专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US3008044A Application of superconductivity in guiding charged particles 失效
标题翻译：超导性在引导带电粒子中的应用
公开(公告)号：US3008044A
公开(公告)日：1961-11-07
申请号：US1103260
申请日：1960-02-25
申请人： GEN ELECTRIC
发明人： ADAM BUCHHOLD THEODOR
IPC分类号： H01F6/00 , H01J37/141
CPC分类号： H01F6/00 , H01J37/1416 , Y10S505/871

2. 发明授权

US3916201A Electron microscope having a plurality of coaxial cryogenically cooled lenses 失效
标题翻译：具有多个同轴低温冷却透镜的电子显微镜
公开(公告)号：US3916201A
公开(公告)日：1975-10-28
申请号：US44033274
申请日：1974-02-07
申请人： SIEMENS AG
发明人： HERRMANN KARL-HEINZ , WEYL REINHARD , ZERBST HELMUT , DIETRICH ISOLDE
IPC分类号： H01J37/09 , H01J37/141 , H01J37/147 , H01L39/00 , G21K1/08
CPC分类号： H01J37/09 , H01J37/1416 , H01J37/1471 , Y10S505/871
摘要： The present invention relates to a lens system for particle radiation devices, particularly electron microscopes, which includes means for adjusting the particle beam, a plurality of superconducting cryogenically cooled magnetic lenses, a cryostat in which the lenses are received and a central supporting tube in the cryostat on which the lenses are mounted. An electron microscope produced according to the present invention is substantially free from thermal drift phenomena, is substantially insensitive to mechanical vibrations, can be readily protected against the influence of external magnetic fields, and can be assembled and disassembled conveniently for cleaning or exchanging parts.
摘要翻译：本发明涉及一种用于粒子辐射装置，特别是电子显微镜的透镜系统，其包括用于调节粒子束的装置，多个超导低温冷却磁性透镜，其中容纳透镜的低温恒温器和在其中的中心支撑管安装透镜的低温恒温器根据本发明制造的电子显微镜基本上没有热漂移现象，对机械振动基本不敏感，可以容易地保护免受外部磁场的影响，并且可以方便地组装和拆卸以用于清洁或更换部件。

3. 发明授权

US3818394A Electron lens for electron microscope and the like 失效
标题翻译：电子显微镜电子镜
公开(公告)号：US3818394A
公开(公告)日：1974-06-18
申请号：US64484667
申请日：1967-06-09
申请人： HITACHI LTD
发明人： KIMURA H , DOI T , KATAGIRI S , OZASA S , KIMURA H
IPC分类号： H01F6/00 , H01J37/141 , H01J37/15 , H01F7/00
CPC分类号： H01F6/00 , H01J37/1416 , H01J37/15 , Y10S505/871
摘要： An electron lens assembly having a diamagnetic shielding member or members inserted in the central opening of a hollow, cylindrical superconducting coil, at least one of the members is movable therein along the axis of the electron beam whilst the coil and member or members are kept in a superconducting state. By this arrangement, the focal length of the lens assembly can be changed by the variation along the axis of the coil of the distribution of magnetic field strength produced by the coil.
摘要翻译：电子透镜组件具有抗磁屏蔽构件或插入中空的圆柱形超导线圈的中心开口中的构件，至少一个构件可以沿着电子束的轴线在其中移动，同时将线圈和构件保持在超导状态通过这种布置，可以通过由线圈产生的磁场强度分布沿着线圈的轴线的变化来改变透镜组件的焦距。

