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    • 123. 发明申请
    • SUBSTRATE HOLDING MECHANISM, SUBSTRATE POLISHING APPARATUS AND SUBSTRATE POLISHING METHOD
    • 基板保持机构,基板抛光装置和基板抛光方法
    • US20080318503A1
    • 2008-12-25
    • US12184032
    • 2008-07-31
    • Tetsuji TOGAWAToshio WatanabeHiroyuki YanoGen ToyotaKenji IwadeYoshikuni Tateyama
    • Tetsuji TOGAWAToshio WatanabeHiroyuki YanoGen ToyotaKenji IwadeYoshikuni Tateyama
    • B24B55/00B24B55/12
    • B24B37/015B24B41/061B24B55/02
    • A substrate holding mechanism, a substrate polishing apparatus and a substrate polishing method have functions capable of minimizing an amount of heat generated during polishing of a substrate to be polished and of effectively cooling a substrate holding part of the substrate holding mechanism, and also capable of effectively preventing a polishing solution and polishing dust from adhering to an outer peripheral portion of the substrate holding part and drying thereon. The substrate holding mechanism has a mounting flange, a support member 6 and a retainer ring. A substrate to be polished is held on a lower side of the support member surrounded by the retainer ring, and the substrate is pressed against a polishing surface of a polishing table. The mounting flange is provided with a flow passage contiguous with at least the retainer ring. A temperature-controlled gas is supplied through the flow passage to cool the mounting flange, the support member and the retainer ring. The retainer ring is provided with a plurality of through-holes communicating with the flow passage to spray the gas flowing through the flow passage onto the polishing surface of the polishing table.
    • 基板保持机构,基板研磨装置和基板研磨方法具有能够使待研磨基板的抛光时产生的热量最小化的功能,并有效地冷却基板保持机构的基板保持部,并且还能够 有效地防止研磨液和抛光尘埃附着在基板保持部的外周部并干燥。 基板保持机构具有安装凸缘,支撑构件6和保持环。 待研磨的基板被保持在由保持环包围的支撑构件的下侧,并且基板被压靠在抛光台的抛光表面上。 安装凸缘设置有至少与保持环相邻的流动通道。 通过流路供给温度控制气体以冷却安装凸缘,支撑构件和保持环。 保持环设置有与流路连通的多个通孔,以将流过流道的气体喷射到抛光台的抛光表面上。
    • 125. 发明授权
    • Substrate holding mechanism, substrate polishing apparatus and substrate polishing method
    • 基板保持机构,基板研磨装置和基板研磨方法
    • US07419420B2
    • 2008-09-02
    • US10539245
    • 2003-12-26
    • Tetsuji TogawaToshio WatanabeHiroyuki YanoGen ToyotaKenji IwadeYoshikuni Tateyama
    • Tetsuji TogawaToshio WatanabeHiroyuki YanoGen ToyotaKenji IwadeYoshikuni Tateyama
    • B24B49/00B24B5/00
    • B24B37/015B24B41/061B24B55/02
    • A substrate holding mechanism, a substrate polishing apparatus and a substrate polishing method have functions capable of minimizing an amount of heat generated during polishing of a substrate to be polished and of effectively cooling a substrate holding part of the substrate holding mechanism, and also capable of effectively preventing a polishing solution and polishing dust from adhering to an outer peripheral portion of the substrate holding part and drying thereon. The substrate holding mechanism has a mounting flange, a support member 6 and a retainer ring. A substrate to be polished is held on a lower side of the support member surrounded by the retainer ring, and the substrate is pressed against a polishing surface of a polishing table. The mounting flange is provided with a flow passage contiguous with at least the retainer ring. A temperature-controlled gas is supplied through the flow passage to cool the mounting flange, the support member and the retainer ring. The retainer ring is provided with a plurality of through-holes communicating with the flow passage to spray the gas flowing through the flow passage onto the polishing surface of the polishing table.
    • 基板保持机构,基板研磨装置和基板研磨方法具有能够使待研磨基板的抛光时产生的热量最小化的功能,并有效地冷却基板保持机构的基板保持部,并且还能够 有效地防止研磨液和抛光尘埃附着在基板保持部的外周部并干燥。 基板保持机构具有安装凸缘,支撑构件6和保持环。 待研磨的基板被保持在由保持环包围的支撑构件的下侧,并且基板被压靠在抛光台的抛光表面上。 安装凸缘设置有至少与保持环相邻的流动通道。 通过流路供给温度控制气体以冷却安装凸缘,支撑构件和保持环。 保持环设置有与流路连通的多个通孔,以将流过流道的气体喷射到抛光台的抛光表面上。
    • 126. 发明申请
    • Liquid Crystal Display Device and Cellular Phone Provided with the Same
    • 液晶显示装置及配备手机的手机
    • US20080030647A1
    • 2008-02-07
    • US11629837
    • 2005-06-22
    • Toshio WatanabeYasushi Kasajima
    • Toshio WatanabeYasushi Kasajima
    • G02F1/13357
    • G02B6/0055G02B6/0018G02B6/0038G02B6/0046G02B6/0063G02F2001/133342H04M1/0214H04M1/22H04M2250/16
    • A liquid crystal display device (B1) according to the present invention includes a first liquid crystal display panel (20A) forming a first display surface (14A), a second liquid crystal display panel (20B) forming a second display surface (14B) which is oriented in an opposite direction from the first display surface (14A), and a light guide plate (30) including a light emitting portion (31) sandwiched between the first and the second liquid crystal display panels (20A), (20B) and a light incident portion (32) provided continuously with the light emitting portion (31) and serving to introduce external light (L) into the light emitting portion (31). The first liquid crystal display panel (20A) is illuminated with external light (L) passed through the second display panel (20B) and the light emitting portion (31) of the light guide plate (30). The second liquid crystal display panel (20B) is illuminated with external light (L) impinged on the light incident surface (32a) of the light guide plate (30) and guided to the second liquid crystal display panel (20B) by the light emitting portion (31).
    • 根据本发明的液晶显示装置(B 1)包括形成第一显示面(14A)的第一液晶显示面板(20A),形成第二显示面的第二液晶显示面板(20B) (14B),其与第一显示面(14A)相反的方向定向;以及导光板(30),其包括被夹在第一和第二液晶显示面板(20)之间的发光部分(31) A),(20B)和连续设置有发光部分(31)并用于将外部光(L)引入发光部分(31)的光入射部分(32)。 第一液晶显示面板(20A)被穿过第二显示面板(20B)的外部光(L)和导光板(30)的发光部分(31)照亮。 第二液晶显示面板(20B)被照射在入射到导光板(30)的光入射面(32a)上的外部光(L),并被引导到第二液晶显示面板(20B),由第二液晶显示面板 发光部(31)。