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    • 7. 发明申请
    • VACUUM VAPOR DESPOSITION APPARATUS
    • 真空蒸气沉降装置
    • US20090169720A1
    • 2009-07-02
    • US12396988
    • 2009-03-03
    • Keiichi SATOToshiro KobayashiMitsuo KatoSusumu KamikawaKouzuo Wada
    • Keiichi SATOToshiro KobayashiMitsuo KatoSusumu KamikawaKouzuo Wada
    • C23C16/52
    • C23C14/243C23C14/543
    • A crucible is a monolithic structure extending over an entire area of a vaporizing chamber and has at least one slit groove provided in the upper surface thereof. The at least one slit groove has a length from one end of the upper surface of the crucible to other end thereof. The at least one slit groove is used as a portion for containing the evaporation material (dopant material or the like). Alternatively, a crucible is a monolithic structure extending over the entire area of the vaporizing chamber and has a plurality of holes provided in the upper surface thereof. The holes are used as portions for containing the evaporation material. Further, the crucible is divided into a plurality of regions, and individual electric heaters are provided under the lower surface of the crucible for the respective regions, whereby temperature can be individually controlled for the respective regions by the electric heaters.
    • 坩埚是在蒸发室的整个区域上延伸的整体结构,并且在其上表面中具有至少一个狭缝槽。 所述至少一个狭缝槽具有从所述坩埚的上表面的一端到其另一端的长度。 使用至少一个狭缝槽作为容纳蒸发材料(掺杂材料等)的部分。 或者,坩埚是在蒸发室的整个区域上延伸的整体结构,并且在其上表面中设置有多个孔。 这些孔用作容纳蒸发材料的部分。 此外,坩埚被分成多个区域,并且在各个区域的坩埚的下表面之下设置单独的电加热器,由此可以通过电加热器对各个区域单独地控制温度。
    • 9. 发明授权
    • Substrate detecting device for detecting the presence of a transparent
and/or an opaque substrate by output of judgement means
    • 基板检测装置,用于通过判断装置的输出来检测透明和/或不透明基板的存在
    • US5354995A
    • 1994-10-11
    • US109430
    • 1993-08-20
    • Shunetsu EndoMitsuo KatoMasato Asakawa
    • Shunetsu EndoMitsuo KatoMasato Asakawa
    • G01V8/12G01N21/55G01N21/59G06M7/00H01L21/00H01L21/67H01L31/12G01N21/86
    • H01L21/67259G01N21/55G01N21/59
    • A device for detecting a semiconductor wafer in a non-contact manner irrespective of transparency or opacity thereof. At positions corresponding to a plurality of wafers loaded on a carrier, a plurality of light emitting/receiving sensors and a plurality of light receiving sensors are correspondingly provided in pairs in such a manner that their respective light emitting/receiving surfaces and their respective light receiving surface in pairs confront each other. The light emitting/receiving sensors and light receiving sensors are alternately arranged in two rows lengthwise on a sensor support board. In the case of a transparent wafer, a light sent out from a light emitting section of the light emitting/receiving sensor strikes on and is reflected by the surface of the wafer. The thus reflected light is then detected by a light receiving section of the same light emitting/receiving sensor. In the presence of an opaque wafer, a light sent out from the light emitting/receiving sensor is not permitted to reach the confronting light receiving sensor. Conversely, in the absence of the opaque wafer, the light reaches the light receiving sensor for detection. On the other hand, there is provided a judgment section switchably inputting one of a light reception signal generated at the light receiving section of the light emitting/receiving sensor and a light reception signal generated at the light receiving section of the light receiving sensor.
    • 用于以非接触方式检测半导体晶片的装置,而不管其透明度或不透明度如何。 在与载置在载体上的多个晶片相对应的位置,成对地设置有多个发光/接收传感器和多个光接收传感器,使得它们各自的发光/接收表面及其各自的光接收 表面互相对立。 发光/接收传感器和光接收传感器在传感器支撑板上纵向交替布置成两行。 在透明晶片的情况下,从发光/接收传感器的发光部分发出的光线撞击并被晶片的表面反射。 然后由相同的发光/接收传感器的光接收部检测到这样反射的光。 在不透明晶片的存在下,从发光/接收传感器发出的光不允许到达面对的光接收传感器。 相反,在不存在不透明晶片的情况下,光到达用于检测的光接收传感器。 另一方面,提供了一种可切换地输入在发光/接收传感器的光接收部分处产生的光接收信号和在光接收传感器的光接收部分处产生的光接收信号之一的判断部分。