4. 发明授权

US3900808A Magnetic lens assemblies for corpuscular ray devices which operate under vacuum 失效
标题翻译：用于在真空下操作的微波设备的磁性镜头组件
公开(公告)号：US3900808A
公开(公告)日：1975-08-19
申请号：US64862367
申请日：1967-06-26
申请人： ZERBST HELMUT , WEYL REINHARD , DIETRICH ISOLDE
发明人： ZERBST HELMUT , WEYL REINHARD , DIETRICH ISOLDE
IPC分类号： H01J37/141 , H01F7/00
CPC分类号： H01J37/1416 , Y10S505/871
摘要： A corpuscular ray device having a magnetic lens assembly. Although the invention is particularly applicable to objective lens assemblies of electron microscopes which operate under vacuum, it is also applicable to lens assemblies for ion microscopes, electron-diffraction devices, or other corpuscular ray apparatus wherein the rays are situated in tubular enclosures. The magnetic lens assembly includes a pair of shielding cylinders which are coaxial and spaced from each other, which are made of a superconductive material, and which have their common axis coinciding with a lens axis of the lens assembly, these shielding cylinders being surrounded by a lens winding which may also be made of a superconductive material and which serves to generate the magnetic field which is concentrated by the shielding cylinders in the region of the corpuscular ray. These shielding cylinders have directed toward each other a pair of end faces which are spaced from each other and define between themselves a lens gap which is devoid of any shielding components made of superconductive material. The aperture error constant of the lens assembly depends upon the maximum value of the field intensity in the lens gap and upon the field gradient along the lens axis in the lens gap. The magnitude of the lens gap is chosen in such a way that with a predetermined value of field intensity outwardly beyond the lens gap and the shielding cylinders the maximum value of the field intensity in the lens gap and the field gradient in the lens gap along the lens axis provide for the lens assembly an aperture error constant which is less than a predetermined value of aperture error constant.

5. 发明授权

US3708772A Magnetic lens arrangement 失效
标题翻译：磁性镜片布置
公开(公告)号：US3708772A
公开(公告)日：1973-01-02
申请号：US3708772D
申请日：1971-11-30
申请人： SIEMENS AG
发明人： LE FRANC G
IPC分类号： H01J37/141 , H01F7/00
CPC分类号： H01J37/1416 , Y10S505/871
摘要： A highly compact magnetic lens arrangement which economically provides the highest field strength on the axis with the minimum beam half width and a minimum outer field strength of the coil winding comprises two tubular shielding cylinder means of superconductive material coaxially aligned with the lens axis, said cylinder means each having a first end and a second end, said first ends being spaced from each other to define a unshielded lens gap therebetween, said lens gap having a coil means positioned about the cylinder means to create a magnetic field, a cooling agent adapted to be present about the cylinder which cause a concentration of the magnetic field adjacent the particle beam, and a ferromagnetic ring-shaped pole shoe on each of said first ends of said cylinders for regulating and guiding the magnetic field.
摘要翻译：一种高度紧凑的磁透镜装置，其经济地在轴上提供最高的场强，具有最小的光束半宽度和线圈绕组的最小外场强度，包括两个与透镜轴同轴对准的超导材料的管状屏蔽筒装置，所述圆筒每个具有第一端和第二端的装置，所述第一端彼此间隔开以限定其间的非屏蔽透镜间隙，所述透镜间隙具有围绕所述气缸装置定位的线圈装置以产生磁场，冷却剂适于围绕气缸存在，其导致与粒子束相邻的磁场的浓度;以及在所述气缸的每个所述第一端上的铁磁环形极靴，用于调节和引导磁场。

6. 发明授权

US3500269A Electron lens utilizing superconductive coils for an electron microscope or the like 失效
标题翻译：使用电子显微镜或其类似物的超导线圈的电子镜头
公开(公告)号：US3500269A
公开(公告)日：1970-03-10
申请号：US3500269D
申请日：1967-06-09
申请人： HITACHI LTD
发明人： KATAGIRI SHINJIRO , OZASA SUSUMU , KIMURA HIROKAZU , DOI TOSHIO , KIMURA HIROSHI
IPC分类号： H01F6/00 , H01J37/141 , H01F7/00 , H01F1/00 , H01F7/22
CPC分类号： H01F6/00 , H01J37/1416 , Y10S505/871

7. 发明授权

US3351754A Magnetic lens comprising an annular electric coil and superconducting material to shape the magnetic flux 失效
标题翻译：磁性透镜，包括环形电线圈和超导材料，以形成磁通量
公开(公告)号：US3351754A
公开(公告)日：1967-11-07
申请号：US38908964
申请日：1964-08-12
申请人： SIEMENS AG
发明人： ISOLDE DIETRICH , ERHARD BERKL , REINHARD WEYL , KARL-HEINZ HERRMANN
IPC分类号： H01F6/00 , H01J37/141
CPC分类号： H01J37/1416 , H01F6/00

