专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明申请

US20060163223A1 Methods and apparatus for truncating an image formed with coherent radiation 有权
标题翻译：用于截断用相干辐射形成的图像的方法和装置
公开(公告)号：US20060163223A1
公开(公告)日：2006-07-27
申请号：US11040739
申请日：2005-01-21
申请人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David Markle , Casey Donaher
发明人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David Markle , Casey Donaher
IPC分类号： B23K26/06
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/082 , B23K2101/40
摘要： Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
摘要翻译：用于截断用相干辐射形成的图像的方法和装置。光学继电器系统适于在图像平面处形成线图像。图像被与图像平面共轭的孔径平面处或附近的可变孔截断，以阻止逐渐增加用于形成线图像的入射相干辐射束的部分。在瞳孔平面中设置有在中心具有最大透射或反射的变迹瞳孔滤光器以及与线图像的长方向相对应的方向变化的透射或反射图。该变迹被设计成防止在截断图像中形成热点并确保相对光滑，平坦的强度分布。因此，在扫描期间扫描的相干线图像的一端或另一端可以在扫描期间被截断，而基本上不改变延伸到产品区域中的图像强度。

2. 发明授权

US07253376B2 Methods and apparatus for truncating an image formed with coherent radiation 有权
标题翻译：用于截断用相干辐射形成的图像的方法和装置
公开(公告)号：US07253376B2
公开(公告)日：2007-08-07
申请号：US11040739
申请日：2005-01-21
申请人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David A. Markle , Casey Donaher
发明人： Shiyu Zhang , Igor Landau , Arnold Lungershausen , David A. Markle , Casey Donaher
IPC分类号： B23K26/06
CPC分类号： B23K26/0738 , B23K26/066 , B23K26/082 , B23K2101/40
摘要： Methods and apparatus for truncating an image formed with coherent radiation. The optical relay system is adapted to form a line image at the image plane. The image is truncated by a variable aperture at or near the aperture plane conjugate to the image plane, to block progressively increasing portions of an incident coherent radiation beam used to form the line image. An apodizing pupil filter having a maximum transmission or reflection in the center and a transmission or reflection profile that varies with direction corresponding to long direction of the line image is provided in the pupil plane. The apodization is designed to prevent hot-spots from forming in the truncated image and ensures a relatively smooth, flat intensity profile. Thus, one end or another of a coherent line image scanned over a substrate can be truncated during scanning without substantially changing the image intensity extending into the product area.
摘要翻译：用于截断用相干辐射形成的图像的方法和装置。光学继电器系统适于在图像平面处形成线图像。图像被与图像平面共轭的孔径平面处或附近的可变孔截断，以阻止逐渐增加用于形成线图像的入射相干辐射束的部分。在瞳孔平面中设置有在中心具有最大透射或反射的变迹瞳孔滤光器以及与线图像的长方向相对应的方向变化的透射或反射图。该变迹被设计成防止在截断图像中形成热点并确保相对光滑，平坦的强度分布。因此，在扫描期间扫描的相干线图像的一端或另一端可以在扫描期间被截断，而基本上不改变延伸到产品区域中的图像强度。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式