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    • 92. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20120058600A1
    • 2012-03-08
    • US13292207
    • 2011-11-09
    • Hideaki KUWABARAKengo AKIMOTOToshinari SASAKI
    • Hideaki KUWABARAKengo AKIMOTOToshinari SASAKI
    • H01L21/34
    • H01L29/7869H01L27/1225H01L29/04H01L29/24H01L29/458H01L29/4908H01L29/78696
    • An object is to increase field effect mobility of a thin film transistor including an oxide semiconductor. Another object is to stabilize electrical characteristics of the thin film transistor. In a thin film transistor including an oxide semiconductor layer, a semiconductor layer or a conductive layer having higher electrical conductivity than the oxide semiconductor is formed over the oxide semiconductor layer, whereby field effect mobility of the thin film transistor can be increased. Further, by forming a semiconductor layer or a conductive layer having higher electrical conductivity than the oxide semiconductor between the oxide semiconductor layer and a protective insulating layer of the thin film transistor, change in composition or deterioration in film quality of the oxide semiconductor layer is prevented, so that electrical characteristics of the thin film transistor can be stabilized.
    • 目的是增加包括氧化物半导体的薄膜晶体管的场效应迁移率。 另一个目的是稳定薄膜晶体管的电特性。 在包括氧化物半导体层的薄膜晶体管中,在氧化物半导体层上形成具有比氧化物半导体更高的导电性的半导体层或导电层,由此可以提高薄膜晶体管的场效应迁移率。 此外,通过在氧化物半导体层和薄膜晶体管的保护绝缘层之间形成具有比氧化物半导体更高的导电性的半导体层或导电层,防止氧化物半导体层的组成变化或膜质量的劣化 ,使得薄膜晶体管的电特性能够稳定。