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91. 发明授权

US09778086B2 Flow sensor with a housing that accommodates an auxiliary channel having an opening into which a fluid to be measured is taken 有权
公开(公告)号：US09778086B2
公开(公告)日：2017-10-03
申请号：US14407763
申请日：2012-06-15
申请人： Satoshi Arai , Shigeharu Tsunoda , Keiji Hanzawa , Shinobu Tashiro
发明人： Satoshi Arai , Shigeharu Tsunoda , Keiji Hanzawa , Shinobu Tashiro
IPC分类号： G01F15/14 , G01F1/684 , G01F5/00 , G01F15/00 , G01F15/18 , B29C65/00 , B32B37/18 , B32B38/00 , B29C65/78 , B29L31/34 , B29C65/16
CPC分类号： G01F15/14 , B29C65/1612 , B29C65/1616 , B29C65/1635 , B29C65/1677 , B29C65/7829 , B29C66/1122 , B29C66/1222 , B29C66/1224 , B29C66/232 , B29C66/242 , B29C66/244 , B29C66/30223 , B29C66/322 , B29C66/53461 , B29C66/542 , B29C66/61 , B29C66/612 , B29C66/71 , B29C66/7352 , B29C66/73772 , B29C66/73776 , B29C66/73921 , B29C66/8122 , B29C66/81267 , B29C66/8322 , B29K2995/0027 , B29L2031/3481 , B32B37/18 , B32B38/0008 , B32B2457/00 , G01F1/6842 , G01F1/6845 , G01F5/00 , G01F15/006 , G01F15/185 , B29K2909/08 , B29K2081/06 , B29K2081/04 , B29K2079/08 , B29K2077/00 , B29K2071/00 , B29K2069/00 , B29K2067/006 , B29K2067/003 , B29K2067/00 , B29K2059/00 , B29K2055/02 , B29K2033/12 , B29K2027/18 , B29K2027/08 , B29K2027/06 , B29K2025/08 , B29K2025/06 , B29K2023/38 , B29K2023/12 , B29K2023/06
摘要： A flow sensor includes an auxiliary channel having an opening into which a fluid to be measured is taken; a sensor element that measures the flow of the fluid to be measured; a housing that accommodates electronic parts; and a resin cover. The flow sensor is configured such that junctions of the housing and the cover are formed in locations where first target weld portions, which are formed so that the circuit chamber is surrounded, face each other and second target weld portions, which are disposed for additional reinforcement of the joints, face each other on a bonding face of the housing and a bonding face of the cover with a step being provided. The positioning of the housing and the cover is determined, and the first target weld portions are welded to each other and second target weld portions are welded to each other by way of laser radiation.

92. 发明授权

US09229040B2 Disconnection detection circuit for bridge circuit and system including disconnection detecting means 有权
标题翻译：用于桥接电路的断路检测电路和包括断线检测装置的系统
公开(公告)号：US09229040B2
公开(公告)日：2016-01-05
申请号：US13806827
申请日：2011-06-21
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Masamichi Yamada
IPC分类号： G01R31/02 , G01D3/08 , G01R31/28
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means.
摘要翻译：在现有的桥接电路断路检测电路中，不考虑电桥输出的失调电压或温度特性劣化的事实。提供一种用于桥接电路的断开检测电路，其能够最小程度地抑制传感器的特性变化。根据本发明的用于桥接电路的断开检测电路8a包括导通装置9和10，每个导通装置9和10各自使电流从桥接电路的输出端流动到预定电位，电位差检测装置12和13各自其检测桥电路的输出端的电位与预定电位之间的电位差;以及断开检测装置14，其基于电位差检测装置的输出来检测断开。

