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    • 5. 发明授权
    • Method and apparatus for vacuum deposition plating
    • 真空沉积电镀方法和装置
    • US4674443A
    • 1987-06-23
    • US855793
    • 1986-04-24
    • Heizaburo FurukawaKanji WakeYoshio ShimozatoKenichi YanagiMitsuo KatohTetsuyoshi WadaNorio TsukijiTakuya AikoToshiharu KittakaYasuji Nakanishi
    • Heizaburo FurukawaKanji WakeYoshio ShimozatoKenichi YanagiMitsuo KatohTetsuyoshi WadaNorio TsukijiTakuya AikoToshiharu KittakaYasuji Nakanishi
    • C21D9/56C23C14/56C23C13/08
    • C21D9/561C21D9/565C23C14/562
    • A vacuum deposition plating apparatus having an inlet-side vacuum sealing device provided in front of a vacuum deposition plating chamber, an inlet-side inactive gas replacement chamber provided between the inlet-side vacuum sealing device and an annealing furnace, an outlet-side vacuum sealing device provided in the rear of the vacuum deposition plating chamber, an outlet-side inactive gas replacement chamber provided between the outlet-side vacuum sealing device and the atmosphere, and an inactive gas circulating/purifying device for circulating an inactive gas from vacuum chambers of both the vacuum sealing devices to atmospheric pressure chambers of both the vacuum sealing devices and for removing water, oil and oxygen from the inactive gas; a pressure gauge provided on the annealing furnace; a pressure gauge, a control valve, an automatic valve, a hydrogen concentration detector and a discharge valve provided on the inlet-side inactive gas replacement chamber; a pressure gauge and an automatic valve provided on the outlet-side inactive gas replacement chamber; and an automatic valve connecting to an inactive gas tank for emergency provided on the atmospheric pressure chambers of both the vacuum sealing devices.
    • 一种真空沉积电镀装置,其具有设置在真空沉积电镀室前面的入口侧真空密封装置,设置在入口侧真空密封装置和退火炉之间的入口侧非活性气体置换室,出口侧真空 密封装置,设置在真空沉积电镀室的后部,设置在出口侧真空密封装置和大气之间的出口侧非活性气体置换室,以及用于使来自真空室的惰性气体循环的惰性气体循环/净化装置 两个真空密封装置与两个真空密封装置的大气压室和从惰性气体中除去水,油和氧的两个; 设置在退火炉上的压力计; 压力计,控制阀,自动阀,氢浓度检测器和设置在入口侧非活性气体置换室上的排出阀; 设置在出口侧非活性气体置换室上的压力计和自动阀; 以及连接到两个真空密封装置的大气压室上的用于紧急的惰性气体罐的自动阀。