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91. 发明授权

US07821187B1 Immersion gun equipped electron beam column 有权
标题翻译：沉枪配电子束柱
公开(公告)号：US07821187B1
公开(公告)日：2010-10-26
申请号：US12204841
申请日：2008-09-05
申请人： Xinrong Jiang , Marian Mankos , Liqun Han
发明人： Xinrong Jiang , Marian Mankos , Liqun Han
IPC分类号： H01J27/02
CPC分类号： H01J37/063 , H01J37/145
摘要： An electron gun of the type having an electron emitter for emitting electrons, including an electrostatic lens and a magnetic lens formed by pole pieces with a winding coil disposed between the magnetic pole pieces. The magnetic lens forms a rotationally symmetrical magnetic field in a gap formed by the pole pieces. The magnetic field forms the magnetic lens and focuses the electrons emitted from the emitter. A vacuum tube separates the electron gun from the magnetic lens. The electron gun is sealed in a vacuum by the vacuum tube and the magnetic lens is shielded in air.
摘要翻译：一种具有用于发射电子的电子发射器的电子枪，包括静电透镜和由极片形成的磁性透镜，该磁极具有设置在磁极片之间的绕组线圈。磁性透镜在由极片形成的间隙中形成旋转对称的磁场。磁场形成磁透镜并聚焦从发射器发射的电子。真空管将电子枪与磁性透镜分开。电子枪由真空管密封在真空中，磁性透镜在空气中被屏蔽。

92. 发明申请

US20090261266A1 MULTI-AXIS LENS, BEAM SYSTEM MAKING USE OF THE COMPOUND LENS, AND METHOD OF MANUFACTURING THE COMPOUND LENS 有权
标题翻译：多轴透镜，使用该化合物镜头的光束系统及其制造方法
公开(公告)号：US20090261266A1
公开(公告)日：2009-10-22
申请号：US12492610
申请日：2009-06-26
申请人： STEFAN LANIO
发明人： STEFAN LANIO
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , B82Y10/00 , B82Y40/00 , H01J37/145 , H01J37/3177 , H01J2237/1205 , H01J2237/1405
摘要： The invention provides a lens system for a plurality of charged particle beams. The lens system comprises an excitation coil providing a magnetic flux to a pole piece unit having a first pole piece, a second pole piece and at least two openings for charged particle beams, wherein the two openings are arranged in one row, thereby forming a lens row, and wherein the pole piece unit has an elongated shape.
摘要翻译：本发明提供一种用于多个带电粒子束的透镜系统。所述透镜系统包括向具有第一极片，第二极片和用于带电粒子束的至少两个开口的极片单元提供磁通的激励线圈，其中两个开口布置成一排，从而形成透镜并且其中所述极靴单元具有细长形状。

93. 发明申请

US20090256076A1 CHARGED PARTICLE BEAM APPARATUS PERMITTING HIGH-RESOLUTION AND HIGH-CONTRAST OBSERVATION 有权
标题翻译：充电颗粒光束设备允许高分辨率和高对比度观察
公开(公告)号：US20090256076A1
公开(公告)日：2009-10-15
申请号：US12385612
申请日：2009-04-14
申请人： Muneyuki FUKUDA , Naomasa SUZUKI , Tomoyasu SHOJO , Noritsugu TAKAHASHI
发明人： Muneyuki FUKUDA , Naomasa SUZUKI , Tomoyasu SHOJO , Noritsugu TAKAHASHI
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G01N23/225 , H01J37/145 , H01J2237/21 , H01J2237/28
摘要： A lower pole piece of an electromagnetic superposition type objective lens is divided into an upper magnetic path and a lower magnetic path. A voltage nearly equal to a retarding voltage is applied to the lower magnetic path. An objective lens capable of acquiring an image with a higher resolution and a higher contrast than a conventional image is provided. An electromagnetic superposition type objective lens includes a magnetic path that encloses a coil, a cylindrical or conical booster magnetic path that surrounds an electron beam, a control magnetic path that is interposed between the coil and sample, an accelerating electric field control unit that accelerates the electron beam using a booster power supply, a decelerating electric field control unit that decelerates the electron beam using a stage power supply, and a suppression unit that suppresses electric discharge of the sample using a control magnetic path power supply. Thus, whether landing energy of an electron beam varies widely, the electron beam can be focused with the electromagnetic superposition type objective lens approached to the sample.
摘要翻译：电磁叠加型物镜的下极片分为上磁路和下磁路。几乎等于延迟电压的电压被施加到下磁路。提供了能够获得具有比常规图像更高分辨率和更高对比度的图像的物镜。电磁叠加型物镜包括包围线圈的磁路，围绕电子束的圆柱形或锥形增强器磁路，介于线圈和样品之间的控制磁路，加速电场控制单元，其加速使用升压电源的电子束，使用级电源减速电子束的减速电场控制部，以及抑制使用控制磁路电源对样品进行放电的抑制部。因此，无论电子束的着陆能量是否变化很大，电子束可以与接近样品的电磁叠加型物镜聚焦。

