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121. 发明授权

US5852621A Pulse laser with pulse energy trimmer 失效
标题翻译：带脉冲能量微调器的脉冲激光器
公开(公告)号：US5852621A
公开(公告)日：1998-12-22
申请号：US897665
申请日：1997-07-21
申请人： Richard L. Sandstrom
发明人： Richard L. Sandstrom
IPC分类号： H01S3/097 , G02F1/03 , H01S3/00 , H01S3/115 , H01S3/137 , H01S3/10
CPC分类号： H01S3/0057 , G02F1/0327 , H01S2301/08
摘要： A pulse laser system for providing precise control of laser pulse energy. A fast pulse energy detector having response time in the nanosecond or sub-nanosecond range provides an electrical signal representing pulse energy to a trigger circuit, which integrates the signal and triggers an electro-optic switch when the integrated signal reaches a predetermined level. The operation of the electro-optic switch trims a portion of the pulse energy so that the resulting pulse energy is maintained at a consistent and desired level. In a preferred embodiment, the electro-optic switch includes a Pockels cell and at least one polarizing beam splitter. In this preferred embodiment, an optical delay line provides additional time for the pulse trimming components to operate.
摘要翻译：脉冲激光系统，用于提供激光脉冲能量的精确控制。具有在纳秒或亚纳秒范围内的响应时间的快速脉冲能量检测器向触发电路提供表示脉冲能量的电信号，该触发电路在集成信号达到预定水平时对信号进行积分并触发电光开关。电光开关的操作调整脉冲能量的一部分，使得所产生的脉冲能量保持在一致和期望的水平。在优选实施例中，电光开关包括普克尔（Pockels）单元和至少一个偏振分束器。在该优选实施例中，光学延迟线为脉冲修整组件提供额外的时间来操作。

122. 发明授权

US5420877A Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby 失效
标题翻译：由此控制的波表和可调谐激光器的温度补偿方法和装置
公开(公告)号：US5420877A
公开(公告)日：1995-05-30
申请号：US093352
申请日：1993-07-16
申请人： Richard L. Sandstrom
发明人： Richard L. Sandstrom
IPC分类号： G01J9/00 , G01J20060101 , G01J9/02 , H01S20060101 , H01S3/13 , H01S5/0687
CPC分类号： G01J9/0246 , H01S3/13 , H01S5/0687
摘要： Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby which avoids the necessity of maintaining a good vacuum in the wave meter housing and which provides the quick establishment of wave length accuracy after laser turn on before temperature stability in the wave meter is reached. In accordance with the method, the wave meter housing is filled preferably with one atmosphere of dry nitrogen, and the wave meter output is corrected for temperature effects by combining the uncorrected or raw wave meter output with an appropriate wave meter temperature dependent component and an additional appropriate rate of change of wave meter temperature dependent component. The net result is the achievement of accuracy and stability in the wave meter output without use of an oven and before a steady state operating temperature is attained.
摘要翻译：波长计和可调谐激光器的温度补偿方法和装置，从而避免了在波表内保持良好真空的必要性，并且在达到波长计的温度稳定性之前，激光打开后能够快速建立波长精度。根据该方法，优选地，用一个大气压的干氮填充波表，并且通过将未校正或原始波长计输出与适当的波长计温度相关分量组合，并对其进行温度效应校正，波形仪温度相关分量的适当变化率。最终的结果是在不使用烘箱的情况下以及达到稳态工作温度之前实现了波表输出的精度和稳定性。

123. 发明授权

US5033055A Compact excimer laser 失效
标题翻译：紧凑型准分子激光
公开(公告)号：US5033055A
公开(公告)日：1991-07-16
申请号：US550658
申请日：1990-07-10
申请人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
发明人： Robert P. Akins , Donald G. Larson , Uday K. Sengupta , Richard L. Sandstrom
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译：一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。气体位于激光腔内，气体能够起激光作用。一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。一对电极中的一个位于腔内的中心位置并且接地到壳体结构。一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。

