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101. 发明授权

US07986866B2 Reproduction device and program 有权
标题翻译：复制设备和程序
公开(公告)号：US07986866B2
公开(公告)日：2011-07-26
申请号：US10597614
申请日：2005-06-02
申请人： Keiichi Tanaka , Masahiro Oashi , Hidetaka Ohto , Hiroaki Iwamoto
发明人： Keiichi Tanaka , Masahiro Oashi , Hidetaka Ohto , Hiroaki Iwamoto
IPC分类号： H04N9/80 , H04N5/783
CPC分类号： H04N5/783 , G11B27/005 , G11B27/10 , G11B27/11 , G11B27/34 , G11B2220/2541 , H04N5/85 , H04N9/7921 , H04N9/8042 , H04N9/8205
摘要： A playback device plays back a digital stream and executes an application. A Java™ module is a platform unit, executes the application, and performs playback control based on a result of the execution. When performing this playback, the playback device has a plurality of real parameters specific to the playback device, for the playback control. The Java™ module provides a function using a real parameter to the application, in response to a method call from the application.
摘要翻译：播放设备播放数字流并执行应用。 Java™模块是平台单元，执行应用程序，并且基于执行结果执行回放控制。当进行该播放时，回放装置具有多个对回放装置特有的实际参数，用于重放控制。响应于来自应用程序的方法调用，Java™模块为应用程序提供了使用实参的功能。

102. 发明申请

US20110146726A1 PROCESS FOR CLEANING SEMICONDUCTOR ELEMENT 审中-公开
标题翻译：清洁半导体元件的工艺
公开(公告)号：US20110146726A1
公开(公告)日：2011-06-23
申请号：US12995303
申请日：2009-05-20
申请人： Keiichi Tanaka , Ryuji Sotoaka
发明人： Keiichi Tanaka , Ryuji Sotoaka
IPC分类号： B08B3/00
CPC分类号： H01L21/02071 , G03F7/423
摘要： In a wiring formation process for a semiconductor device, the resist residue forming in dry etching with a reactive gas and aching with a plasma gas is removed, not corroding the members of the semiconductor device such as the interlayer insulating material and the wiring material thereof, and the device is protected from after-corrosion to occur after left for a given period of time after the treatment.According to a method comprising (1) washing step with an aqueous solution containing hydrofluoric acid, (2) a washing step with a mixed solution of ammonia and hydrogen peroxide, and (3) a washing step with hydrogen peroxide water, the resist residue on the side wall of a metal wiring that comprises aluminium (Al) as the main ingredient thereof is removed, and occurrence of after-corrosion is prevented.
摘要翻译：在半导体装置的布线形成工序中，去除了用反应气体的干蚀刻形成的抗蚀剂残留物和等离子体气体的起伏，而不会腐蚀诸如层间绝缘材料及其布线材料的半导体器件的部件，并且在处理之后，在保持一段给定的时间后，保护装置免于腐蚀。根据包括（1）用含有氢氟酸的水溶液进行洗涤步骤的方法，（2）用氨和过氧化氢的混合溶液进行洗涤步骤，和（3）用过氧化氢水洗涤步骤，将抗蚀剂残留物除去以铝（Al）为主要成分的金属配线的侧壁，防止发生腐蚀。

103. 发明申请

US20110131666A1 VEHICLE DATA STORAGE SYSTEM, VEHICLE DATA STORAGE APPARATUS, VEHICLE DATA STORAGE SERVER, AND VEHICLE DATA STORAGE METHOD 有权
标题翻译：车辆数据存储系统，车辆数据存储设备，车辆数据存储服务器和车辆数据存储方法
公开(公告)号：US20110131666A1
公开(公告)日：2011-06-02
申请号：US13055314
申请日：2009-07-24
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： G06F21/24
CPC分类号： G07C5/085 , G07C5/008
摘要： A vehicle data storage system, in which vehicle data obtained from a vehicle-mounted device is stored, includes a vehicle data storage portion in which the vehicle data is stored; a country determination portion that determines a country in which a vehicle exists, based on position data of the vehicle; a selection table storage portion in which a type of the vehicle data that should be stored in the vehicle data storage portion is stored in association with country data; a data determination portion that determines the type of the vehicle data that should be stored in the vehicle data storage portion, based on the country determined by the country determination portion, by referring to the selection table storage portion; and a data processing portion that stores, in the vehicle data storage portion, the vehicle data determined by the data determination portion.
摘要翻译：一种车载数据存储系统，其中存储从车载装置得到的车辆数据，包括其中存储车辆数据的车辆数据存储部分; 基于车辆的位置数据确定车辆所在的国家的国家确定部分; 选择表存储部，其中应该存储在车辆数据存储部分中的车辆数据的类型与国家数据相关联地存储; 数据确定部分，通过参照选择表存储部分，基于由国家确定部分确定的国家来确定应存储在车辆数据存储部分中的车辆数据的类型; 以及数据处理部，其在车辆数据存储部中存储由数据确定部确定的车辆数据。