93. 发明授权

US09134153B2 Flowmeter 有权
标题翻译：流量计
公开(公告)号：US09134153B2
公开(公告)日：2015-09-15
申请号：US14131125
申请日：2011-07-13
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01F1/34 , G01F1/692 , G01F1/684
CPC分类号： G01F1/34 , G01F1/6845 , G01F1/692 , H01L2224/48247
摘要： A flowmeter that improves a corrosion resistance is provided.The flowmeter includes a silicon substrate having a diaphragm where a heater is formed, an aluminum pad formed on a silicon substrate, an organic protective film laminated on the silicon substrate, and a mold resin that covers the silicon substrate. The diaphragm has an exposed portion exposed from the organic protective film, an adhesion surface high in adhesion property to the mold resin is laminated on the silicon substrate, and an adhesion film of the mold resin to the adhesion film is provided between the exposed portion and the aluminum pad.
摘要翻译：提供了提高耐腐蚀性的流量计。流量计包括具有形成有加热器的隔膜的硅基板，形成在硅基板上的铝焊盘，层叠在硅基板上的有机保护膜，以及覆盖硅基板的模制树脂。隔膜具有从有机保护膜露出的露出部分，将与模制树脂粘附性高的粘合表面层合在硅基板上，并且将模制树脂与粘合膜的粘合膜设置在暴露部分和铝垫。

94. 发明申请

US20140326064A1 Thermal Type Flowmeter 有权
标题翻译：热式流量计
公开(公告)号：US20140326064A1
公开(公告)日：2014-11-06
申请号：US14359161
申请日：2012-01-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.
摘要翻译：提供了一种传感器元件的污染减少的热式流量计。流量计包括：传感器元件，包括形成在薄膜部分中的加热电阻器，薄膜部分设置在形成在基板上的隔膜上; 支撑构件，用于将传感器元件定位在其上; 第二通道，其包括支撑构件的一部分并且部分地吸入通过进气管道的进气; 以及引导构件，其设置在所述支撑构件或所述传感器元件上，所述引导构件位于沿着所述次级通道中的空气流延伸并且越过所述薄膜部分的线L上，所述引导构件允许微粒沿着远离的方向被引导来自线L的细颗粒与沿着支撑构件或传感器元件的表面的空气流一起。

95. 发明授权

US08844348B2 Gas flow rate measurement device 有权
标题翻译：气体流量测量装置
公开(公告)号：US08844348B2
公开(公告)日：2014-09-30
申请号：US13817889
申请日：2011-08-19
申请人： Kazunori Suzuki , Ryo Sato , Keiji Hanzawa
发明人： Kazunori Suzuki , Ryo Sato , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/64 , G01F5/00 , G01F1/684 , G01F1/696
CPC分类号： G01F1/64 , G01F1/684 , G01F1/69 , G01F1/696 , G01F1/6965 , G01F5/00 , G01F15/02
摘要： Provided is a highly accurate, highly reliable gas flow rate measurement device that provides an enlarged temperature range over which the resolution at a high temperature and at a low temperature can be increased to achieve high accuracy no matter whether the characteristics of a gas temperature detection element are nonlinear. The gas flow rate measurement device includes a plurality of resistors that are disposed in a gas flow path, a gas flow rate detection circuit that outputs a gas flow rate detection signal in accordance with the flow rate of a gas flowing in the gas flow path by detecting a current flowing in the resistors or by detecting a voltage generated in accordance with the current, and a gas temperature detection element 1 that detects the temperature of the gas in the gas flow path. The gas flow rate detection circuit includes signal conversion means for converting a signal output from the gas temperature detection element to a signal that has a predetermined maximum output and a predetermined minimum output and is linear within a predetermined temperature range.
摘要翻译：提供了一种高精度，高可靠性的气体流量测量装置，其提供了扩大的温度范围，无论气体温度检测元件的特性如何，可以提高高温和低温下的分辨率以实现高精度是非线性的。气体流量测量装置包括设置在气体流路中的多个电阻器，气体流量检测电路，其根据气体流路中流动的气体的流量输出气体流量检测信号，检测在电阻器中流动的电流或者通过检测根据电流产生的电压，以及气体温度检测元件1，其检测气体流路中的气体的温度。气体流量检测电路包括用于将从气体温度检测元件输出的信号转换为具有预定最大输出和预定最小输出并且在预定温度范围内为线性的信号的信号转换装置。

