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    • 111. 发明授权
    • Method and apparatus for simultaneous lateral and vertical patterning of molecular organic films
    • 用于分子有机膜的同时横向和垂直图案化的方法和装置
    • US08232136B2
    • 2012-07-31
    • US12537424
    • 2009-08-07
    • Vladimir BulovicJennifer J. Yu
    • Vladimir BulovicJennifer J. Yu
    • H01L21/00H01L51/50H01L51/52H01L51/56
    • H01L51/0019H01L51/0037H01L51/0059H01L51/50
    • The disclosure relates to a method and apparatus for micro-patterning organic layers of OLEDs. The disclosed methods do not require applying pressure to the film, nor do they require heat treatment, surface treatment or fast release rate of a stamp from the substrate. The disclosed methods are particularly advantageous over the conventional shadow masking techniques for providing large array fabrication with small features. In one embodiment of the disclosure, one or more organic films are selected for the OLED as a function of their individual or combined sublimation temperature. The material is selected in view of the depth and shape of the features that are to be formed in the organic layer. The disclosed embodiments can provide minimum feature size of 13 μm which is suitable for high resolution OLED displays.
    • 本公开涉及一种用于微图案化有机层的有机层的方法和装置。 所公开的方法不需要对膜施加压力,也不需要来自基底的印模的热处理,表面处理或快速释放速率。 所公开的方法对于提供具有小特征的大阵列制造的常规阴影掩蔽技术是特别有利的。 在本公开的一个实施方案中,作为其单独或组合升华温度的函数,为OLED选择一种或多种有机膜。 鉴于要在有机层中形成的特征的深度和形状来选择材料。 所公开的实施例可以提供适合于高分辨率OLED显示器的13μm的最小特征尺寸。