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91. 发明申请

US20110227657A1 VIBRATOR ELEMENT, SENSOR DEVICE, SENSOR, AND ELECTRONIC APPARATUS 有权
标题翻译：振动元件，传感器装置，传感器和电子设备
公开(公告)号：US20110227657A1
公开(公告)日：2011-09-22
申请号：US13044012
申请日：2011-03-09
申请人： Ryuta NISHIZAWA , So ICHIKAWA
发明人： Ryuta NISHIZAWA , So ICHIKAWA
IPC分类号： H03B5/30
CPC分类号： H03H9/215 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/097 , H03H9/19
摘要： A vibrator element includes: a base part; and a vibrating arm extended from the base part in a first direction, the vibrating arm including a first region, a second region, and a third region sequentially arranged from the base part side in the first direction, the first region to the third region including first electrodes and second electrodes that generate electric fields in second directions perpendicular to the first direction in a plan view and are electrically independent from each other, wherein electric field directions of the first region and the third region and an electric field direction of the second region are opposite to each other, and the vibrating arm is expanded and contracted in the first direction by the electric fields in the second directions, and the vibrating arm is vibrated in third directions as directions perpendicular to the respective first direction and second directions.
摘要翻译：振动元件包括：基部; 以及从第一方向从基部延伸的振动臂，所述振动臂包括从所述第一方向的所述基部侧顺序地配置的第一区域，第二区域和第三区域，所述第一区域到所述第三区域包括第一电极和第二电极，其在平面图中在与第一方向垂直的第二方向上产生电场，并且彼此电独立，其中第一区域和第三区域的电场方向以及第二区域的电场方向彼此相对，并且振动臂通过第二方向上的电场在第一方向上膨胀和收缩，并且振动臂在垂直于相应的第一方向和第二方向的方向上沿第三方向振动。

92. 发明申请

US20110143146A1 PIEZOELECTRIC THIN FILM AND METHOD OF MANUFACTURING THE SAME, INK JET HEAD, METHOD OF FORMING IMAGE WITH THE INK JET HEAD, ANGULAR VELOCITY SENSOR, METHOD OF MEASURING ANGULAR VELOCITY WITH THE ANGULAR VELOCITY SENSOR, PIEZOELECTRIC GENERATING ELEMENT, AND METHOD OF GENERATING ELECTRIC POWER WITH THE PIEZOELECTRIC GENERATING ELEMENT 有权
标题翻译：压电薄膜及其制造方法，喷墨头，用喷墨头形成图像的方法，角速度传感器，用角速度传感器，压电发生元件测量角速度的方法，以及生成电力的方法压电元件
公开(公告)号：US20110143146A1
公开(公告)日：2011-06-16
申请号：US12956772
申请日：2010-11-30
申请人： Takakiyo HARIGAI , Hideaki Adachi , Eiji Fujii
发明人： Takakiyo HARIGAI , Hideaki Adachi , Eiji Fujii
IPC分类号： H01L41/18 , B41J2/045 , G01C19/56 , H01L41/047 , H01L41/113 , B32B9/04 , C23C14/08
CPC分类号： B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2/1646 , B41J2002/14258 , G01C19/5628 , H01L41/0478 , H01L41/0815 , H01L41/1136 , H01L41/187 , H01L41/316 , H01L41/319
摘要： Provided are a piezoelectric thin film including a lead-free ferroelectric material and exhibiting high piezoelectric performance comparable to that of lead zirconate titanate (PZT), and a method of manufacturing the piezoelectric thin film. The piezoelectric thin film of the present invention comprises: a LaNiO3 film having a (001) orientation; a NaNbO3 film having a (001) orientation; and a (Bi, Na, Ba) TiO3 film having a (001) orientation. The LaNiO3 film, the NaNbO3 film, and the (Bi, Na, Ba)TiO3 film are laminated in this order.
摘要翻译：提供了一种包括无铅铁电材料并表现出与锆钛酸铅（PZT）相当的高压电性能的压电薄膜，以及制造压电薄膜的方法。本发明的压电薄膜包括：具有（001）取向的LaNiO3膜; 具有（001）取向的NaNbO 3膜; 和具有（001）取向的（Bi，Na，Ba）TiO 3膜。依次层叠LaNiO3膜，NaNbO3膜，（Bi，Na，Ba）TiO3膜。