104. 发明授权

US07948603B2 Vacuum device, operation method for vacuum device, exposure system, and operation method for exposure system 有权
标题翻译：真空装置，真空装置的操作方法，曝光系统和曝光系统的操作方法
公开(公告)号：US07948603B2
公开(公告)日：2011-05-24
申请号：US10569167
申请日：2004-08-17
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： G03B27/52
CPC分类号： G03F7/70808 , G03F7/70841
摘要： The exposure apparatus 100 comprises a double shell structure which has an upper vacuum chamber 140 on the outside of the reticle chamber 135, and a lower vacuum chamber 160 on the outside of the wafer chamber 155. A cryo pump CP and a turbo molecular pump TMP/dry pump DP are connected in parallel to each of the chambers, i.e., the reticle chamber 135 and wafer chamber 155. During exposure operation and alignment of the exposure apparatus 100, only the cryo pump CP (vibration-free type vacuum pump) is operated; the turbo molecular pump TMP/dry pump DP (vibrating type vacuum pump) is stopped. As a result, it is possible to cut off the transmission of vibration from the vibrating type vacuum pump during exposure operation and alignment of the exposure apparatus, so that the precision of the stage devices 137 and 157 can be ensured to a much greater degree; accordingly, deterioration of the exposure performance can be reduced to a much greater extent.
摘要翻译：曝光装置100包括双层结构，其在分划板室135的外侧具有上真空室140，在晶片室155的外侧具有下真空室160.冷冻泵CP和涡轮分子泵TMP /干泵DP平行地连接到每个室，即标线室135和晶片室155.在曝光操作和曝光装置100的对准期间，只有低温泵CP（无振动型真空泵）是操作; 涡轮分子泵TMP /干泵DP（振动式真空泵）停止。结果，可以在曝光操作和曝光装置的对准期间切断来自振动式真空泵的振动的传递，从而可以更大程度地确保舞台装置137和157的精度; 因此，曝光性能的劣化可以更大程度地降低。

105. 发明授权

US07910888B2 X-ray analyzer 有权
标题翻译： X射线分析仪
公开(公告)号：US07910888B2
公开(公告)日：2011-03-22
申请号：US12343364
申请日：2008-12-23
申请人： Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama , Sumio Iijima , Shunji Bandow
发明人： Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama , Sumio Iijima , Shunji Bandow
IPC分类号： H01L27/18
CPC分类号： G01T1/1606
摘要： Provided is an X-ray analyzer capable of significantly suppressing an influence of an external magnetic field on a transition edge sensor (TES). The X-ray analyzer includes: a TES (7) for detecting energy of a received X-ray as a temperature change and outputting the temperature change as a current signal; a superconducting magnetic shield (8) which contains the TES (7) and enters a superconducting state; and a room temperature magnetic shield (9) which covers the superconducting magnetic shield (8) and performs external magnetic field shielding until the superconducting magnetic shield (8) enters the superconducting state, in which the superconducting magnetic shield (8) and the room temperature magnetic shield (9) are concentrically arranged to have a cylindrical shape.
摘要翻译：提供能够显着抑制外部磁场对过渡边缘传感器（TES）的影响的X射线分析装置。 X射线分析仪包括：TES（7），用于检测接收到的X射线的能量作为温度变化，并输出温度变化作为电流信号; 包含TES（7）并进入超导状态的超导磁屏蔽（8）; 和覆盖超导磁屏蔽（8）的室温磁屏蔽（9），并执行外部磁场屏蔽，直到超导磁屏蔽（8）进入超导状态，其中超导磁屏蔽（8）和室温磁屏蔽（9）同心地布置成具有圆柱形形状。