124. 发明授权

US08810902B2 Multi-pass optical apparatus 有权
标题翻译：多路光学仪器
公开(公告)号：US08810902B2
公开(公告)日：2014-08-19
申请号：US12980939
申请日：2010-12-29
申请人： Richard L. Sandstrom
发明人： Richard L. Sandstrom
IPC分类号： G02B5/08 , H01S4/00 , G02B7/182 , G02B17/00 , G02B7/18 , H01S3/07 , H01S3/23
CPC分类号： G02B17/004 , G02B7/1815 , G02B7/1825 , H01S3/076 , H01S3/2325
摘要： An apparatus includes a first plurality of concave reflecting surfaces; a second plurality of reflecting surfaces facing the first plurality of concave reflecting surfaces such that a region is defined between the first and second pluralities; and an input for an optical beam to enter the region and an output for the optical beam to exit the region. The first and second pluralities of reflecting surfaces are arranged relative to each other so that the optical beam is re-imaged at a reflecting surface of one of the pluralities after only one reflection from a reflecting surface of the other of the pluralities and so that overlap of two or more optical beams on each of the reflecting surfaces is avoided.
摘要翻译：一种装置包括：第一多个凹面反射面; 面对所述第一多个凹反射表面的第二多个反射表面，使得在所述第一和第二多个之间限定区域; 以及用于进入该区域的光束的输入和用于使光束离开该区域的输出。第一和第二多个反射表面相对于彼此布置，使得光束在仅一次反射之后的多个反射表面中从多个另一个的反射表面重新成像，并且重叠避免了在每个反射表面上的两个或更多个光束。

125. 发明申请

US20110058580A1 EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER 有权
标题翻译：用于气体放电激光器的可扩展电极
公开(公告)号：US20110058580A1
公开(公告)日：2011-03-10
申请号：US12945719
申请日：2010-11-12
申请人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
发明人： Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
IPC分类号： H01S3/097 , H01S3/00
CPC分类号： H01S3/038 , H01S3/0381 , H01S3/09705 , H01S3/0971 , H01S3/225 , H01S3/2366
摘要： A movable electrode assembly for use in laser system includes a first electrode, a second electrode arranged opposite from the first electrode, the second electrode being spaced apart from the first electrode by a discharge gap and a discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A movable electrode assembly for integration into a housing of a laser system includes a first electrode having a discharge surface, a second electrode having a discharge surface, such that the discharge surface of the first electrode and the discharge surface of the second electrode face each other in a spaced apart setting that defines a desired discharge gap, and a mechanism for moveably adjusting the spaced apart setting toward the desired discharge gap. A method of adjusting a discharge gap is also disclosed.
摘要翻译：用于激光系统的可移动电极组件包括第一电极，与第一电极相对设置的第二电极，第二电极通过放电间隙与第一电极间隔开，放电间隙调节器与至少一个第二电极或第一电极，放电间隙调节器被配置为调节放电间隙。用于集成到激光系统的壳体中的可动电极组件包括具有放电表面的第一电极，具有放电表面的第二电极，使得第一电极的放电表面和第二电极的放电表面彼此面对在间隔开的设置中限定期望的放电间隙，以及用于可移动地将间隔开的设置调节到期望的放电间隙的机构。还公开了一种调节放电间隙的方法。

126. 发明授权

US07317179B2 Systems and methods to shape laser light as a homogeneous line beam for interaction with a film deposited on a substrate 有权
标题翻译：将激光形成为均匀线束以与沉积在基底上的膜相互作用的系统和方法
公开(公告)号：US07317179B2
公开(公告)日：2008-01-08
申请号：US11261845
申请日：2005-10-28
申请人： Robert P. Akins , Richard L. Sandstrom
发明人： Robert P. Akins , Richard L. Sandstrom
IPC分类号： G01B9/02
CPC分类号： B23K26/0604 , B23K26/0608 , B23K26/066 , B23K26/067 , B23K26/0738 , G02B27/0966 , G02B27/0988 , G02B27/46
摘要： Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.
摘要翻译：公开了用于使激光束成形和均匀化以与膜相互作用的系统和方法。成形和均质系统可以包括透镜阵列和透镜，其被定位成从透镜阵列接收激光，并且在透镜阵列中的每个透镜的平面中产生相应的细长图像。此外，该系统可以包括具有位于平面中的边缘的光束停止器，以及可移动的安装件，其旋转透镜阵列的透镜以改变其中一个细长图像与光束停止边缘之间的对准。