93. 发明申请

US20100050769A1 ANGULAR VELOCITY SENSOR 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20100050769A1
公开(公告)日：2010-03-04
申请号：US12539841
申请日：2009-08-12
申请人： Kosuke Watanabe , Keiichi Okano
发明人： Kosuke Watanabe , Keiichi Okano
IPC分类号： G01C19/56 , H01L41/04
CPC分类号： G01C19/5628
摘要： An angular velocity sensor includes vibrators, an internal circuit that drives the vibrators to detect an angular velocity signal, a circuit substrate on which components such as an IC and a passive component defining the internal circuit are disposed, and electrically connects the vibrators and the components, and a cap that covers a surface of the circuit substrate and encloses the vibrators and internal circuit. An output signal processed by the internal circuit is output from an external electrode provided on the back surface of the circuit substrate. Vibrator inspection electrodes are provided on the back surface of the circuit substrate, and the vibrator inspection electrodes are electrically connected to surface electrodes of the vibrators. Thus, electrical characteristics of the vibrators can be directly measured after assembly.
摘要翻译：角速度传感器包括振动器，驱动振动器以检测角速度信号的内部电路，其上设置有诸如IC和限定内部电路的无源部件的部件的电路基板，并将振动器和部件以及覆盖电路基板的表面并包围振动器和内部电路的盖。由内部电路处理的输出信号从设置在电路基板背面的外部电极输出。振动检查电极设置在电路基板的背面，振子检查电极与振动器的表面电极电连接。因此，可以在组装之后直接测量振动器的电特性。

94. 发明申请

US20090322183A1 INERTIAL SENSOR AND INERTIAL DETECTING DEVICE 审中-公开
标题翻译：惯性传感器和惯性检测装置
公开(公告)号：US20090322183A1
公开(公告)日：2009-12-31
申请号：US12488691
申请日：2009-06-22
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/0922 , G01P15/18 , G01P2015/0817 , G01P2015/0828
摘要： An inertial sensor includes a first beam, a first proof mass section and a first upper surface stopper section. The first beam extends in a first direction in a plane parallel to a major surface of a substrate and is held with a spacing from the major surface of the substrate. The first beam has a first detecting section including a first upper side electrode, a first lower side electrode, and a first upper side piezoelectric film provided between the first upper side electrode and the first lower side electrode. The first beam has one end connected to the major surface of the substrate. The first proof mass section is connected to the other end of the first beam and held with a spacing from the major surface of the substrate. The first upper surface stopper section is provided on the opposite side of the first proof mass section from the substrate with a spacing from the first proof mass section.
摘要翻译：惯性传感器包括第一光束，第一检测质量部分和第一上表面阻挡部分。第一光束在与基板的主表面平行的平面中沿第一方向延伸，并且与基板的主表面保持间隔。第一光束具有包括设置在第一上侧电极和第一下侧电极之间的第一上侧电极，第一下侧电极和第一上侧压电膜的第一检测部。第一光束的一端连接到基板的主表面。第一检测质量部分连接到第一光束的另一端并且与衬底的主表面间隔保持。第一上表面止动部分设置在第一检验质量部分的与第一检验质量部分间隔开的基板的相对侧上。

