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91. 发明授权

US07849869B2 Method for water hammerless opening of fluid passage, and method for supplying chemical solutions and device for water hammerless opening for which the method is used 有权
标题翻译：流体通道的无水锤打开方法，以及用于提供化学溶液的方法和使用该方法的无水锤打开装置
公开(公告)号：US07849869B2
公开(公告)日：2010-12-14
申请号：US10597343
申请日：2005-01-13
申请人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
发明人： Tadahiro Ohmi , Kouji Nishino , Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Ryutaro Nishimura
IPC分类号： F17D5/06
CPC分类号： F16K47/02 , Y10T137/0324 , Y10T137/0396 , Y10T137/7761 , Y10T137/7762 , Y10T137/7842 , Y10T137/86389 , Y10T137/86397 , Y10T137/86461
摘要： The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps′ of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa, of the step operating pressure Ps′ which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.
摘要翻译：无水锤打开装置包括安装在流体通道上的致动器操作型阀，向上述致动器操作型阀提供2级致动器操作压力Pa的电动气动转换装置，可拆卸地固定到在致动器操作型阀的上游侧的管道通道和输入了由振动传感器检测到的振动检测信号Pr的调谐箱，通过该调谐箱控制控制信号Sc以控制前述的操作压力Ps' 将上述的2步执行器工作压力Pa输出到电动气动变换装置，将使振动检测信号Pr接近零的阶梯操作压力Ps'的2级致动器工作压力Pa'从通过调节控制信号Sc进行电 - 气转换。

92. 发明授权

US07798167B2 Internal pressure controller of chamber and internal pressure subject-to-control type chamber 有权
标题翻译：内部压力控制器和内部压力控制型室
公开(公告)号：US07798167B2
公开(公告)日：2010-09-21
申请号：US11278909
申请日：2006-04-06
申请人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Akniobu Teramoto , Tomio Uno , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Atsushi Matsumoto , Masaaki Nagase , Nobukazu Ikeda
IPC分类号： G05D7/06
CPC分类号： G05D16/208 , Y10T137/7761 , Y10T137/8741 , Y10T137/87507
摘要： A gas supply facility includes a plurality of pressure type flow controllers connected in parallel, and a first controller to control operation of the plurality of pressure type flow controllers so as to supply a desired gas exhausted by a vacuum pump to a chamber while controlling its flow rate, one of the pressure type flow controllers operates as a second controller to control the gas flow rate range up to 10% of the maximum flow rate supplied to the chamber, while the remaining pressure type flow controllers are made to be ones that control the rest of the gas flow rate range. Furthermore, pressure inside the chamber is controlled by installing a pressure detector in the chamber, inputting the value detected by the detector to the controller, and by adjusting a control signal to the pressure type flow controllers.
摘要翻译：气体供给设备包括并联连接的多个压力式流量控制器和控制多个压力式流量控制器的操作的第一控制器，以便在控制其流动的同时将由真空泵排出的期望气体供应到腔室压力型流量控制器中的一个作为第二控制器操作，以将气体流量范围控制在高达供应给腔室的最大流速的10％，而剩余的压力式流量控制器被制成控制剩余的气体流量范围。此外，通过在室内安装压力检测器，将检测器检测到的值输入到控制器，并通过调节压力型流量控制器的控制信号来控制室内的压力。

