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111. 发明申请

US20040233457A1 Optical mapping apparatus with optimized OCT configuration 有权
标题翻译：具有优化OCT配置的光学映射设备
公开(公告)号：US20040233457A1
公开(公告)日：2004-11-25
申请号：US10440397
申请日：2003-05-19
发明人： Adrian Gh. Podoleanu , David A. Jackson , John A. Rogers , George M. Dobre , Radu G. Cucu
IPC分类号： G01B009/02
CPC分类号： A61B3/102 , A61B5/0066 , G01B9/0201 , G01B9/02027 , G01B9/0203 , G01B9/02058 , G01B9/02063 , G01B9/02091 , G01B2290/45 , G01B2290/70 , G01N21/23 , G01N21/4795
摘要： OCT apparatus includes an interferometer, having an input beam splitter and a 50/50 output splitter. The splitting ratio of the input splitter may be optimized depending on the source power of light source and on the mismatch of the balanced receiver. The input splitter is a plate beam-splitter to minimize the stray reflected light in the interferometer and allow sequential operation of the apparatus in the OCT or in the confocal regime. The switching between the two regimes may be at will, or synchronous with the en-face scanning which results in quasi-simultaneous OCT/confocal imaging or in alternatives frames, confocal and OCT. By using polarization sensitive elements, two channels are provided in each regime, OCT and confocal. The two confocal polarization sensitive channels may allow adjustments of compensators prior to OCT measurements or OCT imaging.
摘要翻译： OCT设备包括具有输入分束器和50/50输出分离器的干涉仪。输入分路器的分频比可以根据光源的功率和平衡接收机的不匹配进行优化。输入分路器是平板分光器，以最小化干涉仪中的杂散反射光，并允许在OCT或共聚焦状态下对装置的顺序操作。两种方案之间的切换可以是随意的，或者与进行准同时OCT /共聚焦成像或替代帧，共聚焦和OCT的en-face扫描同步。通过使用极化敏感元件，在每个方案中提供了两个通道，OCT和共聚焦。两个共焦极化敏感通道可以允许在OCT测量或OCT成像之前调整补偿器。

112. 发明申请

US20030193670A1 Continuous-zoom imaging device of interferometer 失效
标题翻译：干涉仪连续变焦成像装置
公开(公告)号：US20030193670A1
公开(公告)日：2003-10-16
申请号：US10200204
申请日：2002-07-23
发明人： Mang Ou-Yang , Shin-Gwo Shiue , Shin-Maio Tseng , Kevin S.H. Kuo , Hsin-Chu Liu , I-Pen Chien , Jim Chung
IPC分类号： G01B009/02
CPC分类号： G01B9/02012 , G01B9/02057 , G01B9/02063 , G01B2290/70 , G02B27/283
摘要： The present invention provides a continuous-zoom imaging device of an interferometer. Reflected lights of a reference plane and a test plane interfere with each other to generate an interference pattern. A collimation device converts a parallel light of the interference pattern into a convergent light. An optical path adjustment means guides the light to a polarizing beam splitter. A continuous-zoom device adjusts the magnification ratio of the interference pattern on the imaging passageway and to output an object image, which is then imaged on a charge-coupled device. The present invention can improve the quality of the interference pattern without using any rotating diffuser, and thus has the characteristics of reduced number of components, lowered cost, and shrunk volume. Besides, the present invention can utilize a joint device to connect the continuous-zoom device and an attenuator so as to achieve automatic light adjustment and convenient operation.
摘要翻译：本发明提供一种干涉仪的连续变焦成像装置。参考平面和测试平面的反射光线相互干涉以产生干涉图案。准直装置将干涉图案的平行光转换成会聚光。光路调节装置将光引导到偏振分束器。连续变焦装置调整成像通道上的干涉图案的放大率，并输出对象图像，然后将其成像在电荷耦合器件上。本发明可以在不使用任何旋转扩散器的情况下提高干涉图案的质量，并且具有减少部件数量，降低成本和缩小体积的特性。此外，本发明可以利用联合装置连接连续变焦装置和衰减器，以实现自动调光和方便的操作。