127. 发明授权

US06914927B2 Laser discharge chamber passivation by plasma 失效
标题翻译：激光放电室通过等离子体钝化
公开(公告)号：US06914927B2
公开(公告)日：2005-07-05
申请号：US10649186
申请日：2003-08-26
申请人： Tom A. Watson , Richard L. Sandstrom , Richard G. Morton , Robert E. Weeks , John P. Quitter , Mark R. Lewis
发明人： Tom A. Watson , Richard L. Sandstrom , Richard G. Morton , Robert E. Weeks , John P. Quitter , Mark R. Lewis
IPC分类号： H01L21/027 , B08B7/00 , G03F7/20 , H01S3/03 , H01S3/036 , H01S3/225 , H01S3/22 , H01S3/09 , H01S3/091
CPC分类号： B82Y10/00 , B08B7/0035 , B08B7/0042 , G03F7/70025 , H01J37/32862 , H01S3/036 , H01S3/225
摘要： Methods and apparatus are provided for cleaning and passivating laser discharge chambers with plasmas. In one embodiment, an oxygen based plasma is formed in a plasma source external to the laser discharge chamber by applying a radiofrequency signal to oxygen containing gases. The oxygen based plasma is drawn into the laser discharge chamber, where it reacts with contaminants and cleans internal surfaces. After cleaning, a fluorine based plasma is formed in the plasma source and drawn into the laser discharge chamber to passivate internal surfaces. In another embodiment, cleaning with the oxygen based plasma is not used since some level of cleaning is accomplished with the fluorine based plasma. In another embodiment, oxygen based plasmas and fluorine based plasmas are formed in the laser discharge chamber by applying a radiofrequency signal to a laser discharge chamber electrode. Plasma cleaning and passivation of laser discharge chambers is safer, more efficient, and more effective than conventional thermal cleaning and passivation processes.
摘要翻译：提供了用等离子体清洗和钝化激光放电室的方法和装置。在一个实施例中，通过对含氧气体施加射频信号，在激光放电室外部的等离子体源中形成氧基等离子体。氧基等离子体被吸入激光放电室，在其中与污染物反应并清洗内表面。在清洁之后，在等离子体源中形成氟基等离子体并被吸入激光放电室以钝化内表面。在另一个实施例中，不使用基于氧的等离子体的清洁，因为用氟基等离子体进行一些清洁水平。在另一个实施例中，通过向激光放电室电极施加射频信号，在激光放电室中形成氧基等离子体和基于氟的等离子体。激光放电室的等离子体清洁和钝化比传统的热清洗和钝化工艺更安全，更有效，更有效。

128. 发明授权

US06750972B2 Gas discharge ultraviolet wavemeter with enhanced illumination 有权
标题翻译：气体放电紫外线波长计增强照明
公开(公告)号：US06750972B2
公开(公告)日：2004-06-15
申请号：US10173190
申请日：2002-06-14
申请人： Richard L. Sandstrom , John T. Melchior , Rajasekhar Rao
发明人： Richard L. Sandstrom , John T. Melchior , Rajasekhar Rao
IPC分类号： G01B902
CPC分类号： G01J3/26 , G01J1/4257 , G01J1/429 , G01J3/02 , G01J3/0205 , G01J3/0208 , G01J3/024 , G01J3/027 , G01J9/02 , G01J9/0246 , G03F7/70025 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0401 , H01S3/041 , H01S3/08009 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/1024 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a wavemeter for an ultraviolet laser capable of long life beam quality monitoring in a pulsed ultraviolet laser system at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or greater. In a preferred embodiment an enhanced illumination configuration reduces per pulse illumination of an etalon by a factor of 28 compared to a popular prior art configuration. Optics are provided in this embodiment which reduce light entering the etalon to only that amount needed to illuminate a linear photo diode array positioned to measure interference patterns produced by the etalon. In this preferred embodiment two sample beams produced by reflections from two surfaces of a beam splitter are diffused by a defractive diffuser and the output of the defractive diffuser is focused on two separate secondary diffusers effectively combining both beams in two separate spectrally equivalent diffuse beams. One beam is used for wavelength and bandwidth measurement and the other beam is used for calibration. In preferred embodiments an etalon chamber contains nitrogen with an oxygen concentration of between 1.6 and 2.4 percent.
摘要翻译：本发明提供了一种用于紫外激光器的波长计，其能够在脉冲能量为5mJ以上的脉冲紫外激光系统中以大于2000Hz的脉冲速率进行长寿命光束质量监测。在一个优选实施例中，与常用的现有技术配置相比，增强的照明配置将标准具的每脉冲照明降低了28倍。在该实施例中提供光学器件，其将进入标准具的光仅仅照射照亮定位成测量由标准具产生的干涉图案的线性光电二极管阵列所需的量。在该优选实施例中，通过来自分束器的两个表面的反射产生的两个采样光束被减光扩散器扩散，并且消光扩散器的输出聚焦在两个分开的二次扩散器上，两个分离的二次扩散器在两个分开的光谱等效漫射光束中有效地组合两个光束。一个波束用于波长和带宽测量，另一个波束用于校准。在优选实施例中，标准具室含有氧浓度在1.6和2.4％之间的氮。

