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    • 2. 发明授权
    • Self-aligned structure and method for confining a melting point in a resistor random access memory
    • 用于将熔点限制在电阻随机存取存储器中的自对准结构和方法
    • US08243494B2
    • 2012-08-14
    • US12235773
    • 2008-09-23
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • Erh-Kun LaiChiaHua HoKuang Yeu HsiehShih-Hung Chen
    • G11C16/02H01L29/417
    • H01L45/06G11C11/5678G11C13/0004H01L27/2436H01L45/1233H01L45/1246H01L45/144H01L45/148H01L45/1666
    • A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.
    • 制造具有用于切换可编程电阻存储器中的相位变化的限定熔化区域的电阻器随机存取存储器的过程。 该工艺最初形成了一个支柱,该支柱包括衬底主体,覆盖衬底主体的第一导电材料,覆盖第一导电材料的可编程电阻性存储器材料,覆盖在可编程电阻性存储器材料上的高选择性材料, 选择性材料。 柱中的高选择性材料在高选择性材料的两侧进行各向同性蚀刻,以在长度较小的高选择性材料的每侧产生空隙。 可编程电阻式存储器材料沉积在先前由多晶硅长度减小的限制区域中,并且可编程电阻式存储器材料沉积到先前由氮化硅材料占据的区域中。
    • 3. 发明授权
    • Resistor random access memory cell device
    • 电阻随机存取存储单元器件
    • US08178405B2
    • 2012-05-15
    • US12755897
    • 2010-04-07
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • H01L21/8242
    • H01L45/122G11C11/5678G11C13/0004H01L27/2436H01L45/06H01L45/144H01L45/1625H01L45/1641H01L45/1683
    • A memory cell device has a bottom electrode and a top electrode, a plug of memory material in contact with the bottom electrode, and a cup-shaped conductive member having a rim that contacts the top electrode and an opening in the bottom that contacts the memory material. Accordingly, the conductive path in the memory cells passes from the top electrode through the conductive cup-shaped member, and through the plug of phase change material to the bottom electrode. Also, methods for making the memory cell device include steps of forming a bottom electrode island including an insulative element and a stop element over a bottom electrode, forming a separation layer surrounding the island, removing the stop element to form a hole over the insulative element in the separation layer, forming a conductive film in the hole and an insulative liner over conductive film, etching to form a cup-shaped conductive film having a rim and to form an opening through the insulative liner and the bottom of the cup-shaped conductive film to the surface of the bottom electrode, forming a plug of phase change memory material in the opening, and forming a top electrode in contact with the rim of the cup-shaped conductive film.
    • 存储单元装置具有底部电极和顶部电极,与底部电极接触的存储器材料的插头以及具有接触顶部电极的边缘和接触存储器的底部开口的杯形导电构件 材料。 因此,存储单元中的导电路径从顶部电极通过导电杯状构件,并通过相变材料的塞子到达底部电极。 此外,用于制造存储单元器件的方法包括在底部电极上形成包括绝缘元件和止动元件的底部电极岛的步骤,形成围绕岛的分离层,去除止动元件以在绝缘元件上方形成孔 在分离层中,在孔中形成导电膜,在导电膜上形成绝缘衬垫,进行蚀刻以形成具有边缘的杯形导电膜,并且通过绝缘衬垫和杯状导电体的底部形成开口 在底部电极的表面形成薄膜,在开口中形成相变记忆材料塞,形成与杯状导电膜的边缘接触的顶部电极。
    • 6. 发明授权
    • Method for forming self-aligned thermal isolation cell for a variable resistance memory array
    • 用于形成用于可变电阻存储器阵列的自对准热隔离单元的方法
    • US07923285B2
    • 2011-04-12
    • US12351692
    • 2009-01-09
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • Erh-Kun LaiChiaHua HoKuang Yeu Hsieh
    • H01L21/00
    • H01L45/06H01L45/1233H01L45/1293H01L45/144H01L45/1683
    • A non-volatile memory with a self-aligned RRAM element includes a lower electrode element, generally planar in form, having an inner contact surface; an upper electrode element, spaced from the lower electrode element; a containment structure extends between the upper electrode element and the lower electrode element, with a sidewall spacer element having a generally funnel-shaped central cavity with a central aperture; and a spandrel element positioned between the sidewall spacer element and the lower electrode. A RRAM element extends between the lower electrode element and the upper electrode, occupying at least a portion of the sidewall spacer element central cavity and projecting from the sidewall spacer terminal edge toward and making contact with the lower electrode. In this manner, the spandrel element inner surface is spaced from the RRAM element to define a thermal isolation cell adjacent the RRAM element.