96. 发明授权

US08689608B2 Thermal gas sensor 有权
标题翻译：热气传感器
公开(公告)号：US08689608B2
公开(公告)日：2014-04-08
申请号：US12973376
申请日：2010-12-20
申请人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masamichi Yamada , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01N25/18
CPC分类号： G01N25/18
摘要： The present invention provides a high-responsiveness and high-accuracy thermal gas sensor configured to enable gas to be analyzed based on a variation in heat conductivity. The thermal gas sensor includes a substrate 2 with a cavity portion 5, a thin-film support 6 stacked in the cavity portion and comprising a plurality of insulating layers 8a and 8b, and a first heating member 3 and a second heating member 4 both sandwiched between the insulating layers in the thin-film support. The second heating member is located around a periphery of the first heating member. The first heating member is controlled to a temperature higher than a temperature to which the second heating member is controlled. The concentration of ambient gas is measured based on power applied to the first heating member.
摘要翻译：本发明提供了一种高响应性和高精度的热气传感器，其被配置为使得能够基于导热性的变化来分析气体。热气体传感器包括：具有空腔部分5的基板2，层叠在空腔部分中的薄膜支撑体6，其包括多个绝缘层8a和8b;以及第二加热构件3和第二加热构件4，在薄膜载体中的绝缘层之间。第二加热构件位于第一加热构件的周边周围。第一加热构件被控制到比第二加热构件被控制的温度高的温度。环境气体的浓度基于施加到第一加热构件的功率被测量。

97. 发明申请

US20130313675A1 Thermal Type Flowmeter 审中-公开
标题翻译：热式流量计
公开(公告)号：US20130313675A1
公开(公告)日：2013-11-28
申请号：US13984748
申请日：2011-03-02
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： H01L29/66
CPC分类号： H01L29/66992 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01F5/00
摘要： Provided is a compact thermal type flowmeter that can perform a partial thermal treatment on a sensor element portion without affecting other elements and can improve the reliability of a sensor element while improving the sensitivity of the sensor element.A thermal type flowmeter includes a hollow portion which is formed in a semiconductor substrate, a thin film portion which is formed by insulating films provided to cover the hollow portion and, a heating resistor body and a temperature-measuring resistor body which are formed between the insulating films. In a method for manufacturing the thermal type flowmeter, a thermal treatment is performed to grow a crystal grain size of the heating resistor body and a crystal grain size of the temperature-measuring resistor body by heating the thin film portion after forming the thin film portion.
摘要翻译：提供了一种紧凑型热式流量计，其可以在不影响其他元件的情况下对传感器元件部分进行部分热处理，并且可以在提高传感器元件的灵敏度的同时提高传感器元件的可靠性。一种热式流量计包括形成在半导体衬底中的中空部分，由覆盖中空部分的绝缘膜形成的薄膜部分，以及加热电阻体和温度测量电阻体，绝缘膜。在制造热式流量计的方法中，通过在形成薄膜部分之后加热薄膜部分进行热处理，以增加加热电阻体的晶粒尺寸和温度测量电阻体的晶粒尺寸。

98. 发明授权

US08549901B2 Sensor structure 有权
标题翻译：传感器结构
公开(公告)号：US08549901B2
公开(公告)日：2013-10-08
申请号：US13367939
申请日：2012-02-07
申请人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo
发明人： Takayuki Saito , Keiji Hanzawa , Takayuki Yogo
IPC分类号： G01M15/04
CPC分类号： G01F1/6842 , F02D41/187 , G01F5/00
摘要： In relation to a humidity sensor sensitive to water and contamination, a sensor implementation structure that achieves both protection performance against water and contaminants and measurement performance such as humidity responsiveness is provided. A sensor structure has a mass airflow measurement element that measures a mass airflow flowing in an intake pipe, a humidity sensing element that senses humidity of air flowing in the intake pipe, a housing structural component having a connector that carries out input/output to/from outside and a terminal component of the connector, and a bypass passage that is composed by using part of the housing structural component and takes in part of the air that flows in the intake pipe, the mass airflow measurement element being mounted in the bypass passage; wherein space is provided in the housing structural component in the vicinity of the bypass passage, the humidity sensing element is mounted in the space.
摘要翻译：关于对水和污染物敏感的湿度传感器，提供了实现对水和污染物的保护性能以及诸如湿度响应性的测量性能的传感器实施结构。传感器结构具有测量进气管中流动的质量气流的质量气流测量元件，感测进气管中流动的空气湿度的湿度感测元件，具有连接器的壳体结构部件，该连接器将输入/ 从连接器的外部和端子部件和旁通通路构成，所述旁通通路由使用所述壳体结构部件的一部分而占据所述进气管中流动的一部分空气，所述质量空气流量测量元件安装在所述旁路通路 ; 其中在所述外壳结构部件中在所述旁通通路附近设置空间，所述湿度感测元件安装在所述空间中。