129. 发明授权

US06650666B2 Laser wavelength control unit with piezoelectric driver 有权
公开(公告)号：US06650666B2
公开(公告)日：2003-11-18
申请号：US10027210
申请日：2001-12-21
申请人： Ronald L. Spangler , Robert N. Jacques , John A. Rule , Frederick A. Palenschat , Igor V. Fomenkov , John M. Algots , Jacob P. Lipcon , Richard L. Sandstrom
发明人： Ronald L. Spangler , Robert N. Jacques , John A. Rule , Frederick A. Palenschat , Igor V. Fomenkov , John M. Algots , Jacob P. Lipcon , Richard L. Sandstrom
IPC分类号： H01S310
CPC分类号： G03F7/70575 , G03F7/70025 , G03F7/70041 , G03F7/70333 , G03F7/70933 , H01S3/02 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08036 , H01S3/097 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/1055 , H01S3/1305 , H01S3/1312 , H01S3/134 , H01S3/137 , H01S3/22 , H01S3/2207 , H01S3/225
摘要： An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to five milliseconds and on a very fast time frame of a few microseconds. Preferred techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control with the combination of a stepper motor and a piezoelectric driver. Very fast wavelength control is provided with a piezoelectric load cell in combination with the piezoelectric driver. Preferred embodiments provide (1) fast feedback control based on wavelength measurements, (2) fast vibration control, (3) active damping using the load cell and an active damping module, (4) transient inversion using feed forward algorithms based on historical burst data. A preferred embodiment adapts the feed forward algorithms to current conditions. Another preferred embodiment measures tuning mirror position to permit wavelength pretuning and active wavelength tuning.

130. 发明授权

US6078599A Wavelength shift correction technique for a laser 失效
标题翻译：激光波长漂移校正技术
公开(公告)号：US6078599A
公开(公告)日：2000-06-20
申请号：US898630
申请日：1997-07-22
申请人： George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom
发明人： George J. Everage , Igor V. Fomenkov , Palash P. Das , Richard L. Sandstrom
IPC分类号： H01S3/104 , G03F7/20 , H01S3/00 , H01S3/13 , H01S3/131 , H01S3/137 , H01S3/225 , H01S3/10
CPC分类号： G03F7/70575 , G03F7/70333 , H01S3/13 , H01S3/225
摘要： A wavelength shift correction system for a laser system is provided for correcting wavelength chirps. This wavelength shift correction system includes a learning algorithm that learns characteristics of a wavelength chirp from a laser and a computer system that executes the learning algorithm and provides wavelength correction control signals based on the learned characteristics to reduce the magnitude of the wavelength shift of the present wavelength chirp and subsequent wavelength chirps.
摘要翻译：提供用于激光系统的波长偏移校正系统用于校正波长线性调频脉冲。该波长偏移校正系统包括学习算法，其学习来自激光器的波长啁啾特性和执行学习算法的计算机系统，并且基于所学习的特征提供波长校正控制信号，以减小本发明的波长偏移的幅度波长啁啾和随后的波长啁啾。

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