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    • 112. 发明申请
    • MEMS-BASED NANOPOSITIONERS AND NANOMANIPULATORS
    • 基于MEMS的纳米增塑剂和纳米颗粒
    • US20090278420A1
    • 2009-11-12
    • US12305478
    • 2007-06-21
    • Yu SunXinyu Liu
    • Yu SunXinyu Liu
    • H02N1/00
    • B25J7/00B25J9/0015
    • A MEMS-based mano manipulator or nanopositioner is provided that can achieve both sub-nanometer resolution and millimeter force output. The nanomanipulator or nanopositioner comprises a linear amplification mechanism that minifies input displacements and amplifies input forces, microactuators that drive the amplification mechanism to generate forward and backward motion, and position sensors that measure the input displacement of the amplification mechanism. The position sensors obtain position feedback enabling precise closed-loop control during nanomanipulation.
    • 提供了基于MEMS的马诺机器人或纳米定位器,其可以实现亚纳米分辨率和毫米波力输出。 纳米机械手或纳米定位器包括线性放大机构,其缩小输入位移并放大输入力,驱动放大机构以产生向前和向后运动的微致动器以及测量放大机构的输入位移的位置传感器。 位置传感器获得位置反馈,可在纳米操作期间实现精确的闭环控制。
    • 113. 发明授权
    • Magnetic storage systems and methods with tighter write fault window to improve reliability
    • 磁存储系统和方法具有更严格的写入故障窗口,以提高可靠性
    • US07545593B1
    • 2009-06-09
    • US11075285
    • 2005-03-08
    • Yu SunBill FlynnDon Brunnett
    • Yu SunBill FlynnDon Brunnett
    • G11B27/36G11B15/04G11B19/04G11B5/596
    • G11B19/045G11B5/596G11B5/59627
    • A magnetic storage system includes a disk, a head, an actuator, and a servo controller. The servo controller monitors a value, such as a position error signal (PES) sample value, a predicted PES sample value, and the like, that is based on servo information provided by the head. The servo controller provides a signal to inhibit writing by the head based on a comparison of the monitored value with a threshold, such as a write fault window (WFW), a PES plus Velocity (PPV) threshold, and the like. The servo controller sets the threshold to a first value based on at least one of an on-track track misregistration (TMR) value and a seek settle TMR value. When the servo controller determines that the head is subject to a vibration condition, the servo controller sets the threshold to a second value that is different from the first value.
    • 磁存储系统包括盘,头,致动器和伺服控制器。 伺服控制器基于由头提供的伺服信息来监视诸如位置误差信号(PES)采样值,预测的PES采样值等的值。 伺服控制器基于监视值与诸如写入故障窗口(WFW),PES加速度(PPV)阈值等的阈值的比较来提供用于禁止头部写入的信号。 伺服控制器基于轨道磁道重合失调(TMR)值和寻道稳定TMR值中的至少一个将阈值设置为第一值。 当伺服控制器确定头受到振动条件时,伺服控制器将阈值设置为不同于第一值的第二值。
    • 116. 发明申请
    • Suspension, head gimbal assembly and manufacturing method thereof, and disk drive unit with the same
    • 悬架,头万向架组装及其制造方法以及具有该悬架的磁头驱动单元
    • US20080266713A1
    • 2008-10-30
    • US11790564
    • 2007-04-26
    • MingGao YaoYiRu XieYu SunLin Guo
    • MingGao YaoYiRu XieYu SunLin Guo
    • G11B5/60
    • G11B5/4853
    • A suspension for a HGA includes a suspension flexure and an out trigger. The suspension flexure has a tongue region having a first flexure part in a tip portion thereof for mounting a trailing edge of a slider and a PZT mounting region for mounting PZT elements. One end of the out trigger is connected to the suspension flexure, and the other end of the out trigger has a trigger support portion which extends above the tongue region so as to support the leading edge of the slider. The structure of the out trigger is capable of stiffening the tongue region of the suspension flexure and, in turns, avoiding the deformation problem and the dimple separation problem during the manufacturing process or in vibration or shock events. The invention also discloses a HGA with the suspension, manufacturing methods of the HGA and a disk drive unit having such HGA.