113. 发明申请

US20030076506A1 Optical coherence interferometry and coherence tomography with spatially partially coherent light sources 失效
标题翻译：光学相干干涉测量和相干断层扫描与空间部分相干光源
公开(公告)号：US20030076506A1
公开(公告)日：2003-04-24
申请号：US10257420
申请日：2002-10-10
发明人： Adolf Friedrich Fercher
IPC分类号： G01B011/02
CPC分类号： G01B11/2441 , G01B9/02063 , G01B9/02091
摘要： An airbag cover is defined by a predetermined breaking line which is introduced into a shaped flat material in a recessed manner. The recesses are achieved by removing material by means of laser radiation. According to the invention, the flat material is provided with a barrier layer. The barrier layer, by reason of its material properties, has greater resistance to removal of material by laser action than the material of the rest of the flat material. The recesses made by removing material extend along the predetermined breaking line in the flat material up to the barrier layer. The barrier layer makes it possible to produce a predetermined breaking line by means of laser machining which allows an exact residual wall thickness of the airbag cover in the area of the predetermined breaking line, so that the tearing strength can be adjusted very accurately, which is critically important for a reliable deployment of an airbag. Further, a method for the efficient production of an airbag cover of this type is indicated.
摘要翻译：本发明涉及光学相干干涉仪和光学相干断层扫描。通过用光源的图像扫描物体，可以使用空间上部分相干的光源，例如跨越多模激光器，横向振荡超发光二极管，气体放电灯，弧光灯和白炽灯。这样的光源，例如红色白炽灯，在相干长度为1 =0.9μm的范围内，在h = 500nm至h = 1300nm的范围内发光。因此，这些光源能够显着改善光学相干干涉测量和光学相干断层扫描的测量精度。

114. 发明授权

US06330063B1 Low coherence interferometer apparatus 有权
标题翻译：低相干干涉仪装置
公开(公告)号：US06330063B1
公开(公告)日：2001-12-11
申请号：US09613748
申请日：2000-07-11
申请人： Alexander Knuettel , Dirk Boecker
发明人： Alexander Knuettel , Dirk Boecker
IPC分类号： G01B902
CPC分类号： G01N21/4795 , G01B9/02027 , G01B9/02051 , G01B9/02058 , G01B9/02063 , G01B9/0209 , G01J2009/023 , G02B6/12004 , G02B2006/12104
摘要： Low coherence interferometer apparatus for investigation of a sample (15), in particular for multi-dimensional imaging, having an interferometer configuration (2) comprising a low coherence light source, a probe head (9) having a light exit opening (16) for irradiating light into the sample, an optical coupler, a reference reflector and a detector (13). The optical paths between the elements of the interferometer configuration (2) form interferometer arms. The optical coupler and the reference arm of the interferometer configuration (2) are integrated into a common optical chip (28). In addition to the reference reflector (11), the reference arm comprises a deflection reflector (33) formed on an end surface (35) of the optical chip (28) in such a manner that the reference light is cross-coupled between a first light guide (10a) forming a first portion of the reference arm (10) and a second light guide (10b) forming a second portion of the reference arm (10).
摘要翻译：用于研究样品（15）的低相干干涉仪装置，特别是用于具有包括低相干光源的干涉仪配置（2）的多维成像的探针头（9），具有光出射开口（16）的探针头（9）将光照射到样品中，光耦合器，参考反射器和检测器（13）。干涉仪配置（2）的元件之间的光路形成干涉仪臂。干涉仪配置（2）的光耦合器和参考臂被集成到公共光学芯片（28）中。除了参考反射器（11）之外，参考臂包括形成在光学芯片（28）的端面（35）上的偏转反射器（33），使得参考光交替耦合在第一形成参考臂（10）的第一部分的光导（10a）和形成参考臂（10）的第二部分的第二光导（10b）。