99. 发明申请

US20130152699A1 Gas Flow Rate Measurement Device 有权
标题翻译：气体流量测量装置
公开(公告)号：US20130152699A1
公开(公告)日：2013-06-20
申请号：US13817889
申请日：2011-08-19
申请人： Kazunori Suzuki , Ryo Sato , Keiji Hanzawa
发明人： Kazunori Suzuki , Ryo Sato , Keiji Hanzawa
IPC分类号： G01F1/64
CPC分类号： G01F1/64 , G01F1/684 , G01F1/69 , G01F1/696 , G01F1/6965 , G01F5/00 , G01F15/02
摘要： Provided is a highly accurate, highly reliable gas flow rate measurement device that provides an enlarged temperature range over which the resolution at a high temperature and at a low temperature can be increased to achieve high accuracy no matter whether the characteristics of a gas temperature detection element are nonlinear. The gas flow rate measurement device includes a plurality of resistors that are disposed in a gas flow path, a gas flow rate detection circuit that outputs a gas flow rate detection signal in accordance with the flow rate of a gas flowing in the gas flow path by detecting a current flowing in the resistors or by detecting a voltage generated in accordance with the current, and a gas temperature detection element 1 that detects the temperature of the gas in the gas flow path. The gas flow rate detection circuit includes signal conversion means for converting a signal output from the gas temperature detection element to a signal that has a predetermined maximum output and a predetermined minimum output and is linear within a predetermined temperature range.
摘要翻译：提供了一种高精度，高可靠性的气体流量测量装置，其提供了扩大的温度范围，无论气体温度检测元件的特性如何，可以提高高温和低温下的分辨率以实现高精度是非线性的。气体流量测量装置包括设置在气体流路中的多个电阻器，气体流量检测电路，其根据气体流路中流动的气体的流量输出气体流量检测信号，检测在电阻器中流动的电流或者通过检测根据电流产生的电压，以及气体温度检测元件1，其检测气体流路中的气体的温度。气体流量检测电路包括用于将从气体温度检测元件输出的信号转换为具有预定最大输出和预定最小输出并且在预定温度范围内为线性的信号的信号转换装置。

100. 发明申请

US20130119504A1 Thermal Airlflow Sensor 有权
标题翻译：热气流传感器
公开(公告)号：US20130119504A1
公开(公告)日：2013-05-16
申请号：US13810814
申请日：2011-07-06
申请人： Norio Ishitsuka , Rintaro Minamitani , Keiji Hanzawa
发明人： Norio Ishitsuka , Rintaro Minamitani , Keiji Hanzawa
IPC分类号： H01L37/00
CPC分类号： H01L37/00 , B81C1/00793 , G01F1/6845 , G01F1/692
摘要： An object of the present invention is to provide a thermal airflow sensor that prevents moisture absorption by a silicon oxide film formed closest to a surface (formed to be located on an uppermost portion), and that reduces a measuring error. In order to attain the foregoing object, the thermal airflow sensor according to the present invention applies an ion implantation to a silicon oxide film 4, formed closest to a surface (formed to be located on an uppermost portion), by using an atom or molecule selected from at least any one of silicon, oxygen, and an inert element such as argon or nitrogen, in order to increase a concentration of an atom contained in the silicon oxide film 4 more than that before the ion implantation.
摘要翻译：本发明的目的是提供一种热气流传感器，其防止由最靠近表面（形成在最上部的部分）形成的氧化硅膜吸湿，并且减少了测量误差。为了实现上述目的，根据本发明的热气流传感器通过使用原子或分子将离子注入施加到最靠近表面（形成在最上部）的氧化硅膜4上选自硅，氧和惰性元素如氩或氮中的至少一种，以便增加氧化硅膜4中包含的原子的浓度比离子注入之前的浓度更高。

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