    • 用于HGA的悬架包括悬架弯曲和外触发。 悬架挠曲件具有舌部区域,其顶端部具有用于安装滑动件的后缘的第一挠曲部分和用于安装PZT元件的PZT安装区域。 输出触发器的一端连接到悬架弯曲部,而触发器的另一端具有在舌部上方延伸的触发器支撑部分,以便支撑滑块的前缘。 出口触发器的结构能够加强悬架挠曲的舌部区域,并且反过来避免在制造过程中或振动或冲击事件期间的变形问题和凹坑分离问题。 本发明还公开了一种HGA,具有HGA的悬挂,制造方法和具有这种HGA的盘驱动单元。
    • 117. 发明授权
    • Self-aligned STI SONOS
    • 自对准STI SONOS
    • US07303964B2
    • 2007-12-04
    • US11113509
    • 2005-04-25
    • Hidehiko ShiraiwaMark RandolphYu Sun
    • Hidehiko ShiraiwaMark RandolphYu Sun
    • H01L21/336
    • H01L21/76229H01L27/105H01L27/115H01L27/11568H01L27/11573
    • Methods 300 and 350 are disclosed for fabricating shallow isolation trenches and structures in multi-bit SONOS flash memory devices. One method aspect 300 comprises forming 310 a multi-layer dielectric-charge trapping-dielectric stack 420 over a substrate 408 of the wafer 402, for example, an ONO stack 420, removing 312 the multi-layer dielectric-charge trapping-dielectric stack 420 in a periphery region 406 of the wafer 402, thereby defining a multi-layer dielectric-charge trapping-dielectric stack 420 in a core region 404 of the wafer 402. The method 300 further comprises forming 314 a gate dielectric layer 426 over the periphery region 406 of the substrate 408, forming 316 a first polysilicon layer 428 over the multi-layer dielectric-charge trapping-dielectric stack 420 in the core region 402 and the gate dielectric 426 in the periphery region 406 , then concurrently forming 318 an isolation trench 438 in the substrate 408 in the core region 404 and in the periphery region 406. Thereafter, the isolation trenches are filled 326 with a dielectric material 446, and a second polysilicon layer 452 that is formed 332 over the first polysilicon layer 428 and the filled trenches 438, forming an self-aligned STI structure 446. The method 300 avoids ONO residual stringers at STI edges in the periphery region, reduces active region losses, reduces thinning of the periphery gate oxide and the ONO at the STI edge, and reduces dopant diffusion during isolation implantations due to reduced thermal process steps.
    • 公开了用于在多位SONOS闪存器件中制造浅隔离沟槽和结构的方法300和350。 一个方法方面300包括在晶片402的衬底408(例如,ONO堆叠420)上形成310多层介电电荷俘获 - 电介质堆叠420,去除312多层介电电荷俘获 - 电介质堆叠420 在晶片402的外围区域406中,由此在晶片402的芯区域404中限定多层介电电荷捕获 - 电介质叠层420。 方法300还包括在衬底408的外围区域406上形成314栅极电介质层426,在芯区域402中的多层介电电荷捕获 - 电介质堆叠层420上形成316第一多晶硅层428,并且栅极 在外围区域406中的电介质426,然后同时在芯区域404和周边区域406中的衬底408中形成318隔离沟槽438。 此后,绝缘沟槽用介电材料446填充326,第二多晶硅层452在第一多晶硅层428和填充沟槽438上形成332,形成自对准STI结构446。 方法300避免在外围区域的STI边缘处的ONO残余桁条,减少有源区域损耗,减少STI边缘处的外围栅极氧化物和ONO的稀化,并且由于减少的热处理步骤,在隔离注入期间减少掺杂剂扩散。
    • 120. 发明申请
    • Circuit for measuring breath waveform with impedance method and method and device for resisting interference of electrical fast transient
    • 用阻抗法测量呼吸波形的电路和抵抗电快速瞬变干扰的方法和装置
    • US20070004988A1
    • 2007-01-04
    • US11316454
    • 2005-12-21
    • Xiaoyu WuYu SunJian Cen
    • Xiaoyu WuYu SunJian Cen
    • A61B5/08A61B5/02A61B5/05
    • A61B5/0809
    • A circuit for measuring respiratory waveform with impedance method and a method and device for resisting electrical fast transient interference are provided, and wherein an output from the peak detector circuit and a reference signal are input to two input terminals of the comparator circuit, an output terminal of the comparator circuit is connected to a control terminal of the electronic switch, and one terminal of the electronic switch is connected to an output terminal of the signal amplifier circuit and the other to an input terminal of the demodulator/amplifier circuit. If a level of the output signal of the peak detector circuit is greater than the level of the reference signal, the electronic switch is switched off in response to an inversion of the output of the comparator circuit so that the interference is isolated from the next stage circuit. The present invention is prone to be implemented with significant effect.
    • 提供一种用阻抗法测量呼吸波形的电路以及用于抵抗电快速瞬变干扰的方法和装置,其中来自峰值检测器电路的输出和参考信号被输入到比较器电路的两个输入端,输出端 比较电路连接到电子开关的控制端子,电子开关的一个端子连接到信号放大器电路的输出端,另一端连接到解调器/放大器电路的输入端。 如果峰值检测器电路的输出信号的电平大于参考信号的电平,则电子开关响应于比较器电路的输出的反相而被关断,使得干扰与下一级隔离 电路。 本发明容易实施,效果显着。