115. 发明授权

US5847827A Coherence biometry and coherence tomography with dynamic coherent 失效
标题翻译：相干生物测量和相干断层扫描与动态相干
公开(公告)号：US5847827A
公开(公告)日：1998-12-08
申请号：US667468
申请日：1996-06-21
申请人： Adolf Friedrich Fercher
发明人： Adolf Friedrich Fercher
IPC分类号： A61B3/10 , A61B3/12 , G01B9/02 , G01B11/00 , G01B11/02 , G01N21/17
CPC分类号： A61B3/102 , G01B11/02 , G01B9/02063 , G01B9/02091
摘要： In the application of coherence distance measurement in medical biometry and in medical coherence tomography, an interferometric measurement light path is directed on the object to be measured and is focussed in order to improve the transverse resolution. Since the focus of the measurement light beam is fixed in the axial direction, high transverse resolution cannot be achieved over the entire object depth at all interferometric measurement points along the measurement light beam. This problem is not solved merely by displacing the focus along the measurement beam, since the focus will then lose coherence with respect to the reference light and the actual interferometric measurement location will then lie outside of this focus. In accordance with the invention, a simultaneous displacement of the reference light mirror be effected synchronously with the displacement of the focus by virtue of the optics generating the focus in order to maintain the coherence of the focus. The invention provides a method in which the focus is displaced and the coherence of the focus is maintained by one and the same moving optical element.
摘要翻译：在医疗生物测定和医用相干层析成像中的相干距离测量的应用中，干涉测量光路被指向待测量的对象并被聚焦以便提高横向分辨率。由于测量光束的焦点在轴向上固定，所以在测量光束的所有干涉测量点处，在整个物体深度处不能实现高横向分辨率。这个问题并不仅仅通过沿着测量光束移动焦点来解决，因为焦点将相对于参考光失去一致性，并且实际的干涉测量位置将在该焦点之外。根据本发明，参考光反射镜的同时位移由于产生焦点的光学元件与聚焦的位移同步地进行，以保持焦点的一致性。本发明提供一种方法，其中聚焦被移位并且聚焦的相干性由同一移动的光学元件保持。

116. 发明授权

US4505588A Fiber stellar interferometer 失效
标题翻译：纤维恒星干涉仪
公开(公告)号：US4505588A
公开(公告)日：1985-03-19
申请号：US465215
申请日：1983-02-09
申请人： Jacques E. Ludman , John L. Sampson , Henry J. Caulfield
发明人： Jacques E. Ludman , John L. Sampson , Henry J. Caulfield
IPC分类号： G01B9/02 , G01J9/02
CPC分类号： G01J9/02 , G01B9/02063 , G01B2290/10 , G01B2290/40 , G01J2009/0226
摘要： A fiber stellar interferometer having a pair of adjustably movable focusing lenses, a pair of monomode optical fibers, a block of electro-optic material defining a pair of optical paths, means for controlling the effective path length of one of the optical paths and an intensity detector. Electromagnetic radiation emanating from a source, such as a star, is received at two separate locations by the focusing lenses which direct this electromagnetic radiation into two separate beams which are focused into each of the pair of monomode fibers, respectively. The monomode fibers direct these two beams into respective optical paths within the electro-optic block of material. The outputs from the two optical paths are combined and received by the intensity detector. Varying the effective path length of one of the optical paths alters the phase of the beam passing therethrough. As a consequence thereof the intensity of the output received by the detector varies accordingly. These varying intensities can be utilized to determine the size and shape of the source by conventional stellar intensity interferometer techniques.
摘要翻译：一种具有一对可调节移动聚焦透镜的光纤恒星干涉仪，一对单模光纤，限定一对光路的电光材料块，用于控制一条光路的有效路径长度和强度探测器。从诸如恒星的源发出的电磁辐射通过聚焦透镜在两个分开的位置处被接收，该聚焦透镜将该电磁辐射分别引导到分别聚焦到该对单模光纤中的每一个中的两个单独的光束。单模光纤将这两个光束引导到电光学材料块内的相应的光路中。来自两个光路的输出被强度检测器组合和接收。改变光路中的一个的有效路径长度改变通过其中的光束的相位。因此，由检测器接收的输出的强度相应地变化。这些变化的强度可以用于通过传统的恒星强度干涉仪技术来确定源的尺寸和形状。

