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    • 1. 发明申请
    • X-RAY ANALYZER
    • X射线分析仪
    • US20090184252A1
    • 2009-07-23
    • US12343364
    • 2008-12-23
    • Keiichi TanakaAkikazu OdawaraSatoshi NakayamaSumio IijimaShunji Bandow
    • Keiichi TanakaAkikazu OdawaraSatoshi NakayamaSumio IijimaShunji Bandow
    • G01T1/24G21K7/00H01F7/00
    • G01T1/1606
    • Provided is an X-ray analyzer capable of significantly suppressing an influence of an external magnetic field on a transition edge sensor (TES). The X-ray analyzer includes: a TES (7) for detecting energy of a received X-ray as a temperature change and outputting the temperature change as a current signal; a superconducting magnetic shield (8) which contains the TES (7) and enters a superconducting state; and a room temperature magnetic shield (9) which covers the superconducting magnetic shield (8) and performs external magnetic field shielding until the superconducting magnetic shield (8) enters the superconducting state, in which the superconducting magnetic shield (8) and the room temperature magnetic shield (9) are concentrically arranged to have a cylindrical shape.
    • 提供能够显着抑制外部磁场对过渡边缘传感器(TES)的影响的X射线分析装置。 X射线分析仪包括:TES(7),用于检测接收到的X射线的能量作为温度变化,并输出温度变化作为电流信号; 包含TES(7)并进入超导状态的超导磁屏蔽(8); 和覆盖超导磁屏蔽(8)的室温磁屏蔽(9),并执行外部磁场屏蔽,直到超导磁屏蔽(8)进入超导状态,其中超导磁屏蔽(8)和室温 磁屏蔽(9)同心地布置成具有圆柱形形状。
    • 2. 发明授权
    • X-ray analyzer
    • X射线分析仪
    • US07910888B2
    • 2011-03-22
    • US12343364
    • 2008-12-23
    • Keiichi TanakaAkikazu OdawaraSatoshi NakayamaSumio IijimaShunji Bandow
    • Keiichi TanakaAkikazu OdawaraSatoshi NakayamaSumio IijimaShunji Bandow
    • H01L27/18
    • G01T1/1606
    • Provided is an X-ray analyzer capable of significantly suppressing an influence of an external magnetic field on a transition edge sensor (TES). The X-ray analyzer includes: a TES (7) for detecting energy of a received X-ray as a temperature change and outputting the temperature change as a current signal; a superconducting magnetic shield (8) which contains the TES (7) and enters a superconducting state; and a room temperature magnetic shield (9) which covers the superconducting magnetic shield (8) and performs external magnetic field shielding until the superconducting magnetic shield (8) enters the superconducting state, in which the superconducting magnetic shield (8) and the room temperature magnetic shield (9) are concentrically arranged to have a cylindrical shape.
    • 提供能够显着抑制外部磁场对过渡边缘传感器(TES)的影响的X射线分析装置。 X射线分析仪包括:TES(7),用于检测接收到的X射线的能量作为温度变化,并输出温度变化作为电流信号; 包含TES(7)并进入超导状态的超导磁屏蔽(8); 和覆盖超导磁屏蔽(8)的室温磁屏蔽(9),并执行外部磁场屏蔽,直到超导磁屏蔽(8)进入超导状态,其中超导磁屏蔽(8)和室温 磁屏蔽(9)同心地布置成具有圆柱形形状。
    • 3. 发明授权
    • Superconducting X-ray detector and X-ray analysis apparatus using the same
    • 超导X射线检测器和使用其的X射线分析仪器
    • US07589323B2
    • 2009-09-15
    • US11794288
    • 2006-01-24
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • H01L27/18
    • G01N23/00G01T1/006H01L39/10
    • To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field. A superconducting X-ray detector comprising a temperature detector 6 for detecting a temperature change by heat generated when an X-ray is absorbed, and a heat link 3 for controlling a heat flow amount of escaping the generated heat to a support board i, wherein the temperature detector 6 comprises a heat conducting multilayer thin film, the superconducting X-ray detector is constituted by a structure of providing a superconductor layer 4 above the heat link 3 and providing an insulating member 2 between the superconductor layer 4 and the temperature detector 6, the superconductor layer 4 and the temperature detector 6 are connected by a superconducting wiring 7 and uses materials by which superconducting transition temperatures of the superconductor layer 4 and the superconducting wiring 7 are higher than a superconducting transition temperature of the temperature detector 6.