93. 发明授权

US07669455B2 Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device 有权
标题翻译：用于压力传感器，压力控制装置和压力式流量控制装置的自动零点校正装置
公开(公告)号：US07669455B2
公开(公告)日：2010-03-02
申请号：US10561602
申请日：2004-06-10
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Shoichi Hino , Eiji Takahashi , Makoto Saegusa , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama , Katsuyuki Sugita
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Shoichi Hino , Eiji Takahashi , Makoto Saegusa , Nobukazu Ikeda , Kouji Nishino , Ryousuke Dohi , Toyomi Uenoyama , Katsuyuki Sugita
IPC分类号： G01F19/00
CPC分类号： G01L19/02 , G01L9/065 , G01L19/0023 , G05D7/0635
摘要： The invention provides an automatic zero point correction device that includes a pressure sensor, wherein output from the sensor is outputted and the sensor output is inputted to a time-varying zero point drift correction means of the sensor; a sensor output judgement means of the time-varying zero point drift correction means, wherein the sensor output judgement means operates to make a judgement determining whether the sensor output is larger than a set value; and operating condition judgement means of the time-varying zero point drift correction means, wherein the operating condition judgement means judges operating conditions of the sensor, wherein the time-varying zero point drift correction means operates to cancel time-varying zero point drift of the sensor when the sensor output judgement means determines sensor output is larger than the set value and the operating condition judgement means determines operating conditions of the sensor are within previously set operating conditions.
摘要翻译：本发明提供了一种自动零点校正装置，其包括压力传感器，其中输出来自传感器的输出，并且传感器输出被输入到传感器的时变零点漂移校正装置; 时变零点漂移校正装置的传感器输出判断装置，其中传感器输出判断装置进行判断，判断传感器输出是否大于设定值; 以及时变零点漂移校正装置的操作条件判断装置，其中操作条件判断装置判断传感器的操作条件，其中时变零点漂移校正装置操作以消除时变零点漂移校正装置的时变零点漂移传感器输出判断装置确定传感器输出大于设定值，并且操作条件判断装置确定传感器的操作条件在预先设定的操作条件下。

94. 发明申请

US20090171507A1 GASKET TYPE ORIFICE AND PRESSURE TYPE FLOW RATE CONTROL APPARATUS FOR WHICH THE ORIFICE IS EMPLOYED 有权
标题翻译：垫片类型流量和压力类型流量控制装置，用于使用ORIFICE
公开(公告)号：US20090171507A1
公开(公告)日：2009-07-02
申请号：US11913271
申请日：2006-05-10
申请人： Tadahiro Ohmi , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Tsutomu Shinohara , Takashi Hirose , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
发明人： Tadahiro Ohmi , Kouji Nishino , Ryousuke Dohi , Nobukazu Ikeda , Masaaki Nagase , Kaoru Hirata , Katsuyuki Sugita , Tsutomu Shinohara , Takashi Hirose , Tomokazu Imai , Toshihide Yoshida , Hisashi Tanaka
IPC分类号： G05D7/06 , F16L55/027 , F16K31/12
CPC分类号： F16K27/003 , F16L55/02718 , G01F1/36 , G01F15/001 , G01F15/005 , G05D7/0635
摘要： An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.
摘要翻译：节流孔可变压力型流量控制装置包括安装在设置有流体供给管的联接部的入口侧配件块和设置有流体供给管的出口侧配件块之间的压力型流量控制装置的控制阀的阀体流体取出管的联接部分; 阀体和入口侧配件块的流体入口侧和阀体和出口侧配件块的流体出口侧分别可拆卸地和隐蔽地连接，从而形成用于通过控制阀的气体的流动通道; 并且用于压力式流量控制装置的垫圈型孔口可移除地插入设置在阀体的出口侧的垫圈型孔插入孔和出口侧配件块的衬垫型孔插入孔之间。

95. 发明申请

US20060236781A1 Differential pressure type flowmeter and differential pressure type flowmeter controller 有权
标题翻译：差压式流量计和差压式流量计控制器
公开(公告)号：US20060236781A1
公开(公告)日：2006-10-26
申请号：US10563226
申请日：2004-06-18
申请人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
发明人： Tadahiro Ohmi , Kazuhiko Sugiyama , Tomio Uno , Nobukazu Ikeda , Kouji Nishino , Osamu Nakamura , Ryousuke Dohi , Atsushi Matsumoto
IPC分类号： G01F1/37
CPC分类号： G01F1/50 , G01F1/42 , G05D7/0635
摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100% to 1% with errors E of less than 1 (% SP) both in real time and in a state of inline. To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P1 on the upstream side of an orifice, a detector to detect a fluid pressure P2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P1, pressure P2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1·P1/√{square root over ( )}T·((P2/P1)m−(P2/P1)n)1/2 (where C1 is a proportional constant, and m and n are constants).
摘要翻译：通过使差压式流量计结构简单，可以实现成本降低，并且在100％至1％的宽流量范围内可以获得高精度的流量测量，误差E小于1（％SP），均为在实时和处于内联状态。为了实现这一目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1> 1的检测器，检测流体压力P 2 在孔的下游侧具有用于检测孔口上游侧的流体温度T的检测器，以及控制计算电路，其通过使用压力P <0而计算通过孔口的流体流量Q，使用上述检测器检测到的SUB> 1 <！ - SIPO - >压力P <2>和温度T，并且上述流体的流量Q用等式Q = （P（（P 2/2 / P 1））（P 2 / P 1/2）其中C 1 ）其中C 1 是比例常数，m和n是常数）。