117. 发明授权

US3740150A Surface measurement by interferometer 失效
标题翻译：通过干涉仪测量表面
公开(公告)号：US3740150A
公开(公告)日：1973-06-19
申请号：US3740150D
申请日：1971-01-06
申请人： TROPEL
发明人： MUNNERLYN C
IPC分类号： G01B9/02 , G01B11/255
CPC分类号： G01B11/255 , G01B9/02063
摘要： An interferometer measures a test surface arranged in the test arm of the interferometer by using a focusing lens system movable along the test arm. The focusing lens system is adjustable along a slide that is movable along the test arm of the instrument, and the test surface is mounted at a region of maximum coherence function of the test beam. The focusing lens system is adjusted along the slide to focus the test beam on the surface of the test surface. Then by means of gauge blocks removably interposable between the slide and a reference surface and equalling the desired radius of curvature of the test surface, the slide is moved to bring the focus of the test beam to the region of the center of curvature of the test surface to observe interference fringes between light returning from the test surface and a plane wave front reference beam.
摘要翻译：干涉仪通过使用沿着测试臂移动的聚焦透镜系统来测量布置在干涉仪的测试臂中的测试表面。聚焦透镜系统沿着可沿着仪器的测试臂移动的滑块可调，并且测试表面安装在测试梁的最大相干函数的区域。沿着滑块调整聚焦透镜系统，将测试光束聚焦在测试表面上。然后，借助于可滑动地插入滑块和参考表面之间并且等于测试表面的期望曲率半径的量块，移动滑块以使测试光束的焦点到测试曲率中心的区域以观察从测试表面返回的光与平面波前参考光束之间的干涉条纹。

118. 发明公开

US20230184535A1 OPTICAL MEASUREMENT APPARATUS, MEASURING METHOD USING THE SAME, AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME 审中-公开
公开(公告)号：US20230184535A1
公开(公告)日：2023-06-15
申请号：US17969200
申请日：2022-10-19
申请人： Samsung Electronics Co., Ltd.
发明人： Seung Woo LEE , Wook Rae KIM , Kwang Soo KIM , Myung Jun LEE , Seo Yeon JEONG , Sung Ho JANG
IPC分类号： G01B9/02055 , G01B9/02015 , G01B9/02 , G01B9/02001
CPC分类号： G01B9/02063 , G01B9/0203 , G01B9/02083 , G01B9/02011 , H01L22/12
摘要： A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

119. 发明授权

US10866082B2 Method for adjusting of a measuring device by an adjustment body, adjustment body and method for adjusting an adjustment body 有权
公开(公告)号：US10866082B2
公开(公告)日：2020-12-15
申请号：US16410589
申请日：2019-05-13
申请人： Carl Mahr Holding GmbH
发明人： Axel Wiegmann , Markus Lotz
IPC分类号： G01B9/02 , G01B11/255
CPC分类号： G01B9/02063 , G01B9/02038 , G01B11/255
摘要： A method for adjusting a measuring device having an interferometer unit with an optical axis, an optical distance measuring device with a measuring axis and a support slide that is moveable along a slide axis. The measuring axis is first aligned parallel to the slide axis. An adjustment body with a first spherical reflection and/or diffraction surface and a retro reflector at the back side is arranged at the support slide. It is brought into a first confocal position, in which a first center point of the first spherical reflection/diffraction surface coincides with the focus of the spherical wavefront that is emitted from the interferometer unit. The retro reflector defines a vertex that is located close to the first center point, such that the measuring axis of the distance measuring device extends close to the focus of the emitted spherical wavefront. In doing so, Abbe-faults can be reduced or eliminated.

120. 发明授权

US10845190B2 Measurement apparatus for measuring height or shape of a surface of a material 有权
公开(公告)号：US10845190B2
公开(公告)日：2020-11-24
申请号：US16114011
申请日：2018-08-27
申请人： TOSHIBA MEMORY CORPORATION
发明人： Kiminori Yoshino
IPC分类号： G11B11/24 , G01B9/02 , G01B11/02 , G01M11/02 , G01B11/24
CPC分类号： G01B11/2441 , G01B9/0209 , G01B9/02038 , G01B9/02063 , G01B9/02085 , G01B11/02 , G01M11/025 , G01M11/0271
摘要： A measurement apparatus includes a filter changing a light amount of an irradiation light, a lens irradiating a surface of a material with the irradiation light, a stage changing a focus position of the irradiation light in a depth direction of the material, an interfering light extractor causing the irradiation light to interfere with reflected light from the material, a detector detecting an intensity of interfering light obtained by interference between the irradiation light and the reflected light, and a controller calculating a height of the surface of the material based on the detected intensity of interfering light while changing a relative focus position of the irradiation light with respect to the material at a given measurement point of the surface of the material. The controller controls the filter or light source based on the detected intensity of interfering light to change the light amount of the irradiation light.

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