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1. 发明申请

US20120215121A1 MEMS VASCULAR SENSOR 审中-公开
标题翻译： MEMS血管传感器
公开(公告)号：US20120215121A1
公开(公告)日：2012-08-23
申请号：US13461716
申请日：2012-05-01
申请人： Tzung K. Hsiai , Gopikrishnan Soundararajan , Eun Sok Kim , Hongyu Yu , Mahsa Rouhanizadeh , Christina Tiantian Lin
发明人： Tzung K. Hsiai , Gopikrishnan Soundararajan , Eun Sok Kim , Hongyu Yu , Mahsa Rouhanizadeh , Christina Tiantian Lin
IPC分类号： A61B5/027
CPC分类号： B81C1/00246 , G01N3/24
摘要： A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.
摘要翻译：用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。传感器包括覆盖在衬底内蚀刻的空腔的膜片，以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。热敏元件可电连接到形成在基板的背面上的电极引线。所述传感器包括连接到所述背面的电子系统，并且被配置为当通过向其施加电流来加热所述感测元件时，测量从所述感测元件到周围流体的热对流变化，并进一步被配置为从热变化对流血管参数，例如流过感测元件的流体的剪切应力。

2. 发明申请

US20080139409A1 DNA Probe Synthesis on Chip on Demand By Mems Ejector Array 有权
标题翻译：通过Mems喷射器阵列的芯片上的DNA探针合成
公开(公告)号：US20080139409A1
公开(公告)日：2008-06-12
申请号：US12033845
申请日：2008-02-19
申请人： Eun Sok Kim , Jae Wan Kwon
发明人： Eun Sok Kim , Jae Wan Kwon
IPC分类号： C40B50/14
CPC分类号： B01L3/0268 , B01J2219/00274 , B01L9/52 , B01L2400/0433 , B01L2400/0436 , B41J2/14008 , B41J2/16 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , Y10T436/11 , Y10T436/112499 , Y10T436/113332
摘要： A DNA probe synthesis system may include a target holder for holding a target chip, an ejector array chip, a wash and dry station, and conveyance means for moving the target holder and the chip between the ejector array chip and the wash and dry station. The ejector array chip may include ejectors, reservoirs for containing DNA bases, and microchannels all on the same substrate. The ejectors may be Self Focusing Acoustic Transducers (SFATs).
摘要翻译： DNA探针合成系统可以包括用于保持目标芯片的靶保持器，喷射器阵列芯片，洗涤和干燥站，以及用于在目标夹持器和芯片之间移动喷射器阵列芯片和洗涤和干燥站之间的传送装置。喷射器阵列芯片可以包括喷射器，用于容纳DNA碱基的储存器和全部在相同基板上的微通道。喷射器可以是自聚焦声学传感器（SFAT）。

3. 发明授权

US07360422B2 Silicon inertial sensors formed using MEMS 有权
标题翻译：使用MEMS形成的硅惯性传感器
公开(公告)号：US07360422B2
公开(公告)日：2008-04-22
申请号：US11241869
申请日：2005-09-30
申请人： Asad Madni , Qiang Zou , Eun Sok Kim , Lynn Costlow , Jim Vuong , Roger Wells
发明人： Asad Madni , Qiang Zou , Eun Sok Kim , Lynn Costlow , Jim Vuong , Roger Wells
IPC分类号： G01P9/04 , G01P15/12
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/0802 , G01P15/097 , G01P15/123 , G01P15/18 , G01P2015/0817 , G01P2015/0828 , Y10T29/49004 , Y10T29/49007
摘要： A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane. Vibration cancellation may be provided.
摘要翻译： MEMS硅惯性传感器由质量块形成，该质量块被支撑和约束以仅以指定的方式振动。传感器可以从支持单独优化，以调整灵敏度与带宽分开。传感器可以三维感测，或只能在单个平面中感知。可以提供振动消除。

4. 发明授权

US07332127B2 DNA probe synthesis on chip on demand by MEMS ejector array 有权
标题翻译： DNA探针合成芯片按需求由MEMS喷射器阵列
公开(公告)号：US07332127B2
公开(公告)日：2008-02-19
申请号：US10194996
申请日：2002-07-11
申请人： Eun Sok Kim , Jae Wan Kwon
发明人： Eun Sok Kim , Jae Wan Kwon
IPC分类号： B01L3/02
CPC分类号： B01L3/0268 , B01J2219/00274 , B01L9/52 , B01L2400/0433 , B01L2400/0436 , B41J2/14008 , B41J2/16 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , Y10T436/11 , Y10T436/112499 , Y10T436/113332
摘要： A DNA probe synthesis system may include a target holder for holding a target chip, an ejector array chip, a wash and dry station, and conveyance means for moving the target holder and the chip between the ejector array chip and the wash and dry station. The ejector array chip may include ejectors, reservoirs for containing DNA bases, and microchannels all on the same substrate. The ejectors may be Self Focusing Acoustic Transducers (SFATs).
摘要翻译： DNA探针合成系统可以包括用于保持目标芯片的靶保持器，喷射器阵列芯片，洗涤和干燥站，以及用于在目标夹持器和芯片之间移动喷射器阵列芯片和洗涤和干燥站之间的传送装置。喷射器阵列芯片可以包括喷射器，用于容纳DNA碱基的储存器和全部在相同基板上的微通道。喷射器可以是自聚焦声学传感器（SFAT）。