8. 发明申请

US20070176123A1 Ion implanter having a superconducting magnet 审中-公开
标题翻译：离子注入机具有超导磁体
公开(公告)号：US20070176123A1
公开(公告)日：2007-08-02
申请号：US11343760
申请日：2006-01-31
申请人： Leonard Rubin , John Poate
发明人： Leonard Rubin , John Poate
IPC分类号： H01J37/317
CPC分类号： H01J37/3171 , H01J37/05 , H01J37/1416 , H01J37/1475 , H01J2237/002 , H01J2237/055
摘要： An ion beam implanter includes an ion beam source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece, such as a silicon wafer is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. Various magnets located along the beamline are provided for manipulating the ion beam and ions. Ion beam implanters having magnets including superconducting magnet coils are disclosed.
摘要翻译：离子束注入机包括用于产生沿束线移动的离子束的离子束源和真空或注入室，其中诸如硅晶片的工件被定位成与离子束相交以离子注入工件表面通过离子束。提供沿着束线设置的各种磁体用于操纵离子束和离子。公开了具有包括超导磁体线圈的磁体的离子束注入机。

9. 发明授权

US4977324A Charged particle beam apparatus 失效
标题翻译：带电粒子束装置
公开(公告)号：US4977324A
公开(公告)日：1990-12-11
申请号：US344196
申请日：1989-04-27
申请人： Pieter Kruit , Karel D. Van Der Mast
发明人： Pieter Kruit , Karel D. Van Der Mast
IPC分类号： H01J37/04 , H01J37/141
CPC分类号： H01J37/1416 , H01J37/04
摘要： A Variable Axis Lens system comprises at least two lenses which are arranged to be radially offset with respect to an optical axis of the apparatus. Because the lenses do not contain iron, the occurrence of disturbing eddy currents can be prevented. The lenses for axis displacement are preferably constructed as single ring conductors, a number of which can be readily arranged in one plane in a partly overlapping fashion. Such a system can also be arranged behind the object. For the lenses for axis displacement use is preferably made of a ceramic superconducting material having a comparatively high temperature coefficient and a comparatively high specific heat in the superconducting phase, so that they can be simply cooled from the outside.

10. 发明授权

US4214166A Magnetic lens system for corpuscular radiation equipment 失效
标题翻译：磁透镜系统用于红外辐射设备
公开(公告)号：US4214166A
公开(公告)日：1980-07-22
申请号：US890922
申请日：1978-03-28
申请人： Isolde Dietrich , Fred Fox , Erwin Knapek , Karl Nachtrieb , Reinhard Weyl , Helmut Zerbst , Guy Lefranc
发明人： Isolde Dietrich , Fred Fox , Erwin Knapek , Karl Nachtrieb , Reinhard Weyl , Helmut Zerbst , Guy Lefranc
IPC分类号： H01J37/141 , H01J37/244 , G01N23/00
CPC分类号： H01J37/244 , H01J37/1416 , H01J2237/2442 , H01J2237/24475 , H01J2237/24485 , H01J2237/24507 , H01J2237/24585 , Y10S505/871
摘要： A magnetic lens system for corpuscular radiation equipment operating in a vacuum, in particular, an objective lens system for electron microscopes, comprising a superconducting shield housing, in which are arranged, at one end, a single hollow cylindrical superconducting shielding device, wound with a lens coil, and at the other end, in front of the free end face of the shielding device, a vacuum chamber for accommodating an object to be examined, permitting the cavity to be relatively large, and detectors for radiation analysis to be arranged therein so that the lens system is therefore suitable for use in scanning electron microscopes.
摘要翻译：一种用于在真空中操作的红外辐射设备的磁性透镜系统，特别是用于电子显微镜的物镜系统，其包括一个超导屏蔽壳体，其中在其一端设有单个空心圆柱形超导屏蔽装置，透镜线圈，另一端位于屏蔽装置的自由端面的前方，用于容纳被检查物体的真空室，允许空腔相对较大，并且其中布置有放射线分析用检测器因此，透镜系统因此适用于扫描电子显微镜。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式