    • 提供能够通过抑制自磁场的灵敏度降低而能够通过高能量分辨率进行测量的超导X射线检测器。 一种超导X射线检测器,包括:温度检测器6,用于通过吸收X射线时产生的热量来检测温度变化;以及热连接件3,其用于控制​​将所产生的热量排出到支撑板i上的热流量,其中 温度检测器6包括导热多层薄膜,超导X射线检测器由在超导体层3和温度检测器6之间提供绝热构件2的结构构成, ,超导体层4和温度检测器6通过超导布线7连接,并且使用超导体层4和超导布线7的超导转变温度高于温度检测器6的超导转变温度的材料。
    • 5. 发明申请
    • Superconducting X-Ray Detector And X-Ray Analysis Apparatus Using The Same
    • 超导X射线检测器及X射线分析装置
    • US20070291902A1
    • 2007-12-20
    • US11794288
    • 2006-01-24
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • H05G1/28H01L27/18
    • G01N23/00G01T1/006H01L39/10
    • To provide a superconducting X-ray detector capable of carrying out a measurement by a high energy resolution by restraining a reduction in a sensitivity by a self magnetic field. A superconducting X-ray detector comprising a temperature detector 6 for detecting a temperature change by heat generated when an X-ray is absorbed, and a heat link 3 for controlling a heat flow amount of escaping the generated heat to a support board 1, wherein the temperature detector 6 comprises a heat conducting multilayer thin film, the superconducting X-ray detector is constituted by a structure of providing a superconductor layer 4 above the heat link 3 and providing an insulating member 2 between the superconductor layer 4 and the temperature detector 6, the superconductor layer 4 and the temperature detector 6 are connected by a superconducting wiring 7 and uses materials by which superconducting transition temperatures of the superconductor layer 4 and the superconducting wiring 7 are higher than a superconducting transition temperature of the temperature detector 6.
    • 提供能够通过抑制自磁场的灵敏度降低而能够通过高能量分辨率进行测量的超导X射线检测器。 一种超导X射线检测器,包括用于通过吸收X射线时产生的热量来检测温度变化的温度检测器6,以及用于控制将热量传递到支撑板1的热量的热连接件3,其中 温度检测器6包括导热多层薄膜,超导X射线检测器由在超导体层3和温度检测器6之间提供绝热构件2的结构构成, ,超导体层4和温度检测器6通过超导布线7连接,并且使用超导体层4和超导布线7的超导转变温度高于温度检测器6的超导转变温度的材料。
    • 6. 发明授权
    • Superconducting radiometry apparatus
    • 超导辐射测量装置
    • US07789557B2
    • 2010-09-07
    • US11810767
    • 2007-06-07
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • G01K7/00G01K17/00H01L39/00
    • G01T1/26G01T1/1606
    • A superconducting radiometry apparatus has a micro-calorie meter that detects an energy of a radiant ray as a temperature change. A signal detection mechanism detects an electric current flowing to the micro-calorie meter. A heat addition device adds a quantity of heat to the micro-calorie meter. A peak value monitor measures, in synchronization with the addition of the quantity of heat to the micro-calorie meter, a peak value of an output voltage corresponding to an output signal from the signal detection mechanism. An energy correction device corrects, on the basis of an output from the peak value monitor, an energy value so as to become a peak value corresponding to the quantity of heat added to the micro-calorie meter.
    • 超导辐射测量装置具有微量热量计,其将辐射光的能量作为温度变化进行检测。 信号检测机构检测流向微量热仪的电流。 加热装置将一定量的热量加热到微量热计。 峰值监视器与向微卡计量器加热量同步地测量与来自信号检测机构的输出信号对应的输出电压的峰值。 能量校正装置根据峰值监视器的输出校正能量值,以便成为与添加到微量热计的热量对应的峰值。
    • 7. 发明申请
    • Superconducting radiometry apparatus
    • 超导辐射测量装置
    • US20100019152A1
    • 2010-01-28
    • US11810767
    • 2007-06-07
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • Keiichi TanakaAkikazu OdawaraSatoshi Nakayama
    • H01L39/00
    • G01T1/26G01T1/1606
    • There is provided a superconducting radiometry apparatus capable of performing, while sample-measuring, an energy correction in regard to a fluctuation of a peak value of an output signal, which is due to a radiation heat and a magnetic field from an outside. The superconducting radiometry apparatus is constituted by comprising a micro-calorie meter detecting an energy of a radiant ray as a temperature change, a signal detection mechanism for detecting a displacement of an electric current flowing to the micro-calorie meter, a shunt resistance which is connected in parallel to the micro-calorie meter and whose resistance value is smaller than the micro-calorie meter, a bias electric source connected to the micro-calorie meter and the shunt resistance and applying a constant voltage, a heat addition device adding a constant and already-known heat quantity to the micro-calorie meter, a peak value monitor measuring a peak value corresponding to an added heat quantity within an output signal from the signal detection mechanism while synchronizing with a heat quantity addition from the heat addition device, and an energy correction device correcting, on the basis of an output from the peak value monitor, so as to become a peak value corresponding to the heat quantity from the heat addition device.