106. 发明授权

US07696653B2 Movable-body apparatus, exposure apparatus and methods comprising same, and device-manufacturing methods 有权
标题翻译：移动体装置，曝光装置及其制造方法以及装置制造方法
公开(公告)号：US07696653B2
公开(公告)日：2010-04-13
申请号：US11712243
申请日：2007-02-27
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： H02K41/02
CPC分类号： G03F7/70858 , G03F7/70716 , G03F7/70758 , H01L21/67109
摘要： Movable-body apparatus, notably configured as stages, are disclosed that include at least one movable body and at least one respective actuator. The actuator drives the movable body in the direction of at least one axis in a predetermined plane. A waste-heat member is situated in a non-contacting manner with the movable body. The waste-heat member absorbs heat radiated from the movable body. Thus, adverse thermal influences of the movable body are suppressed without a need to connect a coolant conduit to the movable body, which eliminates decreases in movement accuracy conventionally caused by tension of such a conduit on the movable body.
摘要翻译：公开了包括至少一个可移动体和至少一个相应的致动器的可移动体装置，特别地构造为阶段。致动器沿预定平面中的至少一个轴线的方向驱动可移动体。废热构件以与移动体非接触的方式设置。废热部件吸收从可移动体辐射的热量。因此，可以抑制可移动体的不利的热影响，而不需要将冷却剂导管连接到可移动体，这消除了通常由可移动体上的这种导管的张力引起的移动精度的降低。

107. 发明申请

US20100061702A1 REPRODUCING APPARATUS 有权
标题翻译：再生装置
公开(公告)号：US20100061702A1
公开(公告)日：2010-03-11
申请号：US12523081
申请日：2008-01-23
申请人： Keiichi Tanaka , Hidetaka Ohto
发明人： Keiichi Tanaka , Hidetaka Ohto
IPC分类号： H04N5/91
CPC分类号： H04N9/8042 , G11B27/329 , G11B2020/10537 , G11B2020/10944 , G11B2220/2541 , G11B2220/65 , H04N5/85 , H04N9/8233
摘要： A playback device generates a virtual package in response to a construction request made by an application. After the virtual package is thus generated, a virtual file system 23 allows a file recorded on a removable medium in an 8.3 format to be accessed with use of an alias in a Long File Name format, based on a merge management information file that indicates a correspondence between a file path in the 8.3 format and a file path in the Long File Name format.
摘要翻译：回放设备响应于由应用进行的构造请求而生成虚拟包。在虚拟包被这样生成之后，虚拟文件系统23允许使用长文件名格式的别名，以8.3格式的记录在可移动介质上的文件，基于指示一个 8.3格式的文件路径与长文件名格式的文件路径之间的对应关系。

108. 发明授权

US07589323B2 Superconducting X-ray detector and X-ray analysis apparatus using the same 有权
标题翻译：超导X射线检测器和使用其的X射线分析仪器
公开(公告)号：US07589323B2
公开(公告)日：2009-09-15
申请号：US11794288
申请日：2006-01-24
申请人： Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama
发明人： Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama
IPC分类号： H01L27/18
CPC分类号： G01N23/00 , G01T1/006 , H01L39/10
摘要： To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field. A superconducting X-ray detector comprising a temperature detector 6 for detecting a temperature change by heat generated when an X-ray is absorbed, and a heat link 3 for controlling a heat flow amount of escaping the generated heat to a support board i, wherein the temperature detector 6 comprises a heat conducting multilayer thin film, the superconducting X-ray detector is constituted by a structure of providing a superconductor layer 4 above the heat link 3 and providing an insulating member 2 between the superconductor layer 4 and the temperature detector 6, the superconductor layer 4 and the temperature detector 6 are connected by a superconducting wiring 7 and uses materials by which superconducting transition temperatures of the superconductor layer 4 and the superconducting wiring 7 are higher than a superconducting transition temperature of the temperature detector 6.
摘要翻译：提供能够通过抑制自磁场的灵敏度降低而能够通过高能量分辨率进行测量的超导X射线检测器。一种超导X射线检测器，包括：温度检测器6，用于通过吸收X射线时产生的热量来检测温度变化;以及热连接件3，其用于控制将所产生的热量排出到支撑板i上的热流量，其中温度检测器6包括导热多层薄膜，超导X射线检测器由在超导体层3和温度检测器6之间提供绝热构件2的结构构成，，超导体层4和温度检测器6通过超导布线7连接，并且使用超导体层4和超导布线7的超导转变温度高于温度检测器6的超导转变温度的材料。