    • 具有自对准RRAM元件的非易失性存储器包括具有内接触表面的大体平面形状的下电极元件; 与所述下电极元件间隔开的上电极元件; 容纳结构在上电极元件和下电极元件之间延伸,侧壁间隔元件具有大致漏斗形的具有中心孔的中心腔; 以及位于侧壁间隔元件和下电极之间的突出元件。 RRAM元件在下电极元件和上电极之间延伸,占据侧壁间隔件元件中心腔的至少一部分并且从侧壁间隔件端子边缘朝向和与下电极接触。 以这种方式,伞形元件内表面与RRAM元件间隔开以限定与RRAM元件相邻的热隔离单元。
    • 8. 发明申请
    • Structures and Methods of a Bistable Resistive Random Access Memory
    • 双稳态电阻随机存取存储器的结构和方法
    • US20070257300A1
    • 2007-11-08
    • US11381973
    • 2006-05-05
    • ChiaHua HoErh-Kun LaiKuang Hsieh
    • ChiaHua HoErh-Kun LaiKuang Hsieh
    • H01L29/788H01L21/336H01L21/8234H01L21/8244
    • H01L27/101H01L27/24H01L45/04H01L45/145
    • Structures and methods to form a bistable resistive random access memory for reducing the amount of heat dissipation from electrodes by confining a heating region in the memory cell device are described. The heating region is confined in a kernel comprising a programmable resistive memory material that is in contact with an upper programmable resistive memory member and a lower programmable resistive memory member. The lower programmable resistive member has sides that align with sides of a bottom electrode comprising a tungsten plug. The lower programmable resistive member and the bottom electrode function a first conductor so that the amount of heat dissipation from the first conductor is reduced. The upper programmable resistive memory material and a top electrode function as a second conductor so that the amount of heat dissipation from the second conductor is reduced.
    • 描述了形成双稳态电阻随机存取存储器的结构和方法,用于通过将加热区限制在存储单元装置中来减少从电极散热的量。 加热区域被限制在包括与上可编程电阻存储器构件和下可编程电阻存储器构件接触的可编程电阻性存储器材料的内核中。 下部可编程电阻构件具有与包括钨插件的底部电极的侧面对准的侧面。 下可编程电阻构件和底电极起第一导体的作用,使得来自第一导体的散热量减小。 上部可编程电阻性存储器材料和顶部电极用作第二导体,使得来自第二导体的散热量减少。
    • 9. 发明授权
    • Multilevel-cell memory structures employing multi-memory layers with tungsten oxides and manufacturing method
    • 采用钨氧化物多层记忆层的多层单元记忆结构及制造方法
    • US08597976B2
    • 2013-12-03
    • US12683007
    • 2010-01-06
    • ChiaHua HoErh-Kun Lai
    • ChiaHua HoErh-Kun Lai
    • H01L21/00H01L21/16
    • H01L45/04H01L27/2409H01L27/2481H01L45/1233H01L45/1273H01L45/146H01L45/1633
    • The present invention provides multilevel-cell memory structures with multiple memory layer structures where each memory layer structure includes a tungsten oxide region that defines different read current levels for a plurality of logic states. Each memory layer structure can provide two bits of information, which constitutes four logic states, by the use of the tungsten oxide region that provides multilevel-cell function in which the four logic states equate to four different read current levels. A memory structure with two memory layer structures would provide four bits of storage sites and 16 logic states. In one embodiment, each of the first and second memory layer structures includes a tungsten oxide region extending into a principle surface of a tungsten plug member where the outer surface of the tungsten plug is surrounded by a barrier member.
    • 本发明提供具有多个存储层结构的多电平单元存储器结构,其中每个存储层结构包括为多个逻辑状态定义不同读取电流电平的氧化钨区域。 每个存储器层结构可以通过使用提供多电平单元功能的氧化钨区域来提供构成四个逻辑状态的两位信息,其中四个逻辑状态等于四个不同的读取电流电平。 具有两个存储器层结构的存储器结构将提供四位存储位置和16个逻辑状态。 在一个实施例中,第一和第二存储层结构中的每一个包括延伸到钨插塞构件的主表面中的钨氧化物区域,其中钨插塞的外表面被阻挡构件包围。