    • 提供了一种超导辐射测量装置,其能够在对来自外部的辐射热和磁场的输出信号的峰值的波动进行采样测量时进行能量校正。 超导辐射测量装置包括:检测辐射线的能量作为温度变化的微量热仪;用于检测流向微量热仪的电流的位移的信号检测机构;分流电阻; 与微热量计并联连接,其电阻值小于微热量计,连接到微热量计的偏置电源和分流电阻并施加恒定电压,加热常数的加热装置 以及已知的热量到微量热计的峰值监视器,与来自加热装置的热量添加同步时,测量与来自信号检测机构的输出信号相对应的加热量的峰值的峰值监视器,以及 能量校正装置,根据峰值监视器的输出,对峰值进行校正 g到来自加热装置的热量。
    • 9. 发明授权
    • Nondestructive inspection apparatus with superconducting magnetic sensor
    • 超导磁传感器无损检测装置
    • US5834938A
    • 1998-11-10
    • US699894
    • 1996-08-16
    • Akikazu OdawaraKazuo ChinoneSatoshi Nakayama
    • Akikazu OdawaraKazuo ChinoneSatoshi Nakayama
    • G01N27/87G01R33/035H01L21/66H01L39/04H01L39/22G01N27/82G01R31/28
    • G01R33/035Y10S505/846
    • To provide a nondestructive inspection apparatus with a reduced distance between a superconducting magnetic sensor and an object under inspection, a cryostat for cooling the sensor to a superconducting state is provided with inner and outer vessels. The inner vessel has a baseplate on which the magnetic sensor is disposed, and has an inner wall defining a central chamber for containing a refrigerant for cooling the magnetic sensor. The outer vessel has an inner wall defining a central chamber for containing the inner vessel, the magnetic sensor and the stage. A gap between the inner and outer vessels is evacuated to insulate the inner chamber from the ambient atmosphere. To facilitate ease of transferring an object to and from the stage for inspection, a load lock area is provided adjoining the outer vessel. The load lock has a movable inner wall portion opening to the inner chamber of the outer vessel and a movable outer wall portion opening to the ambient atmosphere so as to permit the transfer of an object to be inspected to and from the stage.
    • 为了提供在超导磁传感器和被检查物体之间的距离减小的非破坏性检查装置,用于将传感器冷却到超导状态的低温恒温器设置有内部和外部容器。 内部容器具有基板,磁性传感器设置在基板上,并且具有限定用于容纳用于冷却磁性传感器的制冷剂的中央室的内壁。 外部容器具有限定用于容纳内部容器,磁性传感器和级的中心室的内壁。 内部和外部容器之间的间隙被排空以将内部室与环境大气隔离。 为了便于将物体传送到台面进行检查,提供了与外部容器邻接的装载锁定区域。 负载锁具有通向外部容器的内部室的可移动的内壁部分,以及通向大气环境的可移动的外壁部分,以便允许将待检查物体从工作台传出。
    • 10. 发明授权
    • Apparatus for detecting a fine magnetic field with characteristic
testing function of a DC squid
    • 用于检测具有DC鱿鱼特征测试功能的精细磁场的装置
    • US5280242A
    • 1994-01-18
    • US840344
    • 1992-02-24
    • Akikazu OdawaraSatoshi NakayamaSattoshi Sekiya
    • Akikazu OdawaraSatoshi NakayamaSattoshi Sekiya
    • G01R33/035H01L39/22
    • G01R33/0356Y10S505/846
    • An apparatus for detecting a fine magnetic field comprises a DC SQUID which detects and converts a magnetic field to an electrical signal. A flux locked looped circuit drives the DC SQUID. The flux locked loop circuit includes an amplifier for amplifying the electrical signal. A phase detector modulates the amplified electrical signal and an integration circuit outputs a voltage signal corresponding to the detected magnetic field. An oscillator coupled to the phase detector supplies a demodulation frequency signal. A modulator including a first voltage-to-current converter and a second voltage-to-current converter is coupled with the integration circuit and the oscillator for supplying a modulation signal to the DC SQUID. The modulator further includes an external input terminal and a feedback modulation change-over circuit for changing an internal feedback signal to an external test signal inputted to the external input terminal. A bias source having a third voltage-to-current converter is coupled to the DC SQUID and supplies a bias signal. The bias source also includes an external input terminal and a change-over circuit for changing an internal bias signal to an external test signal inputted to the second external input terminal. An external output terminal is connected to the amplifier for supplying a monitoring test output signal from the DC SQUID. The apparatus for detecting a fine magnetic field thus provides a self-testing function for the DC SQUID.
    • 用于检测精细磁场的装置包括检测并将磁场转换为电信号的DC SQUID。 磁通锁定环路驱动DC SQUID。 磁通锁定环电路包括用于放大电信号的放大器。 相位检测器对放大的电信号进行调制,并且积分电路输出与检测到的磁场相对应的电压信号。 耦合到相位检测器的振荡器提供解调频率信号。 包括第一电压 - 电流转换器和第二电压 - 电流转换器的调制器与用于向DC SQUID提供调制信号的积分电路和振荡器耦合。 调制器还包括外部输入端和反馈调制转换电路,用于将内部反馈信号改变为输入到外部输入端的外部测试信号。 具有第三电压 - 电流转换器的偏置源耦合到DC SQUID并提供偏置信号。 偏置源还包括用于将内部偏置信号改变为输入到第二外部输入端子的外部测试信号的外部输入端子和转换电路。 外部输出端子连接到放大器,用于从DC SQUID提供监测测试输出信号。 因此,用于检测精细磁场的装置为DC SQUID提供自检功能。