109. 发明申请

US20080286528A1 Color Filter Substrate, Liquid Crystal Display Device, Production Method of Color Filter Substrate, Production Method of Liquid Crystal Display Device 有权
标题翻译：滤色器基板，液晶显示装置，滤色器基板的制造方法，液晶显示装置的制造方法
公开(公告)号：US20080286528A1
公开(公告)日：2008-11-20
申请号：US11663584
申请日：2005-09-16
申请人： Hirokazu Yoshioka , Keiichi Tanaka , Atsuhito Murai , Yasutoshi Murakami , Yoshitaka Okumoto , Satoru Kishimoto
发明人： Hirokazu Yoshioka , Keiichi Tanaka , Atsuhito Murai , Yasutoshi Murakami , Yoshitaka Okumoto , Satoru Kishimoto
IPC分类号： B32B3/00 , B05D5/12 , B05D5/06 , B41M5/00 , B05D3/06
CPC分类号： G02B5/201 , G02F1/133512 , G02F1/133516 , Y10T428/1041 , Y10T428/24479 , Y10T428/24802
摘要： To provide: a color filter substrate with high display quality in which defective portions of a bank member (black matrix), such as a pin hole, a portion having an insufficient film thickness, a portion having an insufficient width, and a disconnection portion, or color mixing defects of a colored layer are corrected by the simple and inexpensive method; a liquid crystal display device including such a color filter; and production methods thereof. The color filter substrate of the present invention is a color filter substrate comprising a bank member and a colored layer on a substrate, wherein the color filter substrate has a structure in which a color mixing member formed of colored layer materials of two or more colors is formed in a defective portion of the bank member or along the bank member.
摘要翻译：为了提供：具有高显示质量的滤色器基板，其中诸如针孔的堤孔部件（黑矩阵）的缺陷部分，膜厚度不足的部分，宽度不足的部分和断开部分，或者通过简单且便宜的方法校正着色层的混色缺陷; 包括这种滤色器的液晶显示装置; 及其制造方法。本发明的滤色器基板是在基板上具有堤部件和着色层的滤色器基板，其中，滤色器基板具有以下结构：由两种或更多种颜色的着色层材料形成的混色部件是形成在银行成员的缺陷部分或沿着银行成员。

110. 发明授权

US07336012B2 Motor, robot, substrate loader, and exposure apparatus 失效
标题翻译：电机，机器人，基板装载机和曝光装置
公开(公告)号：US07336012B2
公开(公告)日：2008-02-26
申请号：US11030155
申请日：2005-01-07
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： H02K17/44
CPC分类号： B25J9/042 , B25J9/126 , B25J18/04 , B82Y10/00 , B82Y40/00 , G01N2035/0475 , G03F7/7075 , G03F7/70766 , H01J37/3174 , H01J37/32743 , H01J2237/204 , H02K7/02 , H02K7/04 , H02K7/116 , H02K7/14 , H02K11/01 , H02K16/02 , H02K16/025 , H02K21/12 , H02K26/00 , H02K41/0356 , Y02E60/16 , Y10T74/20317
摘要： An apparatus that reduces vibration generation and magnetic leakage, wherein the apparatus is a motor, an articulated serial robot that has a motor built in, a substrate loader that includes the articulated robot, and a related exposure apparatus equipped with the substrate loader. The motor includes a drive shaft to drive the motor; a rotor attached with the shaft; and a stator that opposes the rotor and causes an electromagnetic force to act between the rotor and the stator to drive the drive shaft; an RC stator, for reaction force cancellation attached with the stator; an RC rotor for reaction force cancellation, opposing the RC stator; and a counterweight sleeve attached with the RC rotor, wherein the reaction force, which is applied to the stator via the drive shaft when the counterweight sleeve rotates in a direction opposite that of the drive shaft, is cancelled.
摘要翻译：一种减少振动产生和磁泄漏的装置，其中该装置是电动机，具有内置电动机的铰接串联机器人，包括铰接式机器人的基板装载器以及配备有基板装载器的相关曝光装置。马达包括驱动马达的驱动轴; 与轴连接的转子; 以及定子，其与所述转子相对并引起电磁力在所述转子和所述定子之间作用以驱动所述驱动轴; RC定子，用于与定子相连的反作用力消除; 用于反作用力抵消的RC转子，与RC定子相对; 以及安装有RC转子的配重套筒，其中当配重套筒沿与驱动轴的方向相反的方向旋转时，通过驱动轴施加到定子的反作用力被取消。

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