95. 发明申请

US20090241663A1 Angular velocity sensor element 有权
标题翻译：角速度传感器元件
公开(公告)号：US20090241663A1
公开(公告)日：2009-10-01
申请号：US12379236
申请日：2009-02-17
申请人： Tatsumaro Hori
发明人： Tatsumaro Hori
IPC分类号： G01P3/44
CPC分类号： G01P15/0922 , G01C19/5621 , G01C19/5628 , G01P15/14 , G01P15/18
摘要： There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element 1 according to the present embodiment includes: sensor units 10a to 10c with driven-related and detection-related vibrating arms; a base section 4 which couples the sensor units 10a to 10c; a first fixed section 6 which is frame-shaped and which surrounds the base section 4 and the sensor units 10a to 10c; first coupling arms 5a to 5c which couple the base section 4 to the first fixed section 6; a second fixed section 8 which is disposed in at least a part of the area around the first fixed section 6; and second coupling arms 7a to 7c which couple the first fixed section 6 to the second fixed section 8.
摘要翻译：提供了一种角速度传感器元件，即使当从外部发出突然的振动时，也可以吸收振动，以防止振动传递到其元件部分。根据本实施例的角速度传感器元件1包括：具有驱动相关和检测相关的振动臂的传感器单元10a至10c; 连接传感器单元10a至10c的基部4; 第一固定部6，其为框状，并且包围基部4和传感器单元10a〜10c; 第一联接臂5a至5c，其将基部4联接到第一固定部6; 第二固定部8，设置在第一固定部6周围的区域的至少一部分上; 以及将第一固定部分6联接到第二固定部分8的第二联接臂7a至7c。

96. 发明授权

US07579760B2 Vibrator and production method therefor 失效
标题翻译：振动器及其制作方法
公开(公告)号：US07579760B2
公开(公告)日：2009-08-25
申请号：US12101227
申请日：2008-04-11
申请人： Katsumi Fujimoto
发明人： Katsumi Fujimoto
IPC分类号： H01L41/08
CPC分类号： G01C19/5663 , G01C19/5628 , H01L41/0906 , H01L41/257
摘要： A vibrator includes a vibrating body having a substantially quadrangular prism shape and including four side surfaces extending in the longitudinal direction of the vibrating body. A common electrode is formed on substantially an entire surface of one of the side surfaces of the vibrating body. Split electrodes extend in the longitudinal direction on another side surface opposite to the side surface on which the common electrode is formed, and are spaced from each other in the width direction of the side surface on which the split electrodes are formed. In the vibrating body, a first polarized section is polarized in a direction from the side surfaces of the vibrating body that do not have an electrode disposed thereon, toward the split electrodes. A second polarized section is polarized in a direction from the side surfaces of the vibrating body that do not have an electrode disposed thereon, toward the common electrode. Thus, the vibrator does not include a joint layer, and is polarized in opposite directions in the thickness direction.
摘要翻译：振动器包括具有大致四边形棱镜形状并包括在振动体的纵向方向上延伸的四个侧表面的振动体。公共电极形成在振动体的一个侧表面的基本上整个表面上。分离电极在与形成有公共电极的侧面相反的另一侧面上沿长度方向延伸，并且在形成有分割电极的侧面的宽度方向上彼此间隔开。在振动体中，第一极化部在从不具有配置在其上的电极的振动体的侧面朝向分割电极的方向上偏振。第二偏振部分在从不具有设置在其上的电极的振动体的侧表面朝向公共电极的方向上偏振。因此，振动器不包括接合层，并且在厚度方向上沿相反方向极化。

97. 发明授权

US07557667B2 Angular rate sensor 有权
标题翻译：角速度传感器
公开(公告)号：US07557667B2
公开(公告)日：2009-07-07
申请号：US11812858
申请日：2007-06-22
申请人： Toshinobu Hosokawa , Kazuhiro Ota , Hiroshi Tanaka , Masanori Yachi , Hiroaki Takagi
发明人： Toshinobu Hosokawa , Kazuhiro Ota , Hiroshi Tanaka , Masanori Yachi , Hiroaki Takagi
IPC分类号： H03B5/30
CPC分类号： G01C19/5628
摘要： An angular rate sensor includes a tuning-fork oscillator, a support portion, an oscillation absorption portion and a mounting portion. The tuning-fork oscillator has a base and arm portions extending from the base. The support portion supports the base of the tuning-fork oscillator at a front face thereof. The oscillation absorption portion is provided on a back face of the support portion opposite to the front face. The mounting portion mounts the support portion through the oscillation absorption portion.
摘要翻译：角速率传感器包括音叉振荡器，支撑部分，振荡吸收部分和安装部分。音叉式振荡器具有从底座延伸的底座和臂部分。支撑部分在其前面支撑音叉振荡器的基座。振动吸收部设置在与正面相反的支撑部的背面。安装部通过振动吸收部安装支撑部。

