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    • 94. 发明申请
    • CHARGED PARTICLE BEAM LENS AND EXPOSURE APPARATUS USING THE SAME
    • 充电颗粒光束和曝光装置使用它
    • US20140151570A1
    • 2014-06-05
    • US14004845
    • 2012-03-14
    • Takahisa KatoYutaka Setomoto
    • Takahisa KatoYutaka Setomoto
    • H01J37/12
    • H01J37/12H01J2237/04924H01J2237/1205H01J2237/1207H01J2237/31774
    • An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are smaller than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.
    • 静电带电粒子束透镜包括:电极,其包括平板,该平板具有沿光轴方向延伸的法线的第一表面和与该第一表面相对的第二表面,该电极具有从第一表面延伸的通孔 表面到第二表面。 当开口横截面被定义为沿着垂直于法线的平面截取的通孔的横截面,并且代表性直径被定义为通过对开口横截面进行回归分析而获得的圆的直径时,代表 在第一表面侧的第一区域中的开口横截面的直径和位于第二表面侧的第二区域中的开口横截面的代表性直径小于开口横截面的代表性直径 第三区域,其是设置在第一表面和第二表面之间的电极中的区域。
    • 95. 发明申请
    • METHOD OF MANUFACTURING OSCILLATOR DEVICE, AND OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT WITH OSCILLATOR DEVICE BASED ON IT
    • 振荡器器件的制造方法以及基于IT的振荡器器件的光学偏置器和光学仪器
    • US20110019256A1
    • 2011-01-27
    • US12673694
    • 2008-10-28
    • Suguru MiyagawaTakahiro AkiyamaKazutoshi TorashimaTakahisa KatoKazunari Fujii
    • Suguru MiyagawaTakahiro AkiyamaKazutoshi TorashimaTakahisa KatoKazunari Fujii
    • G02B26/08B23Q17/00
    • G02B26/105G02B26/085H04N1/1135Y10T29/49774
    • A method of manufacturing an oscillator device having an oscillator supported relative to a fixed member by a torsion spring for oscillation around a torsion axis and arranged to be driven at a resonance frequency, which method includes a first step for determining an assumed value of an inertia moment weight of the oscillator, a second step for measuring the resonance frequency, a third step for calculating a spring constant of the torsion spring, from the assumed value of the inertia moment weight and the measured resonance frequency obtained at said first and second steps, a fourth step for calculating an adjustment amount for the inertia moment of the oscillator or for the spring constant of the torsion spring, based on the spring constant calculated at said third step and a target resonance frequency determined with respect to the resonance frequency of the oscillator, so as to adjust the resonance frequency to the target resonance frequency, and a fifth step for adjusting the resonance frequency of the oscillator to the target resonance frequency based on the calculated adjustment amount.
    • 一种制造振荡器装置的方法,该振荡器装置具有通过用于围绕扭转轴线摆动并被以共振频率驱动的扭转弹簧相对于固定构件支撑的振荡器的方法,该方法包括用于确定惯性的假定值的第一步骤 振荡器的力矩,用于测量共振频率的第二步骤,用于计算扭簧的弹簧常数的第三步骤,根据在所述第一和第二步骤获得的惯性力矩的假定值和测得的共振频率, 基于在所述第三步骤计算的弹簧常数和相对于振荡器的共振频率确定的目标共振频率,计算用于振荡器的惯性矩或扭簧的弹簧常数的调节量的第四步骤 ,以便将谐振频率调节到目标谐振频率,以及用于调整res的第五步骤 基于计算出的调整量,振荡器的频率与目标谐振频率成正比。
    • 96. 发明授权
    • Oscillator device, optical deflector and optical instrument using the same
    • 振荡器,光偏转器及使用其的光学仪器
    • US07855820B2
    • 2010-12-21
    • US12601924
    • 2008-07-22
    • Takahisa KatoKazutoshi Torashima
    • Takahisa KatoKazutoshi Torashima
    • G02B26/08
    • G02B7/1821G02B26/0833
    • An oscillator device includes a supporting base plate, a torsion spring, and a movable member, wherein the movable member is supported by the torsion spring, for torsional oscillation relative to the supporting base plate about a torsional axis, wherein the torsion spring has an X-shaped section being perpendicular to the torsional axis and a top surface and a bottom surface each being defined by a (100)-equivalent surface of monocrystal silicon, and wherein a distance L1 connecting bottoms of concavities formed at the top surface and bottom surface, respectively, and a distance L2 connecting bottoms of concavities defined at side surfaces of the X-shaped torsion spring as well as a rate of change αi of inertia moment of the movable member around the torsion axis, with a change of a thickness t of the supporting base plate, satisfy the following relation: L1/L2=C1−Exp{C2−(αi+C3)}+C4−αi+C5 where C1=5.0*10^=−1, C2=−4.4, C3=4.6*10^−2, C4=−6.0*10^−1 and 1.5
    • 振荡器装置包括支撑基板,扭转弹簧和可动构件,其中可动构件由扭转弹簧支撑,用于围绕扭转轴线相对于支撑基板的扭转振动,其中扭转弹簧具有X 垂直于扭转轴的截面和顶表面和底表面各自由单晶硅的(100)等效表面限定,并且其中连接在顶表面和底表面处形成的凹部的底部的距离L1, 以及连接X形扭簧的侧面限定的凹部的底部的距离L2以及可动件绕扭转轴线的惯性力矩的变化率αi,随着厚度t的变化, 满足以下关系:L1 / L2 = C1-Exp {C2-(αi+ C3)} + C4-αi+ C5其中C1 = 5.0 * 10 ^ = -1,C2 = -4.4,C3 = 4.6 * 10 ^ -2,C4 = -6.0 * 10 ^ -1和1.5
    • 97. 发明授权
    • Method of manufacturing oscillator device
    • 制造振荡器的方法
    • US07795043B2
    • 2010-09-14
    • US12201315
    • 2008-08-29
    • Toshio TomiyoshiTakahisa KatoAtsushi Kandori
    • Toshio TomiyoshiTakahisa KatoAtsushi Kandori
    • H04L21/00
    • H02K35/02H01F7/0289H01F7/127H01F7/14H01F10/14H01F10/16H01F2007/068H02K15/03
    • A method of manufacturing oscillator devices each having an oscillator and a resilient supporting member for supporting the oscillator for oscillatory motion, includes a step of processing one and the same substrate to form oscillators and resilient supporting members of oscillator devices so that oscillators of adjacent oscillator devices are connected to each other, a step of forming or placing a magnetic material so that it extends across the connected oscillators of the adjacent oscillator devices, and a step of simultaneously cutting and separating the connected oscillators and the magnetic material formed or placed to extend across the connected oscillators, whereby oscillator devices, such as oscillatory type actuators having good reliability and performance evenness can be manufactured with high productivity.
    • 一种振荡器装置的制造方法,具有振荡器和用于支撑用于振荡的振荡器的弹性支撑构件,包括处理同一衬底以形成振荡器装置的振荡器和弹性支撑构件的步骤,使得相邻振荡器装置的振荡器 彼此连接,形成或放置磁性材料以使其延伸穿过相邻振荡器装置的连接的振荡器的步骤,以及同时切割和分离连接的振荡器和形成或放置以延伸的连接的振荡器和磁性材料的步骤 连接的振荡器,由此可以以高生产率制造具有良好可靠性和性能均匀性的振荡器装置,例如振荡型致动器。