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    • 125. 发明授权
    • Scanning probe microscope
    • 扫描探针显微镜
    • US06278113B1
    • 2001-08-21
    • US09166790
    • 1998-10-06
    • Ken MurayamaTakashi ShiraiTakafumi MorimotoHiroshi KurodaHarumasa OnozatoTsuyoshi Nishigaki
    • Ken MurayamaTakashi ShiraiTakafumi MorimotoHiroshi KurodaHarumasa OnozatoTsuyoshi Nishigaki
    • H01J3720
    • G01Q10/02G01Q10/04G01Q30/06H01J2237/20221Y10S977/872
    • A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section arranged on a standard surface of a microscope stage, which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism for moving the moving section in directions parallel to the standard surface.
    • 扫描探针显微镜设置有指向样品表面的探针尖端,用于提供样品和探针尖端之间的相对位置变化的XYZ精细运动机构,以及用于检测探针尖端的位移的位移检测部。 扫描探针显微镜通过使用控制信号测量样品的表面特性。 该控制信号是从位移检测部输出的信号生成的,并且用于保持样品与探针尖端之间产生的相互作用的状态与预定状态相同,同时探针尖端基于样品的表面扫描 关于XYZ精细机芯的操作。 此外,它包括布置在显微镜载物台的标准表面上的移动部分,其具有在上表面上的样品并且基于静压导向件沿着标准表面移动;高度位置控制部分,用于选择性地供应高压 流体移动到移动部分,以便执行静压引导件并将移动部分的高度位置控制到标准表面;以及致动机构,用于沿平行于标准表面的方向移动移动部分。
    • 126. 发明授权
    • Scanning probe microscope with the stage unit
    • 扫描探针显微镜与舞台单元
    • US06184533B2
    • 2001-02-06
    • US09166850
    • 1998-10-06
    • Takashi ShiraiKen MurayamaTakafumi MorimotoHiroshi KurodaHarumasa Onozato
    • Takashi ShiraiKen MurayamaTakafumi MorimotoHiroshi KurodaHarumasa Onozato
    • H01J3720
    • G01Q10/02Y10S977/872
    • A stage unit used for moving a sample comprises a vertical stage for moving a sample stand in a vertical direction, a horizontal stage for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table and the vertical stage is slidably arranged on the slide surface. The vertical stage is coupled with the horizontal stage by means of plate springs having strong rigidity in the horizontal direction and weak rigidity in the vertical direction. The whole rigidity of the stage unit is determined only by the vertical stage and is not subject to the effect of the rigidity of the sections included in the horizontal stage and the rigidity of a driving section as to each axis direction. The rigidity of the stage unit can be increased. The standstill rigidity of the stage unit is determined only by the rigidity of the vertical stage. All stages of the stage unit are not piled up. Therefore the height of stage unit can be decreased as low as possible.
    • 用于移动样品的平台单元包括用于沿垂直方向移动样品台的垂直平台,用于沿垂直方向移动垂直平台的水平台。 在舞台单元中,水平台被固定在表台的水平滑动表面上,并且垂直平台可滑动地布置在滑动表面上。 垂直平台通过在水平方向上具有强刚性和垂直方向的弱刚性的板簧与水平台相结合。 舞台装置的整体刚度仅由垂直平台确定,并且不受包括在水平台中的部分的刚度和驱动部分对于每个轴线方向的刚性的影响。 可以增加舞台装置的刚度。 舞台装置的静止刚度仅由垂直舞台的刚度决定。 舞台单元的所有阶段都不堆积。 因此,台架单元的高度尽可能地降低。