5. 发明授权

US06379573B1 Self-limiting isotropic wet etching process 失效
标题翻译：自限制各向同性湿法蚀刻工艺
公开(公告)号：US06379573B1
公开(公告)日：2002-04-30
申请号：US09352582
申请日：1999-07-13
申请人： Eun Sok Kim , Cheol-Hyun Han
发明人： Eun Sok Kim , Cheol-Hyun Han
IPC分类号： B44C122
CPC分类号： C03C15/00 , B81B2203/0315 , B81B2203/0376 , B81C1/00626 , B81C2201/0133 , H01L21/30604 , H01L21/3081 , Y10T428/2848
摘要： During the formation of a spherical cavity in a substrate, self-limiting etching behavior of an isotropic etchant can be utilized when a tape is used as an etch mask. Such a self-limiting behavior is due to the presence of gas bubbles (consisted of SiF4 and NO, etch by-products) which close the etch window and limit the mass transport of the etchant to this silicon surface. Because of that, the spherical cavity size depends mostly on the size of the etch-mask opening, and is independent of the etching time. This self-limiting etching behavior precisely controls the dimension and uniformity of the spherical cavity.
摘要翻译：在衬底中形成球形腔时，当使用带作为蚀刻掩模时，可以利用各向同性蚀刻剂的自限蚀刻行为。这种自限制性行为是由于存在气泡（由SiF 4和NO（蚀刻副产物组成）），其关闭蚀刻窗口并限制蚀刻剂对该硅表面的质量传递。因此，球形腔尺寸主要取决于蚀刻掩模开口的尺寸，并且与蚀刻时间无关。这种自限制蚀刻行为精确地控制球形腔的尺寸和均匀性。

6. 发明授权

US07481112B2 Silicon inertial sensors formed using MEMS 失效
标题翻译：使用MEMS形成的硅惯性传感器
公开(公告)号：US07481112B2
公开(公告)日：2009-01-27
申请号：US11240804
申请日：2005-09-30
申请人： Eun Sok Kim , Qiang Zou
发明人： Eun Sok Kim , Qiang Zou
IPC分类号： G01P15/12 , G01P9/04
CPC分类号： G01C19/5719 , G01C19/56 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/0802 , G01P15/097 , G01P15/123 , G01P15/18 , G01P2015/0817 , G01P2015/0828 , Y10T29/49004 , Y10T29/49007
摘要： A MEMS silicon inertial sensor formed of a mass that is supported and constrained to vibrate in only specified ways. The sensors can be separately optimized from the support, to adjust the sensitivity separate from the bandwidth. The sensor can sense three dimensionally, or can only sense in a single plane.
摘要翻译： MEMS硅惯性传感器由质量块形成，该质量块被支撑和约束以仅以指定的方式振动。传感器可以从支持单独优化，以调整灵敏度与带宽分开。传感器可以三维感测，或只能在单个平面中感知。

7. 发明授权

US06857501B1 Method of forming parylene-diaphragm piezoelectric acoustic transducers 失效
标题翻译：聚对二甲苯隔膜压电声换能器的形成方法
公开(公告)号：US06857501B1
公开(公告)日：2005-02-22
申请号：US10089008
申请日：2000-09-21
申请人： Cheol-Hyun Han , Eun Sok Kim
发明人： Cheol-Hyun Han , Eun Sok Kim
IPC分类号： H04R17/00 , H04R31/00 , H04R7/00
CPC分类号： H04R31/003 , H04R17/00 , H04R31/006 , Y10T29/49005
摘要： A micromachined acoustic transducer comprising a parylene diaphragm piezoelectric transducer. The parylene diaphragm has far lower stiffness than the silicon nitride. The method for fabricating the parylene diaphragm acoustic transducer utilizes a prestructured disphragm layer utilizing silicon nitride which is compatible with high temperature semiconductor process. A silicon nitride layer is patterned and partially removed after forming the parylene diaphragm layer in order to enhance the structural qualities of the parylene diaphragm. The diaphragm may be flat or dome-shaped.
摘要翻译：一种包含聚对二甲苯隔膜压电换能器的微机械声换能器。聚对二甲苯隔膜的刚度低于氮化硅。用于制造聚对二甲苯隔膜声换能器的方法利用与高温半导体工艺相兼容的利用氮化硅的预结构层状层。在形成聚对二甲苯隔膜层之后，对氮化硅层进行构图和部分去除，以增强聚对二甲苯隔膜的结构质量。隔膜可以是平的或圆顶形的。