94. 发明授权

US07569834B1 High resolution charged particle projection lens array using magnetic elements 有权
标题翻译：高分辨率带电粒子投影透镜阵列使用磁性元件
公开(公告)号：US07569834B1
公开(公告)日：2009-08-04
申请号：US11550762
申请日：2006-10-18
申请人： Neil Richardson
发明人： Neil Richardson
IPC分类号： H01J37/14 , H01J37/20
CPC分类号： H01J37/145 , B82Y10/00 , B82Y40/00 , H01J37/21 , H01J37/3177 , H01J2237/0453 , H01J2237/04922 , H01J2237/04924 , H01J2237/04926 , H01J2237/1405 , H01J2237/24592
摘要： A charged particle optic apparatus for improvement in resolution of an electrostatic, multi-beam column is disclosed. The charged particle optic apparatus includes an electrostatic lens array having a first plurality of apertures and a first magnetic pole piece disposed proximate the electrostatic lens array. The first magnetic pole piece includes a second plurality of apertures. The charged particle optic apparatus also includes a second magnetic pole piece disposed proximate the electrostatic lens array such that the electrostatic lens array is between the first magnetic pole piece and the second magnetic pole piece. The second magnetic pole piece includes a third plurality of apertures. The first, second and third pluralities of apertures are aligned with each other. The charged particle optic apparatus may be implemented in a charged particle beam system.
摘要翻译：公开了一种用于提高静电多光束柱分辨率的带电粒子光学装置。带电粒子装置包括具有第一多个孔的静电透镜阵列和靠近静电透镜阵列设置的第一磁极片。第一磁极片包括第二多个孔。带电粒子装置还包括靠近静电透镜阵列设置的第二磁极片，使得静电透镜阵列位于第一磁极片和第二磁极片之间。第二磁极片包括第三多个孔。第一，第二和第三多个孔彼此对准。带电粒子光学装置可以在带电粒子束系统中实现。

95. 发明授权

US07253417B2 Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens 有权
标题翻译：多轴复合透镜，使用复合透镜的光束系统，以及使用复合透镜的方法
公开(公告)号：US07253417B2
公开(公告)日：2007-08-07
申请号：US10539179
申请日：2003-12-12
申请人： Jürgen Frosien , Pavel Adamec
发明人： Jürgen Frosien , Pavel Adamec
IPC分类号： H01J3/07 , H01J29/51
CPC分类号： B82Y10/00 , B82Y40/00 , H01J37/145 , H01J37/3177
摘要： The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system.
摘要翻译：本发明提供了一种用于带电粒子多光束系统的光学系统。光学系统包括静电透镜部件和磁性透镜部件。这些部件用于将多个带电粒子束聚焦在分开的开口中，用于至少多个穿过光学系统的带电粒子束中的每一个。

96. 发明申请

US20060163488A1 Multi-axis lens, beam system making use of the compound lens, and method of manufacturing the compound lens 有权
公开(公告)号：US20060163488A1
公开(公告)日：2006-07-27
申请号：US10540178
申请日：2003-12-12
申请人： Stefan Lanio
发明人： Stefan Lanio
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , B82Y10/00 , B82Y40/00 , H01J37/145 , H01J37/3177 , H01J2237/1205 , H01J2237/1405
摘要： The invention provides a lens system for a plurality of charged particle beams. Therein, at least one common excitation coil for at least two lens modules is provided. The lens modules comprise an first pole piece, a second pole piece and at least one opening for a charged particle beam. The lens modules constitute a component and share the excitation coil. Thereby, raw material availability, processing of work pieces and symmetry conditions for the lens fields are improved.

97. 发明授权

US06774646B1 Electron beam inspection system using multiple electron beams and uniform focus and deflection mechanisms 有权
标题翻译：电子束检查系统采用多个电子束和均匀的焦点和偏转机制
公开(公告)号：US06774646B1
公开(公告)日：2004-08-10
申请号：US10058614
申请日：2002-01-28
申请人： Liqun Han , Mark A. McCord
发明人： Liqun Han , Mark A. McCord
IPC分类号： G01R3100
CPC分类号： H01J37/28 , G01N23/04 , H01J37/04 , H01J37/141 , H01J37/145 , H01J37/147 , H01J2237/04756 , H01J2237/103 , H01J2237/2817
摘要： A method for inspecting samples uses a multiple beam electron system having a uniform magnetic focusing field. Deflection of the incident electron beams is produced by deflector plates generating an electrostatic deflection force which produces a uniform force on the electron beams. Thermal field emission sources generate incident electron beams towards at least two portions of the sample. A detector array collects multiple detection electrons.
摘要翻译：用于检查样品的方法使用具有均匀磁场的多束电子系统。入射电子束的偏转由偏转板产生，该偏转板产生在电子束上产生均匀的力的静电偏转力。热场发射源朝向样品的至少两部分产生入射电子束。检测器阵列收集多个检测电子。