96. 发明申请

US20050257603A1 Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and shower plate manufacturing method 有权
标题翻译：小孔径自动测量装置，小孔径测量方法和淋浴板制造方法
公开(公告)号：US20050257603A1
公开(公告)日：2005-11-24
申请号：US11015097
申请日：2004-12-16
申请人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
发明人： Tadahiro Ohmi , Masaaki Nagase , Ryousuke Dohi , Kouji Nishino , Osamu Nakamura , Tomio Uno , Nobukazu Ikeda
IPC分类号： G01B13/10
CPC分类号： G01B13/10 , Y10T29/49432
摘要： A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the critical state of the fluid and controlling the inlet-side pressure to a predetermined inlet-side pressure; a plate holding section comprised of a plate supporting device which rotatably holds the plate, and a test probe supporting device which supports a test probe so that the test probe is moved vertically and horizontally; and a control section comprised of a calculation and judgment part, which calculates the hole diameter during the supply of the fluid based upon the measured value of the flow rate from the flow rate measurement section, and an external output part, which outputs the calculated value to the outside.
摘要翻译：一种小孔直径测量装置，包括：流量测量部分，包括自动压力控制装置，该自动压力控制装置将流体供应到板中的小孔的入口侧，同时保持小孔的出口和入口侧压力流体的临界状态并将入口侧压力控制到预定的入口侧压力; 由可转动地保持该板的板支撑装置构成的板保持部和支撑测试探针的测试探针支撑装置，使得测试探针垂直和水平地移动; 以及控制部，包括计算判断部，其基于来自流量测量部的流量的测定值，计算流体供给时的孔径，以及输出计算值的外部输出部到外面

97. 发明授权

US06919056B2 Reactor for generating moisture 有权
标题翻译：反应器产生水分
公开(公告)号：US06919056B2
公开(公告)日：2005-07-19
申请号：US09905209
申请日：2001-07-12
申请人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
发明人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Kenji Tubota , Teruo Honiden , Touru Hirai , Katunori Komehana , Keiji Hirao
IPC分类号： B01J8/02 , B01J10/00 , B01J12/00 , C01B5/00
CPC分类号： B01J12/007 , B01J2219/00058 , B01J2219/00087 , B01J2219/00096 , C01B5/00
摘要： A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wherein the dead space in the interior space is reduced to further reduce the size of the reactor shell. The reactor has a reactor shell A with an interior space; a reflector on an inlet side facing a gas feed port in the interior space of the reactor; a reflector on an outlet side facing a moisture gas take-out port in the interior space; and a platinum coat catalyst layer 8 formed on an inside wall of a reactor structural component on the outlet side. Hydrogen and oxygen fed into the interior space of the reactor react without combustion.
摘要翻译：用于产生水分的反应器，其中充分点燃氢气，对气体供应源侧的回火以及铂涂层催化剂层内部的剥离都被更完全地防止，从而进一步提高了产生水分的反应器的安全性，并且其中减少内部空间中的死空间以进一步减小反应器壳体的尺寸。反应器具有内部空间的反应器壳体A; 在反应器的内部空间中的面向气体供给口的入口侧上的反射器; 出口侧的反射器，其面向内部空间中的湿气取出口; 以及形成在出口侧的反应器结构部件的内壁上的铂涂层催化剂层8。进入反应器内部空间的氢气和氧气反应而不燃烧。

