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    • 96. 发明申请
    • Optical gratings, lithography tools including such optical gratings and methods for using same for alignment
    • 光栅,包括这种光栅的光刻工具和用于对准的方法
    • US20080094629A1
    • 2008-04-24
    • US11584461
    • 2006-10-20
    • Wei WuWarren RobinettShih-Yuan WangJun GaoZhaoning Yu
    • Wei WuWarren RobinettShih-Yuan WangJun GaoZhaoning Yu
    • G01B11/00
    • G03F9/7049G03F9/7003
    • Lithography tools and substrates are aligned by generating geometric interference patterns using optical gratings associated with the lithography tools and substrates. In some embodiments, the relative position between a substrate and lithography tool is adjusted to cause at least one geometric shape to have a predetermined size or shape representing acceptable alignment. In additional embodiments, Moiré patterns that exhibit varying sensitivity are used to align substrates and lithography tools. Furthermore, lithography tools and substrates are aligned by causing radiation to interact with optical gratings positioned between the lithography tools and substrates. Lithography tools include an optical grating configured to generate a portion of an interference pattern that exhibits a sensitivity that increases as the relative position between the tools and a substrate moves towards a predetermined alignment position.
    • 通过使用与光刻工具和衬底相关的光栅产生几何干涉图案来对准平版印刷工具和衬底。 在一些实施例中,调整衬底和光刻工具之间的相对位置以使得至少一个几何形状具有表示可接受对准的预定尺寸或形状。 在另外的实施例中,使用呈现不同灵敏度的莫尔图案来对准衬底和光刻工具。 此外,光刻工具和衬底通过使辐射与位于光刻工具和衬底之间的光栅相互作用来对准。 平版印刷工具包括光栅,其被配置为产生表现出灵敏度的一部分干涉图案,该灵敏度随着工具和基板之间的相对位置朝向预定对准位置移动而增加。