98. 发明申请

US20040084629A1 Objective lens for an electron microscopy system and electron microscopy system 有权
标题翻译：用于电子显微镜系统和电子显微镜系统的物镜
公开(公告)号：US20040084629A1
公开(公告)日：2004-05-06
申请号：US10619475
申请日：2003-07-16
申请人： LEO Elektronenmikroskopie GmbH
发明人： Dirk Preikszas , Michael Steigerwald , Peter Hoffrogge , Peter Gnauck
IPC分类号： H01J037/145
CPC分类号： H01J37/145 , H01J2237/2817 , H01J2237/31745 , H01J2237/31749
摘要： An objective lens with magnetic and electrostatic focusing for an electron microscopy system is provided whose at least partially conical outer shape allows orienting an object to be imaged at a large angle range in respect of an electron beam, said objective lens exhibiting, at the same time, good optical parameters. This is enabled by a specific geometry of the lens elements. Furthermore, an examination for the simultaneous imaging and processing of an object is proposed which comprises, besides an electron microscopy system with the above-mentioned objective lens, also an ion beam processing system and an object support.
摘要翻译：提供了一种用于电子显微镜系统的具有磁性和静电聚焦的物镜，其至少部分为圆锥形的外部形状允许相对于电子束以大角度范围定向要成像的物体，所述物镜同时展现，光学参数好。这可以通过镜头元件的特定几何形状来实现。此外，提出了一种用于同时成像和处理物体的检查，除了具有上述物镜的电子显微镜系统之外，还包括离子束处理系统和物体支撑。

99. 发明授权

US5900629A Scanning electron microscope 失效
公开(公告)号：US5900629A
公开(公告)日：1999-05-04
申请号：US44833
申请日：1998-03-20
申请人： Hideo Todokoro , Makoto Ezumi
发明人： Hideo Todokoro , Makoto Ezumi
IPC分类号： H01J37/244 , H01J37/256 , H01J37/28 , H01J37/285
CPC分类号： H01J37/244 , H01J37/145 , H01J37/268 , H01J37/28 , H01J2237/04 , H01J2237/04756 , H01J2237/2449
摘要： A scanning microscope is provided for producing a scan image at high spatial resolution and in a low acceleration voltage area. An acceleration tube is located in an electron beam path of an objective lens for applying a post-acceleration voltage of the primary electron beam. The application of an overlapping voltage onto a sample allows a retarding electric field against the primary electron beam to be formed between the acceleration tube and the sample. The secondary electrons generated from the sample and the secondary signals such as reflected electrons are extracted into the acceleration tube through the effect of an electric field (retarding electric field) immediately before the sample. The signals are detected by secondary signal detectors located upwardly than the acceleration tube.

100. 发明授权

US3731094A Electron beam apparatus with means for generating a rotation-symmetrical magnetic field 失效
标题翻译：电子束装置，用于产生旋转对称磁场
公开(公告)号：US3731094A
公开(公告)日：1973-05-01
申请号：US17304571
申请日：1971-08-19
申请人： PHILIPS CORP
发明人： LE POOLE J
IPC分类号： G01Q30/02 , H01J29/56 , H01J37/04 , H01J37/063 , H01J37/067 , H01J37/145 , H01J37/153 , H01J41/04 , H01J37/26
CPC分类号： H01J37/04 , H01J29/56 , H01J37/063 , H01J37/067 , H01J37/145 , H01J37/153 , H01J41/04
摘要： An apparatus for generating an electrostatic space charge in a rotation-symmetrical magnetic field, in which an electron beam from an electron gun which is arranged laterally on the field space generates the space charge in the field space. The electron beam may be adjusted by mechanical adjustment of the gun and also by means of the potential of a conducting sleeve in the magnetic field. By means of this potential, it is also possible to adjust the ratio between the contributions to the space charge which are due to primary electrons and to secondary electrons produced by the primary electrons in a residual gas in the field space.
摘要翻译：一种用于在旋转对称磁场中产生静电空间电荷的装置，其中来自电子枪的电子束横向设置在场空间上，在场空间中产生空间电荷。电子束可以通过枪的机械调节以及通过导磁套在磁场中的电位来调节。通过这种电位，还可以调整由于一次电子引起的空间电荷的贡献与在场空间中残留气体中的一次电子产生的二次电子之间的比率。

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