8. 发明授权

US08216434B2 MEMS vascular sensor 有权
标题翻译： MEMS血管传感器
公开(公告)号：US08216434B2
公开(公告)日：2012-07-10
申请号：US12041577
申请日：2008-03-03
申请人： Tzung K. Hsiai , Gopikrishnan Soundararajan , Eun Sok Kim , Hongyu Yu , Mahsa Rouhanizadeh , Christina Tiantian Lin
发明人： Tzung K. Hsiai , Gopikrishnan Soundararajan , Eun Sok Kim , Hongyu Yu , Mahsa Rouhanizadeh , Christina Tiantian Lin
IPC分类号： C23C14/34
CPC分类号： B81C1/00246 , G01N3/24
摘要： A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.
摘要翻译：用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。传感器包括覆盖在衬底内蚀刻的空腔的膜片，以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。热敏元件可电连接到形成在基板的背面上的电极引线。所述传感器包括连接到所述背面的电子系统，并且被配置为当通过向其施加电流来加热所述感测元件时，测量从所述感测元件到周围流体的热对流变化，并进一步被配置为从热变化对流血管参数，例如流过感测元件的流体的剪切应力。

9. 发明授权

US07719170B1 Self-focusing acoustic transducer with fresnel lens 失效
标题翻译：具有菲涅尔透镜的自聚焦声换能器
公开(公告)号：US07719170B1
公开(公告)日：2010-05-18
申请号：US12013413
申请日：2008-01-11
申请人： Eun Sok Kim , Hongyu Yu , Chuang-Yuan Lee
发明人： Eun Sok Kim , Hongyu Yu , Chuang-Yuan Lee
IPC分类号： H01L41/08
CPC分类号： H01L41/29 , B05B17/0607 , G10K11/30
摘要： Techniques, apparatus and systems that use an acoustic transducer with a Fresnel lens to focus an acoustic wave for various applications, including acoustic droplet ejectors.
摘要翻译：使用具有菲涅尔透镜的声学换能器将声波聚焦在各种应用中的技术，装置和系统，包括声学液滴喷射器。

10. 发明申请

US20080302675A1 POLYMER-BASED CARDIOVASCULAR BIOSENSORS, MANUFACTURE, AND USES THEREOF 审中-公开
标题翻译：基于聚合物的血管生物传感器，制造及其用途
公开(公告)号：US20080302675A1
公开(公告)日：2008-12-11
申请号：US12134938
申请日：2008-06-06
申请人： Tzung K. Hsiai , Hongyu Yu , Eun Sok Kim , Lisong Ai
发明人： Tzung K. Hsiai , Hongyu Yu , Eun Sok Kim , Lisong Ai
IPC分类号： B44C1/22 , G01N27/26
CPC分类号： A61B5/6852 , A61B5/01 , A61B5/02007 , A61B5/02141 , A61B5/0215 , A61B5/02156 , A61B5/026 , A61B5/027 , A61B5/053 , A61B2562/0261 , A61B2562/0271 , A61B2562/12 , A61B2562/125 , A61B2562/222 , A61M2025/0002 , A61M2205/3368 , B05D7/50 , G01K13/002
摘要： A flexible, polymer-based biosensor deployable into the arterial system which can assess shear stress in the arterial geometry in the presence of time-varying component of blood flow. Also, a method of fabricating a biosensor which may be used for in vivo procedures, involving the sequential depositing onto a substrate of a silicon dioxide layer, a metal heating element on the silicon dioxide layer, and a biocompatible polymer on the heating element, followed by etching the polymer layer to provide holes to allow for electrode contact with the heating element. A second metal layer is then deposited to form electrodes, followed by a second biocompatible polymer layer to form the device structure and removing the fabricated biosensor from the substrate by etching the substrate. In addition, a method of determining intravascular shear stress by measuring the temperature, flow rate and pressure of a bodily fluid with a biocompatible biosensor is disclosed.
摘要翻译：柔性的基于聚合物的生物传感器可部署到动脉系统中，其可以在存在血流时变分量的情况下评估动脉几何形状中的剪切应力。此外，制造可用于体内程序的生物传感器的方法，包括顺序沉积到二氧化硅层的基底上，二氧化硅层上的金属加热元件和加热元件上的生物相容性聚合物，随后通过蚀刻聚合物层以提供孔以允许电极与加热元件接触。然后沉积第二金属层以形成电极，随后是第二生物相容性聚合物层以形成器件结构，并通过蚀刻衬底从衬底去除所制造的生物传感器。另外，公开了通过用生物相容性生物传感器测量体液的温度，流速和压力来确定血管内剪切应力的方法。

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