98. 发明授权

US06622543B1 Gas detection sensor 失效
标题翻译：气体检测传感器
公开(公告)号：US06622543B1
公开(公告)日：2003-09-23
申请号：US09979039
申请日：2001-11-15
申请人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Katunori Komehana , Teruo Honiden
发明人： Tadahiro Ohmi , Kouji Kawada , Nobukazu Ikeda , Akihiro Morimoto , Yukio Minami , Katunori Komehana , Teruo Honiden
IPC分类号： G01N2532
CPC分类号： G01N33/0013 , G01N25/32
摘要： A gas detection sensor permits precise measurement of the concentration of flammable gas in a detection or subject gas and the concentration of oxygen in a detection gas containing flammable gases. In the sensor, the heating of the sensor by contact catalytic reaction of flammable gas gives off a detection signal of the flammable gas. The gas detection sensor has a first detection sensor including a diaphragm having a platinum coat on a side which the flowing detection gas comes in contact with, and a thermocouple having respective ends of two different metals placed close to each other and fixed on the side of the diaphragm not coming in contact with the flowing detection gas and which is heated by the contact catalytic reaction of flammable gas. A second detection sensor similar to the first detection sensor detects the temperature of the flowing detection gas.
摘要翻译：气体检测传感器允许精确测量检测或目标气体中的可燃气体的浓度以及含有易燃气体的检测气体中的氧浓度。在传感器中，通过可燃气体的接触催化反应对传感器的加热产生可燃气体的检测信号。气体检测传感器具有第一检测传感器，该第一检测传感器包括在流动检测气体接触的一侧上具有铂涂层的膜片，以及将彼此靠近并固定在两侧的两个不同金属的两端固定的热电偶隔膜不会与流动的检测气体接触，并且被易燃气体的接触催化反应加热。类似于第一检测传感器的第二检测传感器检测流动检测气体的温度。

99. 发明授权

US06450190B2 Method of detecting abnormalities in flow rate in pressure-type flow controller 有权
标题翻译：压力式流量控制器流量异常检测方法
公开(公告)号：US06450190B2
公开(公告)日：2002-09-17
申请号：US09826834
申请日：2001-04-06
申请人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kazuo Fukasawa , Hiroshi Koizumi , Hideki Nagaoka , Tomio Uno , Kouji Nishino , Nobukazu Ikeda , Ryousuke Dohi , Eiji Ideta
发明人： Tadahiro Ohmi , Seiichi Iida , Satoshi Kagatsume , Jun Hirose , Kazuo Fukasawa , Hiroshi Koizumi , Hideki Nagaoka , Tomio Uno , Kouji Nishino , Nobukazu Ikeda , Ryousuke Dohi , Eiji Ideta
IPC分类号： G05D706
CPC分类号： G05B23/0235 , G05B23/0256 , G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice—the pressure-type flow controller wherein with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated by the equation QC=KP1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal QY between the calculated flow rate QC and the set flow rate QS.
摘要翻译：一种检测压力型流量控制器流量异常的方法。该方法在使用孔口压力型流量控制器控制压力型流量控制器FCS中的流体流量的同时检查异常流量，其中上游压力P1保持大于下游压力的两倍或更多倍 P2，通过等式QC = KP1（K：常数）计算下游流量QC，并且其中基于所计算的流量QC和设定流量QS之间的差信号QY来控制控制阀CV。

100. 发明授权

US6093662A Method for generating water for semiconductor production 失效
标题翻译：生产半导体水的方法
公开(公告)号：US6093662A
公开(公告)日：2000-07-25
申请号：US242137
申请日：1999-04-14
申请人： Tadahiro Ohmi , Yukio Minami , Koji Kawada , Yoshikazu Tanabe , Nobukazu Ikeda , Akihiro Morimoto
发明人： Tadahiro Ohmi , Yukio Minami , Koji Kawada , Yoshikazu Tanabe , Nobukazu Ikeda , Akihiro Morimoto
IPC分类号： C01B5/00 , H01L21/31 , H01L21/469
CPC分类号： C01B5/00
摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.
摘要翻译： PCT No.PCT / JP98 / 02660 Sec。 371 1999年4月14日第 102（e）1999年4月14日PCT PCT。1998年6月12日PCT公布。第WO98 / 57884号公报日期1998年12月23日用于生产用于半导体制造的水分的方法，该方法包括将氢和氧进料到在内壁上设置有铂包覆催化剂层的反应器中，从而通过催化作用增强氢和氧之间的反应性，在低于点火点的温度下使反应性增强的氢和氧瞬时反应以产生水分而不在高温下经历燃烧，其中在产生水分的反应中启动或终止产生的水分中产生的未反应的氢的量最小化，其中避免了不期望的反应，例如不需要的氧化硅膜涂层。当通过在其内壁上提供有铂包覆的催化剂层的反应器中加入氢气和氧气来启动水分的产生时，首先开始供给氧，一段时间后开始供应氢气。在通过切断氢气和氧气进入反应器来终止湿气生成操作时，首先停止供给氢气，一段时间后，关闭氧气供应。

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