicon layer, the oxide layer, the first polysilicon layer, and the pad oxide layer are removed to expose the partial substrate. The second polysilicon layer and the partial substrate are etched for forming the trench structure in the substrate. An etched depth of the trench structure is well controlled by the etched thickness of the second polysilicon layer.
    • 本发明提供一种沟槽结构的形成方法,包括在衬底上形成衬垫氧化物层。 在衬垫氧化物层上形成第一多晶硅层,在其上形成氧化物层。 在氧化物层上形成第二多晶硅层。 去除部分第二多晶硅层,氧化物层,第一多晶硅层和衬垫氧化物层以暴露部分衬底。 蚀刻第二多晶硅层和部分衬底以在衬底中形成沟槽结构。 沟槽结构的蚀刻深度由第二多晶硅层的蚀刻厚度很好地控制。
    • 130. 发明授权
    • Multilevel-cell memory structures employing multi-memory layers with tungsten oxides and manufacturing method
    • 采用钨氧化物多层记忆层的多层单元记忆结构及制造方法
    • US08597976B2
    • 2013-12-03
    • US12683007
    • 2010-01-06
    • ChiaHua HoErh-Kun Lai
    • ChiaHua HoErh-Kun Lai
    • H01L21/00H01L21/16
    • H01L45/04H01L27/2409H01L27/2481H01L45/1233H01L45/1273H01L45/146H01L45/1633
    • The present invention provides multilevel-cell memory structures with multiple memory layer structures where each memory layer structure includes a tungsten oxide region that defines different read current levels for a plurality of logic states. Each memory layer structure can provide two bits of information, which constitutes four logic states, by the use of the tungsten oxide region that provides multilevel-cell function in which the four logic states equate to four different read current levels. A memory structure with two memory layer structures would provide four bits of storage sites and 16 logic states. In one embodiment, each of the first and second memory layer structures includes a tungsten oxide region extending into a principle surface of a tungsten plug member where the outer surface of the tungsten plug is surrounded by a barrier member.
    • 本发明提供具有多个存储层结构的多电平单元存储器结构,其中每个存储层结构包括为多个逻辑状态定义不同读取电流电平的氧化钨区域。 每个存储器层结构可以通过使用提供多电平单元功能的氧化钨区域来提供构成四个逻辑状态的两位信息,其中四个逻辑状态等于四个不同的读取电流电平。 具有两个存储器层结构的存储器结构将提供四位存储位置和16个逻辑状态。 在一个实施例中,第一和第二存储层结构中的每一个包括延伸到钨插塞构件的主表面中的钨氧化物区域,其中钨插塞的外表面被阻挡构件包围。