98. 发明授权

US07530676B2 Piezoelectric element, inkjet head, angular velocity sensor, methods for manufacturing them and inkjet recording device 有权
标题翻译：压电元件，喷墨头，角速度传感器，它们的制造方法和喷墨记录装置
公开(公告)号：US07530676B2
公开(公告)日：2009-05-12
申请号：US10560001
申请日：2005-02-21
申请人： Atsushi Tomozawa , Eiji Fujii , Hideo Torii
发明人： Atsushi Tomozawa , Eiji Fujii , Hideo Torii
IPC分类号： B41J2/045
CPC分类号： G01C19/5628 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1646 , B41J2002/1425 , B41J2002/14258 , H01L41/0815 , H01L41/094 , H01L41/0973 , H01L41/1876 , H01L41/316
摘要： A piezoelectric element includes two electrode films and a layered piezoelectric film which is sandwiched between the electrode films and made of two thin piezoelectric films each having preferred orientation along the (111) plane. The two thin piezoelectric films are aggregates of columnar grains, respectively, which are continuously linked to each other. The columnar grains of the second thin piezoelectric film have a larger average cross-sectional diameter than the columnar grains of the first thin piezoelectric film. The ratio of the thickness of the layered piezoelectric film to the average cross-sectional diameter of the columnar grains of the second thin piezoelectric film is 20 to 60 inclusive.
摘要翻译：压电元件包括两个电极膜和层压的压电膜，它被夹在电极膜之间并且由沿着（111）面优选取向的两个薄压电膜构成。两个薄压电薄膜分别是彼此连续地连接的柱状晶粒的聚集体。第二薄压电薄膜的柱状晶粒的平均截面直径比第一薄压电薄膜的柱状晶粒大。层叠型压电体膜的厚度与第二薄型压电膜的柱状晶粒的平均截面直径的比率为20〜60。

99. 发明授权

US07481112B2 Silicon inertial sensors formed using MEMS 失效
标题翻译：使用MEMS形成的硅惯性传感器
公开(公告)号：US07481112B2
公开(公告)日：2009-01-27
申请号：US11240804
申请日：2005-09-30
申请人： Eun Sok Kim , Qiang Zou
发明人： Eun Sok Kim , Qiang Zou
IPC分类号： G01P15/12 , G01P9/04
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/0802 , G01P15/097 , G01P15/123 , G01P15/18 , G01P2015/0817 , G01P2015/0828 , Y10T29/49004 , Y10T29/49007
摘要： A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane.
摘要翻译： MEMS硅惯性传感器由质量块形成，该质量块被支撑和约束以仅以指定的方式振动。传感器可以从支持单独优化，以调整灵敏度与带宽分开。传感器可以三维感测，或只能在单个平面中感知。

100. 发明申请

US20070256497A1 Angular velocity sensor 审中-公开
标题翻译：角速度传感器
公开(公告)号：US20070256497A1
公开(公告)日：2007-11-08
申请号：US11785458
申请日：2007-04-18
申请人： Hiroshi Ishikawa , Takayuki Yamaji , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
发明人： Hiroshi Ishikawa , Takayuki Yamaji , Akira Imai , Shoji Ogasawara , Takashi Katsuki , Yuji Takahashi , Fumihiko Nakazawa , Hiroaki Takagi
IPC分类号： G01P15/08
CPC分类号： G01C19/5607 , G01C19/5628
摘要： An angular velocity sensor includes multiple tuning-fork vibrators, each of which respectively includes a base portion and multiple arm portions extending from the base portion, and a difference in a resonance frequency between the multiple tuning-fork vibrators is at least 2 percent of an average of resonance frequencies of the multiple tuning-fork vibrators.
摘要翻译：角速度传感器包括多个音叉振动器，每个音叉振动器分别包括基部和从基部延伸的多个臂部分，并且多个音叉振动器之间的谐振频率的差异为至少2％多音叉振动器的共振频率的平均值。

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